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    • 84. 发明授权
    • Charged particle beam exposure method and charged particle beam exposure
apparatus
    • 带电粒子束曝光方法和带电粒子束曝光装置
    • US5808313A
    • 1998-09-15
    • US892976
    • 1997-07-15
    • Akio YamadaHiroshi YasudaHidefumi YabaraAtsushi Saito
    • Akio YamadaHiroshi YasudaHidefumi YabaraAtsushi Saito
    • H01L21/027H01J37/304H01J37/317H01J37/00
    • B82Y10/00B82Y40/00H01J37/304H01J37/3174
    • The object of the present invention is to ensure a correct exposure even when a single exposure apparatus is used to expose a predetermined pattern, and an exposure apparatus therefor. According to the present invention, a charged particle beam exposure method, wherein a charged particle beam having a predetermined shape is irradiated to a sample to have the surface of the sample be exposed, comprises the steps of: storing a record of a first quantity of reflected electrons or a first sample current, which is detected in accordance with the charged particle beam irradiatd to the sample when a first exposure pattern is formed in a first area of the sample; and comparing a second quantity of reflected electrons or a second sample current, which is detected in accordance with the charged particle beam irradiated to the sample when the first exposure pattern is formed in a second area of the sample, with the first quantity of the reflected electrons or the first sample current which is stored when the first area is exposed, and generating a matched or unmatched signal therefor.
    • 本发明的目的在于即使使用单一的曝光装置来曝光预定图案也能确保正确的曝光及其曝光装置。 根据本发明,一种带电粒子束曝光方法,其中对样品照射具有预定形状的带电粒子束以暴露样品的表面,包括以下步骤:将第一量的 反射电子或第一样品电流,当在样品的第一区域中形成第一曝光图案时,其根据被照射到样品的带电粒子束来检测; 并且比较第二量的反射电子或第二样品电流,其在样品的第二区域中形成第一曝光图案时根据照射到样品的带电粒子束检测到的第一数量的反射电子或第二样品电流, 电子或第一采样电流,其在第一区域被暴露时存储,并且产生匹配或不匹配的信号。
    • 86. 发明授权
    • Portable telephone with speaker projected in front upper oblique
direction
    • 带扬声器的便携式电话投影在前上斜方向
    • US5603100A
    • 1997-02-11
    • US326936
    • 1994-10-21
    • Hiroshi Yasuda
    • Hiroshi Yasuda
    • H04B1/38H04M1/02H04M1/03H04M1/04H04Q7/32
    • H04M1/03H04B1/3833H04B1/3838H04M1/0202H04M1/0237
    • A portable telephone includes a telephone body, a receiver unit, a receiver supporting mechanism and a display unit. The telephone body includes a transmitter attached to one end thereof and an antenna attached to the other end thereof. The telephone body includes at least one aperture defined on one front surface thereof so as to communicate with the transmitter. The receiver unit is placed on the other end of said telephone body. The supporting mechanism slidably supports the receiver such that the receiver is projected from the telephone body not only in the direction away from the antenna but also with a predetermined angle with respect to the longitudinal direction of the telephone body. The display unit is placed on the front surface of the telephone body. A part of the display unit is covered with the receiver unit when the portable telephone is in a telephone call standby mode.
    • 便携式电话包括电话机,接收机单元,接收机支持机构和显示单元。 电话主体包括附接到其一端的发射器和附接到其另一端的天线。 电话主体包括限定在其一个前表面上的至少一个孔,以便与发射器通信。 接收器单元被放置在所述电话机体的另一端。 支撑机构可滑动地支撑接收器,使得接收器不仅沿远离天线的方向从电话机突出,而且相对于电话机的纵向方向以预定的角度突出。 显示单元被放置在电话机体的前表面上。 当便携式电话处于电话呼叫待机模式时,显示单元的一部分被接收器单元覆盖。
    • 88. 发明授权
    • Pattern judging method, mask producing method, and method of dividing
block pattern for use in block exposure
    • 图案判断方法,掩模制作方法以及块模块曝光中使用的块图案的分割方法
    • US5537487A
    • 1996-07-16
    • US257204
    • 1994-06-09
    • Masaaki MiyajimaHiroshi YasudaSatoru YamazakiKiichi Sakamoto
    • Masaaki MiyajimaHiroshi YasudaSatoru YamazakiKiichi Sakamoto
    • G06F17/50H01J37/302G06K9/00
    • G06F17/5081H01J37/3026
    • A method of dividing a block pattern for use in a block exposure, to be implemented on a computer, divides an arbitrary block which is to be formed in a block mask that is used for the block exposure when the arbitrary block is judged as including a prohibiting pattern which is undesirable from a point of view of the block exposure. This method comprises the steps of (a) dividing the arbitrary block in a first direction to obtain a first block having a first dividing width along a second direction which is perpendicular to the first direction, (b) dividing a remaining block portion of the arbitrary block excluding the first block in the first direction to obtain a first divided portion having a second dividing width along the second direction, and merging the first dividing portion to the first block if the second dividing width is less than a predetermined width, and (c) searching the first block in the first direction after the step (b) and merging one of two adjacent first patterns within the first block to a second block if a pattern interval which is less than a predetermined value extends along the first direction between the first patterns.
    • 将要在计算机上实现的块曝光中使用的块图案分割的方法将当将任意块判断为包括一个块时将要用于块曝光的块掩模中形成的任意块划分为 从块曝光的观点来看,禁止图案是不期望的。 该方法包括以下步骤:(a)沿第一方向划分任意块以获得具有垂直于第一方向的第二方向具有第一分割宽度的第一块,(b)将任意块的剩余块部分 在第一方向排除第一块以获得沿着第二方向具有第二分割宽度的第一分割部分,并且如果第二分割宽度小于预定宽度,则将第一分割部分合并到第一块,并且(c )在步骤(b)之后沿第一方向搜索第一块,并且如果小于预定值的图案间隔在第一块之间的第一方向上延伸,则将第一块内的两个相邻第一图案中的一个合并到第二块中 模式。