专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20140072203A1 Selecting Parameters for Defect Detection Methods 有权
标题翻译：选择缺陷检测方法的参数
公开(公告)号：US20140072203A1
公开(公告)日：2014-03-13
申请号：US13610658
申请日：2012-09-11
申请人： Kenong Wu , Chris W. Lee , Michael J. Van Riet , Yi Liu
发明人： Kenong Wu , Chris W. Lee , Michael J. Van Riet , Yi Liu
IPC分类号： G06K9/62
CPC分类号： G01N21/9501
摘要： Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for a defect detection method are provided. One method includes selecting one or more parameters of a defect detection method using an optimization function and information for a set of classified defects, which includes defects of interest and nuisance defects, such that the one or more parameters satisfy an objective for the defect detection method.
摘要翻译：提供了计算机实现的方法，计算机可读介质和用于为缺陷检测方法选择一个或多个参数的系统。一种方法包括使用优化函数选择缺陷检测方法的一个或多个参数，以及一组分类缺陷的信息，所述缺陷检测方法包括感兴趣的缺陷和妨碍缺陷，使得一个或多个参数满足缺陷检测方法的目的。

2. 发明授权

US09310316B2 Selecting parameters for defect detection methods 有权
标题翻译：选择缺陷检测方法的参数
公开(公告)号：US09310316B2
公开(公告)日：2016-04-12
申请号：US13610658
申请日：2012-09-11
申请人： Kenong Wu , Chris W. Lee , Michael J. Van Riet , Yi Liu
发明人： Kenong Wu , Chris W. Lee , Michael J. Van Riet , Yi Liu
IPC分类号： G06K9/00 , G01N21/95
CPC分类号： G01N21/9501
摘要： Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for a defect detection method are provided. One method includes selecting one or more parameters of a defect detection method using an optimization function and information for a set of classified defects, which includes defects of interest and nuisance defects, such that the one or more parameters satisfy an objective for the defect detection method.
摘要翻译：提供了计算机实现的方法，计算机可读介质和用于为缺陷检测方法选择一个或多个参数的系统。一种方法包括使用优化函数选择缺陷检测方法的一个或多个参数，以及一组分类缺陷的信息，所述缺陷检测方法包括感兴趣的缺陷和妨碍缺陷，使得一个或多个参数满足缺陷检测方法的目的。

3. 发明授权

US09601393B2 Selecting one or more parameters for inspection of a wafer 有权
公开(公告)号：US09601393B2
公开(公告)日：2017-03-21
申请号：US13148473
申请日：2010-02-05
申请人： Chris Lee , Lisheng Gao , Tao Luo , Kenong Wu , Tommaso Torelli , Michael J. Van Riet , Brian Duffy
发明人： Chris Lee , Lisheng Gao , Tao Luo , Kenong Wu , Tommaso Torelli , Michael J. Van Riet , Brian Duffy
IPC分类号： G01N21/95 , H01L21/66
CPC分类号： H01L22/20 , G01N21/9501 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for inspection of a wafer are provided.

4. 发明申请

US20110320149A1 Selecting One or More Parameters for Inspection of a Wafer 有权
标题翻译：选择一个或多个参数以检查晶圆
公开(公告)号：US20110320149A1
公开(公告)日：2011-12-29
申请号：US13148473
申请日：2010-02-05
申请人： Chris Lee , Lisheng Gao , Tao Luo , Kenong Wu , Tommaso Torelli , Michael J. Van Riet , Brian Duffy
发明人： Chris Lee , Lisheng Gao , Tao Luo , Kenong Wu , Tommaso Torelli , Michael J. Van Riet , Brian Duffy
IPC分类号： G06F19/00 , G01N21/88
CPC分类号： H01L22/20 , G01N21/9501 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for inspection of a wafer are provided.
摘要翻译：提供了计算机实现的方法，计算机可读介质和用于选择用于检查晶片的一个或多个参数的系统。

5. 发明授权

US07142992B1 Flexible hybrid defect classification for semiconductor manufacturing 有权
标题翻译：用于半导体制造的灵活混合缺陷分类
公开(公告)号：US07142992B1
公开(公告)日：2006-11-28
申请号：US10954968
申请日：2004-09-30
申请人： Patrick Huet , Maruti Shanbhag , Sandeep Bhagwat , Michal Kowalski , Vivekanand Kini , David Randall , Sharon McCauley , Tong Huang , Jianxin Zhang , Kenong Wu , Lisheng Gao , Ariel Tribble , Ashok Kulkarni , Cecelia Anne Campochiaro
发明人： Patrick Huet , Maruti Shanbhag , Sandeep Bhagwat , Michal Kowalski , Vivekanand Kini , David Randall , Sharon McCauley , Tong Huang , Jianxin Zhang , Kenong Wu , Lisheng Gao , Ariel Tribble , Ashok Kulkarni , Cecelia Anne Campochiaro
IPC分类号： G01R31/00 , G06F19/00
CPC分类号： G06T7/0004 , G01R31/2846 , G06T2200/24 , G06T2207/30148
摘要： Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.
摘要翻译：提供了用于分类半导体制造中的缺陷的混合方法。这些方法包括将错误的规则序列应用于检查数据。规则序列包括确定性规则，统计规则，混合规则或其某种组合。序列中包括的规则可以由用户使用图形界面来选择。该方法还包括基于将规则序列应用于检查数据的结果对缺陷进行分类。

6. 发明申请

US20120141013A1 REGION BASED VIRTUAL FOURIER FILTER 有权
标题翻译：基于区域的虚拟FOURIER过滤器
公开(公告)号：US20120141013A1
公开(公告)日：2012-06-07
申请号：US13381696
申请日：2011-08-01
申请人： Lisheng Gao , Kenong Wu , Allen Park , Ellis Chang , Khurram Zafar , Junqing Huang , Ping Gu , Christopher Maher , Grace H. Chen , Songnian Rong , Liu-Ming Wu
发明人： Lisheng Gao , Kenong Wu , Allen Park , Ellis Chang , Khurram Zafar , Junqing Huang , Ping Gu , Christopher Maher , Grace H. Chen , Songnian Rong , Liu-Ming Wu
IPC分类号： G06K9/62
CPC分类号： G06T7/001 , G06T2207/10061 , G06T2207/20021 , G06T2207/20056 , G06T2207/30148
摘要： The present invention includes searching imagery data in order to identify one or more patterned regions on a semiconductor wafer, generating one or more virtual Fourier filter (VFF) working areas, acquiring an initial set of imagery data from the VFF working areas, defining VFF training blocks within the identified patterned regions of the VFF working areas utilizing the initial set of imagery data, wherein each VFF training block is defined to encompass a portion of the identified patterned region displaying a selected repeating pattern, calculating an initial spectrum for each VFF training block utilizing the initial set of imagery data from the VFF training blocks, and generating a VFF for each training block by identifying frequencies of the initial spectrum having maxima in the frequency domain, wherein the VFF is configured to null the magnitude of the initial spectrum at the frequencies identified to display spectral maxima.
摘要翻译：本发明包括搜索图像数据以便识别半导体晶片上的一个或多个图案化区域，生成一个或多个虚拟傅立叶滤波器（VFF）工作区域，从VFF工作区域获取初始图像数据集，定义VFF训练利用初始的图像数据集，在VFF工作区域的所识别的图案化区域内的块，其中每个VFF训练块被定义为包含所识别的图案化区域的一部分，显示所选择的重复模式，计算每个VFF训练块的初始频谱利用来自VFF训练块的初始图像数据组，以及通过识别在频域中具有最大值的初始频谱的频率，为每个训练块生成VFF，其中VFF被配置为在识别出显示频谱最大值的频率。

7. 发明授权

US08111900B2 Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle 有权
标题翻译：用于检测和/或排列掩模版设计图案中的缺陷的计算机实现的方法
公开(公告)号：US08111900B2
公开(公告)日：2012-02-07
申请号：US12780864
申请日：2010-05-15
申请人： Kenong Wu , David Randall , Kourosh Nafisi , Ramon Ynzunza , Ingrid B. Peterson , Ariel Tribble , Michal Kowalski , Lisheng Gao , Ashok Kulkarni
发明人： Kenong Wu , David Randall , Kourosh Nafisi , Ramon Ynzunza , Ingrid B. Peterson , Ariel Tribble , Michal Kowalski , Lisheng Gao , Ashok Kulkarni
IPC分类号： G06K9/00 , G01R31/26 , G21K5/00 , G06F17/50
CPC分类号： G03F1/84 , G01N21/95607 , G01N2021/95676 , G03F7/7065 , G03F7/70666
摘要： Various computer-implemented methods are provided. One method for sorting defects in a design pattern of a reticle includes searching for defects of interest in inspection data using priority information associated with individual defects in combination with one or more characteristics of a region proximate the individual defects. The priority information corresponds to modulation levels associated with the individual defects. The inspection data is generated by comparing images of the reticle generated for different values of a lithographic variable. The images include at least one reference image and at least one modulated image. A composite reference image can be generated from two or more reference images. The method also includes assigning one or more identifiers to the defects of interest. The identifier(s) may include, for example, a defect classification and/or an indicator identifying if the defects of interest are to be used for further processing.
摘要翻译：提供了各种计算机实现的方法。用于对掩模版的设计图案中的缺陷进行排序的一种方法包括使用与各个缺陷相关联的优先级信息，结合邻近各个缺陷的区域的一个或多个特征来搜索检查数据中的缺陷。优先级信息对应于与各个缺陷相关联的调制级别。通过比较为不同的光刻变量值生成的掩模版的图像来生成检查数据。图像包括至少一个参考图像和至少一个调制图像。可以从两个或更多个参考图像生成复合参考图像。该方法还包括将一个或多个标识符分配给感兴趣的缺陷。标识符可以包括例如缺陷分类和/或识别感兴趣的缺陷是否用于进一步处理的指示符。

8. 发明授权

US07359544B2 Automatic supervised classifier setup tool for semiconductor defects 有权
标题翻译：用于半导体缺陷的自动监控分类器设置工具
公开(公告)号：US07359544B2
公开(公告)日：2008-04-15
申请号：US10713628
申请日：2003-11-13
申请人： Lisheng Gao , Bo Magluyan , Jianxin Zhang , Kevin Yeung , Kenong Wu , Tong Huang
发明人： Lisheng Gao , Bo Magluyan , Jianxin Zhang , Kevin Yeung , Kenong Wu , Tong Huang
IPC分类号： G06K9/00 , G06K9/62
CPC分类号： G06K9/6253 , G06T7/0004
摘要： Disclosed are methods and apparatus for efficiently setting up and maintaining a defect classification system. In general terms, the setup procedure optionally includes automatically grouping a set of provided defects and presenting a representative set from each defect group to the user for classification. After the initial manual classification of the representative defects, the setup procedure includes an automatic procedure for classifying the non-reviewed or unclassified defects based on the manual class codes from the user-reviewed defects. After the automatic classification operation, the user may also be presented with defects from each class which may require re-classification. In particular embodiments, the user is iteratively presented with defects which have classifications that are suspect, which are near classification boundaries, or have classifications that have a low confidence level until each class is pure or contains a same type of defect classes as assigned by the user.
摘要翻译：公开了用于有效地建立和维护缺陷分类系统的方法和装置。一般来说，设置过程可选地包括自动地对一组提供的缺陷进行分组，并将来自每个缺陷组的代表集合给用户进行分类。在对代表性缺陷进行初步手动分类后，安装步骤包括根据用户审查缺陷的手册类代码分类未经审查或未分类的缺陷的自动程序。在自动分类操作之后，用户也可能会出现每个类别可能需要重新分类的缺陷。在特定实施例中，用户被迭代地呈现具有可疑的分类的缺陷，其接近分类边界，或者具有低置信度水平的分类，直到每个类是纯的或包含由所分配的相同类型的缺陷类别用户。

9. 发明申请

US20070133860A1 Methods and systems for binning defects detected on a specimen 有权
标题翻译：在样本上检测到的缺陷的方法和系统
公开(公告)号：US20070133860A1
公开(公告)日：2007-06-14
申请号：US11300172
申请日：2005-12-14
申请人： Jason Lin , Xing Chu , Kenong Wu , Sharon McCauley
发明人： Jason Lin , Xing Chu , Kenong Wu , Sharon McCauley
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/95607 , G01N2021/8854 , G06T2207/30148
摘要： Methods and systems for binning defects detected on a specimen are provided. One method includes comparing a test image to reference images. The test image includes an image of one or more patterned features formed on the specimen proximate to a defect detected on the specimen. The reference images include images of one or more patterned features associated with different regions of interest within a device being formed on the specimen. If the one or more patterned features of the test image match the one or more patterned features of one of the reference images, the method includes assigning the defect to a bin corresponding to the region of interest associated with the reference image.
摘要翻译：提供了在样本上检测到的合并缺陷的方法和系统。一种方法包括将测试图像与参考图像进行比较。测试图像包括形成在样本上的接近于在样本上检测到的缺陷的一个或多个图案特征的图像。参考图像包括在形成在样本上的装置内的与感兴趣的不同区域相关联的一个或多个图案特征的图像。如果测试图像的一个或多个图案特征与参考图像之一的一个或多个图案特征匹配，则该方法包括将缺陷分配给对应于与参考图像相关联的感兴趣区域的区域。

10. 发明授权

US06747646B2 System and method for fusing three-dimensional shape data on distorted images without correcting for distortion 有权
标题翻译：用于在失真图像上融合三维形状数据而不纠正失真的系统和方法
公开(公告)号：US06747646B2
公开(公告)日：2004-06-08
申请号：US09852739
申请日：2001-05-11
申请人： Andre Gueziec , Alan David Kalvin , Willie Williamson, Jr. , Kenong Wu
发明人： Andre Gueziec , Alan David Kalvin , Willie Williamson, Jr. , Kenong Wu
IPC分类号： G06T1500
CPC分类号： A61B6/463 , A61B6/032 , G06F19/00
摘要： A system and method for intra-operatively providing a surgeon with visual evaluations of possible surgical outcomes ahead of time, and generating simulated data, includes a medical imaging camera, a registration device for registering data to a physical space, and to the medical imaging camera, and a fusion mechanism for fusing the data and the images to generate simulated data, without correcting for distortion. The simulated data (e.g., such as augmented X-ray images) is natural and easy for a surgeon to interpret. In an exemplary implementation, the system preferably includes a data processor which receives a three-dimensional surgical plan or three-dimensional plan of therapy delivery, one or a plurality of two-dimensional intra-operative images, a three-dimensional model of pre-operative data, registration data, and image calibration data. The data processor produces one or a plurality of simulated post-operative images, without correcting for distortion, by integrating a projection of a three-dimensional model of pre-operative data onto one or a plurality of two-dimensional intra-operative images.
摘要翻译：一种用于在手术前向外科医生提供可能的手术结果提前视觉评价并产生模拟数据的系统和方法，包括医学成像相机，用于将数据注册到物理空间的登记装置以及医疗成像摄像机，以及用于将数据和图像融合以生成模拟数据的融合机制，而不纠正失真。模拟数据（例如，例如增强的X射线图像）对于外科医生来说是自然而且容易的。在示例性实施方式中，系统优选地包括数据处理器，其接收三维手术计划或三维治疗递送计划，一个或多个二维手术内图像，三维预处理模型，操作数据，注册数据和图像校准数据。通过将手术前数据的三维模型的投影集成到一个或多个二维手术图像上，数据处理器产生一个或多个模拟的术后图像，而不纠正失真。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式