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    • 8. 发明授权
    • Strained-channel semiconductor structure and method for fabricating the same
    • 应变通道半导体结构及其制造方法
    • US07381604B2
    • 2008-06-03
    • US11423457
    • 2006-06-12
    • Chun-Chieh LinYee-Chia Yeo
    • Chun-Chieh LinYee-Chia Yeo
    • H01L21/336
    • H01L21/823425H01L21/76224H01L21/823412H01L29/165H01L29/6659H01L29/66628H01L29/7848
    • A strained-channel semiconductor structure and method of fabricating the same. The strained-channel semiconductor structure comprises a substrate composed of a first semiconductor material with a first natural lattice constant. A channel region is disposed in the substrate and a gate stack is disposed over the strained channel region. A pair of source/drain regions are oppositely disposed in the substrate adjacent to the channel region, wherein each of the source/drain regions comprises a lattice-mismatched zone comprising a second semiconductor material with a second natural lattice constant rather than the first natural lattice constant, an inner side and an outer side corresponding to the gate stack, and at least one outer sides laterally contacts the first semiconductor material of the substrate.
    • 应变通道半导体结构及其制造方法。 应变通道半导体结构包括由具有第一自然晶格常数的第一半导体材料构成的衬底。 通道区域设置在衬底中,并且栅堆叠设置在应变通道区域上。 一对源极/漏极区域相邻地设置在衬底中,与沟道区域相邻,其中源极/漏极区域中的每个源极/漏极区域包括具有第二自然晶格常数而不是第一自然晶格的第二半导体材料的晶格失配区域 常数,对应于栅极叠层的内侧和外侧,并且至少一个外侧横向接触基板的第一半导体材料。