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1. 发明授权

US06515491B1 Structural body having a stochastic surface patterning as well as a capacitive sensor having such a structural body 有权
标题翻译：具有随机表面图案化的结构体以及具有这种结构体的电容传感器
公开(公告)号：US06515491B1
公开(公告)日：2003-02-04
申请号：US09569212
申请日：2000-05-11
申请人： Michael Kupzig , Andrea Schilp , Karsten Funk
发明人： Michael Kupzig , Andrea Schilp , Karsten Funk
IPC分类号： G01R2726
CPC分类号： G01N27/221 , G01N27/226 , G01R27/2605
摘要： A structural body which, at least region-wise, has at least one area which is in contact with a liquid or a gas flowing past, and which, at least to a great extent, is provided with a surface patterning made of a plurality of randomly or irregularly distributed geometric forms, in particular pyramids. At least one such structural body be used in a capacitive sensor with which, in particular, the dielectric constants or the conductance of a liquid or a gas can be determined.
摘要翻译：至少在区域上具有与液体或流过的气体接触的至少一个区域的结构体，并且至少在很大程度上具有由多个区域形成的表面图案随机或不规则分布的几何形式，特别是金字塔。在电容式传感器中至少使用一个这样的结构体，尤其可以确定液体或气体的介电常数或电导率。

2. 发明授权

US06062082A Micromechanical acceleration or coriolis rotation-rate sensor 失效
标题翻译：微机械加速度或科里奥利旋转速率传感器
公开(公告)号：US06062082A
公开(公告)日：2000-05-16
申请号：US913598
申请日：1997-09-18
申请人： Gero Guenther , Karsten Funk , Franz Laermer , Andrea Schilp
发明人： Gero Guenther , Karsten Funk , Franz Laermer , Andrea Schilp
IPC分类号： G01C19/5712 , G01P15/14 , G01P15/08 , G01P9/04
CPC分类号： G01C19/5712
摘要： An acceleration sensor, particularly a Coriolis rotation-rate sensor, having a swinging structure that is movably suspended on a substrate (base) and can be deflected due to an acceleration effect, the sensor further having an arrangement for generating a planar swinging movement of the swinging structure, particularly a rotational swinging movement, and an evaluating arrangement for detecting a deflection of the swinging structure that is stipulated by acceleration, particularly for detecting a Coriolis acceleration. The swinging structure (12) is rotatably suspended so as to perform a planar swinging movement, and should perform a planar, rotational swinging movement.
摘要翻译： PCT No.PCT / DE96 / 00248 Sec。 371日期：1997年9月18日 102（e）1997年9月18日PCT PCT 1996年2月17日PCT公布。出版物WO97 / 02467 日期1997年1月23日具有摆动结构的加速度传感器，特别是科里奥利旋转速率传感器，其可移动地悬挂在基板（基座）上并且可由于加速效应而偏转，该传感器还具有用于产生摆动结构的平面摆动运动，特别是旋转摆动运动，以及用于检测由加速度规定的摆动结构的偏转的评估装置，特别是用于检测科里奥利加速度。摆动结构（12）可旋转地悬挂以便进行平面摆动，并且应该进行平面旋转摆动。

3. 发明授权

US6012341A Force sensor having an adjustable distance between an operating point and a point of mechanical instability 有权
标题翻译：力传感器在工作点和机械不稳定点之间具有可调节的距离
公开(公告)号：US6012341A
公开(公告)日：2000-01-11
申请号：US91315
申请日：1998-09-23
申请人： Karsten Funk , Hans-Martin Kulcke , Franz Laermer , Werner Uhler , Andrea Schilp
发明人： Karsten Funk , Hans-Martin Kulcke , Franz Laermer , Werner Uhler , Andrea Schilp
IPC分类号： G01L1/10 , G01L9/00 , G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01L1/10 , G01L9/0008
摘要： A force sensor, especially an acceleration sensor or a pressure sensor, has a structure that vibrates in resonance, and its oscillation frequency is variable due to an acting force which is to be detected. The distance of an operating point of the force sensor from the point of its mechanical instability can be adjusted by applying an electric voltage.
摘要翻译： PCT No.PCT / DE96 / 02070 Sec。 371日期：1998年9月23日 102（e）1998年9月23日PCT PCT 1996年10月31日PCT公布。公开号WO97 / 22864 日期：1997年6月26日力传感器，特别是加速度传感器或压力传感器具有振动的结构，其振动频率由于待检测的作用力而变化。可以通过施加电压来调节力传感器的操作点与其机械不稳定性的距离。

4. 发明授权

US06324910B1 Method and device for measuring a physical variable 有权
标题翻译：用于测量物理变量的方法和装置
公开(公告)号：US06324910B1
公开(公告)日：2001-12-04
申请号：US09284907
申请日：1999-06-22
申请人： Karsten Funk , Hans-Martin Kulcke , Franz Laermer , Andrea Schilp
发明人： Karsten Funk , Hans-Martin Kulcke , Franz Laermer , Andrea Schilp
IPC分类号： G01H1300
CPC分类号： G01P15/097 , G01C19/5726 , G01P2015/0814
摘要： A method for measuring a physical variable in which a structure is put in resonant oscillations and a change in the oscillation frequency of the structure as a result of a change in the physical variable to be measured is detected, and a frequency-analog signal is provided. A structure oscillating with a resonance frequency receives an electrostatic force.
摘要翻译：检测结构被置于共振振荡中的物理变量的测量方法以及由待测物理变化引起的结构振荡频率的变化的方法，并提供频率模拟信号。以共振频率振荡的结构接收静电力。

5. 发明授权

US6030850A Method for manufacturing a sensor 失效
标题翻译：制造传感器的方法
公开(公告)号：US6030850A
公开(公告)日：2000-02-29
申请号：US030414
申请日：1998-02-25
申请人： Juergen Kurle , Karsten Funk , Franz Laermer , Michael Offenberg , Andrea Schilp
发明人： Juergen Kurle , Karsten Funk , Franz Laermer , Michael Offenberg , Andrea Schilp
IPC分类号： G01L1/18 , B81B3/00 , B81C1/00 , G01P15/08 , G01P15/125 , H01L29/84 , G01L1/00 , H01L21/461
CPC分类号： B81B7/007 , B81C1/0019 , G01P15/0802 , G01P15/125 , B81B2201/0235 , B81B2203/033 , B81C2201/0136 , B81C2203/0118 , G01P2015/0814
摘要： In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
摘要翻译：在传感器和制造传感器的方法中，可移动元件被图案化为硅层并固定到基底。导电层被细分成彼此电绝缘的各个区域。通过布置在第一和第二绝缘层之间的导电层来建立硅层的各个区域之间的电连接。

6. 发明授权

US5756901A Sensor and method for manufacturing a sensor 失效
标题翻译：用于制造传感器的传感器和方法
公开(公告)号：US5756901A
公开(公告)日：1998-05-26
申请号：US718603
申请日：1996-09-24
申请人： Juergen Kurle , Karsten Funk , Franz Laermer , Michael Offenberg , Andrea Schilp
发明人： Juergen Kurle , Karsten Funk , Franz Laermer , Michael Offenberg , Andrea Schilp
IPC分类号： G01L1/18 , B81B3/00 , B81C1/00 , G01P15/08 , G01P15/125 , H01L29/84 , G01L1/00
CPC分类号： B81B7/007 , B81C1/0019 , G01P15/0802 , G01P15/125 , B81B2201/0235 , B81B2203/033 , B81C2201/0136 , B81C2203/0118 , G01P2015/0814
摘要： In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
摘要翻译：在传感器和制造传感器的方法中，可移动元件被图案化为硅层并固定到基底。导电层被细分成彼此电绝缘的各个区域。通过布置在第一和第二绝缘层之间的导电层来建立硅层的各个区域之间的电连接。

7. 发明授权

US07335971B2 Method for protecting encapsulated sensor structures using stack packaging 有权
公开(公告)号：US07335971B2
公开(公告)日：2008-02-26
申请号：US10404567
申请日：2003-03-31
申请人： Karsten Funk
发明人： Karsten Funk
IPC分类号： H01L23/02
CPC分类号： B81C1/00333 , B81B2207/095 , B81C2203/0136 , G01P1/023 , G01P15/125 , G01P15/18 , G01P2015/0814 , H01L2224/05554 , H01L2224/16145 , H01L2224/48091 , H01L2224/48137 , H01L2224/48247 , H01L2224/48465 , H01L2224/49171 , H01L2924/181 , H01L2924/00012 , H01L2924/00014 , H01L2924/00
摘要： A method of protecting a micro-mechanical sensor structure embedded in a micro-mechanical sensor chip, in which the micro-mechanical sensor structure is fabricated with a protective membrane, the micro-mechanical sensor chip is arranged so that a surface of the protective membrane faces toward a second chip, and the micro-mechanical sensor chip is secured to the second chip.

8. 发明授权

US07307521B2 Secure method and apparatus for retrieving network node identifier in wireless networks 有权
标题翻译：用于在无线网络中检索网络节点标识符的安全方法和装置
公开(公告)号：US07307521B2
公开(公告)日：2007-12-11
申请号：US11077631
申请日：2005-03-10
申请人： Karsten Funk , Bhaskar Srinivasan
发明人： Karsten Funk , Bhaskar Srinivasan
IPC分类号： G08B1/08 , H04Q7/00
CPC分类号： H04L29/12254 , G01N33/0073 , H04B5/0043 , H04B5/02 , H04L29/12783 , H04L61/2038 , H04L61/35 , H04L67/02 , H04L67/04 , H04L69/329
摘要： A sensor node arrangement in a wireless network, includes a sensor to sense information, an RF transceiver to communicate the information to at least one element of the wireless network, and a coil to establish a secondary communications channel with a handheld device via inductive coupling, the secondary communications channel used, for example, to receive, during installation of the sensor node arrangement, a node identifier of the sensor node arrangement.
摘要翻译：无线网络中的传感器节点布置包括感测信息的传感器，将RF信息传送到无线网络的至少一个元件的RF收发器以及通过电感耦合与手持设备建立辅助通信信道的线圈，例如，在安装传感器节点装置期间使用的辅助通信信道是传感器节点装置的节点标识符。

9. 发明授权

US06705164B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US06705164B2
公开(公告)日：2004-03-16
申请号：US10258336
申请日：2003-03-19
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01C1900
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
摘要翻译：一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。

10. 发明授权

US06672732B1 Micromechanical oscillating device 有权
标题翻译：微机械振荡装置
公开(公告)号：US06672732B1
公开(公告)日：2004-01-06
申请号：US10070054
申请日：2002-07-17
申请人： Andreas Niendorf , Wilhelm Frey , Karsten Funk
发明人： Andreas Niendorf , Wilhelm Frey , Karsten Funk
IPC分类号： G02B7182
CPC分类号： G02B26/0841
摘要： A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsion axis and permitting a torsional vibration about the torsion axis to be induced in the vibrating structure, the spring structure also including at least one converter structure, which at least partially converts forces acting at least largely perpendicularly to the torsion axis on the torsion spring element into forces acting at least partially parallelly to the torsion axis on the torsion-spring element.
摘要翻译：振动微型装置，例如振动微镜，包括振动结构，所述振动结构经由至少一个弹簧结构以至少大体上浮动的方式连接到支撑体，所述弹簧结构包括至少一个限定扭转的扭簧元件所述弹簧结构还包括至少一个转换器结构，所述至少一个转换器结构至少部分地将至少大部分地垂直于所述扭转轴线上的力作用力转换成所述扭转弹簧元件上的扭转轴线至少部分地平行于扭转弹簧元件上的扭转轴线作用的力。

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