会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 10. 发明申请
    • METHODS AND MATERIALS FOR ANCHORING GAPFILL METALS
    • 用于安装GAPFILL金属的方法和材料
    • WO2013126771A1
    • 2013-08-29
    • PCT/US2013/027425
    • 2013-02-22
    • LAM RESEARCH CORPORATION
    • KOLICS, Artur
    • H01L21/28H01L21/31
    • C23C18/1882B32B3/30B32B15/04C23C18/52H01L21/76831H01L21/76879Y10T428/12361Y10T428/12389Y10T428/24917
    • One aspect of the present invention includes a method of fabricating an electronic device. According to one embodiment, the method comprises providing a substrate having dielectric oxide surface areas adjacent to electrically conductive surface areas, chemically bonding an anchor compound with the dielectric oxide surface areas so as to form an anchor layer, initiating the growth of a metal using the electrically conductive surface areas and growing the metal so that the anchor layer also bonds with the metal. The anchor compound has at least one functional group capable of forming a chemical bond with the oxide surface and has at least one functional group capable of forming a chemical bond with the metal. Another aspect of the present invention is an electronic device. A third aspect of the present invention is a solution comprising the anchor compound.
    • 本发明的一个方面包括制造电子设备的方法。 根据一个实施例,所述方法包括提供具有与导电表面区域相邻的电介质氧化物表面区域的基板,将锚固化合物与电介质氧化物表面区域化学结合,以形成锚定层,从而使用 导电表面积并使金属生长,使得锚定层也与金属结合。 锚化合物具有至少一个能够与氧化物表面形成化学键的官能团,并且具有至少一个能够与金属形成化学键的官能团。 本发明的另一方面是电子设备。 本发明的第三方面是包含锚化合物的溶液。