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1. 发明专利

JP2008059759A Vacuum device, high voltage applying unit used for it 审中-公开
标题翻译：真空设备，高压应用单元
公开(公告)号：JP2008059759A
公开(公告)日：2008-03-13
申请号：JP2006231509
申请日：2006-08-29
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO
IPC分类号： H01J37/26 , H01J5/06 , H01J37/065
摘要： PROBLEM TO BE SOLVED: To miniaturize a high voltage applying unit in its axial direction as well as its diameter direction while maintaining withstand voltage properties of the unit.
SOLUTION: This vacuum device is equipped with a vacuum vessel 2, an electrode 8 provided in the vacuum vessel 2, and the high voltage applying unit 4 provided on the outer wall 21 of the vacuum vessel 2 to apply a voltage to the electrode 8 from the outside. The high voltage applying unit 4 is equipped with a high voltage applying terminal 41 one end of which is provided on the atmosphere side, the other end of which is provided on the vacuum side, and the other end of which electrically makes contact with the electrode to apply the voltage, an insulator 42 having insulating properties through which the high voltage applying terminal passes, one end of which is provided on the atmosphere side, and the other end of which is provided on the vacuum side, and a flange part 43 through which the insulator 42 passes, and which is air-tightly attached to the outer wall 21 of the vacuum vessel. The outside periphery 42a of the insulator 42 projecting to the atmosphere side and the vacuum side from the flange part 43 is brought into a non-contact state, and also recessed and projecting parts are provided on the outside periphery 42a of the insulator 42.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了使高压施加单元在其轴向以及其直径方向上的小型化，同时保持单元的耐受电压特性。解决方案：该真空装置配备有真空容器2，设置在真空容器2中的电极8和设置在真空容器2的外壁21上的高压施加单元4，以向电极8从外面。高压施加单元4配备有高压施加端子41，其一端设置在大气侧，另一端设置在真空侧，另一端与电极接触为了施加电压，具有绝缘性能的绝缘体42，高压施加端通过该绝缘体42，其一端设置在大气侧，另一端设置在真空侧，凸缘部43通过绝缘体42通过，并且气密地附接到真空容器的外壁21。突出于大气侧的绝缘体42的外周42a和凸缘部43的真空侧成为非接触状态，凹凸部设置在绝缘体42的外周42a上。 P>版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2008053121A Magnetic shield apparatus and magnetic shielding method 审中-公开
标题翻译：磁屏蔽装置及磁屏蔽方法
公开(公告)号：JP2008053121A
公开(公告)日：2008-03-06
申请号：JP2006229769
申请日：2006-08-25
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO
IPC分类号： H01J37/16
摘要： PROBLEM TO BE SOLVED: To obtain a magnetic shielding function which is equivalent to that using high permeability soft magnetic material such as permalloy by using low cost material, and to shield an outside magnetic field without affecting electron beam.
SOLUTION: The magnetic shield apparatus is provided with a casing 3 composed of low permeability magnetic material such as iron or silicon steel storing an electron apparatus 1, and an exciting coil 4 wound around (a side wall of) the casing 3 and magnetizing the casing 3 by making current I flow through it. The exciting coil 4 generates the magnetic field along the electron beam EB of an electron beam apparatus 1. Furthermore, the casing 3 is magnetized so that the magnetism in the casing 3 is not saturated.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了获得与使用低合金材料的坡莫合金等高磁导率软磁性材料相当的磁屏蔽功能，并且能够在不影响电子束的情况下屏蔽外部磁场。解决方案：磁屏蔽装置设置有壳体3，壳体3由存储电子设备1的铁或硅钢等低磁导率磁性材料和围绕壳体3（侧壁）的励磁线圈4和通过使电流I流过壳体3来磁化壳体3。励磁线圈4沿着电子束装置1的电子束EB产生磁场。此外，壳体3被磁化，使得壳体3中的磁性不饱和。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2005026026A Field emission type electron gun 有权
标题翻译：场发射型电子枪
公开(公告)号：JP2005026026A
公开(公告)日：2005-01-27
申请号：JP2003189071
申请日：2003-06-30
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO , OKADA YOSHIAKI , OHORI KENICHI
IPC分类号： H01J37/067
摘要： PROBLEM TO BE SOLVED: To provide a field emission type electron gun free from complicated alignment work and possible to be miniaturized and simplified in structure.
SOLUTION: A cathode 1 and an extractor 3 are unified to form a structure 6, and the structure 6 and an anode 4 are respectively provided with fitting parts 19 and 21. Positioning of the structure 6 and the anode 4 is performed by a positioning member 17 formed with a first fitting part 18 and a second fitting part 20 having dimension considering a coefficient of thermal expansion so that these fitting parts can be fitted to the fitting parts 19 and 21 without generating looseness when operating.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种没有复杂对准工作的场发射型电子枪，并且可以小型化和简化结构。解决方案：阴极1和提取器3被一体化以形成结构6，结构6和阳极4分别设有配件部分19和21.结构6和阳极4的定位由定位构件17，其形成有第一装配部分18和第二装配部分20，其具有考虑到热膨胀系数的尺寸，使得这些装配部件可以在操作时不产生松动而被装配到装配部分19和21。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2008151518A Apparatus for measuring sample 审中-公开
标题翻译：用于测量样品的装置
公开(公告)号：JP2008151518A
公开(公告)日：2008-07-03
申请号：JP2006336712
申请日：2006-12-14
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AOYAMA JUNICHI , SAIJO YUTAKA , AWATA SHOGO , NISHIKATA KENTARO
IPC分类号： G01N21/62 , G01L1/00 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for measuring sample, having low transfer magnification that is not affected by the size of a sample.
SOLUTION: The apparatus for measuring sample 1, that measures a light CL emitted by irradiating the sample W with an energy beam EB, is equipped with: a sample housing part 2 for housing the sample W; an energy beam irradiating part 3 for irradiating the sample W, in the sample housing part 2 with an energy beam EB; a condensing mirror 41 for condensing the light CL, emitted from the sample W irradiated with the energy beam EB; and an optical fiber 42 for receiving the light CL, condensed by the condensing mirror 41, to transmit the same to the outside of the sample housing part 2. The optical fiber 42 is supported in the inside of the sample housing part 2 by the support part 42a, located close to the condensing mirror 41 and the support part 42b that is located far from the condensing mirror 41.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种不受样品尺寸影响的低转印倍率的样品测量装置。解决方案：用于测量通过用能量束EB照射样品W发射的光CL的测量样品1的装置配备有：用于容纳样品W的样品容纳部分2; 能量束照射部3，用于用能量束EB照射在样本容纳部2中的样本W; 聚光镜41，用于冷凝从能量束EB照射的样品W发射的光CL; 以及用于接收由聚光镜41聚光的光CL的光纤42，将其透射到样品容纳部2的外侧。光纤42由支撑体支撑在样本容纳部2的内侧部分42a，靠近聚光镜41和位于远离聚光镜41的支撑部分42b。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2004093526A Cathode luminescence analysis apparatus 有权
公开(公告)号：JP2004093526A
公开(公告)日：2004-03-25
申请号：JP2002258588
申请日：2002-09-04
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO , KOMATANI SHINTARO , OHORI KENICHI , ISHIDA TOSHIMASA
IPC分类号： G01N21/62 , H01J37/147 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive and high operability cathode luminescence (CL) analysis apparatus simply operated for analysis, not complicating an electronic optical system and eliminating a necessity for embedding an expensive lock-in amplifier in a signal processing system.
SOLUTION: In the CL analysis apparatus having a detector for detecting cathode luminescence 23 emitted from a sample 21 when an electron beam e is radiated from an electron gun 13 to the sample 21, it is characterized in that an emission direction 11 of the electron beam from the electron gun 13 is at an angle to a line between the electron gun 13 and the sample 21.
COPYRIGHT: (C)2004,JPO

6. 发明专利

JP2008116016A Gate valve 审中-公开
标题翻译：闸阀
公开(公告)号：JP2008116016A
公开(公告)日：2008-05-22
申请号：JP2006302141
申请日：2006-11-07
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO
IPC分类号： F16K3/18 , F16K3/04 , F16K31/524 , F16K51/02
摘要： PROBLEM TO BE SOLVED: To provide a gate valve capable of easily and surely opening-closing an opening while allowing downsizing of an entire device. SOLUTION: This gate valve has a shaft member 21 supported by a side wall having an inner wall surface substantially vertical to a partition wall and advancing and retreating along the partition wall, a slider member 22 arranged in a tip part of the shaft member 21, a shutter member 23 relatively movably supported by the slider member 22 and opening-closing the opening, and a movement converting mechanism for moving the shutter member 23 in the opening direction of the opening by using force received from the shaft member 21 to the shutter member 23, and is characterized by closing the opening, by moving in the direction turning to the opening by the movement converting mechanism, by receiving pressing force from the shaft member 21 to the shutter member 23, after pressing and fixing the slider member 22 to the inner wall surface by the advancing movement of the shaft member 21. The movement converting mechanism may be an inclined face. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够容易且可靠地打开开口的闸阀，同时允许整个装置的小型化。解决方案：该闸阀具有由侧壁支撑的轴构件21，该侧壁具有大致垂直于分隔壁的内壁表面并沿着分隔壁前进和后退;滑块构件22，布置在轴的顶端部分中构件21，由滑动构件22相对移动地支撑并打开开口的活门构件23，以及移动转换机构，用于通过使用从轴构件21接收的力将开闭构件23沿开口方向移动到开口方向，闸门构件23，其特征在于，通过在从轴构件21到闸门构件23的按压力的同时，在按压和固定滑动构件之后，通过沿着通过移动转换机构转动到开口的方向移动而关闭开口 22通过轴构件21的前进运动而连接到内壁表面。移动转换机构可以是倾斜面。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2008107335A Cathode luminescence measuring device and electron microscope 有权
标题翻译：阴极荧光测量装置和电子显微镜
公开(公告)号：JP2008107335A
公开(公告)日：2008-05-08
申请号：JP2007249887
申请日：2007-09-26
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO
IPC分类号： G01N21/62 , H01J37/141 , H01J37/252 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a cathode luminescence measuring device capable of implementing high-resolution observation with an electron microscopy and high-resolution observation of cathode luminescence despite of simple configuration.
SOLUTION: The device 1 for measuring a cathode luminescence CL generated by irradiating an electron ray EB to a sample W includes an electromagnetic objective lens 75 for converging the electron ray EB to be irradiated to the sample W and a condensing mirror section 411 for condensing cathode luminescence CL generated from the sample W to which the electron ray EB is irradiated, and is characterized by preparing the condensing mirror section 411 above the terminal at the sample W side of the electromagnetic objective lens 75 to apply a stray magnetic field from the electromagnetic objective lens 75 to the sample W.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够通过电子显微镜实现高分辨率观察和阴极发光的高分辨率观察的阴极发光测量装置，尽管结构简单。解决方案：用于测量通过向样品W照射电子束EB产生的阴极发光CL的装置1包括用于会聚待照射到样品W的电子束EB的电磁物镜75和聚光镜部411 用于冷凝从照射电子束EB的样品W产生的阴极发光CL，其特征在于在电磁物镜75的样品W侧的端子的上方准备聚光镜部411，以施加来自电磁物镜75到样品W.版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2012028019A Condenser device 有权
标题翻译：冷凝器装置
公开(公告)号：JP2012028019A
公开(公告)日：2012-02-09
申请号：JP2010162715
申请日：2010-07-20
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO , ARAI SHIGETOSHI
IPC分类号： H01J37/285 , G01N21/62
CPC分类号： G02B19/0023 , G01N2223/08 , H01J37/023 , H01J37/228 , H01J37/28 , H01J2237/0458 , H01J2237/24485
摘要： PROBLEM TO BE SOLVED: To achieve simplification of position adjustment of a condenser mirror, improvement in position reproducibility in the position adjustment, and shortening of an adjustment time of the condenser mirror.SOLUTION: The condenser device includes moving mechanisms 8-10 that move the condenser mirror 41 converging light CL emitted from a measurement sample W in an X-axial direction, a Y-axial direction, a Z-axial direction, a tilt direction, and a rotation direction, and the moving mechanisms 8-10 each have a guide for movements in the respective directions, and are configured to move the condenser mirror 41 in the respective directions independently.
摘要翻译：要解决的问题：为了简化聚光镜的位置调整，改善位置调整中的位置再现性，缩短聚光镜的调整时间。解决方案：冷凝器装置包括移动机构8-10，移动机构8-10使聚光镜41将从测量样品W发射的光CL在X轴方向，Y轴方向，Z轴方向，倾斜方向和旋转方向，并且移动机构8-10各自具有用于沿各个方向移动的引导件，并且被构造成独立地在各个方向上移动聚光镜41。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2008235101A Antistatic structure in charged particle beam device 审中-公开
标题翻译：充电粒子束装置中的抗静电结构
公开(公告)号：JP2008235101A
公开(公告)日：2008-10-02
申请号：JP2007075378
申请日：2007-03-22
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO
IPC分类号： H01J37/12 , H01J37/16
摘要： PROBLEM TO BE SOLVED: To prevent an insulator in a charged particle beam device from being electrostatically charged.
SOLUTION: This antistatic structure 8 of a charged particle beam device 1 is characterized by including: the insulators 81 each allowing a charged particle beam EB to pass through the inside thereof; and antistatic films 82 formed at least on the inside surfaces 81a of the insulators 81, and having a specific resistance value of 10
4 -10
10 Ω cm.
COPYRIGHT: (C)2009,JPO&INPIT

10. 发明专利

JP2008144906A Vacuum valve unit 有权
标题翻译：真空阀组
公开(公告)号：JP2008144906A
公开(公告)日：2008-06-26
申请号：JP2006334680
申请日：2006-12-12
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： AWATA SHOGO
IPC分类号： F16K31/50 , F16K1/00 , F16K3/00 , F16K51/02
摘要： PROBLEM TO BE SOLVED: To provide a vacuum valve unit 1 superior in work efficiency and in view of costs to a user, and to facilitate miniaturization and a designing of a vacuum device including the vacuum valve unit 1.
SOLUTION: The vacuum valve unit is provided with: a housing 2 having a container connection port P1, a raw exhaust port P2, and a main exhaust port P3; a raw exhaust valve element 3 carrying out opening and closing of the raw exhaust port P2; a planar sealing type main exhaust valve element 4 carrying out opening and closing of the main exhaust port P3; a raw exhaust valve element operation part for operating movement of the raw exhaust valve element 3; and a main exhaust valve element operation part for operating movement of the main exhaust valve element 4. By operating the raw exhaust valve element operation part and the main exhaust valve element operation part, the raw exhaust valve element 3 and the main exhaust valve element 4 are moved from fully closed states to a raw exhaust state wherein the raw exhaust port P2 is opened and the main exhaust port P3 is closed, or to a main exhaust state wherein the raw exhaust port P2 is closed and the main exhaust port P3 is opened.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种工作效率优异并且为了使用者的成本而设计的真空阀单元1，并且能够实现包括真空阀单元1的真空装置的小型化和设计。解决方案真空阀单元具有容器连接口P1，原料排出口P2，主排气口P3的壳体2，进行原料排出口P2的开闭的原料排气阀元件3; 执行主排气口P3的打开和关闭的平面密封型主排气阀元件4; 用于操作原始排气阀元件3的运动的原始排气阀元件操作部分; 主排气阀元件操作部分，用于操作主排气阀元件4的运动。通过操作原始排气阀元件操作部分和主排气阀元件操作部分，原始排气阀元件3和主排气阀元件4 从完全关闭状态移动到原料排气口P2打开并且主排气口P3关闭的原始排气状态或者排气口P2关闭并且主排气口P3打开的主排气状态。版权所有（C）2008，JPO＆INPIT

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