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    • 5. 发明申请
    • MEMORY DEVICES AND FORMATION METHODS
    • 记忆装置和形成方法
    • WO2010096094A1
    • 2010-08-26
    • PCT/US2009/057017
    • 2009-09-15
    • MICRON TECHNOLOGY, INC.LIU, JunSANDHU, Gurtej, S.
    • LIU, JunSANDHU, Gurtej, S.
    • H01L27/115H01L21/8247
    • H01L21/02225H01L27/2409H01L27/2472H01L27/2481H01L45/06H01L45/12H01L45/1233H01L45/144H01L45/16
    • A method includes forming an electrical insulator material over an integrated circuit having a metal-containing conductive interconnect and activating a dopant in a semiconductor material of a substrate to provide a doped region. The doped region provides a junction of opposite conductivity types. After activating the dopant, the substrate is bonded to the insulator material and at least some of the substrate is removed where bonded to the insulator material. After the removing, a memory cell is formed having a word line, an access diode, a state -changeable memory element containing chalcogenide phase change material, and a bit line all electrically connected in series, the access diode containing the junction as a p-n junction. A memory device includes an adhesion material over the insulator material and bonding the word line to the insulator material.
    • 一种方法包括在具有含金属的导电互连的集成电路上形成电绝缘体材料,并激活衬底的半导体材料中的掺杂剂以提供掺杂区域。 掺杂区域提供相反导电类型的结。 在激活掺杂剂之后,衬底被结合到绝缘体材料上,并且至少部分衬底在与绝缘体材料接合的情况下被去除。 在去除之后,形成具有字线,存取二极管,含有硫族化物相变材料的状态可变存储元件和全部电连接的位线的存储单元,该存储二极管包含接合点作为pn结 。 存储器件包括绝缘体材料上的粘附材料并将字线连接到绝缘体材料。
    • 6. 发明申请
    • METHODS OF FABRICATING SUBSTRATES
    • 制作基板的方法
    • WO2010065249A2
    • 2010-06-10
    • PCT/US2009/063978
    • 2009-11-11
    • MICRON TECHNOLOGY, INC.SILLS, ScottSANDHU, Gurtej, S.DEVILLIERS, Anton
    • SILLS, ScottSANDHU, Gurtej, S.DEVILLIERS, Anton
    • H01L21/027
    • H01L21/31138G03F7/0035H01L21/0273H01L21/0337H01L21/0338
    • A method of fabricating a substrate includes forming spaced first features and spaced second features over a substrate. The first and second features alternate with one another and are spaced relative one another. Width of the spaced second features is laterally trimmed to a greater degree than any lateral trimming of width of the spaced first features while laterally trimming width of the spaced second features. After laterally trimming of the second features, spacers are formed on sidewalls of the spaced first features and on sidewalls of the spaced second features. The spacers are of some different composition from that of the spaced first features and from that of the spaced second features. After forming the spacers, the spaced first features and the spaced second features are removed from the substrate. The substrate is processed through a mask pattern comprising the spacers. Other embodiments are disclosed.
    • 制造衬底的方法包括在衬底上形成间隔开的第一特征和间隔开的第二特征。 第一和第二特征彼此交替并彼此间隔开。 间隔开的第二特征的宽度被横向修整到比间隔开的第一特征的宽度的任何横向修剪更大的程度,同时横向地修剪间隔开的第二特征的宽度。 在第二特征的横向修剪之后,间隔物形成在间隔开的第一特征的侧壁上并且在间隔开的第二特征的侧壁上。 间隔物与间隔开的第一特征和间隔开的第二特征的间隔物具有不同的组成。 在形成间隔物之后,从衬底去除间隔开的第一特征和间隔开的第二特征。 通过包括间隔物的掩模图案处理衬底。 公开了其它实施例。