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    • 9. 发明专利
    • Diaphragm-actuated fluid control valve
    • 透膜式液体控制阀
    • JP2011007355A
    • 2011-01-13
    • JP2009148550
    • 2009-06-23
    • Fuji Koki Corp株式会社不二工機
    • MOGI TAKASHIMORITA MASAFUMI
    • F25B41/06F16K31/365
    • F16K31/1262F25B41/062
    • PROBLEM TO BE SOLVED: To provide a diaphragm-actuated fluid control valve capable of, even in a region where a pressure difference between pressure at an upper surface side and pressure at a lower surface side of a diaphragm is small, significantly changing the amount of a lift relative to a change in the pressure difference without reducing a thickness of the diaphragm, and thus providing a predetermined flow rate and performing stable flow rate control.SOLUTION: The fluid control valve has the diaphragm 35 for driving a valve element 25, and the diaphragm 35 has a mountainous wave 35b formed between an outer peripheral part 35a and an inner peripheral part 35c in a state of having the shape of a concentric circle when viewed in a plan view and having N+(0.25 to 0.75) elevated parts that protrude upward or downward when viewed in cross section, where N is a positive integer (1, 2, 3, ...).
    • 要解决的问题:为了提供一种膜片致动流体控制阀,即使在上表面侧的压力差与隔膜的下表面侧的压力小的区域,也能够显着地改变 相对于压力差的变化的升程而不减小隔膜的厚度,从而提供预定的流量并执行稳定的流量控制。解决方案:流体控制阀具有用于驱动阀元件25的隔膜35,以及 隔膜35具有形成在外周部分35a和内周部分35c之间的山形波纹35b,其在平面图中以同心圆的形状观察并且具有N +(0.25至0.75)的突出部分 在横截面中观察时向上或向下,其中N是正整数(1,2,3,...)。