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1. 发明授权

US07359544B2 Automatic supervised classifier setup tool for semiconductor defects 有权
标题翻译：用于半导体缺陷的自动监控分类器设置工具
公开(公告)号：US07359544B2
公开(公告)日：2008-04-15
申请号：US10713628
申请日：2003-11-13
申请人： Lisheng Gao , Bo Magluyan , Jianxin Zhang , Kevin Yeung , Kenong Wu , Tong Huang
发明人： Lisheng Gao , Bo Magluyan , Jianxin Zhang , Kevin Yeung , Kenong Wu , Tong Huang
IPC分类号： G06K9/00 , G06K9/62
CPC分类号： G06K9/6253 , G06T7/0004
摘要： Disclosed are methods and apparatus for efficiently setting up and maintaining a defect classification system. In general terms, the setup procedure optionally includes automatically grouping a set of provided defects and presenting a representative set from each defect group to the user for classification. After the initial manual classification of the representative defects, the setup procedure includes an automatic procedure for classifying the non-reviewed or unclassified defects based on the manual class codes from the user-reviewed defects. After the automatic classification operation, the user may also be presented with defects from each class which may require re-classification. In particular embodiments, the user is iteratively presented with defects which have classifications that are suspect, which are near classification boundaries, or have classifications that have a low confidence level until each class is pure or contains a same type of defect classes as assigned by the user.
摘要翻译：公开了用于有效地建立和维护缺陷分类系统的方法和装置。一般来说，设置过程可选地包括自动地对一组提供的缺陷进行分组，并将来自每个缺陷组的代表集合给用户进行分类。在对代表性缺陷进行初步手动分类后，安装步骤包括根据用户审查缺陷的手册类代码分类未经审查或未分类的缺陷的自动程序。在自动分类操作之后，用户也可能会出现每个类别可能需要重新分类的缺陷。在特定实施例中，用户被迭代地呈现具有可疑的分类的缺陷，其接近分类边界，或者具有低置信度水平的分类，直到每个类是纯的或包含由所分配的相同类型的缺陷类别用户。

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