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    • 8. 发明公开
    • 정전류 다이오드 소자 및 그 제조방법
    • 恒流二极管元件及其制造方法
    • KR1020110096323A
    • 2011-08-30
    • KR1020100015707
    • 2010-02-22
    • (주) 텔트론
    • 이재진김진형
    • H01L29/861
    • H01L29/6609H01L21/822H01L29/861
    • PURPOSE: A constant-current diode element and a manufacturing method thereof are provided to simplify a process by forming a gate region using a silicon etching process. CONSTITUTION: A scribe line region is defined on an epi layer(120) and the scribe line region is etched in the depth of the epi layer thickness. A gate region is formed by injecting the impurity of the same shape as a substrate in a part of the region of the epi layer. A source/drain region is formed on a part of the region of the epi layer by injecting the impurity of the same shape as the epi layer. A contact area is formed by dispersing impurities and coating an insulating layer in order to electrically isolate the impurity region. A metal layer(190) short-circuiting the source/drain region, the scribe line area and the gate region is formed. The insulating layer(200) is coated on the upper end of the metal layer and the insulating layer is formed in the pad area.
    • 目的:提供恒流二极管元件及其制造方法,以通过使用硅蚀刻工艺形成栅极区域来简化工艺。 构成:在外延层(120)上限定划线区域,并且在外延层厚度的深度刻蚀刻划线区域。 通过在外延层的区域的一部分中注入与基板相同形状的杂质来形成栅极区域。 通过注入与外延层相同形状的杂质,在外延层的一部分区域上形成源/漏区。 通过分散杂质并涂覆绝缘层形成接触区域,以使杂质区域电隔离。 形成使源极/漏极区域,划线区域和栅极区域短路的金属层(190)。 绝缘层(200)涂覆在金属层的上端,绝缘层形成在焊盘区域中。
    • 10. 发明公开
    • 분리 다이오드 소자를 갖는 ESD 보호 회로 및 방법
    • 具有隔离二极管元件的ESD保护电路及其方法
    • KR1020080106951A
    • 2008-12-09
    • KR1020087023821
    • 2007-03-29
    • 엔엑스피 유에스에이, 인코포레이티드
    • 버디욱스,데이비드,씨.라미,다니엘,제이.
    • H01L27/04
    • H01L27/0255H01L29/0692H01L29/16H01L29/6609H01L29/861
    • An ESD protection circuit (20) includes an ESD device (24) and an isolation diode element (30). The ESD device includes a drain-source junction isolated ESD transistor (26,28). The isolation diode element is coupled in series with the ESD device and configured for providing ESD protection to a transistor device (22) needing ESD protection. Responsive to-Vgs conditions on a gate of the protected transistor device, the series coupled isolation diode element prevents a forward biasing of the drain-source junction of the ESD transistor prior to a breakdown condition of the isolation diode element. In addition, responsive to an ESD event sufficient to cause damage to the protected transistor device, the series coupled isolation diode element permits an occurrence of the breakdown condition. Furthermore, the ESD protection circuit can operate in both (i) a polarity of normal operation of the protected device and (ii) an opposite polarity other than in normal operation of the protected device. ® KIPO & WIPO 2009
    • ESD保护电路(20)包括ESD器件(24)和隔离二极管元件(30)。 ESD器件包括漏 - 源结隔离ESD晶体管(26,28)。 隔离二极管元件与ESD器件串联耦合,并被配置为向需要ESD保护的晶体管器件(22)提供ESD保护。 串联耦合隔离二极管元件在保护晶体管器件的栅极上的响应于Vgs条件下,在隔离二极管元件的击穿状态之前防止ESD晶体管的漏极 - 源极结的正向偏置。 此外,响应于足以导致对受保护的晶体管器件造成损害的ESD事件,串联耦合隔离二极管元件允许发生故障状态。 此外,ESD保护电路可以在(i)受保护器件的正常工作的极性和(ii)除了受保护器件的正常操作之外的相反极性的情况下工作。 ®KIPO&WIPO 2009