专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2009003021A1 REDUCED-COMPLEXITY SELF-BEARING BRUSHLESS DC MOTOR 审中-公开
标题翻译：降低复杂度自轴承无刷直流电机
公开(公告)号：WO2009003021A1
公开(公告)日：2008-12-31
申请号：PCT/US2008/068160
申请日：2008-06-25
申请人： BROOKS AUTOMATION, INC. , HOSEK, Martin , MOURA, Jairo, Terra , HOFMEISTER, Christopher
发明人： HOSEK, Martin , MOURA, Jairo, Terra , HOFMEISTER, Christopher
IPC分类号： H02K13/04
CPC分类号： F16C32/0444 , F16C32/0493 , F16C2380/26
摘要： A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.
摘要翻译：一种换向电动机的方法包括操作地连接电动机的定子和致动部件，相对于致动部件布置至少两个绕组，并且独立地控制至少两个绕组，使得至少两个绕组组被致动组件都被驱动和集中。

2. 发明申请

WO2008140727A1 SUBSTRATE TRANSPORT APPARATUS 审中-公开
标题翻译：基座运输装置
公开(公告)号：WO2008140727A1
公开(公告)日：2008-11-20
申请号：PCT/US2008/005881
申请日：2008-05-08
申请人： BROOKS AUTOMATION, INC. , CAVENEY, Robert, T. , HOFMEISTER, Christopher
发明人： CAVENEY, Robert, T. , HOFMEISTER, Christopher
IPC分类号： G03F7/20 , H01L21/67
CPC分类号： H01L21/67742 , B25J9/106 , B25J9/107
摘要： A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.
摘要翻译：一种基板输送装置，其特征在于，包括：第一无转矩回转马达，其具有第一定子和第一转子，所述第一定子线性分布，所述第一转子与第一臂连结，第二无轴旋转马达，包括第二定子和第二转子，第二定子是线性分布的，第二转子耦合到第二臂，第二臂连接到第一臂，第一衬底支撑件联接到第一和第二臂中的至少一个，其中第一定子和第二定子被构造成使得第一和第二臂和第一基板支撑件在定子内部，并且在第一和第二无轴旋转马达之间的连接处的马达输出和第一和第二臂中的相应的一个是合力设置在第一和第二臂。

3. 发明申请

WO2013040406A1 ROBOT DRIVE WITH PASSIVE ROTOR 审中-公开
标题翻译：机器人无源转子驱动
公开(公告)号：WO2013040406A1
公开(公告)日：2013-03-21
申请号：PCT/US2012/055505
申请日：2012-09-14
申请人： PERSIMMON TECHNOLOGIES, CORP. , HOSEK, Martin , HA, Tuan , HOFMEISTER, Christopher , POOLE, Dennis
发明人： HOSEK, Martin , HA, Tuan , HOFMEISTER, Christopher , POOLE, Dennis
IPC分类号： B66C23/00
CPC分类号： H02K5/128 , H02K3/30 , H02K3/44 , H02K5/00 , H02K5/225 , H02K9/22 , H02K15/12 , H02K21/44 , H02K41/033 , Y10S901/23
摘要： A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.
摘要翻译：一种基板输送装置，包括驱动部和第一可动臂组件。驱动部分包括第一马达。第一电动机包括定子和无源转子。第一可动臂组件连接到第一电动机。衬底输送装置被配置为使第一可动臂组件可定位在真空室中，其中被动转子与真空室内的环境连通。

4. 发明申请

WO2013040401A1 LOW VARIABILITY ROBOT 审中-公开
标题翻译：低变差机器人
公开(公告)号：WO2013040401A1
公开(公告)日：2013-03-21
申请号：PCT/US2012/055496
申请日：2012-09-14
申请人： PERSIMMON TECHNOLOGIES, CORP. , HOSEK, Martin , HA, Tuan , HOFMEISTER, Christopher
发明人： HOSEK, Martin , HA, Tuan , HOFMEISTER, Christopher
IPC分类号： B25J9/06
CPC分类号： B25J19/0054 , B25J9/043 , B25J11/0095 , H01F38/14 , H01F2038/143 , H01L21/67259 , H01L21/67742 , H02J50/10 , H05K7/209
摘要： An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber.
摘要翻译：一种包括框架，第一位置传感器，驱动器和室的设备。框架具有至少三个构件，其包括形成可动臂和末端执行器的至少两个连杆。端部执行器和连杆通过可动接头连接。端部执行器构造成在其上支撑基板。第一位置传感器位于靠近第一关节的框架上。第一位置传感器构造成感测两个构件相对于彼此的位置。驱动器连接到框架。驱动器被配置成移动可动臂。框架位于腔室中，驱动器延伸穿过腔室中的壁。

5. 发明申请

WO2009012396A2 SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS 审中-公开
标题翻译：具有与室壁整体的电机的基板处理装置
公开(公告)号：WO2009012396A2
公开(公告)日：2009-01-22
申请号：PCT/US2008/070346
申请日：2008-07-17
申请人： BROOKS AUTOMATION, INC. , KURPYSHEV, Alexander , HOFMEISTER, Christopher
发明人： KURPYSHEV, Alexander , HOFMEISTER, Christopher
IPC分类号： H02K7/09 , H01L21/67
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译：一种基板传送设备，包括：周壁，其具有限定能够保持隔离气氛的基板传送室的内表面;至少一个大致环形的电机，其具有位于外围内的至少一个定子模块; 在内表面和周壁的相邻外表面之间的至少一个壁，以及至少一个转子，所述至少一个转子基本上在输送室内不接触地悬挂，使得由环形马达包围的周壁的表面构造成用于附接预定的装置和至少一个基板传送臂，所述至少一个基板传送臂连接到所述至少一个转子并且具有至少一个末端执行器，

6. 发明申请

WO2009003027A1 COMMUTATION OF AN ELECTROMAGNETIC PROPULSION AND GUIDANCE SYSTEM 审中-公开
标题翻译：电磁推进和指导系统的传递
公开(公告)号：WO2009003027A1
公开(公告)日：2008-12-31
申请号：PCT/US2008/068167
申请日：2008-06-25
申请人： BROOKS AUTOMATION, INC. , HOSEK, Martin , MOURA, Jairo, Terra , HOFMEISTER, Christopher
发明人： HOSEK, Martin , MOURA, Jairo, Terra , HOFMEISTER, Christopher
IPC分类号： H01R39/04
CPC分类号： F16C41/008 , F16C32/0493 , F16C2380/26 , H02P6/15 , H02P2209/07
摘要： A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.
摘要翻译：一种换向马达的方法包括计算调整电角度，并利用一组公共换向方程中的调整电角度，使得公共的换向方程组能够在马达中产生一维和二维的力。

7. 发明申请

WO2007133701A9 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
标题翻译：减少能力承运人，运输，装卸港，缓冲系统
公开(公告)号：WO2007133701A9
公开(公告)日：2008-01-17
申请号：PCT/US2007011443
申请日：2007-05-11
申请人： BROOKS AUTOMATION INC , BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL A , MAY ROBERT C
发明人： BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL A , MAY ROBERT C
IPC分类号： B65B5/04
CPC分类号： H01L21/67126 , H01L21/67379 , H01L21/67386 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译：一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。

8. 发明申请

WO2010077727A1 SUBSTRATE PROCESSING APPARATUS 审中-公开
标题翻译：基板加工设备
公开(公告)号：WO2010077727A1
公开(公告)日：2010-07-08
申请号：PCT/US2009/067309
申请日：2009-12-09
申请人： HOSEK, Martin , HOFMEISTER, Christopher , KRUPYSHEV, Alexander , BROOKS AUTOMATION, INC.
发明人： HOSEK, Martin , HOFMEISTER, Christopher , KRUPYSHEV, Alexander
IPC分类号： B65G35/00
CPC分类号： H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67727 , H01L21/67742 , H01L21/67766
摘要： A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.
摘要翻译：用于输送装置的驱动系统包括连接到输送装置的多个永磁体，暴露于多个永磁体中的至少一个的磁场的多个静止绕组，用于给固定绕组通电以提供磁性的控制系统输送装置上的力，以及靠近运输装置的至少一侧的铁磁部件的布置，用于提供传送装置的提升，俯仰和滚动的被动稳定。

9. 发明申请

WO2009003187A1 SENSOR FOR POSITION AND GAP MEASUREMENT 审中-公开
标题翻译：传感器用于位置和差距测量
公开(公告)号：WO2009003187A1
公开(公告)日：2008-12-31
申请号：PCT/US2008/068670
申请日：2008-06-27
申请人： BROOKS AUTOMATION, INC. , HOSEK, Martin , HOFMEISTER, Christopher
发明人： HOSEK, Martin , HOFMEISTER, Christopher
IPC分类号： G01N27/72
CPC分类号： G01D5/2086
摘要： An apparatus including a controller, a transport in communication with the controller having a movable portion and a transport path and a multi-dimensional position measurement device in communication with the controller, the multi-dimensional position measurement device including a plurality of transformers and at least one element attached to the movable portion, wherein the multi-dimensional position measurement device is configured so that a circuit is completed in at least one plurality of transformers as the at least one element passes proximate to the at least one of the plurality of transformers and the controller is configured to calculate a multi-dimensional position of the movable object based on an output of the at least one of the plurality of transformers, wherein the multi¬ dimensional position includes at least a gap between the movable portion and the plurality of transformers.
摘要翻译：一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的传输和与控制器通信的多维位置测量装置，所述多维位置测量装置包括多个变压器，并且至少一个元件附接到可移动部分，其中所述多维位置测量装置被配置为使得当至少一个元件通过所述多个变压器中的至少一个变压器时，在至少一个多个变压器中完成电路，以及控制器被配置为基于多个变压器中的至少一个的输出来计算可移动物体的多维位置，其中多维位置包括可移动部分和多个变压器之间的至少间隙。

10. 发明申请

WO2007133701A3 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
公开(公告)号：WO2007133701A3
公开(公告)日：2007-11-22
申请号：PCT/US2007/011443
申请日：2007-05-11
申请人： BROOKS AUTOMATION, INC. , BUFANO, Michael L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher , BABBS, Daniel A. , MAY, Robert C.
发明人： BUFANO, Michael L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher , BABBS, Daniel A. , MAY, Robert C.
IPC分类号： H01L21/677
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式