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1. 发明授权

EP1947675B1 Manipulator for rotating and translating a sample holder 有权
标题翻译：操纵器用于旋转和移动样品架
公开(公告)号：EP1947675B1
公开(公告)日：2009-03-25
申请号：EP08150440.9
申请日：2008-01-21
申请人： FEI COMPANY , The Regents of the University of California , Board of Trustees at the University of Illinois
发明人： Duden, Thomas , Schmid, Andreas , Petrov, Ivan , Donchev, Todor , Olson, Eric , Van de Water, Jeroen , Wagner, Raymond , Van den Oetelaar, Johannes , Bruggers, Jan Willem , Slingerland, Hendrik , Ottevanger, Adriaan
IPC分类号： H01J37/20 , B25J7/00 , G01N23/22 , G02B21/32 , H01L41/09
CPC分类号： H01J37/20 , B25J7/00 , B25J15/0004

2. 发明授权

EP1770751B1 Cluster tool for microscopic processing of samples 有权
标题翻译：样品的显微治疗复合工具
公开(公告)号：EP1770751B1
公开(公告)日：2015-11-18
申请号：EP06121304.7
申请日：2006-09-27
申请人： FEI COMPANY
发明人： Buijsse, Bart , Meuwese, Mark , Bormans, Bernardus , Slingerland, Hendrik , Tappel, Hendrik
IPC分类号： H01J37/20 , H01J37/28
CPC分类号： H01J37/20 , H01J37/18 , H01J37/226 , H01J37/28 , H01J2237/20214

3. 发明公开

EP2924710A1 Imaging a sample with multiple beams and a single detector 审中-公开
标题翻译： Abbildung einer Probe mittels mehrerer Strahlen und einem einzigen Detektor
公开(公告)号：EP2924710A1
公开(公告)日：2015-09-30
申请号：EP14161519.5
申请日：2014-03-25
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal , Faber, Pybe
IPC分类号： H01J37/28 , H01J37/30
CPC分类号： H01J37/28 , H01J37/3005 , H01J2237/226 , H01J2237/24495 , H01J2237/30466 , H01J2237/31749
摘要： The invention relates to a multi-beam apparatus (210) for inspecting a sample (232) with at least a first focused beam and a second focused beam, the apparatus equipped to scan the first and the second beam (243, 218) over the sample, the apparatus equipped with at least one detector (240) for detecting secondary radiation emitted by the sample when said sample is irradiated by the first and the second beam, the detector capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, in working the detector signal comprising information caused by the first and the second beam, characterized in that the apparatus is equipped with a programmable controller (219) programmed for processing the detector signal using a source separation technique, as a result of which the programmable controller is equipped to output a signal representing information caused by a single beam.
摘要翻译：本发明涉及一种用于使用至少第一聚焦光束和第二聚焦光束来检测样品（232）的多光束装置（210），该装置被配备成扫描第一和第二光束（243,218）所述装置配备有至少一个检测器（240），用于当所述样品被所述第一和第二光束照射时检测由所述样品发射的次级辐射，所述检测器能够输出表示检测到的次级辐射的强度的检测器信号通过检测器处理包括由第一和第二光束引起的信息的检测器信号，其特征在于，该装置配备有可编程控制器（219），其被编程为使用源分离技术来处理检测器信号，作为可编程控制器被配备为输出表示由单个波束引起的信息的信号。

4. 发明公开

EP2166556A1 Method for correcting distortions in a particle-optical apparatus 审中-公开
标题翻译：维尔法赫森zur Berichtigung von Verzerrungen在einer teilchenoptischen Vorrichtung
公开(公告)号：EP2166556A1
公开(公告)日：2010-03-24
申请号：EP09170781.0
申请日：2009-09-21
申请人： FEI COMPANY
发明人： De Jong, Alan , Luecken, Uwe , Slingerland, Hendrik , Tiemeijer, Peter
IPC分类号： H01J37/153 , H01J37/26
CPC分类号： H01J37/153 , H01J37/263 , H01J2237/1534 , H01J2237/2823
摘要： The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain.
To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.
摘要翻译：本发明涉及一种用于校正由TEM的投影系统（106）引入的失真的方法。如本领域技术人员所知，失真可能限制TEM的分辨率，特别是当使用层析成像进行特征的3D重建时。此外，当在TEM中使用应变分析时，失真可能会限制应变的检测。为此，本发明公开了一种装备有多极（152）的检测器，该多极体使得TEM的图像翘曲，使得由投影系统引入的失真被抵消。检测器还可以包括用于检测电子的CCD或荧光屏（151）。

5. 发明公开

EP1947675A1 Manipulator for rotating and translating a sample holder 有权
标题翻译：机械手zum Drehen und Verschieben eines Probenhalters
公开(公告)号：EP1947675A1
公开(公告)日：2008-07-23
申请号：EP08150440.9
申请日：2008-01-21
申请人： FEI COMPANY , The Regents of the University of California , BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
发明人： Duden, Thomas , Schmid, Andreas , Petrov, Ivan , Donchev, Todor , Olson, Eric , Van de Water, Jeroen , Wagner, Raymond , Van den Oetelaar, Johannes , Bruggers, Jan Willem , Slingerland, Hendrik , Ottevanger, Adriaan
IPC分类号： H01J37/20 , B25J7/00 , G01N23/22 , G02B21/32 , H01L41/09
CPC分类号： H01J37/20 , B25J7/00 , B25J15/0004
摘要： A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.
摘要翻译：用于例如机器人的操纵器。描述了透射电子显微镜（TEM），所述操纵器能够旋转和平移样品架（4）。操纵器将圆形样品保持器夹在两个构件（3A，3B）之间，所述构件安装在致动器（2A，2B）上。沿着相同的方向移动致动器导致样品架的平移，同时沿相反方向移动致动器导致样品架的旋转。

6. 发明公开

EP3016130A1 Composite scan path in a charged particle microscope 审中-公开
标题翻译：带电粒子显微镜中的复合扫描路径
公开(公告)号：EP3016130A1
公开(公告)日：2016-05-04
申请号：EP14190703.0
申请日：2014-10-28
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , De Vos, Gert-Jan , Slingerland, Hendrik
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/15 , H01J2237/24495
摘要： A scanning-type Charged Particle Microscope (M), comprising:
- A specimen holder (7), for holding a specimen (S);
- A source (9), for producing a beam of charged particles;
- An illuminator, for directing said beam so as to irradiate the specimen;
- A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Scanning means, for producing relative scanning motion of the beam and specimen so as to cause the beam to trace out a scan path (P) on the specimen;
- A programmable controller that can be invoked to execute at least one automated procedure in the microscope,
wherein:
- Said scanning means comprise:
▪ Long-stroke scanning means (7'), for effecting scanning motion of relatively large amplitude and relatively low frequency;
▪ Short-stroke scanning means (15), for effecting scanning motion of relatively small amplitude and relatively high frequency;
- Said controller can be invoked to trace out a scan path comprising relatively small-amplitude movements, performed using said short-stroke scanning means, that combine into a resultant relatively large-amplitude migration, achieved with the aid of said long-stroke scanning means.
摘要翻译：一种扫描型带电粒子显微镜（M），包括： - 样品架（7），用于保持样品（S）; - 源（9），用于产生带电粒子束; - 照射器，用于引导所述光束以照射样品; - 检测器，用于检测响应于所述照射而从样本发出的辐射通量; - 扫描装置，用于产生光束和样本的相对扫描运动，以使光束扫描样本上的扫描路径（P）; - 扫描装置， - 可被调用以在显微镜中执行至少一个自动程序的可编程控制器，其中： - 所述扫描装置包括：▪长行程扫描装置（7'），用于实现相对大振幅和相对低频率的扫描运动 ; ▪短行程扫描装置（15），用于实现幅度相对较小且频率相对较高的扫描运动; - 可以调用所述控制器来描绘包括相对小振幅运动的扫描路径，所述扫描路径使用所述短行程扫描装置执行，所述扫描路径组合成借助于所述长行程扫描装置获得的合成的相对大振幅的偏移。

7. 发明公开

EP2924708A1 Imaging a sample with multiple beams and multiple detectors 审中-公开
标题翻译： Abbildung einer Probe mit mehreren Strahlen und mehreren Detektoren
公开(公告)号：EP2924708A1
公开(公告)日：2015-09-30
申请号：EP14161505.4
申请日：2014-03-25
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal , Faber, Pybe , Sluijterman, Seyno
IPC分类号： H01J37/244
CPC分类号： H01J37/261 , G01N21/6458 , G01N23/225 , G01N2223/418 , G01N2223/427 , G02B21/0016 , H01J37/06 , H01J37/1472 , H01J37/222 , H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/063 , H01J2237/10 , H01J2237/226 , H01J2237/2446 , H01J2237/2447 , H01J2237/2448 , H01J2237/24507 , H01J2237/2602
摘要： The invention relates to a multi-beam apparatus for inspecting a sample (232) with a multitude of focused beams, the apparatus equipped to scan a multitude of N beams (240-n) over the sample, the apparatus equipped with a multitude of M detectors (234-m) for detecting secondary radiation emitted by the sample when said sample is irradiated by the multitude of beams, each of the detectors capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, characterized in that, in working, each detector signal comprises information caused by multiple beams, the information caused by one beam thus spread over multiple detectors, the apparatus equipped with a programmable controller (236) for processing the multitude of detector signals to a multitude of output signals, the controller processing the multitude of detector signals so that each output signal represents information caused by a single beam.
摘要翻译：本发明涉及一种用于用多个聚焦光束检测样品（232）的多光束装置，该装置用于扫描样品上的多个N个光束（240-n），该装置装备有多个M 检测器（234-m），用于当所述样品被多个光束照射时检测由样品发射的次级辐射，每个检测器能够输出表示由检测器检测到的次级辐射的强度的检测器信号，其特征在于：在工作时，每个检测器信号包括由多个波束引起的信息，由一个波束引起的信息由此分布在多个检测器上，该装置配备有用于将多个检测器信号处理到多个输出信号的可编程控制器（236）控制器处理多个检测器信号，使得每个输出信号表示由单个波束引起的信息。

8. 发明授权

EP2131384B1 Hybrid phase plate 有权
标题翻译： Hybridphasenplatte
公开(公告)号：EP2131384B1
公开(公告)日：2011-05-25
申请号：EP09161890.0
申请日：2009-06-04
申请人： FEI COMPANY
发明人： Wagner, Raymond , Slingerland, Hendrik , Tiemeijer, Peter , Schuurmans, Frank
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J2237/2614

9. 发明公开

EP2166557A1 Method for correcting distortions in a particle-optical apparatus 审中-公开
标题翻译：用于校正颗粒光学设备中的畸变的方法
公开(公告)号：EP2166557A1
公开(公告)日：2010-03-24
申请号：EP08164799.2
申请日：2008-09-22
申请人： FEI COMPANY
发明人： Tiemeijer, Peter , Luecken, Uwe , De Jong, Alan , Slingerland, Hendrik
IPC分类号： H01J37/153 , H01J37/26
CPC分类号： H01J37/153 , H01J37/263 , H01J2237/1534 , H01J2237/2823
摘要： The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain.
To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.
摘要翻译：本发明涉及一种用于校正由TEM的投影系统（106）引入的失真的方法。如本领域技术人员所知，扭曲可能限制TEM的分辨率，特别是当使用层析成像对特征进行3D重建时。当在TEM中使用应变分析时，失真可能会限制应变的检测。为此，本发明公开了一种配备有多极（152）的检测器，所述多极弯曲TEM的图像，使得投影系统引入的失真得到抵消。检测器还可以包括用于检测电子的CCD或荧光屏（151）。

10. 发明公开

EP2958130A1 Mathematical image assembly in a scanning-type microscope 审中-公开
标题翻译：在einem Abtastmikroskop的Mathematische Bildrekonstruktion
公开(公告)号：EP2958130A1
公开(公告)日：2015-12-23
申请号：EP14172871.7
申请日：2014-06-18
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal , Faber, Jacob Simon
IPC分类号： H01J37/22 , H01J37/28 , G02B21/00
CPC分类号： H01J37/222 , G02B21/0024 , G02B21/0048 , G02B21/008 , H01J37/226 , H01J37/28 , H01J2237/226 , H01J2237/28 , H01J2237/2811
摘要： A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
- Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen;
- Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position,

which method additionally comprises the following steps:
- In a first sampling session S 1 , gathering detector data from a first collection P 1 of sampling points distributed sparsely across the specimen;
- Repeating this procedure so as to accumulate a set {P n } of such collections, gathered during an associated set {S n } of sampling sessions, each set with a cardinality N > 1;
- Assembling an image of the specimen by using the set {P n } as input to an integrative mathematical reconstruction procedure,

wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {P n }.
摘要翻译：使用扫描型显微镜对样本的图像进行累积的方法，包括以下步骤： - 提供从源通过照射器引导以照射样本的辐射束; - 提供检测器，用于响应于所述照射检测从样本发出的辐射通量; - 使所述光束相对于所述检体的表面进行扫描运动，并将所述检测器的输出记录为扫描位置的函数，所述方法还包括以下步骤： - 在第一采样会话S 1中，采集检测器数据从第一集合P 1抽样点稀疏地分布在样本上; - 重复此过程，以便累积在相关集合{S n}采样会话期间收集的集合{P n}，每个集合具有基数N> 1; - 通过使用集合{P n}作为整合数学重建过程的输入来组装样本的图像，其中，作为所述组装过程的一部分，进行数学登记校正以补偿组的不同成员之间的漂移不匹配 {P n}。

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