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1. 发明申请

WO2011145025A1 MICROPHONE 审中-公开
标题翻译：麦克风
公开(公告)号：WO2011145025A1
公开(公告)日：2011-11-24
申请号：PCT/IB2011/052068
申请日：2011-05-11
申请人： NXP B.V , REIMANN, Klaus , STEENEKEN, Peter G , VAN LEUKEN-PETERS, Linda , ROEST, Aarnoud L , WUNNICKE, Olaf , GOOSSENS, Martijn
发明人： REIMANN, Klaus , STEENEKEN, Peter G , VAN LEUKEN-PETERS, Linda , ROEST, Aarnoud L , WUNNICKE, Olaf , GOOSSENS, Martijn
IPC分类号： H04R23/00
CPC分类号： H04R23/008
摘要： A microphone comprises a planar substrate arrangement, an optical source provided over the substrate arrangement for emitting a light beam in a direction parallel to the substrate arrangement and a layer structure defining at least one optical cavity through which the light beam is directed, the cavity exposed to the sound pressure to be sensed. The light beam is directed to a target after passing through the cavity. Optical analysis is used for determining an optical property which is dependent on the pressure in the cavity.
摘要翻译：麦克风包括平面衬底布置，设置在衬底布置上用于沿平行于衬底布置的方向发射光束的光源以及限定光束被引导的至少一个光腔的层结构，腔暴露到要感测的声压。光束在通过空腔后被引导到目标。光学分析用于确定取决于空腔中的压力的光学性质。

2. 发明申请

WO2006046194A1 REDUCTION OF AIR DAMPING IN MEMS DEVICE 审中-公开
标题翻译：减少MEMS器件中的空气阻尼
公开(公告)号：WO2006046194A1
公开(公告)日：2006-05-04
申请号：PCT/IB2005/053477
申请日：2005-10-24
申请人： KONINKLIJKE PHILIPS ELECTRONICS N. V. , STEENEKEN, Peter G. , VAN BEEK, Jozef Thomas Martinus , RIJKS, Theo
发明人： STEENEKEN, Peter G. , VAN BEEK, Jozef Thomas Martinus , RIJKS, Theo
IPC分类号： H04R19/00 , H01H59/00
CPC分类号： H01H59/0009 , B81B3/0059 , B81B2201/0257 , B81B2201/0264 , H01G5/16 , H01H2001/0084
摘要： A micro-electromechanical device has a substrate (10), a movable element, movable towards the substrate by electrostatic forces on electrodes, facing surfaces of the movable element and the substrate being shaped such that one or more venting channels (VC) are defined by the facing surfaces when they are in a closed position, configured to enable fluid between the facing surfaces to flow across the facing surfaces, to enter or exit the area between the facing surfaces. Such channels can enable fluid damping of the movement of the moveable element to be controlled. Increasing the flow entering or exiting the area between the facing surfaces, can reduce such damping, and hence increase speed of opening and closing of the device. The channels can connect to holes in the electrodes.
摘要翻译：微机电装置具有基板（10），可移动元件，其可通过电极上的静电力朝向基板移动，可移动元件和基板的相对表面被成形为使得一个或多个排气通道（VC）由所述对置表面当它们处于关闭位置时，被配置为使所述相对表面之间的流体能够流过所述相对表面，以进入或离开所述相对表面之间的区域。这样的通道能够使待控制的可移动元件的运动的流体阻尼。增加进入或离开相对表面之间的区域的流量可以减少这种阻尼，从而增加装置的打开和关闭速度。通道可以连接到电极中的孔。

3. 发明申请

WO2005025057A2 ELECTROMECHANICAL TRANSDUCER AND ELECTRICAL DEVICE 审中-公开
标题翻译：机电传感器和电气设备
公开(公告)号：WO2005025057A2
公开(公告)日：2005-03-17
申请号：PCT/IB2004051524
申请日：2004-08-23
申请人： KONINKL PHILIPS ELECTRONICS NV , VAN BEEK JOZEF T M , STEENEKEN PETER G
发明人： VAN BEEK JOZEF T M , STEENEKEN PETER G
IPC分类号： H03H9/02 , H03H9/24 , H03L1/04 , H03H9/00 , H03H9/08
CPC分类号： H03H9/2405 , H03H9/02448 , H03H9/2463 , H03H2009/02496 , H03L1/04
摘要： The electromechanical transducer (1) for transducing an electrical input signal into an electrical output signal comprises a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20). The elastic deformation is dependent on the electrical input signal and is resonantly enhanced when the electrical input signal comprises a signal component changing substantially with a resonance frequency of the resonator element. The electrical output signal is a function of the elastic deformation. The resonance frequency includes a nominal frequency at an operating temperature and a temperature dependent frequency deviation from the nominal frequency. To stabilize the resonance frequency of the resonator element the electromechanical transducer (1) further comprises a sensing element (40) for providing an electrical sensing signal, which is a function of a temperature of the resonator element (20), and a heating element (50) for heating the resonator element to reduce the temperature dependent frequency deviation to keep the resonance frequency substantially equal to the nominal frequency. The heating element (50) is controlled by an electrical heating signal derived from the electrical sensing signal.
摘要翻译：用于将电输入信号转换成电输出信号的机电换能器（1）包括用于引起谐振器元件（20）的弹性变形的谐振元件（20）和致动器（30）。弹性变形取决于电输入信号，并且当电输入信号包括基本上以谐振元件的谐振频率改变的信号分量时，共振地增强。电输出信号是弹性变形的函数。谐振频率包括在工作温度下的标称频率和与标称频率的温度相关的频率偏差。为了稳定谐振器元件的谐振频率，机电换能器（1）还包括感测元件（40），用于提供作为谐振器元件（20）的温度的函数的电感测信号和加热元件（ 50），用于加热谐振元件以降低与温度相关的频率偏差，以保持谐振频率基本上等于标称频率。加热元件（50）由来自电感测信号的电加热信号控制。

4. 发明申请

WO2006046193A1 ELECTRONIC DEVICE 审中-公开
标题翻译：电子设备
公开(公告)号：WO2006046193A1
公开(公告)日：2006-05-04
申请号：PCT/IB2005/053476
申请日：2005-10-24
申请人： KONINKLIJKE PHILIPS ELECTRONICS N. V. , STEENEKEN, Peter, G. , VAN BEEK, Jozef, Thomas, Martinus , RIJKS, Theo
发明人： STEENEKEN, Peter, G. , VAN BEEK, Jozef, Thomas, Martinus , RIJKS, Theo
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H1/06 , H01H57/00 , H01H2057/006 , H01H2059/0072
摘要： The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate (14). The MEMS element comprises a first electrode (101) and a second electrode (11), that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode (11) is separated from the first electrode (101) by an air gap (110) in its first position. The movable element comprises a mechanical layer (12) and an intermediate layer, in which the second electrode (11) is defined. The second electrode (11) is constituted by a plurality of sections (131, 132, 133) in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect (121, 122, 123) to the mechanical layer (12).
摘要翻译：该电子设备包括在基板（14）的第一侧的微机电系统（MEMS）元件。 MEMS元件包括第一电极（101）和第二电极（11），其是可移动元件的一部分并且可在第一和第二位置之间朝向和离开第一电极移动。第二电极（11）在其第一位置通过气隙（110）与第一电极（101）分离。可移动元件包括机械层（12）和中间层，其中限定了第二电极（11）。第二电极（11）由中间层中的多个部分（131,132,133）构成，每个部分通过分开的垂直互连（121,122,123）与机械层（12）机械连接，。

5. 发明申请

WO2005025057A3 ELECTROMECHANICAL TRANSDUCER AND ELECTRICAL DEVICE 审中-公开
公开(公告)号：WO2005025057A3
公开(公告)日：2005-03-17
申请号：PCT/IB2004/051524
申请日：2004-08-23
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN BEEK, Jozef, T., M. , STEENEKEN, Peter, G.
发明人： VAN BEEK, Jozef, T., M. , STEENEKEN, Peter, G.
IPC分类号： H03H9/02
摘要： The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element (40) for providing an electrical sensing signal has a function of a temperature of the resonator element (20), and a heating element (50) for heating the resonator element to reduce the temperature dependent frequency deviation to keep the resonance frequency equal to the nominal frequency at operating temperature. The heating element (50) is controlled by an electrical heating signal based on the electrical sensing signal. The resonator element may have the hating element or the sensing element; it may be part of a wheatstone bridge; it may consist of two longitudinally extendable parts (201, 202) extending in opposite directions, being attached in a support area (204) in a deformation free part (203).

6. 发明申请

WO2008152559A2 TUNABLE MEMS CAPACITOR 审中-公开
标题翻译：可控MEMS电容器
公开(公告)号：WO2008152559A2
公开(公告)日：2008-12-18
申请号：PCT/IB2008/052253
申请日：2008-06-09
申请人： NXP B.V. , STEENEKEN, Peter, G. , REIMANN, Klaus
发明人： STEENEKEN, Peter, G. , REIMANN, Klaus
IPC分类号： H03J5/24 , H01G5/16
CPC分类号： H01G5/16 , H01G5/013 , H01G5/0136 , H01G7/06 , H01G2005/02 , H03J5/248
摘要： A MEMS tunable capacitor comprises first and second opposing capacitor electrodes (10,12), wherein the second capacitor electrode (12) is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material (14) and a non- tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode (20) faces the movable second electrode (12) for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material (14) for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.
摘要翻译： MEMS可调谐电容器包括第一和第二相对电容器电极（10,12），其中第二电容器电极（12）可通过MEMS开关移动以改变电容器介电间距，从而调谐电容。可调电介质材料（14）和非可调电介质材料串联在第一和第二电极之间。可调电介质材料占电极间距的尺寸gd，不可调电介质材料占电极间距的尺寸g。第三电极（20）面向可动第二电极（12），用于电控制可调电介质材料。控制器适于改变用于MEMS电容器的电容的第一连续调节范围的电容器电介质间隔，并且调谐电介质材料（14）用于MEMS电容器的电容的第二连续调节范围，从而以提供包括第一和第二范围的连续模拟调节范围。这种布置提供了对MEMS功能和介质调谐功能的独立控制，并且实现了连续可调性。

7. 发明申请

WO2008072163A3 MEMS DEVICE WITH CONTROLLED ELECTRODE OFF-STATE POSITION 审中-公开
标题翻译：具有控制电极离态位置的MEMS器件
公开(公告)号：WO2008072163A3
公开(公告)日：2008-10-23
申请号：PCT/IB2007054989
申请日：2007-12-10
申请人： NXP BV , STEENEKEN PETER G
发明人： STEENEKEN PETER G
IPC分类号： B81B3/00 , H01H59/00
CPC分类号： H01H59/0009 , B81B3/0056 , B81B2201/016 , B81C2201/017 , Y10T29/49105
摘要： The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The MEMS device further comprises at least one deformation electrode. The second electrode or the suspension structure or both are plastically deformable upon application of an electrostatic deformation force via the deformation electrode. This way, variations in the off- state position of the second electrode that occur during fabrication of different devices or during operation of a single device can be eliminated.
摘要翻译：本发明涉及一种MEMS器件，其包括第一电极和借助于悬挂结构悬挂至第一电极一定距离的第二电极。 MEMS器件还包括至少一个变形电极。当通过变形电极施加静电变形力时，第二电极或悬架结构或两者均可塑性变形。这样，可以消除在制造不同装置期间或在单个装置的操作期间发生的第二电极的断开状态位置的变化。

8. 发明申请

WO2007043006A3 MEMS TUNABLE DEVICE 审中-公开
公开(公告)号：WO2007043006A3
公开(公告)日：2007-04-19
申请号：PCT/IB2006/053711
申请日：2006-10-10
申请人： NXP B.V. , RIJKS, Theodoor, G., S., M. , STEENEKEN, Peter, G.
发明人： RIJKS, Theodoor, G., S., M. , STEENEKEN, Peter, G.
IPC分类号： H01G5/16 , B81B3/00 , H01H59/00
摘要： A micro-electromechanical device has a substrate (60), a movable element (15), a pair of electrodes (40) arranged on the substrate and on the movable element to move the movable element, and a controller (50) to supply the electrodes. To move the movable element to an intermediate position one or more pulses are applied during the movement, timed to compensate for under or over damping of the movement. This can reduce a settling delay. It can be applied to tunable RF capacitors. To control a decrease in the gap, a single pulse of a maximum supply level compensates for the inherent slowness of the device and over damping. To compensate for under damping, the pulses have a period corresponding to a resonant frequency, and comprise peaks and troughs above and below the final supply level, such that successive ones of the peaks and troughs are closer to the given supply level.

9. 发明申请

WO2007004112A2 METHOD AND CONTROL SYSTEM FOR CONTROLLING THE OUTPUT OF A LED LUMINAIRE 审中-公开
标题翻译：控制LED路灯输出的方法与控制系统
公开(公告)号：WO2007004112A2
公开(公告)日：2007-01-11
申请号：PCT/IB2006/052090
申请日：2006-06-26
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH , MEIJER, Eduard, J. , STEENEKEN, Peter, G. , DEKKER, Ronald , TIMMERING, Eugene , WENDT, Matthias
发明人： MEIJER, Eduard, J. , STEENEKEN, Peter, G. , DEKKER, Ronald , TIMMERING, Eugene , WENDT, Matthias
CPC分类号： H05B33/0869
摘要： The present invention relates to a method of controlling the output of a luminaire comprising an array of LEDs emitting light of at least one color. The array comprises single color LED groups, each consisting of at least one LED. The method comprises the following steps for each LED group: - spectrally bandpass filtering the light emitted by the LED group by means of a filter device, wherein a filter characteristic of said filter device has a peak; detecting the spectrally filtered light from said filter device and generating a response signal, wherein the level of said response signal is related to an amount of detected spectrally filtered light; and - controlling the light output of said LED group at least partially on the basis of said response signal, comprising maximizing the level of said response signal by spectrally shifting the spectrum of the light emitted by the LED group and said filter characteristic in relation to each other. A control system for performing the method is also provided.
摘要翻译：本发明涉及一种控制照明器的输出的方法，该方法包括发射至少一种颜色的光的LED阵列。该阵列包括单色LED组，每组由至少一个LED组成。该方法包括以下步骤：对每个LED组进行以下步骤： - 利用滤波器装置对由LED组发出的光进行频谱带通滤波，其中所述滤波器装置的滤波器特性具有峰值; 检测来自所述滤波器装置的光谱滤波光并产生响应信号，其中所述响应信号的电平与检测到的光谱滤波光量有关; 以及 - 至少部分地基于所述响应信号来控制所述LED组的光输出，包括通过频谱移动由所述LED组发射的光的光谱和所述滤波器特性相对于每个的所述响应信号来最大化所述响应信号的电平其他。还提供了一种用于执行该方法的控制系统。

10. 发明申请

WO2006046192A1 SPRING STRUCTURE FOR MEMS DEVICE 审中-公开
标题翻译： MEMS器件弹簧结构
公开(公告)号：WO2006046192A1
公开(公告)日：2006-05-04
申请号：PCT/IB2005/053475
申请日：2005-10-24
申请人： KONINKLIJKE PHILIPS ELECTRONICS N. V. , STEENEKEN, Peter G. , VAN BEEK, Jozef Thomas Martinus , RIJKS, Theo
发明人： STEENEKEN, Peter G. , VAN BEEK, Jozef Thomas Martinus , RIJKS, Theo
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30) , a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel , and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
摘要翻译： MEM器件具有可移动元件（30），一对电极（e1，e2）以移动可移动元件，一个电极具有可独立移动的部分（e3），弹性地联接到相应电极的其余部分以提供额外的电阻到电极的拉。这可以实现更高的释放电压Vrel，从而降低静电的风险。此外，可以减小Vpi与Vrel的比率，因此可用于可移动元件的移动的较大范围的电压。这样可以实现更快的切换。可独立移动部分的面积小于电极的其余部分，并且弹性联接件的弹簧常数大于柔性支撑件的弹簧常数。或者，可移动元件可以具有弹性耦合并朝向基板突出的可移动的印模部分，以在与基板接触时提供额外的拉入阻力。

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