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1. 发明授权

US06672732B1 Micromechanical oscillating device 有权
标题翻译：微机械振荡装置
公开(公告)号：US06672732B1
公开(公告)日：2004-01-06
申请号：US10070054
申请日：2002-07-17
申请人： Andreas Niendorf , Wilhelm Frey , Karsten Funk
发明人： Andreas Niendorf , Wilhelm Frey , Karsten Funk
IPC分类号： G02B7182
CPC分类号： G02B26/0841
摘要： A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsion axis and permitting a torsional vibration about the torsion axis to be induced in the vibrating structure, the spring structure also including at least one converter structure, which at least partially converts forces acting at least largely perpendicularly to the torsion axis on the torsion spring element into forces acting at least partially parallelly to the torsion axis on the torsion-spring element.
摘要翻译：振动微型装置，例如振动微镜，包括振动结构，所述振动结构经由至少一个弹簧结构以至少大体上浮动的方式连接到支撑体，所述弹簧结构包括至少一个限定扭转的扭簧元件所述弹簧结构还包括至少一个转换器结构，所述至少一个转换器结构至少部分地将至少大部分地垂直于所述扭转轴线上的力作用力转换成所述扭转弹簧元件上的扭转轴线至少部分地平行于扭转弹簧元件上的扭转轴线作用的力。

2. 发明授权

US06749308B1 Micromirror 有权
标题翻译：微镜
公开(公告)号：US06749308B1
公开(公告)日：2004-06-15
申请号：US10169247
申请日：2003-03-03
申请人： Andreas Niendorf , Karsten Funk
发明人： Andreas Niendorf , Karsten Funk
IPC分类号： G02B7182
CPC分类号： G02B26/085 , B81B3/004 , B81B2201/042 , B81B2203/0181 , B81B2203/058 , G02B26/0841 , Y10S359/904
摘要： A micromirror (5), a micro-oscillating mirror in particular, having an at least largely cantilevered mirror surface (10) which may be displaced from the rest position about at least one torsional axis (17) is described. The mirror surface (10) is linked to at least one support body (11, 12) by at least two torsion beams (13, 13′), which are arranged at least approximately parallel to each other. Also described is the displacement of the micrometer from its rest position by an electrostatic or magnetic interaction.
摘要翻译：描述了微镜（5），特别是微振荡反射镜，其具有至少大体上悬臂的反射镜表面（10），其可以围绕至少一个扭转轴线（17）从静止位置移位。镜面（10）通过至少两个扭转梁（13,13'）连接到至少一个支撑体（11,12），所述至少两个扭转梁（13,13'）被布置成彼此至少近似平行。还描述了千分尺从其静止位置通过静电或磁相互作用的位移。

3. 发明申请

US20080180821A1 Apparatus, method and system for providing enhanced mechanical protection of thin beams 审中-公开
标题翻译：用于提供增强的薄梁机械保护的装置，方法和系统
公开(公告)号：US20080180821A1
公开(公告)日：2008-07-31
申请号：US12009875
申请日：2008-01-22
申请人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
发明人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
IPC分类号： G02B7/182
CPC分类号： G02B26/0833 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/058
摘要： An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to the micro-mechanical beam.
摘要翻译：用于微机械梁的布置包括支撑结构，以提供微机械梁的弯曲刚度的增加，而不显着影响扭转刚度，其中支撑结构被配置为直接附接到微机械梁。

4. 发明授权

US06856067B2 Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor 有权
标题翻译：用于静电悬浮盘的装置和方法以及使用静电悬浮盘作为传感器的方法
公开(公告)号：US06856067B2
公开(公告)日：2005-02-15
申请号：US10371809
申请日：2003-02-21
申请人： Wilhelm Frey , Zhiyu Pan , Andreas Niendorf
发明人： Wilhelm Frey , Zhiyu Pan , Andreas Niendorf
IPC分类号： G01C19/00 , G01P15/00 , G01P15/125 , G01P15/13 , H02N1/08 , H02N15/00 , H02N1/00
CPC分类号： H02N15/00 , G01C19/00 , G01P15/00 , G01P15/125 , G01P15/131 , H02N1/08
摘要： A device for levitating a disk including three bottom electrodes situated below the disk and equidistantly around a top circle and three top electrodes situated above the disk, opposite the three bottom electrodes, and situated equidistantly around a bottom circle. Two bottom reference electrodes are situated below the disk, a first bottom reference electrode forming a bottom inner circle on a bottom inner perimeter of the set of three bottom electrodes, a second bottom reference electrode forming a bottom outer circle on a bottom outer perimeter of the set of three bottom electrodes. Two top reference electrodes are situated above the disk, a first top reference electrode forming a top inner circle on a top inner perimeter of the set of three top electrodes, a second top reference electrode forming a top outer circle on a top outer perimeter of the set of three top electrodes. A drive circuit for driving the three bottom electrodes, the three top electrodes, the two bottom reference electrodes, and the two top reference electrodes. A method of levitating a disk includes applying a first plurality of voltages to three bottom electrodes situated below the disk. A second plurality of voltages is applied to three top electrodes situated above the disk and opposite the three bottom electrodes. A third plurality of voltages is applied to two bottom reference electrodes situated below the disk. A fourth plurality of voltages is applied to two top reference electrodes situated above the disk. A fifth plurality of voltages may be applied to side electrodes to rotate the disk.
摘要翻译：一种用于悬浮盘的装置，包括位于盘下方等距离地围绕圆顶的三个底部电极和位于盘的上方的三个顶部电极，与三个底部电极相对，并且等距离地设置在底部圆周周围。两个底部参考电极位于盘的下方，第一底部参考电极在三个底部电极组的底部内周边上形成底部内圆周，第二底部参考电极在第二底部参考电极的底部外周上形成底部外部圆周一组三个底部电极。两个顶部参考电极位于盘的上方，第一顶部参考电极在三个顶部电极组的顶部内周边上形成顶部内圆周;第二顶部参考电极，其在顶部外圆周上形成顶部外圆周一组三个顶部电极。用于驱动三个底部电极，三个顶部电极，两个底部参考电极和两个顶部参考电极的驱动电路。悬浮盘的方法包括将第一多个电压施加到位于盘下方的三个底部电极。将第二组多个电压施加到位于盘上方并与三个底部电极相对的三个顶部电极。第三组电压施加到位于盘下方的两个底部参考电极。将第四多个电压施加到位于盘上方的两个顶部参考电极。可以将第五多个电压施加到侧电极以使盘旋转。

5. 发明授权

US07342703B2 Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action 有权
标题翻译：微机械梁保护支撑结构，其中至少两个相邻的支撑结构在达到预定弯曲作用时彼此接触
公开(公告)号：US07342703B2
公开(公告)日：2008-03-11
申请号：US11698684
申请日：2007-01-26
申请人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
发明人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
IPC分类号： G02B26/08 , G02B7/182
CPC分类号： G02B26/0833 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/058
摘要： An arrangement for use with a micro-mechanical beam, in which a plurality of support structures are configured to directly attach to the micro-mechanical beam to increase bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness. At least two of the support structures are arranged to touch each upon reaching a predetermined bending action of the micro-mechanical beam and prevent a further bending action of the micro-mechanical beam, and at least two of the support structures are non-identical.
摘要翻译：一种与微机械梁一起使用的装置，其中多个支撑结构构造成直接附接到微机械梁，以增加微机械梁的弯曲刚度，而不显着影响扭转刚度。至少两个支撑结构被布置成在达到微机械梁的预定弯曲作用时接触每个支撑结构，并且防止微机械梁进一步的弯曲作用，并且至少两个支撑结构不相同。

6. 发明申请

US20070121229A1 Apparatus, method and system for providing enhanced mechanical protection for thin beams 有权
标题翻译：用于为薄梁提供增强的机械保护的装置，方法和系统
公开(公告)号：US20070121229A1
公开(公告)日：2007-05-31
申请号：US11698684
申请日：2007-01-26
申请人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
发明人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
IPC分类号： G02B7/182
CPC分类号： G02B26/0833 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/058
摘要： An arrangement for use with a micro-mechanical beam, in which a plurality of support structures are configured to directly attach to the micro-mechanical beam to increase bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness. At least two of the support structures are arranged to touch each upon reaching a predetermined bending action of the micro-mechanical beam and prevent a further bending action of the micro-mechanical beam, and at least two of the support structures are non-identical.
摘要翻译：一种与微机械梁一起使用的装置，其中多个支撑结构构造成直接附接到微机械梁，以增加微机械梁的弯曲刚度，而不显着影响扭转刚度。至少两个支撑结构被布置成在达到微机械梁的预定弯曲作用时接触每个支撑结构，并且防止微机械梁进一步的弯曲作用，并且至少两个支撑结构不相同。

7. 发明授权

US07177068B2 Apparatus, method and system for providing enhanced mechanical protection for thin beams 有权
标题翻译：用于为薄梁提供增强的机械保护的装置，方法和系统
公开(公告)号：US07177068B2
公开(公告)日：2007-02-13
申请号：US10327532
申请日：2002-12-20
申请人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
发明人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/058
摘要： An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to the micro-mechanical beam.
摘要翻译：用于微机械梁的布置包括支撑结构，以提供微机械梁的弯曲刚度的增加，而不显着影响扭转刚度，其中支撑结构被配置为直接附接到微机械梁。

8. 发明授权

US06895818B2 Differential in-plane tunneling current sensor 有权
标题翻译：差分平面内隧道电流传感器
公开(公告)号：US06895818B2
公开(公告)日：2005-05-24
申请号：US10327273
申请日：2002-12-20
申请人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
发明人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
IPC分类号： G01P15/08 , G01P15/18 , G01Q10/00 , G01Q20/04
CPC分类号： G01P15/0894 , G01P15/0888 , G01P15/18
摘要： A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof mass body, and at least one external electrode tip arranged externally to the proof mass body and suspended by micro-mechanical beams to permit an external electrode movement, the at least one external electrode tip further arranged to be in a close proximity to the at least one integrated electrode tip to permit a flow of the tunneling current between the at least one external electrode tip and the at least one integrated electrode tip, in which the displacement of the proof mass causes a change in the tunneling current.
摘要翻译：用于测量使用隧道电流的检测质量块的位移的传感器装置包括由微机械梁悬挂以允许质量体运动的检测质量体，至少一个与检验质量体一体化的集成电极末端，以及至少一个外部电极尖端，其布置在所述检测质量体的外部并且被微机械梁悬置以允许外部电极移动，所述至少一个外部电极尖端还被布置成紧邻所述至少一个集成电极尖端以允许隧道电流在至少一个外部电极尖端与至少一个整体电极尖端之间流动，其中检测质量块的位移导致隧道电流的变化。

9. 发明授权

US06901800B2 Differential in-plane tunneling current sensor 有权
公开(公告)号：US06901800B2
公开(公告)日：2005-06-07
申请号：US10946404
申请日：2004-09-20
申请人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
发明人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
IPC分类号： G01P15/08 , G01P15/18 , G01Q10/00 , G01Q20/04
CPC分类号： G01P15/0894 , G01P15/0888 , G01P15/18
摘要： A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof mass body, and at least one external electrode tip arranged externally to the proof mass body and suspended by micro-mechanical beams to permit an external electrode movement, the at least one external electrode tip further arranged to be in a close proximity to the at least one integrated electrode tip to permit a flow of the tunneling current between the at least one external electrode tip and the at least one integrated electrode tip, in which the displacement of the proof mass causes a change in the tunneling current.

10. 发明申请

US20050035289A1 Differential in-plane tunneling current sensor 有权
公开(公告)号：US20050035289A1
公开(公告)日：2005-02-17
申请号：US10946404
申请日：2004-09-20
申请人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
发明人： Andreas Niendorf , Wilhelm Frey , Zhiyu Pan
IPC分类号： G01P15/08 , G01P15/18 , G01Q10/00 , G01Q20/04 , H01J37/244 , G01B7/14 , G01B15/00
CPC分类号： G01P15/0894 , G01P15/0888 , G01P15/18
摘要： A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof mass body, and at least one external electrode tip arranged externally to the proof mass body and suspended by micro-mechanical beams to permit an external electrode movement, the at least one external electrode tip further arranged to be in a close proximity to the at least one integrated electrode tip to permit a flow of the tunneling current between the at least one external electrode tip and the at least one integrated electrode tip, in which the displacement of the proof mass causes a change in the tunneling current.

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