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1. 发明授权

US09739998B2 Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly 有权
公开(公告)号：US09739998B2
公开(公告)日：2017-08-22
申请号：US13894989
申请日：2013-05-15
申请人： Joerg Muchow , Helmut Grutzeck , Jochen Franz , Zoltan Lestyan
发明人： Joerg Muchow , Helmut Grutzeck , Jochen Franz , Zoltan Lestyan
IPC分类号： G02B26/00 , G02B26/08 , G02B26/10 , B81B3/00
CPC分类号： G02B26/00 , B81B3/0021 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/058 , G02B26/085 , G02B26/105 , Y10T29/4902
摘要： A micromechanical assembly having a holder, a drive frame which has at least one energizable coil device disposed at least one of on and in the drive frame and which is joined to the holder via at least one frame spring, a mirror element that is at least partially framed by the drive frame and is suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the two mirror springs and being adjustable about a mirror axis of rotation in relation to the drive frame, and the mirror element being suspended from the drive frame asymmetrically relative to the mirror axis of rotation. A method for manufacturing a micromechanical assembly is also described. A method for operating a micromechanical assembly is also described.

2. 发明授权

US07134337B2 Micromechanical rotational rate sensor 有权
公开(公告)号：US07134337B2
公开(公告)日：2006-11-14
申请号：US11328755
申请日：2006-01-09
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01P9/04
CPC分类号： G01C19/5747
摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

3. 发明授权

US06752017B2 Rotation speed sensor 有权
标题翻译：转速传感器
公开(公告)号：US06752017B2
公开(公告)日：2004-06-22
申请号：US10258339
申请日：2003-03-19
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01P1514
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.
摘要翻译：一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。诱导科里奥利元件平行于第一轴振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。因此，对于同相和反相振荡，两轴的振荡频率不同。

4. 发明授权

US06703937B1 Filtering apparatus for filtering compressed air 失效
标题翻译：用于过滤压缩空气的过滤装置
公开(公告)号：US06703937B1
公开(公告)日：2004-03-09
申请号：US10111031
申请日：2002-04-18
申请人： Jochen Franz , Günter Gebauer
发明人： Jochen Franz , Günter Gebauer
IPC分类号： G08B2100
CPC分类号： B01D46/446 , B01D46/0086 , B01D46/46
摘要： A filter device for filtering compressed air having recognition means (24), which render possible recognition of the degree of contamination of the filter means (6) fitted. The recognition means (24) comprise a pressure differential sensor means (25) responsive to the pressure differential at the filter means (6) and a flow rate sensor means (26) responsive to the flow rate. Furthermore there is an electronic evaluating means (27) for linking the detected pressure differential values and the flow rate values to give a condition value relevant for the degree of contamination of the filter means (6) and to be compared with predetermined threshold values.
摘要翻译：一种用于过滤具有识别装置（24）的压缩空气的过滤装置，其使得可以识别装配的过滤装置（6）的污染程度。识别装置（24）包括响应于过滤装置（6）处的压力差的压差传感器装置（25）和响应于流量的流量传感器装置（26）。此外，存在用于将检测到的压力差值与流量值相关联的电子评估装置（27），以给出与过滤装置（6）的污染程度相关的条件值，并与预定阈值进行比较。

5. 发明授权

US06312264B1 Connecting device 失效
标题翻译：连接装置
公开(公告)号：US06312264B1
公开(公告)日：2001-11-06
申请号：US09300872
申请日：1999-04-28
申请人： Jochen Franz , Peter Rühle , Jürgen Böck
发明人： Jochen Franz , Peter Rühle , Jürgen Böck
IPC分类号： H01R1200
CPC分类号： H05K3/326 , H01R12/721 , H01R13/6658 , H05K1/119 , H05K2201/09063 , H05K2201/09181 , H05K2201/1003 , H05K2201/10446 , H05K2201/1059 , Y10S439/931 , Y10S439/951
摘要： A connecting device for the electrical connection of a support board to another component is proposed. The support board has a recess open toward its end and delimited to the side by spring arms, contact faces for the electrical connection being arranged thereon.
摘要翻译：提出了用于将支撑板电连接到另一部件的连接装置。支撑板具有朝向其端部敞开的凹部，并且通过弹簧臂限定在一侧，用于电连接的接触面被布置在其上。

6. 发明申请

US20140366630A1 MICROMECHANICAL MOISTURE SENSOR DEVICE, CORRESPONDING MANUFACTURING METHOD, AND MICROMECHANICAL SENSOR SYSTEM 有权
标题翻译：微生物水分传感器装置，相应的制造方法和微观传感器系统
公开(公告)号：US20140366630A1
公开(公告)日：2014-12-18
申请号：US14304394
申请日：2014-06-13
申请人： Jochen FRANZ , Uwe SCHILLER
发明人： Jochen FRANZ , Uwe SCHILLER
IPC分类号： G01N27/22 , G01N27/04
CPC分类号： G01N27/223 , G01N27/048
摘要： A micromechanical moisture sensor device includes: a substrate having a front side and a rear side; an interdigital printed conductor track arrangement provided above and/or below the front side of the substrate; and a moisture-sensitive polymer layer situated above and in the gaps of the interdigital printed conductor track arrangement. The moisture-sensitive polymer layer extends below the front side into the substrate.
摘要翻译：微机械湿度传感器装置包括：具有前侧和后侧的基板; 在衬底的正面的上方和/或下方设置的指数间印刷导体轨道布置; 以及位于叉指式印刷导体轨道装置的上方和上方的间隙中的湿度敏感的聚合物层。湿敏聚合物层在正面的下方延伸到基底中。

7. 发明授权

US07313958B2 Rotational rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US07313958B2
公开(公告)日：2008-01-01
申请号：US10471635
申请日：2002-09-25
申请人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
发明人： Rainer Willig , Jochen Franz , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Dieter Maurer , Christian Doering , Wolfram Bauer , Udo Bischof , Reinhard Neul , Johannes Classen , Christoph Lang , Jens Frey
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.
摘要翻译：提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面上方; 提供了一种驱动装置，通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置，通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。

8. 发明授权

US06705164B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US06705164B2
公开(公告)日：2004-03-16
申请号：US10258336
申请日：2003-03-19
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01C1900
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
摘要翻译：一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。

9. 发明授权

US6077094A Plug connector means with gripper rib 失效
标题翻译：插头连接器表示带夹臂
公开(公告)号：US6077094A
公开(公告)日：2000-06-20
申请号：US195417
申请日：1998-11-18
申请人： Jurgen Bock , Peter Ruhle , Jochen Franz , Walter Suchy
发明人： Jurgen Bock , Peter Ruhle , Jochen Franz , Walter Suchy
IPC分类号： H01R12/55 , H05K1/11 , H05K3/30 , H05K3/32 , H01R12/00
CPC分类号： H05K1/119 , H01R12/58 , H05K3/326 , H05K2201/09063 , H05K2201/1059 , H05K3/306
摘要： A plug connector having a main body, which has at least one connecting unit including an opening delimited at the side of an elongated transversely elastic gripping rib. The opening constitutes a plug socket, into which a plug element may be inserted and acted upon by the gripping rib. The gripping rib has a concave shaped longitudinal edge portion facing away from the plug socket such that the width of the gripper rib increases toward the two ends of the rib.
摘要翻译：一种插头连接器，具有主体，该主体具有至少一个连接单元，该连接单元包括限定在细长的横向弹性夹持肋侧面的开口。该开口构成一个插头插座，一个插头元件可插入该插座中并由夹紧肋作用。夹紧肋具有背向插头插座的凹形的纵向边缘部分，使得夹持器肋的宽度朝向肋的两端增加。

10. 发明申请

US20130234140A1 MICROMECHANICAL COMPONENT HAVING A DIAPHRAGM 有权
标题翻译：具有膜片的微生物组分
公开(公告)号：US20130234140A1
公开(公告)日：2013-09-12
申请号：US13761558
申请日：2013-02-07
申请人： Uwe SCHILLER , Volkmar SENZ , Jochen FRANZ , Helmut GRUTZECK , Michaela MITSCHKE
发明人： Uwe SCHILLER , Volkmar SENZ , Jochen FRANZ , Helmut GRUTZECK , Michaela MITSCHKE
IPC分类号： B81B3/00
CPC分类号： B81B3/0078 , B81C1/00253 , B81C2203/075 , G01L9/0042 , G01L19/0672 , H04R29/00
摘要： Measures are described with the aid of which not only a rupture, but also cracks may be detected in the diaphragm structure of a micromechanical component with the aid of circuit means integrated into the diaphragm structure. At least some circuit elements are integrated for this purpose into the bottom side of the diaphragm, i.e., into a diaphragm area directly adjoining the cavern below the diaphragm.
摘要翻译：借助于集成到隔膜结构中的电路装置，可以在不仅破裂的情况下描述措施，而且还可以在微机械部件的隔膜结构中检测到裂纹。至少一些电路元件为此目的被集成到隔膜的底侧，即进入与隔膜下面的洞穴直接邻接的隔膜区域中。

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