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1. 发明专利

DE60128846T2 未知
公开(公告)号：DE60128846T2
公开(公告)日：2008-02-14
申请号：DE60128846
申请日：2001-02-28
申请人： HORIBA LTD
发明人： SATAKE TSUKASA , TOMINAGA KOJI , FUNAKUBO HIROSHI
IPC分类号： C30B25/16 , C23C16/40 , C23C16/44 , C23C16/455 , C23C16/52 , G01N21/35 , G01N21/3504 , H01L21/205 , H01L21/31
摘要： This invention provides a thin film depositing process making it possible to form a thin film having a desired composition with good reproducibility and high efficiency; a device therefor; an FTIR gas analyzer used in the thin film depositing process; and a mixed gas supplying device used in the thin film depositing process. In this invention, a thin film depositing process comprises the steps of mixing plural organic metal gases in a gas mixing chamber and supplying the mixed gas into a reaction chamber to deposit a thin film on a substrate set up in the reaction chamber, wherein the mixture ratio between/among the organic metal gases supplied into the gas mixing chamber is measured with an FTIR gas analyzer fitted to the gas mixing chamber and then on the basis of results of the measurement the flow rates of the organic metal gases are individually adjusted.

2. 发明专利

DE19744061A1 Apparatus for determining substances adsorbed by catalyst e.g. gas mixture of CO, NO, O2, C3H6 未知
公开(公告)号：DE19744061A1
公开(公告)日：1998-04-30
申请号：DE19744061
申请日：1997-10-06
申请人： NIPPON SOKEN , HORIBA LTD
发明人： SUMIYA ATSUHIRO , OGATA ITSUHEI , SATAKE TSUKASA , UKON JUICHIRO
IPC分类号： G01N21/27 , G01N21/31 , G01N31/00
摘要： An apparatus determines the types of substance which are adsorbed at the surface of a catalyst esp. a catalytic converter during the processing of IC engine exhaust gases. It comprises an infrared spectrometer (10), computer/keyboard (20/21) and output peripheral (30). The surface under test is irradiated by the spectrometer IR source and the spectra of reflected rays registered by the computer. A signal processing stage reduces the effect of noise and the refined signal is compared with similar stored references using a particular computer algorithm in order to establish the accuracy of coincidence of the two sets of spectral data.

3. 发明专利

DE60128846D1 未知
公开(公告)号：DE60128846D1
公开(公告)日：2007-07-26
申请号：DE60128846
申请日：2001-02-28
申请人： HORIBA LTD
发明人： SATAKE TSUKASA , TOMINAGA KOJI , FUNAKUBO HIROSHI
IPC分类号： C30B25/16 , C23C16/40 , C23C16/44 , C23C16/455 , C23C16/52 , G01N21/35 , G01N21/3504 , H01L21/205 , H01L21/31
摘要： This invention provides a thin film depositing process making it possible to form a thin film having a desired composition with good reproducibility and high efficiency; a device therefor; an FTIR gas analyzer used in the thin film depositing process; and a mixed gas supplying device used in the thin film depositing process. In this invention, a thin film depositing process comprises the steps of mixing plural organic metal gases in a gas mixing chamber and supplying the mixed gas into a reaction chamber to deposit a thin film on a substrate set up in the reaction chamber, wherein the mixture ratio between/among the organic metal gases supplied into the gas mixing chamber is measured with an FTIR gas analyzer fitted to the gas mixing chamber and then on the basis of results of the measurement the flow rates of the organic metal gases are individually adjusted.

4. 发明专利

DE19744061C2 未知
公开(公告)号：DE19744061C2
公开(公告)日：2000-01-05
申请号：DE19744061
申请日：1997-10-06
申请人： NIPPON SOKEN , HORIBA LTD
发明人： SUMIYA ATSUHIRO , OGATA ITSUHEI , SATAKE TSUKASA , UKON JUICHIRO
IPC分类号： G01N21/27 , G01N21/31 , G01N31/00
摘要： An infrared spectrometer disperses a radiation ray from a catalyst which has been exposed to a gas for evaluation to adsorb adsorbates thereon, and outputs spectral data in accordance with a wavenumber of the radiation ray to a computer storing reference data. The computer normalizes the spectral data and the reference data, and then, it calculates a product of the normalized spectral data and the reference data. Thereafter, a function of the product is differentiated with respect to the wavenumber to obtain a differential function. Accordingly, a specified wavenumber for which the differential function is zero is determined, so that the common peak of the spectral data and the reference data at the specified wavenumber is accurately determined.

5. 发明专利

DE19724655A1 Analysing material adsorbed onto catalyst carriers from gases e.g. vehicle exhaust gases 未知
公开(公告)号：DE19724655A1
公开(公告)日：1997-12-18
申请号：DE19724655
申请日：1997-06-11
申请人： NIPPON SOKEN , HORIBA LTD
发明人： OGATA ITSUHEI , SUMIYA ATUHIRO , SATAKE TSUKASA
IPC分类号： G01N31/00 , G01N21/00 , G01N21/35 , G01N21/62 , G01N21/71 , G01N21/75 , G01N21/61 , G01M3/00
摘要： An apparatus that collects and analyses material adsorbed on a solid object (36) consists of an enclosed reaction chamber (30) containing the solid object (36) and the adsorbate formed at elevated temperature from an introduced test gas. The chamber (30) is fitted with a window (39) transparent to infra red. An optical device is operationally linked to the apparatus to collect and analyse the IR radiation emitted by the adsorbate and which passes through the window (39). A cooling device (38) cools the IR transparent window (39). Also claimed is a system for the evaluation of an adsorbed solid that additionally includes equipment for introducing a test gas. A further device evaluates the information provided by the optical device to analyse the adsorbate. Also claimed is such a system that also includes a gas interception device that determines any gas leakage from the enclosed chamber.

6. 发明专利

JP2004053432A Infrared gas analyzer 审中-公开
标题翻译：红外气体分析仪
公开(公告)号：JP2004053432A
公开(公告)日：2004-02-19
申请号：JP2002211919
申请日：2002-07-22
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： SATAKE TSUKASA , TAKADA HIDEJI
IPC分类号： G01N21/35 , G01N21/3504 , G01N21/359 , G01N21/61
摘要： PROBLEM TO BE SOLVED: To provide an infrared gas analyzer that has a detection section with a simple configuration and sensitively detects a single component gas. SOLUTION: In the infrared gas analyzer, a light source 2 is provided at one end of a cell 1 where a sample gas SG is supplied; a thermal infrared sensor 8 for measurement and a thermal infrared sensor 9 for comparison are provided at the other end in parallel; and light with a specific wavelength enters each infrared sensor via a filter 5. The filter is integrated for the thermal infrared sensor for measurement and that for comparison and the section shape of the filter is a quadrangle . In an optical axis 10 in a parallelogram, two vertical surfaces 5a, 5d are coated with a reflection protecting film. Then, the surface 5b in surfaces 5b, 5c that are adjacent to the surfaces 5a, 5d and are slanted to the optical axis by a specific angle cuts on light having the shortest wavelength in a plurality of absorption peaks in the component to be measured, allows the light to enter the thermal infrared sensor for measurement. The other surface 5c enables light being reflected on the surface 5b to enter the thermal infrared sensor for comparison. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供具有简单结构的检测部分并且敏感地检测单一组分气体的红外线气体分析仪。解决方案：在红外线气体分析仪中，在供给样品气体SG的电池1的一端设置有光源2，平行地设置用于测量的热红外传感器8和用于比较的热红外传感器9，并且具有特定波长的光通过滤光器5进入每个红外传感器。滤光器被集成用于热红外传感器用于测量，并且用于比较，并且滤光器的截面形状是四边形。在平行四边形的光轴10中，两个垂直表面5a，5d涂覆有反射保护膜。然后，表面5b，5c的与表面5a，5d相邻并且以特定角度向光轴倾斜一定角度的表面5b切割在待测量部件中的多个吸收峰中具有最短波长的光，允许光进入热红外传感器进行测量。另一个表面5c使得能够在表面5b上反射的光进入热红外传感器进行比较。版权所有（C）2004，JPO

7. 发明专利

JP2004031398A Probe for monitoring light emission in plasma process 审中-公开
公开(公告)号：JP2004031398A
公开(公告)日：2004-01-29
申请号：JP2002181132
申请日：2002-06-21
申请人： Horiba Ltd , Stec Inc , 株式会社エステック , 株式会社堀場製作所
发明人： SATAKE TSUKASA , HARA KIYOAKI
IPC分类号： C23C14/00 , C23C16/44 , H01L21/203 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a probe for monitoring light emission capable of quickly preventing the adhesion of a processing material to the surface of an optical window and stably performing optical measurement without fluctuation of transmissivity of plasma light for a long period.
SOLUTION: An incident opening 4 of the plasma light 3 in a plasma process is placed on one end side of a probe body 2 and the optical window 8 is placed on the other end side. The probe 1 for monitoring the light emission in the plasma process is constructed so that the plasma light 3 incident on the probe body 2 through the incident opening 4 is led out through the optical window 8. The adhesion of the growing processing material 18 to the optical window 8 is prevented in the plasma process by providing gas without adverse influence to gas used in the plasma process as protecting gas 11 into the probe body 2 so as to increase gas pressure thereof higher than that in the plasma process.
COPYRIGHT: (C)2004,JPO

8. 发明专利

JP2003091618A GREENHOUSE EFFECT GAS EMISSION INDEX CONVERTING SYSTEM AND METHOD 审中-公开
公开(公告)号：JP2003091618A
公开(公告)日：2003-03-28
申请号：JP2001284458
申请日：2001-09-19
申请人： HORIBA LTD
发明人： SATAKE TSUKASA
IPC分类号： G06Q10/00 , G06Q50/00 , G06Q50/10 , G06Q50/26 , G06F17/60
摘要： PROBLEM TO BE SOLVED: To provide a greenhouse effect gas emission index converting system and a greenhouse effect gas emission index converting method capable of performing the conversion of the emission index of the greenhouse effect gas on the basis of the input information by using a predetermined conversion formula. SOLUTION: This greenhouse effect gas emission index converting system has an information input part 9 for getting the conversion formula 10a for conversion into the emission index M of the greenhouse effect gas, and each constant GWP, Ci, Bi, etc., through the Internet 6, an input part 8 for inputting various datum Q, C, FC, h, P, a, d for calculating the emission index M of the greenhouse effect gas, an operation processing part 10 for converting the data from the input part 8 in accordance with the converting information obtained from the information input part 9, and calculating the emission index M of the greenhouse effect gas, and an information output part 11 for outputting the calculated emission index M to the Internet 6.

9. 发明专利

JP2002116050A PORTABLE MEASURING INSTRUMENT AND MEASUREMENT SYSTEM 失效
公开(公告)号：JP2002116050A
公开(公告)日：2002-04-19
申请号：JP2000310068
申请日：2000-10-11
申请人： HORIBA LTD
发明人： SATAKE TSUKASA
IPC分类号： G01D1/00 , G01D1/18 , G01N1/02 , G01N1/22 , G01N33/00 , G01S19/14
摘要： PROBLEM TO BE SOLVED: To provide a portable measuring instrument which can accurately grasp not only the analytic data on a measurement point, but also information regarding the position of the measurement point. SOLUTION: This system comprises a gas analyzing meter 1, which measures the components and the density of contaminants in an atmosphere, a GPS receiver 2 which detects the position information on the measurement point, and a data processing means 4 such as a PC(personal computer) which displays an analytic result computed on the basis of the measured value of the analyzing meter 1 at a display part 7 according to the position information on the measurement point. The display part 7 displays the measurement point on a map so that it is accurately known where the analytic result is obtained as data.

10. 发明专利

JP2001348211A SO3 GENERATOR AND QUANTITATIVE ANALYSIS METHOD OF SO3 USING FOURIER TRANSFORM INFRARED SPECTROMETER 失效
公开(公告)号：JP2001348211A
公开(公告)日：2001-12-18
申请号：JP2000165451
申请日：2000-06-02
申请人： HORIBA LTD
发明人： SATAKE TSUKASA , YOSHIDA MAKOTO , YAMANUKI MIKITO
IPC分类号： G01J3/45 , C01B17/74 , G01N21/35 , G01N21/3504
摘要： PROBLEM TO BE SOLVED: To provide a SO3 generator capable of monitoring the generating of SO3 while considering temperature condition and to provide a quantitative analysis of SO3 using a Fourier transform inferred spectrometer capable of measuring the concentration of SO3 by using the Fourier transform infrared spectrophotometer. SOLUTION: The SO3 generator 1 is for generating SO3 by oxidizing SO2, and is constituted so as to oxidize SO2 having a known concentration in an inert gas as a base to measure the concentration of SO2 and SO3 at the outlet of an oxidation furnace 2 by using the Fourier transform infrared spectrometer and to control the temperature condition in the oxidation furnace 2 based on the signal of the SO3 concentration.

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