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1. 发明授权

US06669185B2 Wafer loading system positioning method and device 有权
公开(公告)号：US06669185B2
公开(公告)日：2003-12-30
申请号：US09736664
申请日：2000-12-08
申请人： Wu-Lang Lin , Kuan-Chou Chen , Ping-Yu Hu , Muh-Wang Liang , Kuei-Jung Chen , Tzong-Ming Wu
发明人： Wu-Lang Lin , Kuan-Chou Chen , Ping-Yu Hu , Muh-Wang Liang , Kuei-Jung Chen , Tzong-Ming Wu
IPC分类号： B65G6534
CPC分类号： H01L21/67775 , Y10S269/903 , Y10S414/137
摘要： A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

2. 发明授权

US06896470B1 Front-opening unified pod auto-loading structure 有权
标题翻译：前开口统一吊舱自动装载结构
公开(公告)号：US06896470B1
公开(公告)日：2005-05-24
申请号：US09705733
申请日：2000-11-06
申请人： Kuan-Chou Chen , Ping-Yu Hu , Kuei-Jung Chen , Tzong-Ming Wu , Wu-Lang Lin , Wen-Yo Lee
发明人： Kuan-Chou Chen , Ping-Yu Hu , Kuei-Jung Chen , Tzong-Ming Wu , Wu-Lang Lin , Wen-Yo Lee
IPC分类号： B65G65/34 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67775 , H01L21/67772 , Y10S414/14
摘要： The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.
摘要翻译：本发明主要包括机座，托架，滑动控制机构，闩锁机构，水平移动机构和提升机构。 FOUP（前开口统一吊舱）放在承载架上，并通过闩锁的锁定板在准确的位置锁定。托架向前移动以将FOUP紧密地接合在机座底板上的通道上的门上，因此FOUP的盖子通过位于门后部的主轴箱齿轮打开，然后由FOUP通过水平移动机构，并由提升机构降低。相反，盖子在FOUP上关闭。因此，盖被自动加载和打开，以及在封闭中，其可以是自动化的一部分并防止晶片被污染。

3. 发明授权

US06997664B1 Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment 有权
标题翻译：用于从半导体制造设备加载/卸载晶片的装置
公开(公告)号：US06997664B1
公开(公告)日：2006-02-14
申请号：US09619388
申请日：2000-07-19
申请人： Muh-Wang Liang , Chun-Kai Huang , Jiann-Cherng Chen , Tzong-Ming Wu , Ping-Yu Hu , Kuan-Chou Chen
发明人： Muh-Wang Liang , Chun-Kai Huang , Jiann-Cherng Chen , Tzong-Ming Wu , Ping-Yu Hu , Kuan-Chou Chen
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , Y10S414/14
摘要： The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system. Because the present invention adopts a modular design, the drive source of each unit is isolated and the circuit of each unit is hidden so that the whole structure is most compact and the assembling/disassembling and maintenance are easier.
摘要翻译：本发明提出了一种用于将晶片装载和从半导体制造设备卸载的装置。本发明使用两个具有高刚度的U形端口板支撑件分别与诸如导螺杆，轴轴承和引线装置的驱动装置接合，然后与诸如端口板，端口门和基础。组件由电机通过定时滑轮，同步皮带，惰轮，一对导螺杆，轴轴承和引导装置驱动。编码器匹配反馈控制。因此，可以实现负责向上和向下移动的晶片盒的主机构的精确定位，从而提高晶片定位传送的准确性和可靠性。其次，通过使用进气过滤系统可以减少由主机构的运动引起的颗粒污染。因为本发明采用模块化设计，每个单元的驱动源是隔离的，每个单元的电路都是隐藏的，使得整个结构最紧凑，组装/拆卸和维护更容易。

4. 发明授权

US06382896B1 Front-opening unified pod closing/opening control structure 失效
标题翻译：前开口统一吊舱关闭/开启控制结构
公开(公告)号：US06382896B1
公开(公告)日：2002-05-07
申请号：US09705728
申请日：2000-11-06
申请人： Ping-Yu Hu , Kuan-Chou Chen , Tzong-Ming Wu , Wu-Lang Lin
发明人： Ping-Yu Hu , Kuan-Chou Chen , Tzong-Ming Wu , Wu-Lang Lin
IPC分类号： B65G4907
CPC分类号： H01L21/67772 , Y10S414/137 , Y10S414/139
摘要： A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.
摘要翻译：前开口的统一的关闭/打开控制结构包括一个控制传动传动轴旋转的传动马达，使传动轴通过两个蜗杆转动两个蜗轮组，每个蜗轮组包括与一个蜗杆啮合的蜗轮，固定在蜗轮上的径向延伸的定位板，以及具有矩形中心孔的垫圈构件，分别装配在矩形中心孔中的两个致动螺栓，并通过相应的螺母固定到蜗轮组，保持蜗杆的定位板齿轮组保持直角，两个第一止动销适于在第一位置停止蜗轮组的定位板，其中致动螺栓关闭FOUP的盖子，以及两个第二止动销，其适于停止定位板蜗轮组处于第二位置，其中致动螺栓打开FOUP的盖。

5. 发明授权

US06452201B1 Wafer-mapping method of wafer load port equipment 失效
标题翻译：晶圆负载端口设备的晶圆映射方法
公开(公告)号：US06452201B1
公开(公告)日：2002-09-17
申请号：US09619087
申请日：2000-07-19
申请人： Yu-Sheng Wang , Chien-Rong Huang , Kuan-Chou Chen , Ping-Yu Hu , Tzong-Ming Wu
发明人： Yu-Sheng Wang , Chien-Rong Huang , Kuan-Chou Chen , Ping-Yu Hu , Tzong-Ming Wu
IPC分类号： G01N2188
CPC分类号： H01L21/67265 , Y10S414/136
摘要： This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.
摘要翻译：本发明使用基于模式的信号来加速评估过程，作为替代复杂计算过程的手段。通过实施绝对坐标来构建本发明，通过位置和两个光学传感器信号产生基于图案的信号，并且通过进行特征提取处理。该过程产生了侧向和重叠问题的特征信号。此外，通过转换信号，特征信号可以由数字数据处理器处理。因此，本发明可以实现晶片映射的三个主要目的。

6. 发明授权

US6135702A Apparatus for automated loading of wafer cassette 失效
标题翻译：用于自动装载晶片盒的装置
公开(公告)号：US6135702A
公开(公告)日：2000-10-24
申请号：US89498
申请日：1998-06-03
申请人： Gwo-Jou Huang , Ping-Yu Hu , Ton-Li Lee , Chen-Shin Lin
发明人： Gwo-Jou Huang , Ping-Yu Hu , Ton-Li Lee , Chen-Shin Lin
IPC分类号： B25J19/06 , B65G49/07 , H01L21/677
CPC分类号： B25J19/06 , H01L21/67763 , Y10S414/14
摘要： An apparatus for preventing the over-tilt of a gripper assembly in a cassette loading device is described. The apparatus provides an additional sensor arm system rigidly mounted to the gripper assembly such that the additional sensor arm not only provides a method for it to reach an over-tilt position, but also provides a mechanical stop to manually stop the gripper assembly from making further motion beyond the maximum downward-tilt position of the arm. The apparatus may further be provided with a warning system and a manual override device such that a machine operator may be alerted of the over-tilt condition and further, may manually override the sensor system by temporarily restoring power to the gripper assembly and returning it to a safe position.
摘要翻译：描述了一种用于防止盒装载装置中的夹具组件过度倾斜的装置。该装置提供了刚性地安装到夹持器组件的附加传感器臂系统，使得附加的传感器臂不仅提供了一种使其达到倾斜位置的方法，而且提供了一种机械停止来手动停止夹持器组件以进一步制造超出臂的最大向下倾斜位置的运动。该装置还可以设置有警告系统和手动超控装置，使得机器操作者可以被警告超倾斜状态，并且还可以通过暂时恢复到夹具组件的电力并将其返回到一个安全的位置。

7. 发明授权

US6024334A Self-locking mechanism for a semiconductor wafer cassette support 失效
标题翻译：用于半导体晶片盒支架的自锁机构
公开(公告)号：US6024334A
公开(公告)日：2000-02-15
申请号：US120407
申请日：1998-07-22
申请人： Gwo-Jou Huang , Ping-Yu Hu , Ton-Li Lee , Chen-Shin Lin
发明人： Gwo-Jou Huang , Ping-Yu Hu , Ton-Li Lee , Chen-Shin Lin
IPC分类号： H01L21/687 , E04G3/00
CPC分类号： H01L21/687
摘要： The present invention discloses a support mechanism for laterally supporting an article on a platform by utilizing a stabilizing means such that when a support plate is in an upright position to laterally support an article situated on the platform, the stabilizing means is placed in a relaxed state for stabilizing the upright position of the support member. The stabilizing means can be advantageously an extensible spring or a compressible spring to be used to modify an existing loading/unloading apparatus and to achieve the desirable benefits of the present invention method and apparatus.
摘要翻译：本发明公开了一种用于通过利用稳定装置横向支撑平台上的物品的支撑机构，使得当支撑板处于直立位置以横向支撑位于平台上的物品时，稳定装置处于松弛状态用于稳定支撑构件的直立位置。稳定装置可以有利地是用于修改现有加载/卸载装置的可延展弹簧或可压缩弹簧，并且实现本发明的方法和装置的期望的益处。

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