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1. 发明授权

US08997566B2 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US08997566B2
公开(公告)日：2015-04-07
申请号：US13116821
申请日：2011-05-26
申请人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
发明人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.
摘要翻译：描述了一种横摆速度传感器，其包括驱动装置，至少一个科里奥利元件和具有至少两个检测元件的检测装置，该至少两个检测元件借助耦合装置相互耦合，驱动装置连接到科里奥利用于驱动科里奥利元件的振动的元件，以及连接到检测装置和科里奥利斯元件的附加耦合装置，用于将Coriolis元件的振动平面中的偏转与检测装置沿垂直于振动。

2. 发明授权

US08943891B2 Yaw-rate sensor 有权
标题翻译：偏光率传感器
公开(公告)号：US08943891B2
公开(公告)日：2015-02-03
申请号：US13365740
申请日：2012-02-03
申请人： Torsten Ohms , Burkhard Kuhlmann , Robert Sattler , Rolf Scheben , Daniel Christoph Meisel
发明人： Torsten Ohms , Burkhard Kuhlmann , Robert Sattler , Rolf Scheben , Daniel Christoph Meisel
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.
摘要翻译：提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸，所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

3. 发明申请

US20130340522A1 YAM RATE SENSOR 有权
标题翻译： YAM速率传感器
公开(公告)号：US20130340522A1
公开(公告)日：2013-12-26
申请号：US13922801
申请日：2013-06-20
申请人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorten BALSLINK
发明人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorten BALSLINK
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5747
摘要： A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction.
摘要翻译：包括基板和主延伸平面的横摆角速度传感器，用于检测平行于主延伸平面的第一方向的横摆率，第一科里奥利质量和第二科里奥利质量，驱动装置被配置为驱动第一和第二科里奥利质量平行于垂直于第一方向的驱动方向，第一和第二科里奥利质量，对于围绕第一方向的横摆率，经历与垂直于驱动器的检测方向平行的科里奥利加速度和第一方向，分别具有第一/第二部分区域和第三/第四部分区域的第一和第二科里奥利群体。第一和第三部分区域平行于第一方向距离对称轴更远，并且第二和第四部分区域平行于第一方向更靠近对称轴。

4. 发明申请

US20120125099A1 YAW-RATE SENSOR AND METHOD FOR OPERATING A YAW-RATE SENSOR 有权
标题翻译： YAW速率传感器和操作传感器的方法
公开(公告)号：US20120125099A1
公开(公告)日：2012-05-24
申请号：US13294752
申请日：2011-11-11
申请人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
发明人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.
摘要翻译：偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

5. 发明申请

US20120060604A1 YAW-RATE SENSOR 有权
标题翻译： YAW-RATE传感器
公开(公告)号：US20120060604A1
公开(公告)日：2012-03-15
申请号：US12734228
申请日：2008-10-02
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01P3/44 , F16F3/00
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译：具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

6. 发明授权

US06691571B2 Rotational speed sensor 有权
标题翻译：转速传感器
公开(公告)号：US06691571B2
公开(公告)日：2004-02-17
申请号：US10258218
申请日：2003-05-29
申请人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人： Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号： G01C1900
CPC分类号： G01C19/5747
摘要： An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.
摘要翻译：描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。诱导科里奥利元件平行于第一轴振荡。响应于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。提供证明元件以证明偏转。

7. 发明授权

US09146107B2 Rotation rate sensor and method for operating a rotation rate sensor 有权
标题翻译：旋转速率传感器和操作旋转速度传感器的方法
公开(公告)号：US09146107B2
公开(公告)日：2015-09-29
申请号：US13718173
申请日：2012-12-18
申请人： Burkhard Kuhlmann , Jan-Timo Liewald
发明人： Burkhard Kuhlmann , Jan-Timo Liewald
IPC分类号： G01C19/56 , G01C19/5719 , G01C19/5712
CPC分类号： G01C19/56 , G01C19/5712 , G01C19/5719
摘要： A rotation rate sensor having a substrate including a main extension plane, force transmission elements that are movably fastened on the substrate using detection springs and a seismic mass are provided, the seismic mass being suspended over the force transmission elements, movably relative to the substrate, in such a way that the seismic mass is able to be excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and in response to the presence of a rotation rate that extends in parallel to the main extension plane and perpendicular to the drive axis, the seismic mass is excitable, as a result of Coriolis forces, to a detection vibration about a detection axis that is perpendicular to the main extension plane, the detection springs being connected to the force transmission elements in the region of the vibrational nodes.
摘要翻译：一种旋转速率传感器，其具有包括主延伸面的基板，使用检测弹簧和抗震块可动地固定在基板上的力传递元件，所述地震质量块相对于所述基板可移动地悬挂在所述力传递元件上方，使得地震质量能够使用驱动单元被激励绕与主延伸平面平行的驱动轴线的驱动振动，并响应于平行延伸的旋转速率的存在而被激发到主延伸平面并垂直于驱动轴线，由于科里奥利力的结果，地震质量是可激发的，围绕与主延伸平面垂直的检测轴线的检测振动，检测弹簧被连接到力传播元件在振动节点的区域。

8. 发明授权

US08783105B2 Yaw-rate sensor and method for operating a yaw-rate sensor 有权
标题翻译：偏航速率传感器和操作偏航率传感器的方法
公开(公告)号：US08783105B2
公开(公告)日：2014-07-22
申请号：US13305292
申请日：2011-11-28
申请人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
发明人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.
摘要翻译：横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。

9. 发明申请

US20130298672A1 YAW-RATE SENSOR 有权
标题翻译： YAW-RATE传感器
公开(公告)号：US20130298672A1
公开(公告)日：2013-11-14
申请号：US13889791
申请日：2013-05-08
申请人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorsten BALSLINK
发明人： Burkhard KUHLMANN , Rolf SCHEBEN , Daniel Christoph MEISEL , Benjamin SCHMIDT , Thorsten BALSLINK
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5747
摘要： A yaw-rate sensor, having a substrate which has a main extension plane, for detecting a yaw rate about a first direction extending either parallel to the main extension plane or perpendicular to the main extension plane. The yaw-rate sensor has a drive device, a first Coriolis mass and a second Coriolis mass, the drive device being configured to drive at least one part of the first Coriolis mass and at least one part of the second Coriolis mass in a direction parallel to a drive direction extending perpendicular to the first direction.
摘要翻译：一种偏转速率传感器，具有具有主延伸面的基板，用于检测围绕主延伸面平行延伸或垂直于主延伸面延伸的第一方向的横摆率。所述偏航速率传感器具有驱动装置，第一科里奥利质量块和第二科里奥利质量块，所述驱动装置被配置成驱动所述第一科里奥利质量的至少一部分和所述第二科里奥利质量的至少一部分在平行方向上到垂直于第一方向延伸的驱动方向。

10. 发明申请

US20130042664A1 Method for the functional checking of an inertial sensor and inertial sensor 审中-公开
标题翻译：惯性传感器和惯性传感器的功能检查方法
公开(公告)号：US20130042664A1
公开(公告)日：2013-02-21
申请号：US13586282
申请日：2012-08-15
申请人： Martin Wrede , Klaus Petzold , Burkhard Kuhlmann , Uwe Tellermann , Markus Brockmann , Marian Keck , Thorsten Balslink
发明人： Martin Wrede , Klaus Petzold , Burkhard Kuhlmann , Uwe Tellermann , Markus Brockmann , Marian Keck , Thorsten Balslink
IPC分类号： G01P15/097 , G01P21/00
CPC分类号： G01P15/097 , G01C19/5762 , G01C25/005 , G01P15/125 , G01P21/00
摘要： A method for providing functional checking of an inertial sensor, a first test signal having a first frequency being fed in at a test electrode of the inertial sensor for exciting a vibration of a vibration mass and a first response signal corresponding to the vibration mass is recorded, a second test signal having a second frequency different from the first frequency being fed in at the test electrode, a second response signal corresponding to the vibration mass being recorded, and the two response signals being evaluated. Also described is an inertial sensor.
摘要翻译：一种用于提供惯性传感器的功能检查的方法，记录了在惯性传感器的测试电极处馈送第一频率的第一测试信号，用于激发振动质量的振动和对应于振动质量的第一响应信号第二测试信号具有不同于在测试电极处馈入的第一频率的第二频率，对应于所记录的振动质量的第二响应信号，并且评估两个响应信号。还描述了惯性传感器。

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