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    • 5. 发明申请
    • GERMANIUM-BASED POLYMERS AND PRODUCTS FORMED FROM GERMANIUM-BASED POLYMERS
    • 基于锗的聚合物和从基于锗的聚合物形成的产品
    • WO2006116751A2
    • 2006-11-02
    • PCT/US2006016470
    • 2006-04-27
    • ULTRADOTS INCKESHAVARZ MAJIDLIU GUOJUN
    • KESHAVARZ MAJIDLIU GUOJUN
    • C08G83/00
    • C08J3/12C08J2343/00
    • Germanium-based polymers are described. In one embodiment, a germanium-based polymer includes a structure given by the formula: [GeR]n, wherein n is a non-negative integer that is at least one, and R is selected from a wide variety of groups, such as alkyl groups, alkenyl groups, alkynyl groups, aryl groups, iminyl groups, and so forth. Also described are methods of forming germanium-based polymers, methods of forming nanoparticles from germanium-based polymers, methods of forming nanostructured materials from germanium-based polymers, nanoparticles formed from germanium-based polymers, nanostructured materials formed from germanium-based polymers, and devices formed from germanium-based polymers.
    • 描述了基于锗的聚合物。 在一个实施方案中,锗基聚合物包括由下式给出的结构:[GeR] n,其中n是至少为1的非负整数,R选自多种基团,例如烷基 基团,烯基,炔基,芳基,亚氨基等。 还描述了形成锗基聚合物的方法,从基于锗的聚合物形成纳米颗粒的方法,从锗基聚合物形成纳米结构材料的方法,由锗基聚合物形成的纳米颗粒,由锗基聚合物形成的纳米结构材料,以及 由锗基聚合物形成的器件。
    • 6. 发明申请
    • CONTROL OF PLASMA PROFILE USING MAGNETIC NULL ARRANGEMENT BY AUXILIARY MAGNETS
    • 使用辅助磁铁的磁性空安排来控制等离子体轮廓
    • WO2012018770A3
    • 2012-08-09
    • PCT/US2011046204
    • 2011-08-02
    • APPLIED MATERIALS INCLIU GUOJUNTANG XIANMINLUO QIANCAO YONG
    • LIU GUOJUNTANG XIANMINLUO QIANCAO YONG
    • H01L21/203H05H1/46
    • H01F7/0278H01J37/3408H01J37/3461
    • Magnetrons for use in physical vapor deposition (PVD) chambers and methods of use thereof are provided herein. In some embodiments, an apparatus may include a support member having an axis of rotation; a plurality of first magnets coupled to the support member on a first side of the axis of rotation and having a first polarity oriented in a first direction perpendicular to the support member; and a second magnet coupled to the support member on a second side of the axis of rotation opposite the first side and having a second polarity oriented in a second direction opposite the first direction. In some embodiments, the apparatus is capable of forming a magnetic field including one or more magnetic nulls that modulate local plasma uniformity in a physical vapor deposition (PVD) chamber.
    • 本文提供了用于物理气相沉积(PVD)室的磁控管及其使用方法。 在一些实施例中,装置可以包括具有旋转轴线的支撑构件; 多个第一磁体,其在所述旋转轴线的第一侧上联接到所述支撑构件,并且具有在垂直于所述支撑构件的第一方向上定向的第一极性; 以及第二磁体,其在所述旋转轴线的与所述第一侧相反的第二侧上与所述支撑构件相耦合,并且具有在与所述第一方向相反的第二方向上定向的第二极性。 在一些实施例中,该装置能够形成包括调制物理气相沉积(PVD)室中的局部等离子体均匀性的一个或多个磁零点的磁场。