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1. 发明授权

EP1947675B1 Manipulator for rotating and translating a sample holder 有权
标题翻译：操纵器用于旋转和移动样品架
公开(公告)号：EP1947675B1
公开(公告)日：2009-03-25
申请号：EP08150440.9
申请日：2008-01-21
申请人： FEI COMPANY , The Regents of the University of California , Board of Trustees at the University of Illinois
发明人： Duden, Thomas , Schmid, Andreas , Petrov, Ivan , Donchev, Todor , Olson, Eric , Van de Water, Jeroen , Wagner, Raymond , Van den Oetelaar, Johannes , Bruggers, Jan Willem , Slingerland, Hendrik , Ottevanger, Adriaan
IPC分类号： H01J37/20 , B25J7/00 , G01N23/22 , G02B21/32 , H01L41/09
CPC分类号： H01J37/20 , B25J7/00 , B25J15/0004

2. 发明公开

EP1947675A1 Manipulator for rotating and translating a sample holder 有权
标题翻译：机械手zum Drehen und Verschieben eines Probenhalters
公开(公告)号：EP1947675A1
公开(公告)日：2008-07-23
申请号：EP08150440.9
申请日：2008-01-21
申请人： FEI COMPANY , The Regents of the University of California , BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
发明人： Duden, Thomas , Schmid, Andreas , Petrov, Ivan , Donchev, Todor , Olson, Eric , Van de Water, Jeroen , Wagner, Raymond , Van den Oetelaar, Johannes , Bruggers, Jan Willem , Slingerland, Hendrik , Ottevanger, Adriaan
IPC分类号： H01J37/20 , B25J7/00 , G01N23/22 , G02B21/32 , H01L41/09
CPC分类号： H01J37/20 , B25J7/00 , B25J15/0004
摘要： A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.
摘要翻译：用于例如机器人的操纵器。描述了透射电子显微镜（TEM），所述操纵器能够旋转和平移样品架（4）。操纵器将圆形样品保持器夹在两个构件（3A，3B）之间，所述构件安装在致动器（2A，2B）上。沿着相同的方向移动致动器导致样品架的平移，同时沿相反方向移动致动器导致样品架的旋转。

3. 发明公开

EP2131385A1 Hybrid phase plate 审中-公开
标题翻译： Hybridphasenplatte
公开(公告)号：EP2131385A1
公开(公告)日：2009-12-09
申请号：EP08157619.1
申请日：2008-06-05
申请人： FEI Company
发明人： Wagner, Raymond , Slingerland, Hendrik , Schuurmans, Frank , Tiemeijer, Peter
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J2237/2614
摘要： The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.
摘要翻译：本发明涉及用于TEM中的混合相位板。根据本发明的相位板类似于安装有Zernike相位板的Boersch相位板。结果，根据本发明的相位板类似于用于电子散射的Boersch相位板，使得它们通过中心结构（15）的外部，并且类似于通过中心结构的孔的散射电子的Zernike相位板。将本发明的相位板与Zernike相位板进行比较的优点在于，对于以大角度散射的电子，没有电子被箔吸收或散射，导致TEM具有更好的高分辨率性能。将本发明的相位板与Boersch相位板相比较，中心结构的小型化的要求不那么严格。

4. 发明公开

EP2131384A1 Hybrid phase plate 有权
标题翻译：混合相板
公开(公告)号：EP2131384A1
公开(公告)日：2009-12-09
申请号：EP09161890.0
申请日：2009-06-04
申请人： FEI COMPANY
发明人： Wagner, Raymond , Slingerland, Hendrik , Tiemeijer, Peter , Schuurmans, Frank
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J2237/2614
摘要： The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.
摘要翻译：本发明涉及用于TEM中的混合相位板。根据本发明的相位板类似于其中安装Zernike相位板的Boersch相位板。结果，根据本发明的相位板类似于Boersch相位板，用于电子散射的程度使得它们通过中心结构（15）的外部并且类似于通过中心结构的孔的散射电子的Zernike相位板。将本发明的相位板与Zernike相位板进行比较具有以下优点：对于散射大角度的电子，没有电子被箔片吸收或散射，从而导致TEM的更高的分辨率性能。比较本发明的相位板和Boersch相位板，中央结构小型化的要求不太严重。

5. 发明公开

EP1489642A1 Sample carrier for carrying a sample to be irradiated with an electron beam 审中-公开
标题翻译： Probenhalterfürelektronendurchstrahlten Proben
公开(公告)号：EP1489642A1
公开(公告)日：2004-12-22
申请号：EP04076678.4
申请日：2004-06-08
申请人： FEI Company
发明人： Wagner, Raymond , Water, Gerbert Jeroen van de
IPC分类号： H01J37/20
CPC分类号： H01J37/20
摘要： Sample carriers for use in Transmission Electron Microscopes (TEMs) and freely commercially available have the form of a gauze with a strengthening edge. The thickness of these known sample carriers is of the order of magnitude of 20 µm, and is uniform across the entire sample holder. The tiny thickness of these fragile sample carriers makes manipulation difficult. There is a desire to realize automatic introduction and removal of sample carriers in a TEM, seeing as this would make it possible to use the TEM continuously, without human intervention.
The invention describes a robust sample carrier whereby - both in the case of manual and automatic manipulation - deformation of and/or damage to the sample carrier is avoided. This is achieved by employing a strengthening edge portion 2 with a thickness 6 larger than the thickness 5 of the middle portion 1 of the sample carrier. The ability to use the sample carrier in analyses in which tilting is important is hereby not impeded.
摘要翻译：用于透射电子显微镜（TEM）的样品载体和可自由商购的样品载体具有加强边缘的纱布的形式。这些已知样品载体的厚度为20μm的数量级，并且在整个样品架上均匀。这些脆弱的样品载体的微小厚度使操作困难。期望在TEM中实现样品载体的自动引入和去除，因为这将使得可以连续使用TEM而无需人为干预。本发明描述了一种坚固的样品载体，其中 - 在手动和自动操作的情况下 - 避免了样品载体的变形和/或损坏。这是通过采用具有比样品载体的中间部分1的厚度5大的厚度6的加强边缘部分2来实现的。因此，在倾斜重要的分析中使用样品载体的能力不受阻碍。

6. 发明公开

EP2458617A1 Electron microscope with assistive locating apparatus 审中-公开
标题翻译： Elektronenmikroskop mitunterstützenderLokalisationvorrichtung
公开(公告)号：EP2458617A1
公开(公告)日：2012-05-30
申请号：EP10192319.1
申请日：2010-11-24
申请人： FEI Company
发明人： Knippels, Guido , Buijsse, Bart , De Jong, Frank , Wagner, Raymond
IPC分类号： H01J37/26 , H01J37/304 , H01J37/22 , H01J37/20
CPC分类号： H01J37/26 , H01J37/20 , H01J37/22 , H01J37/265 , H01J37/3045 , H01J2237/2002 , H01J2237/20292 , H01J2237/2445 , H01J2237/2482 , H01J2237/30438
摘要： An imaging apparatus comprising:
An imaging sub-assembly, in which an electron microscope is arranged to acquire an image of a sample that can be located in a sample holder, said image being acquired using an imaging beam that can be switched so as to
produce a flash of imaging electrons,

wherein the apparatus additionally comprises:
A locating sub-assembly, which does not employ electron microscopy, and which can be employed to determine a location of the sample relative to the imaging beam.
The field of detection of the locating sub-assembly may be substantially coincident with the field of view of the imaging sub-assembly, allowing concurrent locating/imaging of the sample. Alternatively, in the case of a moving sample caused to flow through the sample holder, said field of detection may be located "upstream" of said field of view, and a processor can be used to calculate the commencement time of an imaging flash using data that comprise the relative displacement of said fields and the velocity of the sample.
摘要翻译：一种成像装置，包括：成像子组件，其中布置电子显微镜以获取可位于样本保持器中的样本的图像，所述图像是使用能够切换的成像光束获取的，以便产生成像电子的闪光，其中该装置另外包括：定位子组件，其不使用电子显微镜，并且可用于确定样品相对于成像光束的位置。定位子组件的检测领域可以与成像子组件的视场基本一致，允许对样品进行同时定位/成像。或者，在移动的样本流过样本保持器的情况下，所述检测区域可以位于所述视场的“上游”，并且处理器可以用于使用数据来计算成像闪光灯的开始时间其包括所述场的相对位移和样品的速度。

7. 发明公开

EP1102304A3 Particle-optical apparatus including a low-temperature specimen holder 失效
标题翻译：用低温样品架粒子 - 光学设备
公开(公告)号：EP1102304A3
公开(公告)日：2006-05-31
申请号：EP01200763.9
申请日：1997-12-08
申请人： FEI COMPANY
发明人： Bormans, Bernardus Jacobus Marie , De Jong, Alan Frank , Van der Mast, Karel Diederick , Wagner, Raymond , Asselbergs, Peter Emile Stephan Joseph
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/2001
摘要： In an electron microscope it is sometimes important that specimens can be studied at a very low temperature (for example, that of liquid helium). In the case of known specimen holders the specimen is cooled by supplying the cooling medium via a bore in the specimen holder; this causes thermal drift of the removed specimen holder each time when a specimen is exchanged, and also an acoustic coupling (i.e. transfer of vibrations) exists with the dewar vessel connected to the specimen holder. In accordance with the invention, the specimen is arranged on the end 20 of the specimen holder 7 by means of a separate transport unit 13, 36 so that it is not necessary to remove the specimen holder 7 in order to exchange a specimen, with the result that the specimen holder is not heated. Moreover, the coupling to the cold source 22, 28 can take place via a flexible cooling conduit 30 which extends directly to the end 20 to be cooled and may be permanently connected thereto, thus avoiding the transfer of vibrations.

8. 发明公开

EP2381236A1 Apparatus for preparing a cryogenic TEM specimen 审中-公开
标题翻译： Vorrichtung zur Herstellung einer kryogenen TEM-Probe
公开(公告)号：EP2381236A1
公开(公告)日：2011-10-26
申请号：EP10160903.0
申请日：2010-04-23
申请人： FEI COMPANY , Maastricht Instruments B.V.
发明人： Smulders, Karin , Wagner, Raymond , Van de Water, Jeroen , Luecken, Uwe , Nijpels, Frank , Storms, Marc
IPC分类号： G01N1/42
CPC分类号： G01N1/42 , G01N1/2813
摘要： Apparatus (100) for preparing a cryogenic TEM specimen on a specimen carrier (102), the apparatus comprising a plunger (105), blotters (106 a , 106 b ), a container (108) for holding a cryogenic liquid (110), the plunger moving the specimen carrier to an applicator position for applying a liquid, blotting the specimen carrier, and plunging the specimen carrier in the cryogenic liquid. The apparatus is characterized in that it shows a first acceptor (114) for holding a first storage capsule (112) equipped to store one or more specimen carriers (126-i), the plunger is equipped with a gripper (104) for gripping the specimen carrier; a second acceptor (118) for holding a second storage capsule (116) at a cryogenic temperature to store one or more specimen carriers (128-i) at a cryogenic temperature; and the apparatus is equipped to move the specimen carrier automatically from the first storage capsule via the applicator position and the blotting position to the second storage capsule.
摘要翻译：用于在试样载体（102）上制备低温TEM样品的装置（100），该装置包括柱塞（105），吸墨纸（106a，106b），用于保持低温液体的容器（108）柱塞将样品载体移动到施加位置以施加液体，印迹样品载体，并将样品载体插入低温液体中。该装置的特征在于，其示出了用于保持装备有存储一个或多个样本载体（126-i）的第一储存胶囊（112）的第一受体（114），柱塞配备有夹持器（104）标本载体用于在低温下保持第二储存胶囊（116）以在低温下存储一个或多个样本载体（128-i）的第二受体（118）并且该装置被配备为将样品载体从第一储存胶囊经由施用器位置和吸印位置自动移动到第二储存胶囊。

9. 发明授权

EP2131384B1 Hybrid phase plate 有权
标题翻译： Hybridphasenplatte
公开(公告)号：EP2131384B1
公开(公告)日：2011-05-25
申请号：EP09161890.0
申请日：2009-06-04
申请人： FEI COMPANY
发明人： Wagner, Raymond , Slingerland, Hendrik , Tiemeijer, Peter , Schuurmans, Frank
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J2237/2614

10. 发明授权

EP1102304B1 Particle-optical apparatus including a low-temperature specimen holder 失效
标题翻译：用低温样品架粒子 - 光学设备
公开(公告)号：EP1102304B1
公开(公告)日：2010-02-24
申请号：EP01200763.9
申请日：1997-12-08
申请人： FEI COMPANY
发明人： Bormans, Bernardus Jacobus Marie , De Jong, Alan Frank , Van der Mast, Karel Diederick , Wagner, Raymond , Asselbergs, Peter Emile Stephan Joseph
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/2001

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