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    • 7. 发明公开
    • Integrated circuit package with cap and device of the same material
    • 包具有盖和相同的材料的装置的集成电路。
    • EP0431261A1
    • 1991-06-12
    • EP90115893.1
    • 1990-08-20
    • International Business Machines Corporation
    • Bregman, Mark FieldingHorton, Robert RaymondNoyan, Ismail CevdetPalmer, Michael Jon
    • H01L23/04H01L23/06H01L23/14H01L21/52
    • H01L21/4803H01L23/04H01L23/06H01L23/147H01L2924/0002H01L2924/01079H01L2924/00
    • A thermally matched integrated circuit package comprising a semiconductor substrate; at least one semiconductor electronic device mounted on said substrate; means for providing electrical connections to said at least one semiconductor electronic device and to said substrate; and a semiconductor cap, disposed over said at least one device, wherein the cap is directly attached to said substrate and further wherein said substrate, said at least one device, and said cap are all formed from the same semiconductor material to assure no thermal mismatch therebetween. The cap comprises at least one cavity which is disposed over at least one semiconductor electronic device. The cap may be fabricated utilizing anisotropic etching techniques or via electro-discharge machining. Hermetically sealed and nonhermetically sealed caps are both contemplated, as well as a grooved cap having an increased surface area to enhance its inherent cooling capacity. The invention is well suited to enhancing the performance of large scale multichip carrier modules.
    • 热匹配的集成电路封装,包括:半导体衬底; 在安装在所述基板的至少一个半导体电子器件; 装置,用于提供到所述的电连接的至少一个半导体电子器件和所述的底物; 和半导体帽,设置在所述至少一个设备,worin盖被直接附连到所述基板,此外worin所述基板,所述至少一个设备,并且所述帽都是从相同的半导体材料形成,以确保没有热失配 有间。 帽包括至少一个腔,其全部被设置在至少一个半导体电子器件。 该盖可以制造利用各向异性蚀刻技术或通过放电加工。 密封和密封nonhermetically帽都是预期的,以及在增加的表面积具有以提高其内在的冷却能力的开槽帽。 本发明非常适合于提高的大规模多芯片载体模块的性能。