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    • 4. 发明专利
    • METHOD AND DEVICE FOR PRETREATING SAMPLE FOR ANALYZING METAL
    • JP2001033364A
    • 2001-02-09
    • JP20570399
    • 1999-07-21
    • HORIBA LTD
    • YOSHIDA TOMOYUKIBANDO ATSUSHIIKEDA MASAHIKO
    • G01N31/00G01N1/28G01N1/32
    • PROBLEM TO BE SOLVED: To reduce the scattering of analysis accuracy and at the same time reduce pretreatment time by eliminating the surface contaminant of a sample for analyzing metal by the sand blast method before analysis. SOLUTION: A sample S is installed at a retention means 15 of a device D, air 12 is supplied from an air supply means 5 to a channel 7 for feeding to a nozzle part 11 along with sand particles 13, the nozzle part 11 is moved to an appropriate position and at the same time the sand particles 13 are sprayed on the sample S, and the surface contaminant of the sample S is eliminated. In this case, the distance between the upper surface of the sample S and the tip of the nozzle part 11 is maintained constant, and the nozzle part 11 is moved up and down by a traveling means 14 along to the shape of the sample S. When a specific spraying is completed, the sample S is rotated at an appropriate angle around the axis center by the retention means 15 for spraying the sand particles 13 again, and the operation is repeated for a specific number of times. In this case, when the all required part of the sample S cannot be polished unless the pinching position of the sample S due to the pinching part of the retention means 15 is changed at least once, the pinching position is changed appropriately. Also, the sample S may be retained by a retention means 16.
    • 5. 发明专利
    • Fluorescent x-ray detector and fluorescent x-ray detection method
    • 荧光X射线检测器和荧光X射线检测方法
    • JP2011247882A
    • 2011-12-08
    • JP2011097579
    • 2011-04-25
    • Horiba LtdOsaka City Univ公立大学法人大阪市立大学株式会社堀場製作所
    • TSUJI KOICHIKOMATANI SHINTAROUCHIHARA HIROSHIBANDO ATSUSHI
    • G01N23/223
    • PROBLEM TO BE SOLVED: To provide a fluorescent X-ray detector and a fluorescent X-ray detection method capable of improving the spatial resolution of fluorescent X-ray analysis without reducing the concentration spot of an X-ray lens.SOLUTION: For the fluorescent X-ray detector, the position of the focus of a first X-ray lens 12 for concentrating primary X-rays from an X-ray tube (X-ray source) 11 to the concentration spot (first space) and the position of the focus of a second X-ray lens 22 for condensing fluorescent X-rays from a fetch spot (second space) to be detected by an X-ray detector (detection means) 21 are separated within such a range that the concentration spot and the fetch spot overlap. Only the fluorescent X-rays from a detection region where the concentration spot and the fetch spot overlap are detected, and the size of the detection region is the spatial resolution. Compared to a conventional fluorescent X-ray detector for which the size of the concentration spot is the spatial resolution, the spatial resolution of the fluorescent X-ray analysis is improved.
    • 解决问题:提供能够在不降低X射线透镜的浓度点的情况下提高荧光X射线分析的空间分辨率的荧光X射线检测器和荧光X射线检测方法。 解决方案:对于荧光X射线检测器,第一X射线透镜12的焦点位置用于将来自X射线管(X射线源)11的初级X射线集中到浓度点( 第一空间),并且用于聚集来自X射线检测器(检测装置)21检测的取指点(第二空间))的荧光X射线的第二X射线透镜22的焦点位置在这样的 浓度点和获取点重叠的范围。 只有检测到浓度点和取指点重叠的检测区域的荧光X射线,并且检测区域的大小是空间分辨率。 与其中浓度点的尺寸为空间分辨率的常规荧光X射线检测器相比,荧光X射线分析的空间分辨率提高。 版权所有(C)2012,JPO&INPIT
    • 6. 发明专利
    • Analyzer used with electron microscope apparatus, and second analyzer used with first one
    • 分析仪用电子显微镜装置和第一分析仪
    • JP2007255950A
    • 2007-10-04
    • JP2006077840
    • 2006-03-20
    • Horiba Ltd株式会社堀場製作所
    • BANDO ATSUSHIISHIKAWA SUMIYO
    • G01N23/225
    • PROBLEM TO BE SOLVED: To provide an analyzer used with an excellent electron microscope apparatus capable of shortening the analyzing time and improving the analyzing accuracy by suppressing the occurrence of the contamination on an analysis object surface. SOLUTION: The analyzer used with the electron microscope apparatus P comprises a data storage section 1 for temporarily storing data related to an energy beam other than the energy beam that is emitted from a sample S when the electron microscope apparatus P radiates an electron beam and used for analysis in the electron microscope apparatus P, an electron beam radiation condition variation monitoring section 2 for monitoring whether the variation occurs in the electron beam irradiation condition, and an energy beam analysis section 3 for reading data related to the other energy beam temporarily stored in the data storage section 1 and analyzing the sample S when the electron beam irradiation condition variation monitoring section 2 is referred and the monitoring result of no variation in the electron beam irradiation condition is obtained in analyzing the sample S using the other energy beam. COPYRIGHT: (C)2008,JPO&INPIT
    • 解决问题:提供一种使用优异的电子显微镜装置的分析仪,能够通过抑制分析对象面上的污染的发生而缩短分析时间,提高分析精度。 < P>解决方案:与电子显微镜装置P一起使用的分析装置具有数据存储部1,用于临时存储与电子显微镜装置P放射电子时从样品S发射的能量束以外的能量束有关的数据 并且用于电子显微镜装置P中的分析,用于监测电子束照射条件中是否发生变化的电子束辐射条件变化监测部分2和用于读取与其他能量束相关的数据的能量束分析部分3 临时存储在数据存储部分1中并且当参考电子束照射条件变化监测部分2时分析样本S,并且在使用另一个能量束分析样本S时获得电子束照射条件不变化的监测结果 。 版权所有(C)2008,JPO&INPIT
    • 7. 发明专利
    • METHOD FOR IDENTIFYING MATERIAL CONTAINED IN SAMPLE AND METHOD FOR MEASURING ITS DISTRIBUTION
    • JPH0886762A
    • 1996-04-02
    • JP24884594
    • 1994-09-16
    • HORIBA LTD
    • OHORI KENICHIBANDO ATSUSHIYURUGI TOSHIKAZU
    • G01N23/225H01J37/256
    • PURPOSE: To enable directly identifying the constituent materials of a sample without performing spectrum analysis and element identification for each of the materials by originating a characteristic X-ray image, a computed image and a scatter diagram for each of the elements of the sample, and comparing a preregistered material with data on the scatter diagram. CONSTITUTION: A sample 3 is scanned and illuminated by an electron beam 4. Characteristic X-rays 8 are detected 7 and the number of the X-rays 8 is counted 9. As the counted value of the X-rays 8 is stored 11, characteristic X-ray images are obtained. An appropriate combination of coefficients is calculated 12 and the characteristic X-ray images are multiplied by the coefficients and then added together to originate computed images. A scatter diagram showing the correlation between two of the computed images is originated 12. From a standard spectrum stored on a disk, the computing unit 12 calculates the characteristic X-ray intensity of an element corresponding to the characteristic X-ray image and calculates coordinates on the scatter diagram. A display device 13 determines whether or not the coordinates of the region of the scatter diagram overlap signs; if so, a material A shown in the spectrum is judged to be present in the sample 3.
    • 8. 发明专利
    • Quantitative analyzing method, quantitative analyzer and program
    • 量化分析方法,量化分析仪和程序
    • JP2008039607A
    • 2008-02-21
    • JP2006214826
    • 2006-08-07
    • Horiba Ltd株式会社堀場製作所
    • TANAKA SATORUOKAYAMA JUNJIBANDO ATSUSHIHIRANO AKIHIROUCHIHARA HIROSHI
    • G01N31/00G01N31/12
    • PROBLEM TO BE SOLVED: To perform a quantitative analysis using an HF furnace type carbon densitometor and to sharply enhance the treatment speed of quantitative analysis even if both of an ER furnace carbon densitometor and the HF furnace type carbon densitometor are used.
      SOLUTION: The mass of silicon carbide containing free carbon is measured before heating and the silicon carbide containing free carbon is heated at a predetermined temperature using a muffle furnace for a predetermined time. Thereafter, the masses of the silicon carbide after heating and the mass of silicon oxide are measured and both of silicon carbide and silicon oxide are succeedingly charged in an HF furnace 51 and combusted to measure the concentration of carbon after combustion. The content of free carbon is calculated by substituting masses before and after measurement and the concentration of carbon for a model formula led out on the basis the first reaction equation obtained in the case where silicon carbide containing free carbon is heated and the second reaction equation obtained in the case where silicon carbide and silicon oxide after heating are combusted.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:使用HF炉式碳密度计进行定量分析,并且即使使用ER炉碳密度计和HF炉型碳密度计两者,也能够显着提高定量分析的处理速度。 解决方案:在加热之前测量含有碳化硅的游离碳的质量,并使用马弗炉将预定时间的碳化硅含碳游离碳在预定温度下加热。 此后,测量加热后的碳化硅质量和氧化硅质量,并将碳化硅和氧化硅两者在HF炉51中继续充电,并燃烧以测量燃烧后的碳浓度。 游离碳的含量是通过在测量之前和之后取代质量计算的,并且基于在加热含碳化硅的游离碳的情况下获得的第一反应方程式得到的模型公式的碳浓度,并且获得第二反应方程 在加热后的碳化硅和氧化硅燃烧的情况下。 版权所有(C)2008,JPO&INPIT
    • 9. 发明专利
    • Fluorescent x-ray analysis method and fluorescent x-ray analyzer
    • 荧光X射线分析方法和荧光X射线分析仪
    • JP2012088196A
    • 2012-05-10
    • JP2010235681
    • 2010-10-20
    • Horiba Ltd株式会社堀場製作所
    • ONO HITOMIKOMATANI SHINTAROBANDO ATSUSHI
    • G01N23/223
    • PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analysis method and a fluorescent X-ray analyzer capable of performing quantitative analysis for elements in a liquid sample regardless of concentration.SOLUTION: In the present invention, a prescribed amount of liquid sample is dropped on a flat sample table 2, the sample is dried, and a residue sample (residue) 31 is created. A fluorescent X-ray analyzer, by irradiating the sample table 2 with an X-ray emitted from an X-ray source 11 while moving the sample table 2 by a driving section 41, scans the sample table 2 containing a residue sample 31 by the X-ray. A detecting section 12 detects a fluorescent X-ray. An analyzing section 13 generates intensity distribution of the fluorescent X-ray which is caused from a particular element, calculates an integrated value of the intensity of the fluorescent X-ray, and calculates the concentration of the particular element in the liquid sample based on the integrated value by using a calibration curve previously stored in a storage section 16. Regardless of the concentration of the liquid sample, the entire residue sample 31 is irradiated with the X-ray, and quantitative analysis for the particular element contained in the liquid sample is made possible.
    • 要解决的问题:提供能够对液体样品中的元素进行定量分析而不考虑浓度的荧光X射线分析方法和荧光X射线分析仪。 解决方案:在本发明中,将规定量的液体样品滴在平坦的样品台2上,将样品干燥,并形成残留物样品(残余物)31。 荧光X射线分析仪通过用X射线源11发射的X射线照射样品台2,同时通过驱动部41移动样品台2,扫描含有残留样品31的样品台2 X射线。 检测部12检测荧光X射线。 分析部分13产生由特定元素引起的荧光X射线的强度分布,计算荧光X射线强度的积分值,并基于该液体样品计算液体样品中特定元素的浓度 通过使用先前存储在存储部16中的校准曲线的积分值。不管液体样品的浓度如何,用X射线照射全部残留样品31,并且对于液体样品中包含的特定元素的定量分析是 成为可能 版权所有(C)2012,JPO&INPIT
    • 10. 发明专利
    • Analyzer for element in sample
    • 样品中的元素分析仪
    • JP2003028852A
    • 2003-01-29
    • JP2001213910
    • 2001-07-13
    • Horiba Ltd株式会社堀場製作所
    • HIRANO AKIHIROUCHIHARA HIROSHIBANDO ATSUSHIIKEDA MASAHIKO
    • G01N31/12G01N21/35G01N21/3504G01N21/61G01N31/00
    • PROBLEM TO BE SOLVED: To provide an analyzer for an element by which gas molecules generated by a halogen element contained in a sample are removed surely so as to measure a component as a measuring object with satisfactory accuracy and which can prevent a pipe constituting a gas flow channel or various members installed in the gas flow channel from being corroded. SOLUTION: In the analyzer for the element in the sample 3, the sample 3 is thermally decomposed inside a heating furnace 1, a gas generated at this time is supplied to a gas analytical part 10 via the gas flow channel 6, and the element in the sample is quantitatively analyzed on the basis of a gas analyzed result in the part 10. A filter 16 which is composed of an organic polymer blank is installed in the channel 6.
    • 要解决的问题:提供一种用于元件的分析器,通过该分析器可靠地去除由样品中包含的卤素元素产生的气体分子,以便以良好的精度测量作为测量对象的部件,并且可以防止构成气体的管 流路或安装在气流通道中的各种构件被腐蚀。 解决方案:在样品3中的元件分析仪中,样品3在加热炉1内热分解,此时产生的气体经由气体流路6供给到气体分析部10, 基于部分10中的气体分析结果对样品进行定量分析。由有机聚合物坯料构成的过滤器16安装在通道6中。