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    • 10. 发明申请
    • LOAD LOCK CHAMBER, VACUUM PROCESSING SYSTEM WITH LOAD LOCK CHAMBER AND METHOD FOR EVACUATING A LOAD LOCK CHAMBER
    • 负载锁定室,带有锁定室的真空加工系统和用于装载锁定室的方法
    • WO2016184487A1
    • 2016-11-24
    • PCT/EP2015/060806
    • 2015-05-15
    • APPLIED MATERIALS, INC.GEBELE, ThomasKLEIN, WolfgangLINDENBERG, Ralph
    • GEBELE, ThomasKLEIN, WolfgangLINDENBERG, Ralph
    • H01L21/67
    • H01L21/67201
    • A load lock chamber (100) for a vacuum processing system (500) is described. The load lock chamber includes load lock walls surrounding a load lock chamber volume, wherein the load lock walls include a first load lock wall (101) and a second load lock wall (102), wherein the second load lock wall (102) is arranged opposite to the first load lock wall (101). The load lock chamber further includes at least one first vacuum suction outlet (110) and at least one second vacuum suction outlet (111) for evacuating the load lock chamber (100); wherein the at least one first vacuum suction outlet (110) is located at the first load lock wall (101) and the at least one second vacuum suction outlet (111) is located at the second load lock wall (102). Further, a vacuum processing system and a method for evacuating a load lock chamber are described.
    • 描述了一种用于真空处理系统(500)的装载锁定室(100)。 负载锁定室包括围绕负载锁定室容积的负载锁定壁,其中负载锁定壁包括第一负载锁定壁(101)和第二负载锁定壁(102),其中第二负载锁定壁(102)被布置 与第一负载锁定壁(101)相对。 所述装载锁定室还包括至少一个第一真空抽吸出口(110)和至少一个用于抽空所述负载锁定室(100)的第二真空抽吸出口(111)。 其中所述至少一个第一真空抽吸出口(110)位于所述第一负载锁定壁(101)处,并且所述至少一个第二真空抽吸出口(111)位于所述第二负载锁定壁(102)处。 此外,描述了真空处理系统和用于排空负载锁定室的方法。