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1. 发明授权

US06591973B2 Sideboard assembly for waste processing machine 失效
公开(公告)号：US06591973B2
公开(公告)日：2003-07-15
申请号：US09873914
申请日：2001-06-04
申请人： Leward N. Smith
发明人： Leward N. Smith
IPC分类号： B65G6534
CPC分类号： B02C18/225 , B02C23/02 , B02C2201/066
摘要： A sideboard assembly for an infeed system of a waste processing machine includes a sideboard for attachment to a sidewall of the infeed system of the waste processing machine. The sideboard assembly also includes a plurality of fasteners for removably attaching the sideboard to the sidewall of the infeed system of the waste processing machine.

2. 发明授权

US06368044B1 Convertible wafer transfer machine 失效
标题翻译：可转换晶片转印机
公开(公告)号：US06368044B1
公开(公告)日：2002-04-09
申请号：US08995706
申请日：1997-12-22
申请人： Ernest C. Nichols , Leo L. Malmin, Jr.
发明人： Ernest C. Nichols , Leo L. Malmin, Jr.
IPC分类号： B65G6534
CPC分类号： H01L21/67781 , H01L21/67775 , H01L21/68 , Y10S269/903 , Y10S414/137
摘要： A semiconductor wafer transfer machine for transferring first wafers having a first diameter from a first transferor carrier to a first receiver carrier and second wafers having a second diameter different from the first diameter from a second transferor carrier to a second receiver carrier. The wafer transfer machine includes a base plate with a longitudinal axis for placement on the base plate of the transferor carriers and the receiver carriers and a mechanism for transferring wafers contained in the first and second transferor carriers to the first and second receiver carriers, respectively. The wafer transfer machine also includes an adjustable positioner that comprises (1) a transferor positioning mechanism for aligning the first and second transferor carriers on the top surface of the base plate, (2) a first receiver positioning mechanism for aligning the first receiver carrier in a first position with respect to the first transferor carrier on the top surface of the base plate, and (3) a second receiver positioning mechanism for aligning the second receiver carrier in a second position with respect to the second transferor carrier on the top surface of the base plate.
摘要翻译：一种用于将具有第一直径的第一晶片从第一转移器载体转移到第一接收器载体的半导体晶片转移机和具有不同于第一直径的第二直径的第二晶片从第二转移器载体转移到第二接收器载体。晶片转印机包括具有纵向轴线的基板，用于放置在转印支架的基板和接收器支架上，以及用于将包含在第一和第二转印器载体中的晶片分别转印到第一和第二接收器载体的机构。晶片转印机还包括可调定位器，其包括：（1）用于对准基板顶表面上的第一和第二转印架的转印机定位机构，（2）第一接收机定位机构，用于将第一接收机载体相对于基板的顶表面上的第一传送器载体的第一位置，和（3）第二接收器定位机构，用于将第二接收器载体相对于第二传送器载体的第二位置对准在第二传送器载体的顶表面上基板。

3. 发明授权

US06669185B2 Wafer loading system positioning method and device 有权
公开(公告)号：US06669185B2
公开(公告)日：2003-12-30
申请号：US09736664
申请日：2000-12-08
申请人： Wu-Lang Lin , Kuan-Chou Chen , Ping-Yu Hu , Muh-Wang Liang , Kuei-Jung Chen , Tzong-Ming Wu
发明人： Wu-Lang Lin , Kuan-Chou Chen , Ping-Yu Hu , Muh-Wang Liang , Kuei-Jung Chen , Tzong-Ming Wu
IPC分类号： B65G6534
CPC分类号： H01L21/67775 , Y10S269/903 , Y10S414/137
摘要： A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

4. 发明授权

US06821073B1 Container handling system for substrate processing apparatus and method of handling containers 失效
标题翻译：用于基材处理装置的容器处理系统和处理容器的方法
公开(公告)号：US06821073B1
公开(公告)日：2004-11-23
申请号：US09611635
申请日：2000-07-07
申请人： Akira Koguchi
发明人： Akira Koguchi
IPC分类号： B65G6534
CPC分类号： H01L21/67757 , H01L21/67781 , H01L21/681 , Y10S414/14
摘要： A carrier is carried between a receiving stage (21) (or a delivery stage (22)) by a movable table (24). Each of the stages is provided with a cut-away area (30) extending from one end of the stage to a predetermined position at which the carrier is placed on the stage and allowing the movable table (24) to move vertically therethrough. The movable table (24) is moved under the stage to a position directly below the carrier mounted on the stage, is raised through the cut-away area (30) to lift up the carrier, and is moved away from the stage together with the carrier. A sensing device (10) incorporated into the movable table (24) inspects the condition of wafers contained in the carrier while the movable table (24) is being moved to the position directly below the carrier placed on the stage.
摘要翻译：通过可移动台（24）在承载台（21）（或输送台（22））之间承载承载件。每个级设置有从舞台的一端延伸到载体被放置在舞台上并允许可动台（24）垂直移动的预定位置的切割区域（30）。活动台（24）在舞台下方移动到安装在舞台上的行星架正下方的位置，被提升穿过切割区域（30）以抬起托架，并与载体结合到可移动台（24）中的感测装置（10）在可移动台（24）移动到放置在台架上的载体正下方的位置时，检查容纳在载体中的晶片的状态。

5. 发明授权

US06736258B2 Apparatus for supplying raw materials at constant amounts 有权
标题翻译：用于以恒定量供应原材料的装置
公开(公告)号：US06736258B2
公开(公告)日：2004-05-18
申请号：US10082140
申请日：2002-02-26
申请人： Keiji Noda , Kisao Kadoi , Yuji Ueda
发明人： Keiji Noda , Kisao Kadoi , Yuji Ueda
IPC分类号： B65G6534
CPC分类号： B28B13/02 , B65G47/19 , B65G2201/04
摘要： An apparatus for supplying raw materials at constant amounts has a raw material tank for storing and feeding raw materials, a belt for transferring raw materials, a level control guide for defining a thickness of raw materials on the belt, and a belt cover. The apparatus further includes a reversible belt drive motor for controlling a rotation direction of the belt forward and backward and a device for removing raw materials arranged at a backward side of the belt. In the case of supplying the raw materials at constant amounts, a normal operation of supplying the raw materials is performed by rotating the belt in a forward direction. In the case of removing the raw materials arranged on the belt and in the raw material tank, the raw materials are transferred to the device for removing raw materials arranged at a backward side of the belt by rotating the belt in a backward direction so as to remove the raw materials from the belt and the raw material tank.
摘要翻译：用于原料供给量恒定的装置具有用于储存和进料原材料的原料罐，用于转移原料的带，用于限定带上的原料厚度的水平控制导向器和带罩。该装置还包括可逆带驱动马达，其用于控制带前后的旋转方向，以及用于去除布置在带的后侧的原料的装置。在以恒定量供给原料的情况下，通过沿着向前方向旋转皮带来进行供给原料的正常操作。在去除布置在带和原料槽中的原料的情况下，通过沿着向后的方向旋转带将原料转移到用于除去布置在带的后侧的原料的装置，以便从皮带和原料罐中取出原料。

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