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1. 发明授权

EP3249676B1 DUAL-BEAM CHARGED-PARTICLE MICROSCOPE WITH IN SITU DEPOSITION FUNCTIONALITY 有权
公开(公告)号：EP3249676B1
公开(公告)日：2018-10-03
申请号：EP16171645.1
申请日：2016-05-27
申请人： FEI Company
发明人： Mitchels, John , Schampers, Ruud , Hrouzek, Michal , Gardelka, Tomas
IPC分类号： H01J37/28 , H01J37/34 , C23C14/35
CPC分类号： H01J37/3405 , C23C14/35 , H01J37/06 , H01J37/08 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/32623 , H01J37/3464 , H01J2237/3137
摘要： A charged-particle microscope M, comprising a vacuum chamber in which are provided: - A specimen holder 7 for holding a specimen in an irradiation position Pi; - A particle-optical column 1;31, for producing a charged particle beam 3';33 and directing it so as to irradiate the specimen; - A detector 19, for detecting a flux of radiation emanating from the specimen in response to irradiation by said beam, wherein: - Said vacuum chamber comprises an in situ magnetron sputter deposition module D, comprising a magnetron sputter source for producing a vapor stream of target material; - A stage 7,7' is configured to move a sample comprising at least part of said specimen between said irradiation position and a separate deposition position Pd at said deposition module; - Said deposition module is configured to deposit a layer of said target material onto said sample when held at said deposition position.

2. 发明公开

EP1879011A3 Method for separating a minute sample from a work piece 有权
标题翻译：一种用于分离的工件的一个小样本方法
公开(公告)号：EP1879011A3
公开(公告)日：2009-09-02
申请号：EP07112014.1
申请日：2007-07-09
申请人： FEI COMPANY
发明人： Schampers, Ruud , Verkleij, Dick , Venema, Sjoerd
IPC分类号： G01N1/28 , H01J37/305 , H01J37/31 , G01N1/32 , G01N1/06
CPC分类号： H01J37/3056 , G01N1/06 , G01N1/286 , G01N1/32 , H01J2237/31732 , H01J2237/31745
摘要： The invention pertains to a method for separating a minute sample (1) from a work piece (2). Such a method is routinely used in the semiconductor industry to obtain samples from wafers to be inspected in a TEM. It occurred to the inventor that approximately 20% of the obtained samples could not be properly finished (thinned) due to a misalignment of specimen carrier (6) and sample. It turned out that this misalignment is caused by the specimen carrier contacting the sample prior to welding. By not contacting the sample while welding, but leaving a small gap between specimen carrier and sample, this misalignment is avoided. To avoid movement of the specimen carrier during welding, due to e.g. vibration, the specimen carrier can be landed on the wafer on a position (8) close to the sample.

3. 发明授权

EP2626886B1 Forming a vitrified sample for an electron microscopy 有权
标题翻译： Proenfürein Elektronenmikroskop的Formen einer schockgefrorenen
公开(公告)号：EP2626886B1
公开(公告)日：2017-04-05
申请号：EP13154508.9
申请日：2013-02-08
申请人： FEI COMPANY
发明人： Mulders, Johannes , Schampers, Ruud , Piet, Trompenaars
IPC分类号： H01J37/28 , G01N1/42
CPC分类号： H01J37/28 , G01N1/42 , H01J2237/006 , H01J2237/31745

4. 发明授权

EP2685234B1 Forming an electron microscope sample from high-pressure frozen material 有权
标题翻译：形成高压的冷冻材料的电子显微镜的样品
公开(公告)号：EP2685234B1
公开(公告)日：2014-12-17
申请号：EP13176233.8
申请日：2013-07-12
申请人： FEI COMPANY
发明人： Schampers, Ruud , Hayles, Michael , De Winter, Matthijs , Schneijdenberg, Chris
IPC分类号： G01N1/42 , G01N1/28
CPC分类号： B23K15/08 , G01N1/06 , G01N1/42 , G01N2001/2873

5. 发明公开

EP2765591A1 Sample preparation stage 有权
标题翻译： Probenvorbereitungshalter
公开(公告)号：EP2765591A1
公开(公告)日：2014-08-13
申请号：EP13154537.8
申请日：2013-02-08
申请人： FEI Company
发明人： Persoon, Johannes , Van den Boogaard, Ron , Engelen, Andreas , Schampers, Ruud , Hayles, Michael
IPC分类号： H01J37/20 , G01N1/06
CPC分类号： H01J37/20 , G01N2001/2873 , H01J37/3056 , H01J2237/2001 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/31745
摘要： Described is a system and method for in situ sample preparation and imaging. The system includes a multi-axis stage 100 having a bulk stage 110 and a grid stage 150 with various degrees of freedom to allow for sample preparation. In some embodiments, a focused ion beam system is used to prepare a lamella on the bulk stage 110. The lamella can then be transferred to the grid stage 150 from the bulk stage 110 without needing to move the multi-axis stage 100 from the focused ion beam system.
摘要翻译：描述了用于原位样品制备和成像的系统和方法。该系统包括具有大块台110和具有不同自由度以允许样品制备的网格台150的多轴台100。在一些实施例中，使用聚焦离子束系统来在体台110上制备薄片。然后可以将薄片从大体积台110转移到网格台150，而不需要将多轴台100从聚焦离子束系统。

6. 发明公开

EP3249676A1 CHARGED-PARTICLE MICROSCOPE WITH IN SITU DEPOSITION FUNCTIONALITY 有权
标题翻译：具有原位沉积功能的带电粒子显微镜
公开(公告)号：EP3249676A1
公开(公告)日：2017-11-29
申请号：EP16171645.1
申请日：2016-05-27
申请人： FEI Company
发明人： Mitchels, John , Schampers, Ruud , Hrouzek, Michal , Gardelka, Tomas
IPC分类号： H01J37/28 , H01J37/34 , C23C14/35
CPC分类号： H01J37/3405 , C23C14/35 , H01J37/06 , H01J37/08 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/32623 , H01J37/3464 , H01J2237/3137
摘要： A charged-particle microscope M, comprising a vacuum chamber in which are provided:
- A specimen holder 7 for holding a specimen in an irradiation position Pi;
- A particle-optical column 1;31, for producing a charged particle beam 3';33 and directing it so as to irradiate the specimen;
- A detector 19, for detecting a flux of radiation emanating from the specimen in response to irradiation by said beam,
wherein:
- Said vacuum chamber comprises an in situ magnetron sputter deposition module D, comprising a magnetron sputter source for producing a vapor stream of target material;
- A stage 7,7' is configured to move a sample comprising at least part of said specimen between said irradiation position and a separate deposition position Pd at said deposition module;
- Said deposition module is configured to deposit a layer of said target material onto said sample when held at said deposition position.
摘要翻译：一个带电粒子显微镜M，包括一个真空室，在其中提供： - 样品架7，用于将样品保持在照射位置Pi; - 用于产生带电粒子束3'的粒子光学镜筒1; 31;并引导它以照射样品; - 检测器19，用于检测响应于所述束照射而从样本发出的辐射通量，其中： - 所述真空室包括原位磁控溅射沉积模块D，其包括磁控溅射源，用于产生目标材料; - 阶段7,7'被配置为在所述沉积模块处将包括所述样本的至少一部分的样本移动到所述照射位置和单独的沉积位置Pd之间; 所述沉积模块被配置成当被保持在所述沉积位置时将所述靶材料层沉积到所述样品上。

7. 发明公开

EP2626886A3 Forming a vitrified sample for an electron microscopy 有权
标题翻译：形成用于电子显微镜的冲击冷冻样品
公开(公告)号：EP2626886A3
公开(公告)日：2016-03-30
申请号：EP13154508.9
申请日：2013-02-08
申请人： FEI COMPANY
发明人： Mulders, Johannes , Schampers, Ruud , Piet, Trompenaars
IPC分类号： H01J37/28 , G01N1/42
CPC分类号： H01J37/28 , G01N1/42 , H01J2237/006 , H01J2237/31745
摘要： The invention relates to a method of forming a vitrified sample on a sample holder (112) for inspection in an electron microscope (100, 106). It is known to spray a solution on a grid and then immerse the grid in a cryogenic liquid, such as ethane or liquid nitrogen. The invention proposes to spray (via 118) small droplets of the liquid on a cryogenic surface (112), such as a grid or a sample holder in vacuum. The liquid forms vitrified sample material (200, 202) when hitting the surface due to the low temperature of the grid or sample holder.
A lamella may be excavated from the thus formed sample material, to be studied in a TEM, or the vitrified sample material may be directly observed in a SEM. In an embodiment the material may be sprayed on a cryogenic liquid, to be scooped from the liquid and placed on a grid.

8. 发明授权

EP2367195B1 Measurement and endpointing of sample thickness 有权
标题翻译：测量样品的厚度和Endpunkbestimmung
公开(公告)号：EP2367195B1
公开(公告)日：2014-03-12
申请号：EP11165381.2
申请日：2009-11-02
申请人： FEI Company
发明人： Young, Richard , Peterson, Brennan , Moriarty, Michael , Schampers, Ruud
IPC分类号： H01J37/304 , H01J37/305 , G01N1/28
CPC分类号： H01J37/3056 , G01N1/286 , H01J37/304 , H01J2237/24455 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749

9. 发明公开

EP2367195A3 Measurement and endpointing of sample thickness 有权
标题翻译：测量样品的厚度和Endpunkbestimmung
公开(公告)号：EP2367195A3
公开(公告)日：2012-11-21
申请号：EP11165381.2
申请日：2009-11-02
申请人： FEI Company
发明人： Young, Richard , Peterson, Brennan , Moriarty, Michael , Schampers, Ruud
IPC分类号： H01J37/304 , H01J37/305 , G01N1/28
CPC分类号： H01J37/3056 , G01N1/286 , H01J37/304 , H01J2237/24455 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749
摘要： An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.

10. 发明公开

EP2367195A2 Measurement and endpointing of sample thickness 有权
标题翻译： Messung der Probendicke und Endpunkbestimmung
公开(公告)号：EP2367195A2
公开(公告)日：2011-09-21
申请号：EP11165381.2
申请日：2009-11-02
申请人： FEI Company
发明人： Young, Richard , Peterson, Brennan , Moriarty, Michael , Schampers, Ruud
IPC分类号： H01J37/304 , H01J37/305 , G01N1/28
CPC分类号： H01J37/3056 , G01N1/286 , H01J37/304 , H01J2237/24455 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749
摘要： An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.
摘要翻译：一种改进的TEM样品创建方法。在双光束FIB / SEM中使用SEM-STEM检测器允许使用FIB对样品进行稀释，而STEM信号用于监测样品厚度。本发明的一个优选实施例可以通过使用可重复且适合自动化的精确终点检测方法来测量S / TEM样品的厚度或产生S / TEM样品。优选实施例还可以在TEM薄片创建期间实现自动终点，并且在手动稀疏期间向用户提供关于样品厚度的直接反馈。因此，本发明的优选实施例提供了用于终止样品稀释的改进方法以及部分或全部自动化终点以提高TEM样品产生的生产量和再现性的方法。

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