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    • 2. 发明申请
    • POLISHING PAD
    • 抛光垫
    • US20140213151A1
    • 2014-07-31
    • US14241008
    • 2012-08-24
    • Tsuyoshi Kimura
    • Tsuyoshi Kimura
    • B24B37/20H01L21/304B24B37/22
    • B24B37/205B24B37/22H01L21/304
    • An object of the invention is to provide a polishing pad that is prevented from slurry leaks and has high optical detection accuracy. The present invention relates to a polishing pad comprising a polishing region, a cushion layer, and a support film layered in this order, wherein a light-transmitting region is provided on the support film and in an opening part that passes through the polishing region and the cushion layer; the light-transmitting region has a peripheral part and a recessed part on the surface of a polishing platen-side; the support film is layered on the peripheral part; and the support film is not layered on the recessed part, which remains open.
    • 本发明的目的是提供一种防止浆料泄漏并具有高光学检测精度的抛光垫。 抛光垫技术领域本发明涉及一种抛光垫,其包括依次层叠的研磨区域,缓冲层和支撑膜,其中在所述支撑膜上和穿过所述研磨区域的开口部分设置透光区域, 缓冲层; 光透射区域在研磨台板侧的表面上具有周边部分和凹陷部分; 支撑膜层叠在周边部分上; 并且支撑膜不会层叠在保持打开的凹部上。
    • 4. 发明申请
    • POLISHING PAD
    • 抛光垫
    • US20130017769A1
    • 2013-01-17
    • US13639475
    • 2011-04-07
    • Tsuyoshi Kimura
    • Tsuyoshi Kimura
    • H01L21/304B24B37/22
    • B24B37/205B24B37/22
    • An object of the present invention is to provide a polishing pad which enables high accuracy optical end-point detection in a state where polishing is carrying out, and which can prevent slurry leakage from a polishing layer to a cushion layer even in the case of being used for a long period. Another object is to provide a method for producing a semiconductor device using the polishing pad. The present invention relates to a polishing pad in which a polishing layer having a polishing region and a light-transmitting region, and a cushion layer having a through hole are laminated via a double-sided adhesive sheet such that the light-transmitting region and the through hole are laid one upon another, wherein a transparent member is stuck on an adhesive layer of the double-sided adhesive sheet in the through hole.
    • 本发明的目的是提供一种抛光垫,其能够在进行抛光的状态下进行高精度的光学终点检测,并且即使在存在如下的情况下也能够防止浆料从抛光层向缓冲层的泄漏 使用了很长时间。 另一个目的是提供一种使用抛光垫制造半导体器件的方法。 本发明涉及一种抛光垫,其中具有抛光区域和透光区域的抛光层和具有通孔的缓冲层通过双面粘合片层压,使得透光区域和 通孔彼此放置,其中透明构件粘附在通孔中的双面粘合片的粘合剂层上。
    • 6. 发明授权
    • Plastic optical fiber cable and method of signal transmission using the same
    • 塑料光缆和信号传输方法采用相同的方式
    • US08023789B2
    • 2011-09-20
    • US12311360
    • 2007-09-28
    • Amane AoyagiYoshihito TsukamotoYasushi FujishigeYoshiko MaedaTsuyoshi Kimura
    • Amane AoyagiYoshihito TsukamotoYasushi FujishigeYoshiko MaedaTsuyoshi Kimura
    • G02B6/44G02B6/036
    • G02B1/045G02B6/02033
    • A plastic optical fiber cable includes: a bare optical fiber including a core made of a poly(methyl methacrylate) or a copolymer including methyl methacrylate as a major component and a cladding layer including, at least in the outermost layer, a layer made of a certain fluorine-containing olefin-based resin; and a coating layer provided on the outer surface thereof. The coating layer includes a protective coating layer, a light blocking coating layer, and a functional coating layer, the layers being provided in the order mentioned from inner side. The protective coating layer is made of a certain resin material. The light blocking coating layer is made of a nylon-based resin including, as a major component, nylon 11 or nylon 12, the nylon-based resin containing monomer and oligomer compounds derived from the nylon-based resin in an amount of a certain range. The functional coating layer is made of a nylon-based resin composition having a crystalline melting point within a certain range, the nylon-based resin composition containing a certain amount of melamine cyanurate or bromine atoms and further containing a certain amount of inorganic chromatic pigments, or the layer is made of a nylon-based resin composition having a crystalline melting point of within a certain range and an oxygen transmission rate within a certain range.
    • 塑料光缆包括:包括由聚(甲基丙烯酸甲酯)制成的芯或包含甲基丙烯酸甲酯作为主要成分的共聚物的裸光纤,以及至少在最外层中包含由 某些含氟烯烃类树脂; 以及设置在其外表面上的涂层。 涂层包括保护涂层,遮光涂层和功能性涂层,这些层以从内侧提到的顺序提供。 保护涂层由特定的树脂材料制成。 防光涂层由尼龙类树脂制成,尼龙系树脂包括尼龙11或尼龙12作为主要成分,尼龙系树脂含有单体和衍生自尼龙系树脂的低聚物化合物,其量为一定范围 。 功能性涂层由结晶熔点在一定范围内的尼龙系树脂组合物构成,尼龙系树脂组合物含有一定量的氰尿酸三聚氰胺或溴原子,并含有一定量的无机彩色颜料, 或者该层由结晶熔点在一定范围内且氧气透过率在一定范围内的尼龙类树脂组合物制成。