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    • 6. 发明申请
    • NANOSCALE SWITCHING DEVICES WITH PARTIALLY OXIDIZED ELECTRODES
    • 具有部分氧化电极的纳米开关器件
    • WO2011133138A1
    • 2011-10-27
    • PCT/US2010/031639
    • 2010-04-19
    • HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.YANG, JianhuaGILBERTO, RibeiroWILLIAMS, R. Stanley
    • YANG, JianhuaGILBERTO, RibeiroWILLIAMS, R. Stanley
    • H01L21/332
    • H01L45/08H01L27/2463H01L45/1253H01L45/146Y10S438/90
    • A nanoscale switching device (200) is provided. The device comprises: a first electrode (110) of a nanoscale width; a second electrode (120) of a nanos-cale width; an active region (122) disposed between the first and second elec-trodes, the active region having a non-conducting portion (122a) comprising an electronically semiconducting or nominally insulating and a weak ionic conductor switching material capable of carrying a species of dopants and transporting the dopants under an electric field and a source portion (122b) that acts as a source or sink for the dopants; and an oxide layer (115, 125) either formed on the first electrode, between the first electrode and the active region or formed on the second electrode, between the second electrode and the active region. A crossbar array comprising a plurality of the nanoscale switching devices is also provided. A process for making at least one nanoscale switching device is further provided.
    • 提供了一种纳米级切换装置(200)。 该装置包括:纳米级宽度的第一电极(110) 具有纳秒级宽度的第二电极(120); 设置在第一和第二电极之间的有源区(122),有源区具有非导电部分(122a),该导电部分包括电子半导体或标称绝缘以及能够承载一种掺杂剂的弱离子导体开关材料, 在电场下传输掺杂剂和用作掺杂剂的源或阱的源极部分(122b); 或者形成在第一电极之间,第一电极和有源区之间,或形成在第二电极上,在第二电极和有源区之间的氧化物层(115,125)。 还提供了包括多个纳米级切换装置的交叉开关阵列。 还提供了制造至少一个纳米级切换装置的方法。