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1. 发明申请

WO2007072409A3 A MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR 审中-公开
标题翻译： MEMS谐振器，其制造方法和MEMS振荡器
公开(公告)号：WO2007072409A3
公开(公告)日：2007-10-18
申请号：PCT/IB2006054931
申请日：2006-12-18
申请人： NXP BV , VAN BEEK JOZEF T M , LOEBL HANS-PETER , VANHELMONT FREDERIK W M
发明人： VAN BEEK JOZEF T M , LOEBL HANS-PETER , VANHELMONT FREDERIK W M
IPC分类号： H03H9/02 , H03H3/007 , H03H9/24
CPC分类号： H03H9/02448 , H03H3/0072 , H03H9/2447 , H03H2009/02496 , Y10T29/42
摘要： The invention relates to a MEMS resonator comprising a movable element (48), the movable element (48) comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the movable element (48) further comprising a second part (B) having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient, at least, at operating conditions of the MEMS resonator, and a cross-sectional area of the first part (A) and the cross-sectional area of the second part (B) being such that the absolute temperature coefficient of the Young's modulus of the first part (A) multiplied by the cross-sectional area of the first part (A) does not deviate more than 20% from the absolute temperature coefficient of the Young's modulus of the second part (B) multiplied by the cross-sectional area of the second part (B), the cross-sectional areas being measured locally and perpendicularly to the movable element (48).
摘要翻译：本发明涉及一种包括可移动元件（48）的MEMS谐振器，所述可移动元件（48）包括具有第一杨氏模量和第一杨氏模量的第一温度系数的第一部分（A）和可移动元件（48））还包括具有第二杨氏模量和第二杨氏模量的第二温度系数的第二部分（B），所述第二温度系数的符号与所述第一温度系数的符号相反，至少在所述MEMS谐振器以及所述第一部分（A）的横截面面积和所述第二部分（B）的横截面面积使得所述第一部分（A）的杨氏模量的绝对温度系数乘以第一部分（A）的横截面面积与第二部分（B）的杨氏模量的绝对温度系数乘以第二部分（B）的横截面积不相差大于20％横截面面积被局部地和垂直于可移动元件（48）测量。

2. 发明申请

WO2007072409A2 A MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR 审中-公开
标题翻译： MEMS谐振器，其制造方法以及MEMS振荡器
公开(公告)号：WO2007072409A2
公开(公告)日：2007-06-28
申请号：PCT/IB2006/054931
申请日：2006-12-18
申请人： NXP B.V. , VAN BEEK, Jozef, T., M. , LOEBL, Hans-Peter , VANHELMONT, Frederik, W., M.
发明人： VAN BEEK, Jozef, T., M. , LOEBL, Hans-Peter , VANHELMONT, Frederik, W., M.
IPC分类号： H03H9/02 , H03H3/007
CPC分类号： H03H9/02448 , H03H3/0072 , H03H9/2447 , H03H2009/02496 , Y10T29/42
摘要： The invention relates to a MEMS resonator comprising a movable element (48), the movable element (48) comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the movable element (48) further comprising a second part (B) having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient, at least, at operating conditions of the MEMS resonator, and a cross-sectional area of the first part (A) and the cross-sectional area of the second part (B) being such that the absolute temperature coefficient of the Young's modulus of the first part (A) multiplied by the cross-sectional area of the first part (A) does not deviate more than 20% from the absolute temperature coefficient of the Young's modulus of the second part (B) multiplied by the cross-sectional area of the second part (B), the cross-sectional areas being measured locally and perpendicularly to the movable element (48).
摘要翻译：本发明涉及一种包括可移动元件（48）的MEMS谐振器，可移动元件（48）包括具有第一杨氏模量和第一杨氏模量的第一温度系数的第一部分（A）并且所述可移动元件（48）还包括具有第二杨氏模量和第二杨氏模量的第二温度系数的第二部分（B），所述第二温度系数的符号与所述第一温度系数的符号相反至少在MEMS谐振器的操作条件下，第一部分（A）的横截面积和第二部分（B）的横截面积使得杨氏模量的绝对温度系数第一部分（A）乘以第一部分（A）的横截面积与第二部分（B）的杨氏模量的绝对温度系数乘以横截面积的偏差不超过20％的秒（B），所述横截面积局部地且垂直于所述可移动元件（48）测量。

3. 发明申请

WO2005043572A1 RADIO-FREQUENCY MICROELECTROMECHANICAL SYSTEMS AND A METHOD OF MANUFACTURING SUCH SYSTEMS 审中-公开
标题翻译：无线电频率微电子系统及其制造方法
公开(公告)号：WO2005043572A1
公开(公告)日：2005-05-12
申请号：PCT/IB2004/052201
申请日：2004-10-26
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , DEN TOONDER, Jacob, M., J. , VAN DIJKEN, Auke, R. , RIJKS, Theodoor, G., S., M. , VAN BEEK, Jozef, T., M.
发明人： DEN TOONDER, Jacob, M., J. , VAN DIJKEN, Auke, R. , RIJKS, Theodoor, G., S., M. , VAN BEEK, Jozef, T., M.
IPC分类号： H01H59/00
CPC分类号： B81B3/0072 , B81B2203/0118 , H01H1/0036 , H01H59/0009 , H01H2001/0052 , Y10T428/31678
摘要： An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further materials. The resultant thin film has improved hardness and reduced creep relative to conventional thin films.
摘要翻译： RF MEMS器件包括被配置为响应于致动或刺激而运动的一个或多个独立的薄膜，所述一个或多个薄膜包括铝和镁的合金以及任选的一种或多种其它材料。所得薄膜相对于常规薄膜具有改善的硬度和降低的蠕变。

4. 发明申请

WO2005015373A2 A TOUCH SENSITIVE DISPLAY 审中-公开
标题翻译：触摸敏感显示
公开(公告)号：WO2005015373A2
公开(公告)日：2005-02-17
申请号：PCT/IB2004/051366
申请日：2004-08-03
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , DESTURA, Galileo, J., A. , CORTIE, Rogier, H., M. , VAN BEEK, Jozef, T., M. , KEMMEREN, Antonius L, A., M.
发明人： DESTURA, Galileo, J., A. , CORTIE, Rogier, H., M. , VAN BEEK, Jozef, T., M. , KEMMEREN, Antonius L, A., M.
IPC分类号： G06F3/00
CPC分类号： G06F3/0412
摘要： A touch sensitive display comprises pixels (18), each of the pixels (18) have a pixel electrode (22). An optical state of a pixel (18) depends on a drive voltage (VD) supplied to the pixel electrode (22). A touch sensitive elements (S1) is arranged between the pixel electrode (22) and a further electrode (40;17). The touch sensitive element (S1) has an impedance dependent on a mechanical force applied to it.
摘要翻译：触敏显示器包括像素（18），每个像素（18）具有像素电极（22）。像素（18）的光学状态取决于提供给像素电极（22）的驱动电压（VD）。在像素电极（22）和另一电极（40; 17）之间布置有触敏元件（S1）。触敏元件（S1）的阻抗取决于施加到其上的机械力。

5. 发明申请

WO2005008462A2 A PORTABLE DEVICE AND A TOUCH SENSITIVE DISPLAY THEREFOR 审中-公开
标题翻译：便携式设备和触摸敏感显示器
公开(公告)号：WO2005008462A2
公开(公告)日：2005-01-27
申请号：PCT/IB2004/051173
申请日：2004-07-08
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , DESTURA, Galileo, J., A. , HUITEMA, Hjalmar, E., A. , VAN DELDEN, Martinus, H., W., M. , VAN BEEK, Jozef, T., M. , KEMMEREN, Antonius, L., A., M.
发明人： DESTURA, Galileo, J., A. , HUITEMA, Hjalmar, E., A. , VAN DELDEN, Martinus, H., W., M. , VAN BEEK, Jozef, T., M. , KEMMEREN, Antonius, L., A., M.
IPC分类号： G06F3/00
CPC分类号： G06F3/0412 , G02F1/13338 , G06F3/0414
摘要： A portable device is provided having a touch sensitive display (100) comprising an active matrix display element (101) and a touch sensitive element (103). The touch sensitive element (103) is disposed on the viewer distal side of the active matrix display element (101) thereby not affecting the display properties. The touch sensitive element (103) comprises a first and second conductive layer (113, 115) each having a plurality of conductors. The conductive layers (113, 115) sandwich a pressure sensitive layer (117) which modifies an electrical conductivity between two conductors of the two conductive layers (113, 115) in response to a pressure point resulting from an applied pressure. Thus, accurate position detection is achieved. The conductors may be aligned with the active matrix and the requirement for calibration may be obviated.
摘要翻译：提供了具有触敏显示器（100）的便携式设备，该触敏显示器（100）包括有源矩阵显示元件（101）和触敏元件（103）。触敏元件（103）设置在有源矩阵显示元件（101）的观看者远侧，从而不影响显示属性。触敏元件（103）包括每个具有多个导体的第一和第二导电层（113,115）。导电层（113,115）夹着压力敏感层（117），该压力敏感层（117）响应于由所施加的压力导致的压力点而改变两个导电层（113,115）的两个导体之间的导电性。因此，实现了精确的位置检测。导体可以与有源矩阵对准，并且可以避免校准的要求。

6. 发明申请

WO2009153754A3 MEMS RESONATOR FOR FILTERING AND MIXING 审中-公开
标题翻译：用于滤波和混合的MEMS谐振器
公开(公告)号：WO2009153754A3
公开(公告)日：2010-05-27
申请号：PCT/IB2009052614
申请日：2009-06-18
申请人： NXP BV , STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
发明人： STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
IPC分类号： H03D7/00
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译：一种操作微机电系统的方法，包括谐振器; 致动电极; 和第一检测电极，以过滤和混合多个信号。该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。在第一检测电极处检测第一交流信号。

7. 发明申请

WO2008001252A3 METHOD FOR MANUFACTURING MEMS DEVICES WITH MOVEABLE STRUCTURE 审中-公开
标题翻译：用于制造具有移动结构的MEMS器件的方法
公开(公告)号：WO2008001252A3
公开(公告)日：2008-02-21
申请号：PCT/IB2007052269
申请日：2007-06-14
申请人： NXP BV , VAN VELZEN BART , VAN BEEK JOZEF T M , KNOTTER DIRK M
发明人： VAN VELZEN BART , VAN BEEK JOZEF T M , KNOTTER DIRK M
IPC分类号： B81B3/00
CPC分类号： B81C1/00952 , B81B3/001 , B81C2201/0109
摘要： After the release etch of MEMS structures stiction is a well-known problem. Especially for the buried oxide etch on SOI wafers because of the very flat surfaces. Methods to prevent stiction are etching with an etch liquid but the wafers are dried in a CPD tool or alternatively etching with a vapor. However these methods require special equipment and are only effective for the release etch. A simple method for the formation of anti-stiction structures is described in order to prevent direct mechanical contact. The buried oxide is etched in a controlled way and stopped before the buried oxide is totally etched away. The buried oxide residues form anti-stiction structures and prevent direct contact between the resonator and the substrate. For this method no special equipment is required and the process complexity is not increased.
摘要翻译： MEMS结构静电释放蚀刻之后是众所周知的问题。特别是对于SOI晶片上的掩埋氧化物蚀刻，因为非常平坦的表面。防止静电的方法是用蚀刻液蚀刻，但是晶片在CPD工具中干燥，或者替代地用蒸气蚀刻。然而，这些方法需要特殊的设备，并且仅对释放蚀刻有效。描述了形成抗静电结构的简单方法，以防止直接的机械接触。埋入的氧化物以受控的方式蚀刻并在埋入的氧化物被完全蚀刻掉之前停止。掩埋氧化物残留物形成抗静电结构并防止谐振器和衬底之间的直接接触。对于这种方法，不需要特殊设备，并且不增加过程复杂性。

8. 发明申请

WO2005008462A3 TOUCH SENSITIVE DISPLAY FOR A PORTABLE DEVICE 审中-公开
标题翻译：触摸敏感显示器的便携式设备
公开(公告)号：WO2005008462A3
公开(公告)日：2005-07-07
申请号：PCT/IB2004051173
申请日：2004-07-08
申请人： KONINKL PHILIPS ELECTRONICS NV , DESTURA GALILEO J A , HUITEMA HJALMAR E A , VAN DELDEN MARTINUS H W M , VAN BEEK JOZEF T M , KEMMEREN ANTONIUS L A M
发明人： DESTURA GALILEO J A , HUITEMA HJALMAR E A , VAN DELDEN MARTINUS H W M , VAN BEEK JOZEF T M , KEMMEREN ANTONIUS L A M
IPC分类号： G02F1/133 , G06F3/033 , G06F3/041 , G06K11/00 , G09F9/00 , G09G3/32
CPC分类号： G06F3/0412 , G02F1/13338 , G06F3/0414
摘要： A portable device is provided having a touch sensitive display (100) comprising an active matrix display element (101) and a touch sensitive element (103). The touch sensitive element (103) is disposed on the viewer distal side of the active matrix display element (101) thereby not affecting the display properties. The touch sensitive element (103) comprises a first and second conductive layer (113, 115) each having a plurality of conductors. The conductive layers (113, 115) sandwich a pressure sensitive layer (117) which modifies an electrical conductivity between two conductors of the two conductive layers (113, 115) in response to a pressure point resulting from an applied pressure. Thus, accurate position detection is achieved. The conductors may be aligned with the active matrix and the requirement for calibration may be obviated.
摘要翻译：提供了具有触敏显示器（100）的便携式设备，该触敏显示器（100）包括有源矩阵显示元件（101）和触敏元件（103）。触敏元件（103）设置在有源矩阵显示元件（101）的观看者远侧，从而不影响显示属性。触敏元件（103）包括每个具有多个导体的第一和第二导电层（113,115）。导电层（113,115）夹着压力敏感层（117），该压力敏感层（117）响应于由所施加的压力导致的压力点而改变两个导电层（113,115）的两个导体之间的导电性。因此，实现了精确的位置检测。导体可以与有源矩阵对准，并且可以避免校准的要求。

9. 发明申请

WO2005025057A3 ELECTROMECHANICAL TRANSDUCER AND ELECTRICAL DEVICE 审中-公开
公开(公告)号：WO2005025057A3
公开(公告)日：2005-03-17
申请号：PCT/IB2004/051524
申请日：2004-08-23
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN BEEK, Jozef, T., M. , STEENEKEN, Peter, G.
发明人： VAN BEEK, Jozef, T., M. , STEENEKEN, Peter, G.
IPC分类号： H03H9/02
摘要： The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element (40) for providing an electrical sensing signal has a function of a temperature of the resonator element (20), and a heating element (50) for heating the resonator element to reduce the temperature dependent frequency deviation to keep the resonance frequency equal to the nominal frequency at operating temperature. The heating element (50) is controlled by an electrical heating signal based on the electrical sensing signal. The resonator element may have the hating element or the sensing element; it may be part of a wheatstone bridge; it may consist of two longitudinally extendable parts (201, 202) extending in opposite directions, being attached in a support area (204) in a deformation free part (203).

10. 发明申请

WO2003017479A2 ELECTRONIC DEVICE AND METHOD OF TESTING AND OF MANUFACTURING 审中-公开
标题翻译：电子设备及其制造和制造方法
公开(公告)号：WO2003017479A2
公开(公告)日：2003-02-27
申请号：PCT/IB2002/003230
申请日：2002-08-14
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN BEEK, Jozef, T., M. , RIJKS, Theodoor, G., S., M. , MATTERS-KAMMERER, Marion, K. , VAN ESCH, Henricus, A.
发明人： VAN BEEK, Jozef, T., M. , RIJKS, Theodoor, G., S., M. , MATTERS-KAMMERER, Marion, K. , VAN ESCH, Henricus, A.
IPC分类号： H03H7/01
CPC分类号： G01R27/2617 , G01R27/26 , H01F17/0006 , H01F17/0013 , H01F27/2804 , H01L27/08 , H01L28/10 , H01L28/40 , H01L2924/0002 , H03H7/0115 , H01L2924/00
摘要： The electronic device (10) comprises a capacitor (12) and an inductor (11) and is present on a substrate (1) with an unplanarized surface (2). This is realized in winding (21) of the inductor (11) has a thickness of at least 1 micron and has a planarized upper surface (81). The upper electrode (32) of the capacitor is present in a second electrode layer (6) and has a lower surface (82) which is spaced from the substrate (1) by a larger distance than the upper surface (81) of the lower electrode (31). The second electrode layer (6) preferably includes a second winding (22) of the inductor (11). The electronic device (10) is suitable for use at high frequencies.
摘要翻译：电子器件（10）包括电容器（12）和电感器（11），并且具有非平面化表面（2）的基板（1）上。这在电感器（11）的绕组（21）中具有至少1微米的厚度并且具有平坦化的上表面（81）。电容器的上电极（32）存在于第二电极层（6）中，并且具有与基板（1）间隔开比下层（6）的上表面（81）更大的距离的下表面（82）电极（31）。第二电极层（6）优选地包括电感器（11）的第二绕组（22）。电子设备（10）适合在高频下使用。

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