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1. 发明专利

JP2005235474A Signal particle detector and electron beam analyzer 有权
标题翻译：信号粒子检测器和电子束分析仪
公开(公告)号：JP2005235474A
公开(公告)日：2005-09-02
申请号：JP2004040856
申请日：2004-02-18
申请人： Horiba Ltd , Okutekku:Kk , 株式会社オクテック , 株式会社堀場製作所
发明人： OKUMURA KATSUYA , IHI HIROYUKI , OKADA YOSHIAKI
IPC分类号： G01N23/225 , H01J37/244
摘要： PROBLEM TO BE SOLVED: To provide a signal particle detector 1 that allows a significant reduction of size and has significant flexibility in an arranged position and an installation mode, for the signal particle detector 1 for detecting signal particles B, such as electrons, photons, and ions; and to provide an electron beam analyzer that allows reduction of size using the signal particle detector 1.
SOLUTION: A detector body 2 formed of semiconductors 21, 22 that make a PN junction structure or a PIN junction structure is provided, wherein the signal particles B incident from a detecting surface 2a set on the surface of the detector body 2 is detected as a current under the condition with a reverse bias voltage applied to the detector body 2, the detector body 2 is configured to thin film-like so as to have flexibility, and made so as to stick along the curved retention surface of the detector.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供信号粒子检测器1，其能够显着地减小尺寸并且在布置位置和安装模式下具有显着的灵活性，对于信号粒子检测器1，用于检测诸如电子的信号粒子B ，光子和离子; 并提供使用信号粒子检测器1来减小尺寸的电子束分析仪。解决方案：提供由形成PN结结构或PIN结结构的半导体21,22形成的检测器体2，其中在设置在检测器主体2的表面上的检测面2a入射的信号粒子B在施加到检测器主体2的反向偏置电压的条件下被检测为电流，检测器主体2被构造为薄膜状以具有柔性，并使其沿着检测器的弯曲保持表面粘着。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP2012013423A X-ray stress measuring apparatus 审中-公开
标题翻译： X射线应力测量装置
公开(公告)号：JP2012013423A
公开(公告)日：2012-01-19
申请号：JP2010147324
申请日：2010-06-29
申请人： Horiba Ltd , Nippon Steel Corp , 新日本製鐵株式会社 , 株式会社堀場製作所
发明人： MIYOSHI YOSHIO , HOSOKAWA YOSHINORI , TANAKA HIRONORI , OKADA AKIRA , FUJII AKIRA , MATSUMOTO KOICHI , OKADA YOSHIAKI
IPC分类号： G01N23/207 , G01L1/25 , G21K3/00
摘要： PROBLEM TO BE SOLVED: To provide an X-ray stress measuring apparatus capable of accurately discriminating a diffracted X-ray peak without influence from background fluorescent X-rays, even in the case that X-ray irradiation density to an object to be measured is enhanced.SOLUTION: An X-ray stress measuring apparatus comprises an X-ray irradiating means for irradiating X-rays to a metal sample surface, an X-ray detecting means for detecting diffracted X-rays emitting from the metal sample surface, and a calculating means for calculating a stress of a metal based on a change in wavelength of the diffracted X-rays, where a Ti filter and a Cl compound filter is disposed between the X-ray detecting means and the metal sample surface. Alternatively, a filter containing Ti and a Cl compound may be used. The Ti filter reduces fluorescent X-rays of Fe, and the Cl compound filter reduces fluorescent X-rays of Ti.
摘要翻译：要解决的问题：为了提供能够在不受背景荧光X射线影响的情况下精确地识别衍射X射线峰值的X射线应力测量装置，即使在对对象的X射线照射密度被测量得到增强。解决方案：X射线应力测量装置包括用于将X射线照射到金属样品表面的X射线照射装置，用于检测从金属样品表面发射的衍射X射线的X射线检测装置，以及用于根据衍射X射线的波长变化计算金属的应力的计算装置，其中在X射线检测装置和金属样品表面之间设置有Ti过滤器和Cl复合过滤器。或者，可以使用含有Ti和Cl化合物的过滤器。 Ti过滤器减少Fe的荧光X射线，Cl复合过滤器减少Ti的荧光X射线。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2005043263A Signal detector 审中-公开
标题翻译：信号检测器
公开(公告)号：JP2005043263A
公开(公告)日：2005-02-17
申请号：JP2003278680
申请日：2003-07-23
申请人： Horiba Ltd , Okutekku:Kk , 株式会社オクテック , 株式会社堀場製作所
发明人： OKUMURA KATSUYA , IHI HIROYUKI , OKADA YOSHIAKI
IPC分类号： G01N23/207 , G01N23/225 , G01N23/227 , G01T1/24 , H01J37/244 , H01L31/09
摘要： PROBLEM TO BE SOLVED: To contribute to reduction of the size of overall electron microscope and improve the degrees of freedom of installation and utilization of electron microscope, by providing a signal detector capable of drastically reducing the size.
SOLUTION: The signal detector comprises N-type semiconductors 31 and P-type semiconductors 32. By reverse-biasing the semiconductors 31 and 32, a depletion layer DR is formed at their boundary and the signal detector detects secondary electrons SE entered in the depletion layer DR. Each of the semiconductors 31, 32 is alternately exposed to a surface 3a, and is constituted so as to form the depletion layer DR extending along the surface exposure section of the other semiconductor 31 pinched by either one of semiconductors 32.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过提供能够显着减小尺寸的信号检测器，有助于减小整个电子显微镜的尺寸并提高电子显微镜的安装和利用的自由度。
解决方案：信号检测器包括N型半导体31和P型半导体32.通过反向偏置半导体31和32，在其边界处形成耗尽层DR，并且信号检测器检测输入的二次电子SE 耗尽层DR。半导体31,32中的每一个交替地暴露于表面3a，并且构成为形成沿着由半导体32中的任一个夹持的另一个半导体31的表面曝光部分延伸的耗尽层DR。版权所有：（C）2005，JPO＆NCIPI

4. 发明专利

JP2005044676A Signal electronic detector 有权
标题翻译：信号电子探测器
公开(公告)号：JP2005044676A
公开(公告)日：2005-02-17
申请号：JP2003278679
申请日：2003-07-23
申请人： Horiba Ltd , Okutekku:Kk , 株式会社オクテック , 株式会社堀場製作所
发明人： OKUMURA KATSUYA , IHI HIROYUKI , OKADA YOSHIAKI
IPC分类号： H01J37/244
摘要： PROBLEM TO BE SOLVED: To contribute to downsizing of the whole electronic microscope, and improve installation flexibility and utilization flexibility of the electronic microscope by providing a signal electron detector in which a remarkable downsizing is possible.
SOLUTION: This is the detector of a signal electron SE which is ejected when an electron beam EB passed through an electron beam transmitting hole 2 penetrated through the center and irradiated onto a sample W, and is provided with the detector main body 3 shaped in such a board state that a P-type semiconductor and an N-type semiconductor are joined directly or via an intrinsic semiconductor so that a detecting face 3a of the signal electron SE will be formed on one end face facing the sample W side, and a package 4 integrally mounted on the detector main body 3. Then, the package 4 is arranged at least at the outside of a side peripheral face of the detector main body 3, and one part or the whole of the outer face of the package 4 is formed by an electrode 42.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过提供可以显着缩小尺寸的信号电子检测器，有助于整个电子显微镜的小型化，并提高电子显微镜的安装灵活性和利用灵活性。解决方案：这是当电子束EB通过电子束透过孔2穿过中心并照射到样品W上时的信号电子SE的检测器，并且设置有检测器主体3 在这样的板状态下，使P型半导体和N型半导体直接或通过本征半导体结合，使得信号电子SE的检测面3a将形成在面向样品W侧的一个端面上，以及一体地安装在检测器主体3上的封装4.然后，封装4至少布置在检测器主体3的侧面的外侧，并且封装的一个或整个外表面 4由电极42形成。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2005026026A Field emission type electron gun 有权
标题翻译：场发射型电子枪
公开(公告)号：JP2005026026A
公开(公告)日：2005-01-27
申请号：JP2003189071
申请日：2003-06-30
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO , OKADA YOSHIAKI , OHORI KENICHI
IPC分类号： H01J37/067
摘要： PROBLEM TO BE SOLVED: To provide a field emission type electron gun free from complicated alignment work and possible to be miniaturized and simplified in structure.
SOLUTION: A cathode 1 and an extractor 3 are unified to form a structure 6, and the structure 6 and an anode 4 are respectively provided with fitting parts 19 and 21. Positioning of the structure 6 and the anode 4 is performed by a positioning member 17 formed with a first fitting part 18 and a second fitting part 20 having dimension considering a coefficient of thermal expansion so that these fitting parts can be fitted to the fitting parts 19 and 21 without generating looseness when operating.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种没有复杂对准工作的场发射型电子枪，并且可以小型化和简化结构。解决方案：阴极1和提取器3被一体化以形成结构6，结构6和阳极4分别设有配件部分19和21.结构6和阳极4的定位由定位构件17，其形成有第一装配部分18和第二装配部分20，其具有考虑到热膨胀系数的尺寸，使得这些装配部件可以在操作时不产生松动而被装配到装配部分19和21。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JPH01316683A X-RAY DETECTOR 失效
公开(公告)号：JPH01316683A
公开(公告)日：1989-12-21
申请号：JP14951688
申请日：1988-06-17
申请人： NAT INST RES INORGANIC MAT , HORIBA LTD
发明人： NAKAZAWA HIROMOTO , HOSOKAWA YOSHINORI , WAKIYAMA YOSHIHIRO , OKADA YOSHIAKI
IPC分类号： G01N23/223 , G01N23/20 , G01T1/24 , G01T1/28 , G01T1/36
摘要： PURPOSE:To execute the spectral measurement of a secondary X-ray with good accuracy by forming an X-ray detector to a hollow shaft structure, forming the X-ray incident window thereof to an annular shape and irradiating a sample with the X-ray via an X-ray guide body. CONSTITUTION:The semiconductor X-ray detector 3 is formed to the hollow shaft structure having a hollow part 4 at the center thereof. The X-ray window 5 which is provided on the front surface thereof and consists of, for example, beryllium, etc., is formed to the annular shape. The secondary X-ray (fluorescence, diffracted X-ray, Compton scattered X-ray) is generated from the surface of the sample S when the sample is irradiated with the X-ray 8 from the X-ray source via the X-ray guide body 7 inserted in the hollow body 4. This secondary X-ray enters the detector 3 via the incident window 5. The X-ray from the outside is made to arrive efficiently at the sample part in this way; in addition, the taking-out angle constant with respect to the primary X-ray is obtd. by maintaining the specified distance between the end of the guide body 7 and the sample S. The large effective detection stereoscopic angle is obtd. by extremely shortening said distance.

7. 发明专利

JPS62237328A EVAPORATION LOSS METER OR RESIDUAL VOLUME METER FOR LOW-TEMPERATURE LIQUEFIED GAS 失效
公开(公告)号：JPS62237328A
公开(公告)日：1987-10-17
申请号：JP8031886
申请日：1986-04-08
申请人： HORIBA LTD
发明人： OKADA YOSHIAKI , ANDO SHINGO
IPC分类号： G01G17/04 , G01F23/00
摘要： PURPOSE:To exactly and continuously measure the evaporation loss of a low- temp. liquefied gas by hermetically closing a low-temp. liquefied gas vessel, and providing a gas lead-out passage for introducing an evaporating gas to be generated by the evaporation of the low-temp. liquefied gas to said vessel. CONSTITUTION:A shielding body 1 consists of a shieldable material such as lead and a measuring chamber 2 of a suitable volume is internally formed thereto. A semiconductor radiation detector 3 is provided with a semiconductor sensor of germanium, etc. provided in the measuring chamber 2 and is so constituted as to be cooled by liquid nitrogen LG as the low-temp. liquefied gas. A liquid nitrogen supply path 8 is so formed that one end thereof is inserted through a hermetic plug 5 so as to face the inside of the vessel 4. A plug body 9 is provided to the other end of the supply path. The gas lead-out path 10 is so formed that one end thereof is inserted through the plug 5 to face the inside of the vessel 4 and leads out the evaporating gas G. The evaporation loss of the liquid nitrogen LG is, therefore, determined by measuring the flow rate of the gas by a gas flow meter 11 provided in the path 10.

8. 发明专利

JPS6263881A RADIATION DETECTOR 失效
公开(公告)号：JPS6263881A
公开(公告)日：1987-03-20
申请号：JP20587885
申请日：1985-09-14
申请人： HORIBA LTD
发明人： TOMITA KATSUHIKO , KATSUKI MASARU , OKADA YOSHIAKI , ANDO SHINGO , KUMAKURA KOICHI , NAKANE MASAMI , KANAMORI SEIKO , NAKAJIMA KAZUO
IPC分类号： G01T1/20
摘要： PURPOSE:To use a scintillator which is excellent in its workability, by sticking the scintillator consisting of a crystal and an optical sensor made of a semiconductor, by an adhesive agent layer which is incorporated with a fluorescent material whose wavelength characteristic is similar to a wavelength characteristic of this optical sensor. CONSTITUTION:A scintillator 1 consisting of a CsI (Tl) single crystal, and a single crystal Si optical sensor 2 are stuck to each other by an adhesive agent layer 3 which is incorporated with a fluorescent material of DTTC, etc. into transparent Si. A part which does not contact to the adhesive agent layer 3 of the scintillator 1 is covered with a metallic vapor-deposited film 4, and prevents a beam from the outside from being made incident. The whole surface of the metallic film 4 is covered with a humidity preventive layer 5 made of an acryl resin. An electrode 7 of the optical sensor 2 is grounded, and an electrode 6 is connected to a bias voltage use terminal 9 and a pre-amplifier 8. Light which has been emitted from the scintillator 1 is converted to light of a wavelength of a high sensitivity of the optical sensor 2 by the fluorescent material which has been mixed into the adhesive agent layer 3, therefore, the scintillator having a good workability, of CsI (Tl), etc. can be used.

9. 发明专利

JPH075127A X-RAY FLUORESCENCE ANALYTIC METHOD FOR SULFUR 失效
公开(公告)号：JPH075127A
公开(公告)日：1995-01-10
申请号：JP16754193
申请日：1993-06-14
申请人： HORIBA LTD
发明人： KIRA AKIMICHI , HOSOKAWA YOSHINORI , OKADA YOSHIAKI , MIZUTA MASAO
IPC分类号： G01N23/223
摘要： PURPOSE:To provide an X-ray fluorescence analytic method for sulfur in which the concentration of sulfur can be measured highly accurately by employing a standard sample exhibiting stabilized quality for a long term. CONSTITUTION:In an X-ray fluorescence analytic method for determining the concentration of sulfur in a sample using a working curve obtained from a standard sample, and the ration between the fluorescent X-rays and the scattering X-rays emitted from a sample upon irradiation with primary X-rays 2, a simulation sample 10 comprising a simulation sample body 11 of molybdenum and an X-ray absorber 12 is substituted for the standard sample.

10. 发明专利

JPH05188018A FLUORESCENT X-RAY ANALYSIS DEVICE 失效
公开(公告)号：JPH05188018A
公开(公告)日：1993-07-27
申请号：JP2318692
申请日：1992-01-12
申请人： HORIBA LTD
发明人： KOMATANI SHINTARO , WAKIYAMA YOSHIHIRO , OKADA YOSHIAKI , HOSOKAWA YOSHINORI
IPC分类号： G01N23/223 , H05G1/00 , H05G1/26 , H05G1/32 , H05G1/54
摘要： PURPOSE:To enable the deterioration, the time of exchange, and the durability of an X-ray tube to be surly recognized in a daily analysis work by achieving a constant monitoring of the control grid voltage a grid. CONSTITUTION:The current of an X-ray tube IX passes a detecting resistance 14 through a cathode 9, leading to generation of the detected voltage VX at the resisitance 14. This voltage signal VX is compared with the set voltage VR in a comparator 13, and the compared results are fed back to the first grid 18 through a level converter 20. Thus, the primary X-ray 3 is generated by making the thermoelectron 11 impinge against a target 16 while controlling the control grid voltage, and the sample is irradiated with the primary X-ray to implement the desired analysis. When the analysis is implemented, the control grid voltage of the grid 18 is received by the CPU 22 through an AD converter 21, when, a person in charge of the analysis, e.g. outputs this so as to confirm the control grid voltage, or output an alarm.

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