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1. 发明公开

EP2653892A2 Method for analyzing an EDS signal 有权
标题翻译： Verfahren zur分析EDS信号
公开(公告)号：EP2653892A2
公开(公告)日：2013-10-23
申请号：EP13164043.5
申请日：2013-04-17
申请人： FEI COMPANY
发明人： Kooijman, Cornelis , De Vos, Gert-Jan
IPC分类号： G01T1/17 , G01T1/36
CPC分类号： G06F17/18 , G01T1/16 , G01T1/17 , G01T1/36
摘要： The invention relates to a method for analyzing the output signal of a Silicon Drift Detector (SDD). A SDD is used for detecting X-rays in e.g. Scanning Electron Microscopes and X-ray analysis instruments, where X-rays are emitted by a sample as a result of impinging radiation.
The signal of a SDD comprises a number of randomly spaced steps, in which the step height is a function of the energy of the detected X-ray photon.
The variance in step height is a function of the averaging time that can be used to determine the plateau between steps: averaging over a short interval (405) results in more uncertainty of the plateau value than a long interval (403). As the step height relies on determination of the preceding plateau and the following plateau value, step heights (401, 402) have different reliabilities/variances. By according a weight factor, the weight factor a function of the variance such that a step with a low variance (high reliability) is associated with a larger weight factor than a step with a high variance (low reliability), measurement values with a low variance, corresponding to a high reliance, are emphasized. This results in better resolved spectra.
摘要翻译：本发明涉及一种用于分析硅漂移检测器（SDD）的输出信号的方法。 SDD用于检测例如X射线。扫描电子显微镜和X射线分析仪器，其中X射线由于受到辐射的影响而被样品发射。 SDD的信号包括多个随机间隔的步骤，其中台阶高度是所检测的X射线光子的能量的函数。台阶高度的方差是平均时间的函数，可用于确定平台之间的平台：间隔平均（405）导致平台值比长间隔更多的不确定性（403）。由于台阶高度依赖于确定先前的平台和随后的平台值，步高（401,402）具有不同的可靠性/方差。根据权重因子，权重因子是方差的函数，使得具有低方差（高可靠性）的步长与具有高方差（低可靠性）的步长相比具有更大的权重因子，具有低的测量值强调对应于高度依赖的差异。这导致更好的解析光谱。

2. 发明公开

EP2653891A1 Method for analyzing an EDS signal 审中-公开
标题翻译：分析EDS信号的方法
公开(公告)号：EP2653891A1
公开(公告)日：2013-10-23
申请号：EP12164724.2
申请日：2012-04-19
申请人： FEI COMPANY
发明人： Kooijman, Cees , De Vos, Gert-Jan
IPC分类号： G01T1/17 , G01T1/36
CPC分类号： G06F17/18 , G01T1/16 , G01T1/17 , G01T1/36
摘要： The invention relates to a method for analyzing the output signal of a Silicon Drift Detector (SDD). A SDD is used for detecting X-rays in e.g. Scanning Electron Microscopes and X-ray analysis instruments, where X-rays are emitted by a sample as a result of impinging radiation. The signal of a SDD comprises a number of randomly spaced steps, in which the step height is a function of the energy of the detected X-ray photon.
The variance in step height is a function of the averaging time that can be used to determine the plateau between steps: averaging over a short interval (405) results in more uncertainty of the plateau value than a long interval (403). As the step height relies on determination of the preceding plateau and the following plateau value, step heights (401, 402) have different reliabilities/ variances. By according a weight factor, the weight factor a function of the variance such that a step with a low variance (high reliability) is associated with a larger weight factor than a step with a high variance (low reliability), measurement values with a low variance, corresponding to a high reliance, are emphasized. This results in better resolved spectra.
摘要翻译：本发明涉及一种用于分析硅漂移检测器（SDD）的输出信号的方法。 SDD用于检测例如X射线的X射线。扫描电子显微镜和X射线分析仪器，其中由于撞击辐射而由样品发射X射线。 SDD的信号包括多个随机间隔的阶梯，其中阶梯高度是检测到的X射线光子的能量的函数。步长的变化是平均时间的函数，可以用来确定步骤之间的平稳期：在短时间间隔内平均（405）导致平稳值比长时间间隔（403）更不确定。由于台阶高度依赖于确定前面的平台和下面的平台值，台阶高度（401,402）具有不同的可靠性/方差。根据权重因子，权重因子是方差的函数，使得具有低方差（高可靠性）的步骤与具有高方差（低可靠性）的步骤相比具有更大的权重因子，测量值具有低强调对应于高度依赖性的差异。这导致更好的解析光谱。

3. 发明公开

EP3016130A1 Composite scan path in a charged particle microscope 审中-公开
标题翻译：带电粒子显微镜中的复合扫描路径
公开(公告)号：EP3016130A1
公开(公告)日：2016-05-04
申请号：EP14190703.0
申请日：2014-10-28
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , De Vos, Gert-Jan , Slingerland, Hendrik
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/15 , H01J2237/24495
摘要： A scanning-type Charged Particle Microscope (M), comprising:
- A specimen holder (7), for holding a specimen (S);
- A source (9), for producing a beam of charged particles;
- An illuminator, for directing said beam so as to irradiate the specimen;
- A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Scanning means, for producing relative scanning motion of the beam and specimen so as to cause the beam to trace out a scan path (P) on the specimen;
- A programmable controller that can be invoked to execute at least one automated procedure in the microscope,
wherein:
- Said scanning means comprise:
▪ Long-stroke scanning means (7'), for effecting scanning motion of relatively large amplitude and relatively low frequency;
▪ Short-stroke scanning means (15), for effecting scanning motion of relatively small amplitude and relatively high frequency;
- Said controller can be invoked to trace out a scan path comprising relatively small-amplitude movements, performed using said short-stroke scanning means, that combine into a resultant relatively large-amplitude migration, achieved with the aid of said long-stroke scanning means.
摘要翻译：一种扫描型带电粒子显微镜（M），包括： - 样品架（7），用于保持样品（S）; - 源（9），用于产生带电粒子束; - 照射器，用于引导所述光束以照射样品; - 检测器，用于检测响应于所述照射而从样本发出的辐射通量; - 扫描装置，用于产生光束和样本的相对扫描运动，以使光束扫描样本上的扫描路径（P）; - 扫描装置， - 可被调用以在显微镜中执行至少一个自动程序的可编程控制器，其中： - 所述扫描装置包括：▪长行程扫描装置（7'），用于实现相对大振幅和相对低频率的扫描运动 ; ▪短行程扫描装置（15），用于实现幅度相对较小且频率相对较高的扫描运动; - 可以调用所述控制器来描绘包括相对小振幅运动的扫描路径，所述扫描路径使用所述短行程扫描装置执行，所述扫描路径组合成借助于所述长行程扫描装置获得的合成的相对大振幅的偏移。

4. 发明授权

EP2653892B1 Method for analyzing an EDS signal 有权
标题翻译：一种用于分析EDS信号的方法
公开(公告)号：EP2653892B1
公开(公告)日：2016-06-08
申请号：EP13164043.5
申请日：2013-04-17
申请人： FEI COMPANY
发明人： Kooijman, Cornelis , De Vos, Gert-Jan
IPC分类号： G01T1/17 , G01T1/36
CPC分类号： G06F17/18 , G01T1/16 , G01T1/17 , G01T1/36

5. 发明公开

EP2653892A3 Method for analyzing an EDS signal 有权
标题翻译：一种用于分析EDS信号的方法
公开(公告)号：EP2653892A3
公开(公告)日：2014-05-21
申请号：EP13164043.5
申请日：2013-04-17
申请人： FEI COMPANY
发明人： Kooijman, Cornelis , De Vos, Gert-Jan
IPC分类号： G01T1/17 , G01T1/36
CPC分类号： G06F17/18 , G01T1/16 , G01T1/17 , G01T1/36
摘要： The invention relates to a method for analyzing the output signal of a Silicon Drift Detector (SDD). A SDD is used for detecting X-rays in e.g. Scanning Electron Microscopes and X-ray analysis instruments, where X-rays are emitted by a sample as a result of impinging radiation.
The signal of a SDD comprises a number of randomly spaced steps, in which the step height is a function of the energy of the detected X-ray photon.
The variance in step height is a function of the averaging time that can be used to determine the plateau between steps: averaging over a short interval (405) results in more uncertainty of the plateau value than a long interval (403). As the step height relies on determination of the preceding plateau and the following plateau value, step heights (401, 402) have different reliabilities/variances. By according a weight factor, the weight factor a function of the variance such that a step with a low variance (high reliability) is associated with a larger weight factor than a step with a high variance (low reliability), measurement values with a low variance, corresponding to a high reliance, are emphasized. This results in better resolved spectra.

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