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    • 10. 发明申请
    • MEMORY DEVICES AND FORMATION METHODS
    • 记忆装置和形成方法
    • WO2010096094A1
    • 2010-08-26
    • PCT/US2009/057017
    • 2009-09-15
    • MICRON TECHNOLOGY, INC.LIU, JunSANDHU, Gurtej, S.
    • LIU, JunSANDHU, Gurtej, S.
    • H01L27/115H01L21/8247
    • H01L21/02225H01L27/2409H01L27/2472H01L27/2481H01L45/06H01L45/12H01L45/1233H01L45/144H01L45/16
    • A method includes forming an electrical insulator material over an integrated circuit having a metal-containing conductive interconnect and activating a dopant in a semiconductor material of a substrate to provide a doped region. The doped region provides a junction of opposite conductivity types. After activating the dopant, the substrate is bonded to the insulator material and at least some of the substrate is removed where bonded to the insulator material. After the removing, a memory cell is formed having a word line, an access diode, a state -changeable memory element containing chalcogenide phase change material, and a bit line all electrically connected in series, the access diode containing the junction as a p-n junction. A memory device includes an adhesion material over the insulator material and bonding the word line to the insulator material.
    • 一种方法包括在具有含金属的导电互连的集成电路上形成电绝缘体材料,并激活衬底的半导体材料中的掺杂剂以提供掺杂区域。 掺杂区域提供相反导电类型的结。 在激活掺杂剂之后,衬底被结合到绝缘体材料上,并且至少部分衬底在与绝缘体材料接合的情况下被去除。 在去除之后,形成具有字线,存取二极管,含有硫族化物相变材料的状态可变存储元件和全部电连接的位线的存储单元,该存储二极管包含接合点作为pn结 。 存储器件包括绝缘体材料上的粘附材料并将字线连接到绝缘体材料。