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1. 发明专利

JP2004093526A Cathode luminescence analysis apparatus 有权
公开(公告)号：JP2004093526A
公开(公告)日：2004-03-25
申请号：JP2002258588
申请日：2002-09-04
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO , KOMATANI SHINTARO , OHORI KENICHI , ISHIDA TOSHIMASA
IPC分类号： G01N21/62 , H01J37/147 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive and high operability cathode luminescence (CL) analysis apparatus simply operated for analysis, not complicating an electronic optical system and eliminating a necessity for embedding an expensive lock-in amplifier in a signal processing system.
SOLUTION: In the CL analysis apparatus having a detector for detecting cathode luminescence 23 emitted from a sample 21 when an electron beam e is radiated from an electron gun 13 to the sample 21, it is characterized in that an emission direction 11 of the electron beam from the electron gun 13 is at an angle to a line between the electron gun 13 and the sample 21.
COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2004093510A Analysis result display method, x-ray analyzer, and computer program 有权
公开(公告)号：JP2004093510A
公开(公告)日：2004-03-25
申请号：JP2002258233
申请日：2002-09-03
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： NAGAO TOSHIHARU , OSAWA SUMUTO , KOMATANI SHINTARO , OHORI KENICHI
IPC分类号： G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide an analysis result display method capable of improving the contrast of a transmission X-ray image.
SOLUTION: The number of pulses corresponding to the output level of the transmission X-ray outputted from a transmission X-ray detector 28 is counted by a counting means such as a multi-channel analyzer. In the counting means, number of pulses is counted for each output level, and the counted values are stored in a memory. An X-ray analyzer 1 extracts the counted values corresponding to the output level in a specified range among the counted values corresponding to the output level counted by the counting means. Based on the counted values corresponding to the extracted output level, the analyzer generates a transmission X-ray image and outputs the generated transmission X-ray image to a display device.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2004093511A X-ray analysis apparatus and computer program 有权
公开(公告)号：JP2004093511A
公开(公告)日：2004-03-25
申请号：JP2002258236
申请日：2002-09-03
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： OSAWA SUMUTO , KOMATANI SHINTARO , OHORI KENICHI
IPC分类号： G01N23/223 , G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide an X-ray analysis apparatus and a computer program capable of performing phase separation including the interior of a sample.
SOLUTION: This X-ray analysis apparatus is provided with a sample stage 24 on which a sample 20 is placed; X-ray emitting means 12, 14 for irradiating the placed sample 20 with X-rays; a fluorescent X-ray detecting means 16 for detecting fluorescent X-rays generated by X-ray irradiation to the sample 20; a transmitted X-ray detecting means 22 for detecting transmitted X-rays transmitted through the sample 20; analysis means 40, 42 for analyzing the distribution of similar portions of the composition of the sample based on the detected fluorescent X-rays and transmitted X-rays; and a display means 44 for displaying the distribution of the similar portions of the composition of the sample 20.
COPYRIGHT: (C)2004,JPO

4. 发明专利

JP2008039522A Analyzer 有权
标题翻译：分析仪
公开(公告)号：JP2008039522A
公开(公告)日：2008-02-21
申请号：JP2006212403
申请日：2006-08-03
申请人： Horiba Ltd , Toyota Motor Corp , トヨタ自動車株式会社 , 株式会社堀場製作所
发明人： HIRAMATSU TAKAYO , SAGAMI HIROO , MIZOE HIDEAKI , KOMATANI SHINTARO , OHORI KENICHI , FUJIMOTO TORU , NISHIKATA YASUHIRO
IPC分类号： G01N23/223 , G01N21/35 , G01N21/3563
摘要： PROBLEM TO BE SOLVED: To provide an analyzer capable of preventing the shift of an analyzing position and the loss of an object to be irradiated when X-ray analysis and infrared analysis are respectively performed to perform X-ray analysis with high precision. SOLUTION: The analyzer is equipped with a sample stage 10 having a mount part 12 on which the sample 20 is mounted, an X-ray analyzing unit having a fluorescent X-ray detector provided with a first polycapillary lens 48 for emitting X rays and a second polycapillary lens for detecting secondary X rays, an infrared irradiation unit 30 for emitting infrared rays, an infrared ray detection unit 34 for detecting infrared rays, a moving device for moving the sample stage 10 to a position where the mount part 12 is irradiated with X rays from the X-ray analyzing unit or moving the sample stage 10 to a position where the mount part 12 is irradiated is irradiated with infrared rays from the infrared irradiation unit 30 and a pressure rod 22 for pressing the sample 20 to the mount part 12 in the state that the sample stage 10 is moved to the position where the mount part 12 is irradiated with the infrared rays from the infrared irradiation unit 30. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够防止分析位置的偏移和当分别进行X射线分析和红外分析时要照射的物体的损失的分析仪以高精度进行X射线分析。解决方案：分析仪配备有具有安装部件12的样品台10，样品20安装在其上的X射线分析单元，具有荧光X射线检测器，该荧光X射线检测器设置有用于发射X的第一多毛细透镜48 用于检测次X射线的第二多毛细透镜，用于发射红外线的红外线照射单元30，用于检测红外线的红外线检测单元34，用于将样品台10移动到安装部12的位置的移动装置用X射线分析装置的X射线照射或将样品台10移动到照射了安装部分12的位置，红外线照射单元30和用于将样品20按压的压力杆22照射到红外线在安装部分12处于样品台10移动到安装部分12被来自红外辐射单元30的红外线照射的位置的状态。（C）2008，JPO和INPIT

5. 发明专利

JP2007225314A X-rays convergence element and x-ray irradiator 有权
标题翻译： X射线融合元素和X射线辐射体
公开(公告)号：JP2007225314A
公开(公告)日：2007-09-06
申请号：JP2006043960
申请日：2006-02-21
申请人： Horiba Ltd , National Institute For Materials Science , 株式会社堀場製作所 , 独立行政法人物質・材料研究機構
发明人： NAKAZAWA HIROMOTO , YOSHIKAWA HIDEKI , VLAICU AUREL MIHAI , OHORI KENICHI , KOMATANI SHINTARO , OSAWA SUMUTO
IPC分类号： G21K1/02 , G01N23/04 , G01N23/20 , G01N23/223 , G21K1/06 , H05G1/00
CPC分类号： G21K1/06 , G21K2201/064
摘要： PROBLEM TO BE SOLVED: To enable the analysis, fluorescent X-ray analysis and X-ray diffraction analysis of an object to be inspected which has concaves and convexes on its surface by making it possible to prolonging the working distance from an opening end on the emission side to the object to be inspected.
SOLUTION: In an X-ray shielding member 23, three supporting members 233 which support the X-ray shielding member 23 are placed toward its center from an annular member 232 whose diameter is approximately as large as the aperture of an opening end (the outer diameter of a capillary 20) on the incidence side to fix the annular member 232 onto the capillary 20. The annular member 232, the supporting members 233 and the X-ray shielding member 23 are formed through integral moulding by using X-ray shielding metals such as tantalum, tungsten and molybdenum. The dimension (thickness) in the axial direction of the X-ray shielding member 23 is set to be thick enough to act as a shield X rays.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了能够通过使得能够延长从开口的工作距离来分析在其表面上具有凹凸的待检查对象的荧光X射线分析和X射线衍射分析在发射侧结束到要检查的对象。解决方案：在X射线屏蔽构件23中，支撑X射线屏蔽构件23的三个支撑构件233从其直径约为开口端的孔径的环形构件232朝向其中心放置（毛细管20的外径），以将环状构件232固定在毛细管20上。环状构件232，支撑构件233和X射线屏蔽构件23通过使用X- 射线屏蔽金属如钽，钨和钼。将X射线屏蔽部件23的轴向尺寸（厚度）设定为足够厚以作为屏蔽X射线。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2005026026A Field emission type electron gun 有权
标题翻译：场发射型电子枪
公开(公告)号：JP2005026026A
公开(公告)日：2005-01-27
申请号：JP2003189071
申请日：2003-06-30
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO , OKADA YOSHIAKI , OHORI KENICHI
IPC分类号： H01J37/067
摘要： PROBLEM TO BE SOLVED: To provide a field emission type electron gun free from complicated alignment work and possible to be miniaturized and simplified in structure.
SOLUTION: A cathode 1 and an extractor 3 are unified to form a structure 6, and the structure 6 and an anode 4 are respectively provided with fitting parts 19 and 21. Positioning of the structure 6 and the anode 4 is performed by a positioning member 17 formed with a first fitting part 18 and a second fitting part 20 having dimension considering a coefficient of thermal expansion so that these fitting parts can be fitted to the fitting parts 19 and 21 without generating looseness when operating.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种没有复杂对准工作的场发射型电子枪，并且可以小型化和简化结构。解决方案：阴极1和提取器3被一体化以形成结构6，结构6和阳极4分别设有配件部分19和21.结构6和阳极4的定位由定位构件17，其形成有第一装配部分18和第二装配部分20，其具有考虑到热膨胀系数的尺寸，使得这些装配部件可以在操作时不产生松动而被装配到装配部分19和21。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JPH03152448A X-RAY ANALYZER 失效
公开(公告)号：JPH03152448A
公开(公告)日：1991-06-28
申请号：JP29188189
申请日：1989-11-09
申请人： HORIBA LTD
发明人： HOSOKAWA YOSHINORI , OHORI KENICHI , ARAI SHIGETOSHI
IPC分类号： G01N23/00
摘要： PURPOSE:To enable three-dimensional measurement of an external shape or an internal structure in a minute structure by providing a sample stage in a high vacuum chamber so that it can be displaced in the three-dimensional direction, by setting a sample thereon and by applying a fine-bundle electron beam to the sample. CONSTITUTION:A sample stage 2 which can be displaced in the three-dimensional direction is provided inside a high vacuum chamber 1 made of iron, for instance. A sample (e.g. LSI) S is set, as it is, on the upper surface of the stage 2. When an electron beam is emitted from an electron beam generating element 3, it is turned to be a fine-bundle electron beam SB by the operations of a condenser lens 4, and electron beam scanning element 5 and an objective lens 6 and applied to the sample S. A transmitted X-ray PX transmitted through the sample S, out of X-rays generated when the electron beam SB strikes on the samples S, falls on the detecting surface of an X-ray detector (e.g. a semiconductor X-ray detector, three units of which are provided below the stage 2 with appropriate spacing therefrom) 9. by displacing the stage 2 three-dimensionally on the occasion, the X-ray PX passes through each part of the sample S, and therefore the external shape or the internal structure of the sample S can be measured three-dimensionally.

8. 发明专利

JP2000258340A SUBSTANCE IDENTIFICATION APPARATUS 失效
公开(公告)号：JP2000258340A
公开(公告)日：2000-09-22
申请号：JP5897499
申请日：1999-03-05
申请人： HORIBA LTD
发明人： OSAWA SUMUTO , OHORI KENICHI , SATAKE TSUKASA , KOMATANI SHINTARO
IPC分类号： G01N23/223 , G01N21/27 , G01N21/35 , G01N21/65 , G01N23/225 , G02B21/06
摘要： PROBLEM TO BE SOLVED: To provide a substance identification apparatus by which an unknown substance can be identified quickly and simply. SOLUTION: The same position of a sample 2 on a sample stage 1 is irradiated simultaneously with an electron beam or X-rays (a) and infrared rays (b). Secondary X-rays (c), (e) which are generated in the sample 2 at this time are detected by X-ray detectors 5, 10. Reflected infrared rays (d) or transmitted infrared rays (f) which are generated in the sample 2 are detected by infrared detectors 8, 11. Outputs of the respective detectors 5, 10, 8, 11 are processed respectively by a secondary-X-ray-signal processing part 12 and an FT-IR-signal processing part 13. On the basis of their signal processed results, the sample 2 is identified.

9. 发明专利

JPH10260144A ENERGY DISPERSION TYPE X-RAY MICRO ANALYZER 失效
公开(公告)号：JPH10260144A
公开(公告)日：1998-09-29
申请号：JP8760497
申请日：1997-03-20
申请人： HORIBA LTD
发明人： OHORI KENICHI
IPC分类号： G01N23/225 , H01J37/22 , H01J37/256
摘要： PROBLEM TO BE SOLVED: To provide an energy dispersion type X-ray micro analyzer which can indicate both images of electron microscope and EDX (X-ray analyze) in an easily visible form through simple operation even when the indication screen is small. SOLUTION: This analyzer consists of an electron microscope 2, an energy dispersion type X-ray analyzer 3 and a computer 1 for controlling them, and it indicates the electron microscope image 5 obtained by the electron microscope 2 and the X-ray spectrum and X-ray image 6 obtained by the X-ray analyzer 3, on the screen 4A of an indicator 4 connected to the computer 1. In this case, the indication pattern of both the images 5 and 6 is preset to indicate the image corresponding to the analysis mode.

10. 发明专利

JPH0886762A METHOD FOR IDENTIFYING MATERIAL CONTAINED IN SAMPLE AND METHOD FOR MEASURING ITS DISTRIBUTION 失效
公开(公告)号：JPH0886762A
公开(公告)日：1996-04-02
申请号：JP24884594
申请日：1994-09-16
申请人： HORIBA LTD
发明人： OHORI KENICHI , BANDO ATSUSHI , YURUGI TOSHIKAZU
IPC分类号： G01N23/225 , H01J37/256
摘要： PURPOSE: To enable directly identifying the constituent materials of a sample without performing spectrum analysis and element identification for each of the materials by originating a characteristic X-ray image, a computed image and a scatter diagram for each of the elements of the sample, and comparing a preregistered material with data on the scatter diagram. CONSTITUTION: A sample 3 is scanned and illuminated by an electron beam 4. Characteristic X-rays 8 are detected 7 and the number of the X-rays 8 is counted 9. As the counted value of the X-rays 8 is stored 11, characteristic X-ray images are obtained. An appropriate combination of coefficients is calculated 12 and the characteristic X-ray images are multiplied by the coefficients and then added together to originate computed images. A scatter diagram showing the correlation between two of the computed images is originated 12. From a standard spectrum stored on a disk, the computing unit 12 calculates the characteristic X-ray intensity of an element corresponding to the characteristic X-ray image and calculates coordinates on the scatter diagram. A display device 13 determines whether or not the coordinates of the region of the scatter diagram overlap signs; if so, a material A shown in the spectrum is judged to be present in the sample 3.

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