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    • 5. 发明授权
    • Micromechanical oscillating device
    • 微机械振荡装置
    • US06672732B1
    • 2004-01-06
    • US10070054
    • 2002-07-17
    • Andreas NiendorfWilhelm FreyKarsten Funk
    • Andreas NiendorfWilhelm FreyKarsten Funk
    • G02B7182
    • G02B26/0841
    • A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsion axis and permitting a torsional vibration about the torsion axis to be induced in the vibrating structure, the spring structure also including at least one converter structure, which at least partially converts forces acting at least largely perpendicularly to the torsion axis on the torsion spring element into forces acting at least partially parallelly to the torsion axis on the torsion-spring element.
    • 振动微型装置,例如振动微镜,包括振动结构,所述振动结构经由至少一个弹簧结构以至少大体上浮动的方式连接到支撑体,所述弹簧结构包括至少一个限定扭转的扭簧元件 所述弹簧结构还包括至少一个转换器结构,所述至少一个转换器结构至少部分地将至少大部分地垂直于所述扭转轴线上的力作用力转换成所述扭转弹簧元件上的扭转轴线 至少部分地平行于扭转弹簧元件上的扭转轴线作用的力。
    • 6. 发明授权
    • Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane
    • 传感器,特别是热传感器,以及用于制造大部分自支撑膜的方法
    • US06655834B1
    • 2003-12-02
    • US09613131
    • 2000-07-10
    • Wilhelm FreyKarsten Funk
    • Wilhelm FreyKarsten Funk
    • G01K702
    • H01L35/32B81B2201/0278B81B2203/0127B81B2207/07B81C1/00246B81C2203/0735G01J5/20
    • A sensor, in particular thermal sensor, having a silicon element and a largely self-supporting membrane layer equipped with at least one sensor element, is proposed. The membrane layer is furthermore spaced away from the silicon element by way of at least one contact column and is at least largely supported thereby. The contact column moreover makes electrical contact to the sensor element. Also proposed is a method for manufacturing a largely self-supporting membrane, a polymer layer first being deposited on a base element, patterned, and equipped with at least one cutout. The cutout is subsequently filled with a filler material, and a membrane layer is applied onto the polymer layer. Lastly, the polymer layer is removed again. The proposed method for manufacturing a largely self-supporting membrane layer is suitable in particular for constructing a sensor, in particular a thermal sensor or a thermal sensor array.
    • 提出了一种具有硅元件和大部分自支撑膜层的传感器,特别是热传感器,其具有至少一个传感器元件。 膜层还通过至少一个接触柱与硅元件隔开,并且至少大部分被支撑。 接触柱还与传感器元件电接触。 还提出了一种用于制造大部分自支撑膜的方法,首先沉积在基底元件上的聚合物层被图案化并且装备有至少一个切口。 切口随后填充有填充材料,并且将膜层施加到聚合物层上。 最后,再次除去聚合物层。 所提出的用于制造大部分自支撑膜层的方法特别适用于构造传感器,特别是热传感器或热传感器阵列。
    • 8. 发明授权
    • Method for manufacturing a micromechanical device
    • 微机械装置制造方法
    • US06369931B1
    • 2002-04-09
    • US09367760
    • 1999-08-18
    • Karsten FunkWilhelm Frey
    • Karsten FunkWilhelm Frey
    • G02B1700
    • B81B3/004B81B2201/0292B81B2201/042B81C1/00142B81C2201/019G02B26/0841
    • A method for manufacturing a micromechanical device, in particular a micromechanical vibrating-mirror device, having the following steps: making available a three-layer structure having a first layer, a second layer and a third layer, the second layer lying between the first and the third layers; etching through the first layer up to the second layer to produce an island region, lying on the second layer, which is joined to region of the first layer surrounding the island region by way of one or more connecting webs, and etching through a region of the third layer up to the second layer and removing a region of the second layer below the island region in such a way that the island region can perform movements, preferably torsional vibrations, about the one or more connecting webs, the torsional vibrations having such an amplitude that a part of the island region extends into the etched-through region of the third layer.
    • 一种用于制造微机械装置,特别是微机械振镜装置的方法,具有以下步骤:提供具有第一层,第二层和第三层的三层结构,所述第二层位于第一层和第二层之间, 第三层; 蚀刻通过第一层直到第二层,以产生位于第二层上的岛状区域,其通过一个或多个连接幅材连接到围绕岛状区域的第一层的区域,并且蚀刻通过 第三层直到第二层,并且以这样的方式去除岛状区域下面的第二层的区域,使得岛状区域可以围绕一个或多个连接幅材执行运动,优选扭转振动,扭转振动具有这样的 该区域的一部分延伸到第三层的蚀刻穿透区域的振幅。