会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明授权
    • Micromechanical motion sensor
    • 微机械运动传感器
    • US07591179B2
    • 2009-09-22
    • US10556172
    • 2004-03-24
    • Dietmar KriegUdo-Martin GomezReinhard Neul
    • Dietmar KriegUdo-Martin GomezReinhard Neul
    • G01P9/04
    • G01C19/5712G01C19/5726G01C19/5776
    • A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.
    • 微机械运动传感器能够检测通过施加周期性驱动电压的静电振荡驱动器激发到永久周期性振荡的可摆放安装的弹簧元件的偏转。 为了补偿棒弹簧元件的共振频率响应的非线性,可以将正常驱动电压信号和补偿驱动信号的总和施加到梳齿驱动器。 在替代实施例中,分离的补偿梳驱动单元可以附加地提供给用于振荡驱动的梳状驱动单元,并且补偿电压信号可以被施加到它们以补偿非线性。