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    • 8. 发明申请
    • DETERMINING IMAGE BLUR IN AN IMAGING SYSTEM
    • 在成像系统中确定图像图像
    • WO2005083525A2
    • 2005-09-09
    • PCT/IB2005/050496
    • 2005-02-08
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.DIRKSEN, PeterJANSSEN, Augustus, J., E., M.BRAAT, Josephus, J., M.LEEUWESTEIN, Adriaan
    • DIRKSEN, PeterJANSSEN, Augustus, J., E., M.BRAAT, Josephus, J., M.LEEUWESTEIN, Adriaan
    • G03F9/00
    • G03F7/70608G03F7/706
    • The invention relates to a method of determining a parameter relating to image blur in an imaging system (IS) comprising the step of illuminating an object having a test pattern (MTP) by means of the imaging system (IS), thereby forming an image of the test pattern,. The test pattern (MTP) has a size smaller than the resolution of the imaging system (IS), which makes the image of the test pattern independent of illuminator aberrations. The test pattern (MTP) is an isolated pattern, which causes the image to be free of optical proximity effects. The image is blurred due to stochastic fluctuations in the imaging system and/or in the detector detecting the blurred image. The parameter relating to the image blur is determined from a parameter relating to the shape of the blurred image. According to the invention, resist diffusion and/or focus noise may be characterized. In the method of designing a mask, the parameter relating to the image blur due to diffusion in the resist is taken into account. The computer program according to the invention is able to execute the step of determining the parameter relating to the image blur from a parameter relating to a shape of the blurred image.
    • 本发明涉及一种确定与成像系统(IS)中的图像模糊相关的参数的方法,包括通过成像系统(IS)照亮具有测试图案(MTP)的对象的步骤,从而形成图像 测试模式。 测试图案(MTP)的尺寸小于成像系统(IS)的分辨率,这使得测试图案的图像与照明器像差无关。 测试图案(MTP)是一种孤立的图案,使图像无光学邻近效应。 图像由于成像系统中的随机波动和/或检测模糊图像的检测器而模糊。 根据与模糊图像的形状相关的参数确定与图像模糊有关的参数。 根据本发明,可以表征抗蚀剂扩散和/或聚焦噪声。 在设计掩模的方法中,考虑与抗蚀剂中的扩散引起的图像模糊有关的参数。 根据本发明的计算机程序能够执行从与模糊图像的形状相关的参数确定与图像模糊有关的参数的步骤。