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2. 发明专利

JP2003337104A Mapping measuring apparatus 审中-公开
标题翻译：映射测量装置
公开(公告)号：JP2003337104A
公开(公告)日：2003-11-28
申请号：JP2002100208
申请日：2002-04-02
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： ISHIDA TOSHIMASA , TAKEDA KOICHI
IPC分类号： G01B11/06 , G01N21/41 , G01N21/64 , G01N21/65
摘要： PROBLEM TO BE SOLVED: To provide a mapping measuring apparatus capable of mapping a sample in uniform density by improving a method for driving a sample moving stage for measuring mapping.
SOLUTION: The mapping measuring apparatus includes the stage 2; a mapping means for supplying mapping light signals for the surface of the sample 1 supported on the stage at regular time intervals and acquiring signal light; a drive mechanism for driving the stage 2 by combining a rotating movement and a rectilinear movement in a direction orthogonal to the axis of the rotation; a drive signal generating circuit for generating a drive signal for the drive mechanism; and a means for processing and outputting a detection signal. The drive signal comprises a rectilinear movement speed signal (dr/dt) and a rotation speed signal (dθ/dt) and provides relationship predetermined so that spots of the mapping signal are located in a helical curve between them and that the intervals of the spots in the spiral curve become equal to one another.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种能够通过改进用于驱动用于测量映射的样本移动台的方法来以均匀密度映射样本的映射测量装置。
解决方案：映射测量装置包括阶段2; 映射装置，用于以规则的时间间隔提供支撑在舞台上的样本1的表面的映射光信号并获取信号光; 驱动机构，用于通过在与旋转轴线正交的方向上组合旋转运动和直线运动来驱动平台2; 用于产生驱动机构的驱动信号的驱动信号发生电路; 以及用于处理和输出检测信号的装置。驱动信号包括直线运动速度信号（dr / dt）和转速信号（dθ/ dt），并提供预定的关系，使得映射信号的点位于它们之间的螺旋曲线中，并且点的间隔在螺旋曲线中彼此相等。版权所有（C）2004，JPO

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