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1. 发明授权

EP1947675B1 Manipulator for rotating and translating a sample holder 有权
标题翻译：操纵器用于旋转和移动样品架
公开(公告)号：EP1947675B1
公开(公告)日：2009-03-25
申请号：EP08150440.9
申请日：2008-01-21
申请人： FEI COMPANY , The Regents of the University of California , Board of Trustees at the University of Illinois
发明人： Duden, Thomas , Schmid, Andreas , Petrov, Ivan , Donchev, Todor , Olson, Eric , Van de Water, Jeroen , Wagner, Raymond , Van den Oetelaar, Johannes , Bruggers, Jan Willem , Slingerland, Hendrik , Ottevanger, Adriaan
IPC分类号： H01J37/20 , B25J7/00 , G01N23/22 , G02B21/32 , H01L41/09
CPC分类号： H01J37/20 , B25J7/00 , B25J15/0004

2. 发明公开

EP3016130A1 Composite scan path in a charged particle microscope 审中-公开
标题翻译：带电粒子显微镜中的复合扫描路径
公开(公告)号：EP3016130A1
公开(公告)日：2016-05-04
申请号：EP14190703.0
申请日：2014-10-28
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , De Vos, Gert-Jan , Slingerland, Hendrik
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/15 , H01J2237/24495
摘要： A scanning-type Charged Particle Microscope (M), comprising:
- A specimen holder (7), for holding a specimen (S);
- A source (9), for producing a beam of charged particles;
- An illuminator, for directing said beam so as to irradiate the specimen;
- A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Scanning means, for producing relative scanning motion of the beam and specimen so as to cause the beam to trace out a scan path (P) on the specimen;
- A programmable controller that can be invoked to execute at least one automated procedure in the microscope,
wherein:
- Said scanning means comprise:
▪ Long-stroke scanning means (7'), for effecting scanning motion of relatively large amplitude and relatively low frequency;
▪ Short-stroke scanning means (15), for effecting scanning motion of relatively small amplitude and relatively high frequency;
- Said controller can be invoked to trace out a scan path comprising relatively small-amplitude movements, performed using said short-stroke scanning means, that combine into a resultant relatively large-amplitude migration, achieved with the aid of said long-stroke scanning means.
摘要翻译：一种扫描型带电粒子显微镜（M），包括： - 样品架（7），用于保持样品（S）; - 源（9），用于产生带电粒子束; - 照射器，用于引导所述光束以照射样品; - 检测器，用于检测响应于所述照射而从样本发出的辐射通量; - 扫描装置，用于产生光束和样本的相对扫描运动，以使光束扫描样本上的扫描路径（P）; - 扫描装置， - 可被调用以在显微镜中执行至少一个自动程序的可编程控制器，其中： - 所述扫描装置包括：▪长行程扫描装置（7'），用于实现相对大振幅和相对低频率的扫描运动 ; ▪短行程扫描装置（15），用于实现幅度相对较小且频率相对较高的扫描运动; - 可以调用所述控制器来描绘包括相对小振幅运动的扫描路径，所述扫描路径使用所述短行程扫描装置执行，所述扫描路径组合成借助于所述长行程扫描装置获得的合成的相对大振幅的偏移。

3. 发明公开

EP2924708A1 Imaging a sample with multiple beams and multiple detectors 审中-公开
标题翻译： Abbildung einer Probe mit mehreren Strahlen und mehreren Detektoren
公开(公告)号：EP2924708A1
公开(公告)日：2015-09-30
申请号：EP14161505.4
申请日：2014-03-25
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal , Faber, Pybe , Sluijterman, Seyno
IPC分类号： H01J37/244
CPC分类号： H01J37/261 , G01N21/6458 , G01N23/225 , G01N2223/418 , G01N2223/427 , G02B21/0016 , H01J37/06 , H01J37/1472 , H01J37/222 , H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/063 , H01J2237/10 , H01J2237/226 , H01J2237/2446 , H01J2237/2447 , H01J2237/2448 , H01J2237/24507 , H01J2237/2602
摘要： The invention relates to a multi-beam apparatus for inspecting a sample (232) with a multitude of focused beams, the apparatus equipped to scan a multitude of N beams (240-n) over the sample, the apparatus equipped with a multitude of M detectors (234-m) for detecting secondary radiation emitted by the sample when said sample is irradiated by the multitude of beams, each of the detectors capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, characterized in that, in working, each detector signal comprises information caused by multiple beams, the information caused by one beam thus spread over multiple detectors, the apparatus equipped with a programmable controller (236) for processing the multitude of detector signals to a multitude of output signals, the controller processing the multitude of detector signals so that each output signal represents information caused by a single beam.
摘要翻译：本发明涉及一种用于用多个聚焦光束检测样品（232）的多光束装置，该装置用于扫描样品上的多个N个光束（240-n），该装置装备有多个M 检测器（234-m），用于当所述样品被多个光束照射时检测由样品发射的次级辐射，每个检测器能够输出表示由检测器检测到的次级辐射的强度的检测器信号，其特征在于：在工作时，每个检测器信号包括由多个波束引起的信息，由一个波束引起的信息由此分布在多个检测器上，该装置配备有用于将多个检测器信号处理到多个输出信号的可编程控制器（236）控制器处理多个检测器信号，使得每个输出信号表示由单个波束引起的信息。

4. 发明授权

EP2131384B1 Hybrid phase plate 有权
标题翻译： Hybridphasenplatte
公开(公告)号：EP2131384B1
公开(公告)日：2011-05-25
申请号：EP09161890.0
申请日：2009-06-04
申请人： FEI COMPANY
发明人： Wagner, Raymond , Slingerland, Hendrik , Tiemeijer, Peter , Schuurmans, Frank
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J2237/2614

5. 发明公开

EP2166557A1 Method for correcting distortions in a particle-optical apparatus 审中-公开
标题翻译：用于校正颗粒光学设备中的畸变的方法
公开(公告)号：EP2166557A1
公开(公告)日：2010-03-24
申请号：EP08164799.2
申请日：2008-09-22
申请人： FEI COMPANY
发明人： Tiemeijer, Peter , Luecken, Uwe , De Jong, Alan , Slingerland, Hendrik
IPC分类号： H01J37/153 , H01J37/26
CPC分类号： H01J37/153 , H01J37/263 , H01J2237/1534 , H01J2237/2823
摘要： The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain.
To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.
摘要翻译：本发明涉及一种用于校正由TEM的投影系统（106）引入的失真的方法。如本领域技术人员所知，扭曲可能限制TEM的分辨率，特别是当使用层析成像对特征进行3D重建时。当在TEM中使用应变分析时，失真可能会限制应变的检测。为此，本发明公开了一种配备有多极（152）的检测器，所述多极弯曲TEM的图像，使得投影系统引入的失真得到抵消。检测器还可以包括用于检测电子的CCD或荧光屏（151）。

6. 发明公开

EP2958130A1 Mathematical image assembly in a scanning-type microscope 审中-公开
标题翻译：在einem Abtastmikroskop的Mathematische Bildrekonstruktion
公开(公告)号：EP2958130A1
公开(公告)日：2015-12-23
申请号：EP14172871.7
申请日：2014-06-18
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal , Faber, Jacob Simon
IPC分类号： H01J37/22 , H01J37/28 , G02B21/00
CPC分类号： H01J37/222 , G02B21/0024 , G02B21/0048 , G02B21/008 , H01J37/226 , H01J37/28 , H01J2237/226 , H01J2237/28 , H01J2237/2811
摘要： A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
- Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen;
- Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position,

which method additionally comprises the following steps:
- In a first sampling session S 1 , gathering detector data from a first collection P 1 of sampling points distributed sparsely across the specimen;
- Repeating this procedure so as to accumulate a set {P n } of such collections, gathered during an associated set {S n } of sampling sessions, each set with a cardinality N > 1;
- Assembling an image of the specimen by using the set {P n } as input to an integrative mathematical reconstruction procedure,

wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {P n }.
摘要翻译：使用扫描型显微镜对样本的图像进行累积的方法，包括以下步骤： - 提供从源通过照射器引导以照射样本的辐射束; - 提供检测器，用于响应于所述照射检测从样本发出的辐射通量; - 使所述光束相对于所述检体的表面进行扫描运动，并将所述检测器的输出记录为扫描位置的函数，所述方法还包括以下步骤： - 在第一采样会话S 1中，采集检测器数据从第一集合P 1抽样点稀疏地分布在样本上; - 重复此过程，以便累积在相关集合{S n}采样会话期间收集的集合{P n}，每个集合具有基数N> 1; - 通过使用集合{P n}作为整合数学重建过程的输入来组装样本的图像，其中，作为所述组装过程的一部分，进行数学登记校正以补偿组的不同成员之间的漂移不匹配 {P n}。

7. 发明公开

EP2924709A1 Imaging a sample with multiple beams and multiple detectors 审中-公开
标题翻译： ABBILDUNG EINER探针麻醉师MEHREREN STRAHLEN UND MEHREREN DETEKTOREN
公开(公告)号：EP2924709A1
公开(公告)日：2015-09-30
申请号：EP15160701.7
申请日：2015-03-25
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal , Faber, Pybe , Sluijterman, Albertus
IPC分类号： H01J37/244
CPC分类号： H01J37/261 , G01N21/6458 , G01N23/225 , G01N2223/418 , G01N2223/427 , G02B21/0016 , H01J37/06 , H01J37/1472 , H01J37/222 , H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/063 , H01J2237/10 , H01J2237/226 , H01J2237/2446 , H01J2237/2447 , H01J2237/2448 , H01J2237/24507 , H01J2237/2602
摘要： A multi-beam apparatus for inspecting or processing a sample (232) with a multitude of focused beams, the apparatus equipped to scan a multitude of N beams (240-n) over the sample, the apparatus equipped with a multitude of M detectors (234-m) for detecting secondary radiation emitted by the sample when said sample is irradiated by the multitude of beams, each of the detectors capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, , in working, each detector signal comprising information caused by multiple beams, the information caused by one beam thus spread over multiple detectors, the apparatus equipped with a programmable controller (236) for processing the multitude of detector signals to a multitude of output signals, using weight factors so that each output signal represents information caused by a single beam, characterized in that the weight factors are dynamic weight factors depending on the scan position of the beams with respect to the detectors and the distance between sample and detectors.
The weight factors describe the contribution of each beam to each detector. The invention is based on the insight that when scanning the beams over the sample, the position of the position where the secondary radiation is formed (the impact position) changes. Therefore the weight factors should be a function of the scan position.
Also the distance between sample and detector (the working distance) has a similar effect on the weight factors
It is noted that, as the position of the impact is known at all times the weight factors can be a known function of the scan position, working distance and, if applicable, the beam energies.
摘要翻译：一种用于用多个聚焦光束检测或处理样品（232）的多光束装置，所述装置配备用于扫描样品上的多个N个光束（240-n），所述装置配备有多个M个检测器每个检测器能够输出表示由检测器检测到的二次辐射的强度的检测器信号，每个检测器信号在工作时，每个检测器检测器信号包括由多个波束引起的信息，由一个波束引起的信息由此分布在多个检测器上，该装置配备有可编程控制器（236），用于使用加权因子将多个检测器信号处理到多个输出信号，使得每个输出信号表示由单个波束引起的信息，其特征在于，所述权重因子是取决于所述扫描位置的动态加权因子相对于检测器的光束和样品和检测器之间的距离。权重因子描述了每个光束对每个探测器的贡献。本发明基于以下认识：当扫描样品上的光束时，形成次级辐射的位置的位置（冲击位置）发生变化。因此，重量因子应该是扫描位置的函数。样品和检测器之间的距离（工作距离）对重量因子也有类似的影响。应注意的是，由于冲击位置始终是已知的，重量因子可以是扫描位置的已知功能，工作距离和（如果适用）射束能量。

8. 发明公开

EP1770751A3 Cluster tool for microscopic processing of samples 有权
标题翻译：样品的显微治疗复合工具
公开(公告)号：EP1770751A3
公开(公告)日：2011-08-17
申请号：EP06121304.7
申请日：2006-09-27
申请人： FEI COMPANY
发明人： Buijsse, Bart , Meuwese, Mark , Bormans, Bernardus , Slingerland, Hendrik , Tappel, Hendrik
IPC分类号： H01J37/20 , H01J37/28
CPC分类号： H01J37/20 , H01J37/18 , H01J37/226 , H01J37/28 , H01J2237/20214
摘要： A cluster tool includes multiple tools (104) for microscopic processing of a sample positioned around a rotatable base (102). A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.

9. 发明公开

EP2131385A1 Hybrid phase plate 审中-公开
标题翻译： Hybridphasenplatte
公开(公告)号：EP2131385A1
公开(公告)日：2009-12-09
申请号：EP08157619.1
申请日：2008-06-05
申请人： FEI Company
发明人： Wagner, Raymond , Slingerland, Hendrik , Schuurmans, Frank , Tiemeijer, Peter
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J2237/2614
摘要： The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.
摘要翻译：本发明涉及用于TEM中的混合相位板。根据本发明的相位板类似于安装有Zernike相位板的Boersch相位板。结果，根据本发明的相位板类似于用于电子散射的Boersch相位板，使得它们通过中心结构（15）的外部，并且类似于通过中心结构的孔的散射电子的Zernike相位板。将本发明的相位板与Zernike相位板进行比较的优点在于，对于以大角度散射的电子，没有电子被箔吸收或散射，导致TEM具有更好的高分辨率性能。将本发明的相位板与Boersch相位板相比较，中心结构的小型化的要求不那么严格。

10. 发明公开

EP2131384A1 Hybrid phase plate 有权
标题翻译：混合相板
公开(公告)号：EP2131384A1
公开(公告)日：2009-12-09
申请号：EP09161890.0
申请日：2009-06-04
申请人： FEI COMPANY
发明人： Wagner, Raymond , Slingerland, Hendrik , Tiemeijer, Peter , Schuurmans, Frank
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J2237/2614
摘要： The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.
摘要翻译：本发明涉及用于TEM中的混合相位板。根据本发明的相位板类似于其中安装Zernike相位板的Boersch相位板。结果，根据本发明的相位板类似于Boersch相位板，用于电子散射的程度使得它们通过中心结构（15）的外部并且类似于通过中心结构的孔的散射电子的Zernike相位板。将本发明的相位板与Zernike相位板进行比较具有以下优点：对于散射大角度的电子，没有电子被箔片吸收或散射，从而导致TEM的更高的分辨率性能。比较本发明的相位板和Boersch相位板，中央结构小型化的要求不太严重。

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