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    • 5. 发明申请
    • OPTICAL DEVICE FOR MEASURING POSITION
    • 光学位置测量装置
    • WO0065310A3
    • 2001-04-05
    • PCT/EP0003441
    • 2000-04-15
    • HEIDENHAIN GMBH DR JOHANNESHOLZAPFEL WOLFGANGMAYER ELMAR
    • HOLZAPFEL WOLFGANGMAYER ELMAR
    • G01B11/00G01D5/347G01D5/36G01D5/38
    • G01D5/38G01D5/34715
    • The invention relates to an optical device for measuring position, comprising a measuring grating and a scanning unit that is moveable in relation thereto in a measuring direction. Said scanning unit is provided with a light source, a transmitting grating, which is located at a distance DLQ from said light source, a scanning grating with the grating period PAT, on which a periodic stripe pattern with the stripe period PSM is produced in the event of relative movement between the scanning unit and the measuring grating, and a detector arrangement, which is located at a distance of DDET from the scanning grating and which has several blocks of individual detector elements, these blocks being arranged periodically with the detector period PDET in the measuring direction. The transmitting grating is located at a distance u from the measuring grating and the measuring grating is located at a distance v from the scanning grating. The detector period PDET is selected according to the relation PDET=m*I*Pv; m=(1+DDET/(u+v+DLQ) and I = 1, 2, 3, .... Pv refers to the vernier period in the plane of the scanning grating that is produced according to 1/Pv = |1/PSM-1/PAT|.
    • 提供了一种光学位置测量装置,包括一个测量刻度和相对在测量方向上可移动到其扫描单元。 到扫描单元,反过来,包括一个光源,一个远离所述光源位于距离DLQ发送毕业,扫描刻度与毕业期间PAT,在扫描单元的相对运动,并在与条带图案周期PSM的周期性条纹图案的测量分结果和隔开DDET中的一个的情况下 扫描具有多个单独的检测器元件的块的远程检测器阵列,所述块被布置在测量方向上周期性地与检测器周期PDET。 发送毕业具有从测量刻度,其测量分具有从所述扫描间隔诉间距ü。 周期检测器PDET EIRD选择的m个* I根据关系PDET =,其中m =(1 + DDET /(U + V + DLQ)和I = 1,2,3,...适用* Pv的。随着Pv是游标 结果| | 1 / PSM-1 / PAT在扫描的平面中,其中根据1 / PV =称为-Periode。
    • 7. 发明申请
    • SCANNING UNIT FOR AN OPTICAL POSITION MEASURING DEVICE
    • 扫描光学位置测量装置
    • WO0184084A8
    • 2003-05-22
    • PCT/EP0104277
    • 2001-04-14
    • HEIDENHAIN GMBH DR JOHANNESMAYER ELMAR JHOLZAPFEL WOLFGANG
    • MAYER ELMAR JHOLZAPFEL WOLFGANG
    • G01D5/36
    • G01D5/366
    • Disclosed is a scanning unit for an optical position measuring device. The inventive device is suitable for scanning a periodic striped pattern within a detection plane and is highly insensitive with respect to short periodic disruptions of the scanned measurement partition. The scanning unit consists of at least one detector array provided with several radiation-sensitive detector elements which are disposed adjacent to each other in a first direction on a common carrier substrate with a period PDET. At least one second detector array consisting of several radiation-sensitive detector elements is arranged in an adjacent position to the first detector array in a direction which is perpendicular to the first direction on the plane of detection. The detector elements of the second detector array are also disposed adjacent to each other in the first direction. The detector elements of the second detector array are offset in a defined manner when compared with the detector elements of the first detector array in the first direction.
    • 提供了一种用于这是适合于在检测平面扫描的周期性条纹图案,并尽可能不敏感特别是在扫描测量刻度的短周期扰动的光学位置测量装置所具备的扫描单元。 扫描单元包括具有多个其与周期PDET一个共同的载体衬底上布置彼此相邻的在第一方向上的辐射敏感检测器元件中的至少一个检测器阵列。 此外,毗邻的方向上的第一检测器阵列垂直于在检测平面上的第一方向的至少一个第二检测器阵列配置有多个辐射敏感探测器元件。 所述第二检测器阵列的检测器元件也沿所述第一方向布置彼此相邻。 此外,第二检测器阵列的检测器元件具有限定的从第一方向上的第一探测器阵列的探测器元件偏置。