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1. 发明申请

WO0184084A8 SCANNING UNIT FOR AN OPTICAL POSITION MEASURING DEVICE 审中-公开
标题翻译：扫描光学位置测量装置
公开(公告)号：WO0184084A8
公开(公告)日：2003-05-22
申请号：PCT/EP0104277
申请日：2001-04-14
申请人： HEIDENHAIN GMBH DR JOHANNES , MAYER ELMAR J , HOLZAPFEL WOLFGANG
发明人： MAYER ELMAR J , HOLZAPFEL WOLFGANG
IPC分类号： G01D5/36
CPC分类号： G01D5/366
摘要： Disclosed is a scanning unit for an optical position measuring device. The inventive device is suitable for scanning a periodic striped pattern within a detection plane and is highly insensitive with respect to short periodic disruptions of the scanned measurement partition. The scanning unit consists of at least one detector array provided with several radiation-sensitive detector elements which are disposed adjacent to each other in a first direction on a common carrier substrate with a period PDET. At least one second detector array consisting of several radiation-sensitive detector elements is arranged in an adjacent position to the first detector array in a direction which is perpendicular to the first direction on the plane of detection. The detector elements of the second detector array are also disposed adjacent to each other in the first direction. The detector elements of the second detector array are offset in a defined manner when compared with the detector elements of the first detector array in the first direction.
摘要翻译：提供了一种用于这是适合于在检测平面扫描的周期性条纹图案，并尽可能不敏感特别是在扫描测量刻度的短周期扰动的光学位置测量装置所具备的扫描单元。扫描单元包括具有多个其与周期PDET一个共同的载体衬底上布置彼此相邻的在第一方向上的辐射敏感检测器元件中的至少一个检测器阵列。此外，毗邻的方向上的第一检测器阵列垂直于在检测平面上的第一方向的至少一个第二检测器阵列配置有多个辐射敏感探测器元件。所述第二检测器阵列的检测器元件也沿所述第一方向布置彼此相邻。此外，第二检测器阵列的检测器元件具有限定的从第一方向上的第一探测器阵列的探测器元件偏置。

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