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1. 发明申请

WO2008134041A1 INERTIAL WAFER CENTERING AND EFFECTOR AND TRANSPORT APPARATUS 审中-公开
标题翻译：惯性中心和效应器和运输装置
公开(公告)号：WO2008134041A1
公开(公告)日：2008-11-06
申请号：PCT/US2008/005438
申请日：2008-04-28
申请人： BROOKS AUTOMATION, INC. , DIBELLA, Anthony, V. , POOLE, Dennis , FOSNIGHT, William
发明人： DIBELLA, Anthony, V. , POOLE, Dennis , FOSNIGHT, William
IPC分类号： H01L21/68
CPC分类号： H01L21/68707
摘要： A substrate transport apparatus for a processing tool. The apparatus has a drive section, a movable arm, and an end effector. The arm is operably connected to the drive section. The end effector is connected to the movable arm for holding and transporting the substrate in the processing tool. The apparatus has a substrate inertial capture edge grip connected to the end effector and arranged so that the grip effects capture and centering of the substrate onto the end effector from substrate inertia.
摘要翻译：一种用于加工工具的基片输送装置。该装置具有驱动部分，可动臂和端部执行器。臂可操作地连接到驱动部分。端部执行器连接到可移动臂，用于在处理工具中保持和传送基板。该装置具有连接到端部执行器的基板惯性捕获边缘抓握器并且被布置成使得抓地效应从基板惯性捕获并定位到端部执行器上。

2. 发明申请

WO2008144668A1 SIDE OPENING SUBSTRATE CARRIER AND LOAD PORT 审中-公开
标题翻译：侧开式底座承载和载荷端口
公开(公告)号：WO2008144668A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/064163
申请日：2008-05-19
申请人： BROOKS AUTOMATION, INC. , BABBS, Daniel , FOSNIGHT, William , MAY, Robert, C. , WEAVER, William
发明人： BABBS, Daniel , FOSNIGHT, William , MAY, Robert, C. , WEAVER, William
IPC分类号： H01L21/00 , H01L21/20
CPC分类号： H01L21/67161 , H01L21/67017 , H01L21/67772 , H01L21/67775
摘要： A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
摘要翻译：一种基板处理系统，包括：处理部，其被配置为保持其中的处理气氛;载体，其具有形成内部容积的外壳，用于保持至少一个基板用于输送到所述处理部分，所述壳体被配置为允许内部体积被泵送下降到与衬底处理系统外部的外部空气不同的预定真空压力，以及负载端口，可通信地连接到处理部分，以将处理气氛与外部大气隔离，负载端口被配置为与载体耦合，泵送载体的内部体积并将载体可通信地连接到处理部分，以通过负载端口将基板装载到处理部分中。

3. 发明申请

WO2007133701A3 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
公开(公告)号：WO2007133701A3
公开(公告)日：2007-11-22
申请号：PCT/US2007/011443
申请日：2007-05-11
申请人： BROOKS AUTOMATION, INC. , BUFANO, Michael L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher , BABBS, Daniel A. , MAY, Robert C.
发明人： BUFANO, Michael L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher , BABBS, Daniel A. , MAY, Robert C.
IPC分类号： H01L21/677
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

4. 发明申请

WO2008024225A2 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
标题翻译：减少的容量载体，运输，装载港口，缓冲系统
公开(公告)号：WO2008024225A2
公开(公告)日：2008-02-28
申请号：PCT/US2007/017924
申请日：2007-08-13
申请人： BROOKS AUTOMATION, INC. , BUFANO, Michael, L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher , BABBS, Daniel , MAY, Robert, C.
发明人： BUFANO, Michael, L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher , BABBS, Daniel , MAY, Robert, C.
IPC分类号： B65B35/00
CPC分类号： H01L21/67733 , H01L21/67017 , H01L21/67126 , H01L21/67201 , H01L21/67276 , H01L21/67376 , H01L21/67379 , H01L21/67386 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67736 , H01L21/67757 , H01L21/67766 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
摘要翻译：根据一个示例性实施例，一种半导体工件处理系统，具有用于处理半导体工件的至少一个处理工具，用于在其中保持至少一个半导体工件的容器，用于传送到所述至少一个处理器工具和第一传送部分，所述第一传送部分伸长并限定行进方向。第一传送部分具有与容器接合的部件，该容器沿着行进方向支撑和运送容器往返于至少一个处理工具。当由第一运输部分支撑时，容器在行进方向上以基本恒定的速率基本上连续运输。第二传送部分连接到至少一个处理工具，用于将容器传送到至少一个处理工具和从至少一个处理工具传送。

5. 发明申请

WO2008144670A1 LOAD LOCK FAST PUMP VENT 审中-公开
标题翻译：装载快速泵出口
公开(公告)号：WO2008144670A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/064166
申请日：2008-05-19
申请人： BROOKS AUTOMATION, INC. , HOFMEISTER, Christopher , ELLIOT, Martin, R. , KRUPYSHEV, Alexander , HALLISEY, Joseph , KRAUS, Joseph, A. , FOSNIGHT, William , CARBONE, Craig, J. , BLAHNIK, Jeffrey, C. , FONG, Hi Yin, Owen
发明人： HOFMEISTER, Christopher , ELLIOT, Martin, R. , KRUPYSHEV, Alexander , HALLISEY, Joseph , KRAUS, Joseph, A. , FOSNIGHT, William , CARBONE, Craig, J. , BLAHNIK, Jeffrey, C. , FONG, Hi Yin, Owen
IPC分类号： H01L21/677
CPC分类号： H01L21/67098 , H01L21/67126 , H01L21/6719 , H01L21/67201
摘要： A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.
摘要翻译：一种基板处理工具，其包括形成至少一个可分离室的框架，该隔离室被构造成保持受控气氛，至少两个基板支撑件，位于所述至少一个可隔离室的每一个内，所述至少两个基板支撑件中的每个基板支撑件彼此堆叠并且被配置为保持相应的基板和可通信地联接到所述至少两个基板支撑件的冷却单元，使得所述至少两个基板支撑件和冷却单元对位于所述至少两个基板支撑件上的各个基板的每个基板进行同时导电冷却。

6. 发明申请

WO2006009723A2 SUBSTRATE PROCESSING APPARATUS WITH REMOVABLE COMPONENT MODULE 审中-公开
标题翻译：具有可拆卸组件模块的基板处理装置
公开(公告)号：WO2006009723A2
公开(公告)日：2006-01-26
申请号：PCT/US2005/021087
申请日：2005-06-15
申请人： BROOKS AUTOMATION, INC.
发明人： HALL, Daniel, A. , HOFMEISTER, Christopher , FOSNIGHT, William , CAVENEY, Robert, T. , GILCHRIST, Ulysses , ARAUJO, Jeff, G.
IPC分类号： H01L21/677
CPC分类号： H01L21/67196 , Y10S414/135
摘要： A substrate processing apparatus having a frame, a housing, an access system and - at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The f rame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.
摘要翻译：一种基板处理装置，具有框架，外壳，访问系统和<

7. 发明申请

WO2006024035A2 TRANSPORTATION SYSTEM 审中-公开
标题翻译：运输系统
公开(公告)号：WO2006024035A2
公开(公告)日：2006-03-02
申请号：PCT/US2005/030617
申请日：2005-08-24
申请人： BROOKS AUTOMATION, INC.
发明人： GILCHRIST, Ulysses , BUFANO, Michael, L. , FOSNIGHT, William , HOFMEISTER, Christopher , FRIEDMAN, Gerald, M.
CPC分类号： H01L21/67715 , H01L21/67736 , H01L21/67775
摘要： An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.
摘要翻译：提供了一种示例性实施例的基板输送系统。该系统具有导轨和至少一个运输车辆。运输车辆适于保持至少一个基底并且能够被支撑并沿导轨移动。导轨包括用于车辆的至少一个行驶车道和从行驶车道偏移的至少一个通道，允许车辆可选择地接近行驶车道和离开行车道。

8. 发明申请

WO2006023838A3 REDUCED CAPACITY CARRIER AND METHOD OF USE 审中-公开
公开(公告)号：WO2006023838A3
公开(公告)日：2006-03-02
申请号：PCT/US2005/029757
申请日：2005-08-19
申请人： BROOKS AUTOMATION, INC.
发明人： ULYSSES, Gilchrist , BUFANO, Michael, L. , FOSNIGHT, William , HOFMEISTER, Christopher , FRIEDMAN, Gerald, M.
IPC分类号： B65G49/07
摘要： A substrate transport apparatus (10) is provided. The apparatus has a casing (11) and a door (13). The casing is adapted to form a controlled environment therein. The casing has supports (12, 14) therein for holding at least one substrate (s) in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

9. 发明申请

WO2007056443A2 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
标题翻译：减少的容量载体，运输，装载港口，缓冲系统
公开(公告)号：WO2007056443A2
公开(公告)日：2007-05-18
申请号：PCT/US2006/043462
申请日：2006-11-07
申请人： BROOKS AUTOMATION, INC.
发明人： BUFANO, Michael, L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher
IPC分类号： B65G47/00
CPC分类号： H01L21/67769 , H01L21/67376 , H01L21/67386 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67778
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译：半导体工件处理系统，其具有用于处理工件的至少一个处理装置，主传输系统，次传输系统以及第一传输系统和第二传输系统之间的一个或多个接口。主要和次要运输系统都有一个或多个基本上恒定速度的部分，并且在与恒定速度部分连通的排队部分中。

10. 发明申请

WO2007008939A2 APPARATUS WITH ON-THE-FLY WORKPIECE CENTERING 审中-公开
标题翻译：装置与工厂工作中心
公开(公告)号：WO2007008939A2
公开(公告)日：2007-01-18
申请号：PCT/US2006/026973
申请日：2006-07-11
申请人： BROOKS AUTOMATION, INC.
发明人： GILCHRIST, Ulysses , OLIVERA, Haniel , FOSNIGHT, William , PICKREIGN, Richard , CAVENEY, Robert
IPC分类号： H01L21/677
CPC分类号： H01L21/67265
摘要： A substrate processing apparatus having a transport apparatus, at least one sensor connected to the transport apparatus and a controller. The transport apparatus is adapted for transporting the substrate between processing stations of the processing apparatus. The sensor is capable of sensing the substrate transported by the transporting apparatus . The sensor is arranged for sending at least one signal in response to sensing the substrate. The controller is communicably connected to the sensor and arranged to determine alignment of the substrate in at least two directions, angled relative to each other, relative to a predetermined location. The controller is capable of determining alignment from the at least one signal identifying no more than two points on the substrate and independent of radial variances between substrates.
摘要翻译：一种具有输送装置的基板处理装置，连接到输送装置的至少一个传感器和控制器。输送装置适于在处理装置的处理站之间传送基板。传感器能够感测由输送装置输送的基板。传感器布置成响应于感测基板而发送至少一个信号。控制器可通信地连接到传感器并且被布置成确定基板相对于预定位置在至少两个方向上相对于彼此成角度的对准。控制器能够根据识别基板上不超过两个点的至少一个信号确定对准，而与基板之间的径向方差无关。

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