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1. 发明申请

WO2009153754A2 MEMS RESONATOR FOR FILTERING AND MIXING 审中-公开
标题翻译：用于滤波和混合的MEMS谐振器
公开(公告)号：WO2009153754A2
公开(公告)日：2009-12-23
申请号：PCT/IB2009052614
申请日：2009-06-18
申请人： NXP BV , STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
发明人： STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译：一种操作微机电系统的方法，包括：谐振器; 致动电极; 以及第一检测电极，以过滤和混合多个信号。该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。在第一检测电极处检测第一交流信号。

2. 发明申请

WO2009153754A3 MEMS RESONATOR FOR FILTERING AND MIXING 审中-公开
标题翻译：用于滤波和混合的MEMS谐振器
公开(公告)号：WO2009153754A3
公开(公告)日：2010-05-27
申请号：PCT/IB2009052614
申请日：2009-06-18
申请人： NXP BV , STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
发明人： STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
IPC分类号： H03D7/00
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译：一种操作微机电系统的方法，包括谐振器; 致动电极; 和第一检测电极，以过滤和混合多个信号。该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。在第一检测电极处检测第一交流信号。

3. 发明申请

WO2010001344A2 INTEGRATING AND OPTIMIZING DIFFERENT FUNCTIONAL COMPONENTS ON A SINGLE SUBSTRATE HAVING LAYER IN COMMON 审中-公开
标题翻译：在具有共同层的单层基板上集成和优化不同的功能组件
公开(公告)号：WO2010001344A2
公开(公告)日：2010-01-07
申请号：PCT/IB2009052847
申请日：2009-06-30
申请人： NXP BV , KLEE MAREIKE , RENDERS CHRISTINA ADRIANA , LOK PIETER , ROEST AARNOUD LAURENS , DEN DEKKER ARNOLDUS , REIMANN KLAUS , STEENEKEN PETER GERARD , WUNNICKE OLAF
发明人： KLEE MAREIKE , RENDERS CHRISTINA ADRIANA , LOK PIETER , ROEST AARNOUD LAURENS , DEN DEKKER ARNOLDUS , REIMANN KLAUS , STEENEKEN PETER GERARD , WUNNICKE OLAF
IPC分类号： H03H9/05 , H01L21/00 , H01L27/00
CPC分类号： H03H9/0542 , H01L27/0805
摘要： The invention relates to a method of manufacturing a monolithic device comprising multiple process steps. The monolithic device comprises at least two different electrical or electromechanical functional components (GS, CS, TC1, TC2, HKC, BW, BWM, FBAR). Each respective electromechanical functional component is formed by a respective functional stack (FS1, FS2) comprising a plurality of layers. The at least two 5 functional components (GS...FBAR) have a first layer in common (DL, E1, E2, E3). The method comprises a step of: providing a first ranking of the functional components (GS...FBAR) for the first layer (DL, E1, E2, E3) which is based on a plurality of respective performance indicators for each respective one of the functional. The multiple process steps comprise a step of manufacturing the first layer (DL, E1, E2, E3) such that it is physically 10 and/or geometrically optimized for at least a single one of the functional components selected on the basis of a highest rank in the first ranking. The method in accordance with the invention provides for a monolithic integration of different functional components (GS...FBAR). In this method layers of the functional stack are reused, which saves process steps, and optimized for optimal performance of at least one of the functional components 15 (GS...FBAR) without jeopardizing the performance of the monolithic device to unacceptable levels. The invention further relates to a monolithic device which features a wider applicability than the known monolithic devices because the tunable and/or high-k dielectric layer in respective functional stacks can be better shared between the functional components.
摘要翻译：本发明涉及一种制造包括多个工艺步骤的整体式装置的方法。单片装置包括至少两个不同的电或机电功能部件（GS，CS，TC1，TC2，HKC，BW，BWM，FBAR）。每个相应的机电功能部件由包括多个层的相应的功能堆叠（FS1，FS2）形成。至少两个5个功能组件（GS ... FBAR）具有共同的第一层（DL，E1，E2，E3）。该方法包括以下步骤：为第一层（DL，E1，E2，E3）提供功能组件（GS ... FBAR）的第一等级，其基于多个相应的性能指示符功能。多个处理步骤包括制造第一层（DL，E1，E2，E3）的步骤，使得其在基于最高等级选择的功能组件中的至少一个功能部件的物理上为10和/或几何优化排名第一。根据本发明的方法提供了不同功能组件（GS ... FBAR）的单片集成。在该方法中，功能堆叠的层被重复使用，这节省了工艺步骤，并且优化了功能组件15（GS ... FBAR）中的至少一个的最佳性能，而不会将单片设备的性能损害到不可接受的水平。本发明还涉及具有比已知单片器件更广泛适用性的单片器件，因为相应功能堆叠中的可调谐和/或高k电介质层可以在功能部件之间更好地共享。

4. 发明申请

WO2008152559A3 CONTROLLER FOR TUNABLE MEMS CAPACITOR 审中-公开
标题翻译：微控制器电容器控制器
公开(公告)号：WO2008152559A3
公开(公告)日：2009-02-05
申请号：PCT/IB2008052253
申请日：2008-06-09
申请人： NXP BV , STEENEKEN PETER G , REIMANN KLAUS
发明人： STEENEKEN PETER G , REIMANN KLAUS
IPC分类号： H03J5/24 , H01G5/16
CPC分类号： H01G5/16 , H01G5/013 , H01G5/0136 , H01G7/06 , H01G2005/02 , H03J5/248
摘要： A MEMS tunable capacitor comprises first and second opposing capacitor electrodes (10,12), wherein the second capacitor electrode (12) is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material (14) and a non- tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode (20) faces the movable second electrode (12) for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material (14) for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.
摘要翻译： MEMS可调谐电容器包括第一和第二相对电容器电极（10,12），其中第二电容器电极（12）可通过MEMS开关移动以改变电容器介电间距，从而调谐电容。可调电介质材料（14）和非可调电介质材料串联在第一和第二电极之间。可调电介质材料占电极间距的尺寸gd，不可调电介质材料占电极间距的尺寸g。第三电极（20）面向可动第二电极（12），用于电控制可调电介质材料。控制器适于改变用于MEMS电容器的电容的第一连续调节范围的电容器电介质间隔，并且调谐电介质材料（14）用于MEMS电容器的电容的第二连续调节范围，从而以提供包括第一和第二范围的连续模拟调节范围。这种布置提供了对MEMS功能和介质调谐功能的独立控制，并且实现了连续可调性。

5. 发明申请

WO2008050271A3 FERROELECTRIC VARACTOR WITH IMPROVED TUNING RANGE 审中-公开
标题翻译：具有改进的调谐范围的电磁变压器
公开(公告)号：WO2008050271A3
公开(公告)日：2008-06-19
申请号：PCT/IB2007054260
申请日：2007-10-19
申请人： NXP BV , BEELEN DANIELLE , KLEE MAREIKE , REIMANN KLAUS , KEUR WILHELMUS C , MAUCZOK RUEDIGER
发明人： BEELEN DANIELLE , KLEE MAREIKE , REIMANN KLAUS , KEUR WILHELMUS C , MAUCZOK RUEDIGER
IPC分类号： H01G7/06 , H01L21/00
CPC分类号： H01G7/06 , H01G7/028
摘要： The present invention relates to a ferroelectric varactor (400) that comprises a dielectric-layer stack (408) between electrodes (406, 410). The dielectric- layer stack comprises an alternating layer sequence of at least three dielectric layers. At least two first dielectric layers of the dielectric-layer stack are made of a non-single-crystalline first dielectric material having a first dielectric constant, at least one second dielectric layer of the dielectric-layer stack is made of a non-single-crystalline second dielectric material with a second dielectric constant that differs from the first dielectric constant. One of the first and second dielectric materials exhibits a weaker ferroelectric hysteresis. The dielectric material with the weaker ferroelectric hysteresis makes up more than 20 % of the total volume of the dielectric- layer stack. The ferroelectric varactor of the present invention achieves high relative dielectric permittivities in the dielectric layers, a high breakdown voltage, a large tuning range at low voltages, and low dielectric losses.
摘要翻译：本发明涉及一种铁电变容二极管（400），其包括电极（406,410）之间的电介质层叠层（408）。介电层堆叠包括至少三个电介质层的交替层序列。电介质层叠层的至少两个第一电介质层由具有第一介电常数的非单晶第一绝缘材料制成，介电层叠层的至少一个第二电介质层由非单晶第一绝缘材料制成，具有不同于第一介电常数的第二介电常数的晶体第二电介质材料。第一和第二介质材料之一表现出较弱的铁电滞后。具有较弱铁电滞后的电介质材料占电介质层叠层总体积的20％以上。本发明的铁电变容二极管在电介质层中实现高相对介电常数，高击穿电压，低电压下的大调谐范围以及低介电损耗。

6. 发明申请

WO2010049864A3 GENERATING AND EXPLOITING AN ASYMMETRIC CAPACITANCE HYSTERESIS OF FERROELECTRIC MIM CAPACITORS 审中-公开
标题翻译：生成和开发电磁MIM电容器的不对称电容滞后
公开(公告)号：WO2010049864A3
公开(公告)日：2010-07-08
申请号：PCT/IB2009054704
申请日：2009-10-24
申请人： NXP BV , ROEST AARNOUD LAURENS , KLEE MAREIKE , MAUCZOK RUDIGER GUNTER , REIMANN KLAUS , JOEHREN MICHAEL
发明人： ROEST AARNOUD LAURENS , KLEE MAREIKE , MAUCZOK RUDIGER GUNTER , REIMANN KLAUS , JOEHREN MICHAEL
IPC分类号： H01L27/02 , G11C11/56 , H01L27/115
CPC分类号： H01L27/0251 , G11C11/22 , G11C11/221 , H01L27/11502 , H01L28/55
摘要： The present invention relates to an electric component comprising at least one first MIM capacitor having a ferroelectric insulator with a dielectric constant of at least 100 between a first capacitor electrode of a first electrode material and a second capacitor electrode of a second electrode material. The first and second electrode materials are selected such that the first MIM capacitor exhibits, as a function of a DC voltage applicable between the first and second electrodes, an asymmetric capacitance hysteresis that lets the first MIM capacitor, in absence of the DC voltage, assume one of at least two possible distinct capacitance values, in dependence on a polarity of a switching voltage last applied to the capacitor, the switching voltage having an amount larger than a threshold-voltage amount. The invention is applicable for ESD sensors, memories and high-frequency devices.
摘要翻译：本发明涉及一种电气部件，包括至少一个第一MIM电容器，其具有在第一电极材料的第一电容器电极和第二电极材料的第二电容器电极之间具有至少100的介电常数的铁电绝缘体。选择第一和第二电极材料，使得第一MIM电容器作为可应用于第一和第二电极之间的DC电压的函数表现出不对称电容滞后，其使第一MIM电容器在没有DC电压的情况下呈现根据最后施加到电容器的开关电压的极性，开关电压具有大于阈值电压量的量的至少两个可能的不同电容值中的一个。本发明适用于ESD传感器，存储器和高频器件。

7. 发明申请

WO2008001268A3 DEVICE AND METHOD FOR DELIVERING A FLUID IN FORM OF A HIGH-SPEED MICRO-JET 审中-公开
标题翻译：用于以高速微射流的形式输送流体的装置和方法
公开(公告)号：WO2008001268A3
公开(公告)日：2008-02-21
申请号：PCT/IB2007052341
申请日：2007-06-19
申请人： KONINKL PHILIPS ELECTRONICS NV , PELZER HEIKO , REIMANN KLAUS
发明人： PELZER HEIKO , REIMANN KLAUS
IPC分类号： A61M5/30 , B41J2/14
CPC分类号： B41J2/14314 , A61M5/204 , A61M5/30 , B41J2002/14338 , B41J2202/11
摘要： The present invention relates to a device and method for delivering a fluid in the form of a high-speed micro-jet. In order to provide a small and low-cost device for delivering a fluid in the form of a high-speed micro-jet, a device (1) is suggested comprising a container (2) for accommodating a fluid which is to be delivered through an orifice (3) of said container (2), and further comprising an actuator (5) cooperating with said container (2), characterized in that said actuator (5) comprises a thin-film transducer membrane (6), wherein the transducer membrane (6) is divided into at least two transducer elements (15), said transducer elements (15) forming a transducer array in which each transducer element (15) corresponds to a certain portion of the transducer membrane (6).
摘要翻译：本发明涉及用于输送高速微射流形式的流体的装置和方法。为了提供用于输送高速微射流形式的流体的小型且低成本的装置，提出了一种装置（1），其包括容器（2），所述容器（2）用于容纳待输送的流体所述容器（2）的孔（3），并且还包括与所述容器（2）配合的致动器（5），其特征在于，所述致动器（5）包括薄膜换能器膜片（6），其中所述换能器膜片（6）被分成至少两个换能器元件（15），所述换能器元件（15）形成换能器阵列，其中每个换能器元件（15）对应于换能器膜片（6）的特定部分。

8. 发明申请

WO2009004558A3 THIN FILM DETECTOR FOR PRESENCE DETECTION 审中-公开
标题翻译：薄膜检测器用于存在检测
公开(公告)号：WO2009004558A3
公开(公告)日：2010-09-30
申请号：PCT/IB2008052610
申请日：2008-06-30
申请人： KONINKL PHILIPS ELECTRONICS NV , KLEE MAREIKE , REIMANN KLAUS , SREEDHARAN NAIR BIJU K , DELNOIJ ROGER P A , BOOTS HENRI M J , RENDERS CHRISTINA A , WUNNICKE OLAF , REEFMAN DERK , DIRKSEN PETER , DEKKER RONALD , VAN ESCH HARRY , DE WILD MARCO , MAUCZOK RUEDIGER , VAN HEESCH CHRIS , PASVEER WILLEM F , KNIBBE ENGEL J , BREEN REMCO A H
发明人： KLEE MAREIKE , REIMANN KLAUS , SREEDHARAN NAIR BIJU K , DELNOIJ ROGER P A , BOOTS HENRI M J , RENDERS CHRISTINA A , WUNNICKE OLAF , REEFMAN DERK , DIRKSEN PETER , DEKKER RONALD , VAN ESCH HARRY , DE WILD MARCO , MAUCZOK RUEDIGER , VAN HEESCH CHRIS , PASVEER WILLEM F , KNIBBE ENGEL J , BREEN REMCO A H
IPC分类号： H01L41/22 , B06B1/06 , G08B13/16 , H01L41/09 , H01L41/314
CPC分类号： B06B1/0603 , B06B1/0292 , G08B13/1645 , H01L27/20 , H01L41/0973 , H01L41/314 , Y10T29/42
摘要： A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.
摘要翻译：提供换能器（800），其中膜（830）形成在前基板（615）上方; 并且在有源部分（821）和靠近有效部分（821）的周边部分之间在膜（830）上形成压电层（820）。包括第一和第二电极（840,845）的图案化导电层形成在压电层（820）上方。此外，背面基板结构设置有位于与活动部分（821）相邻的周边部分处的支撑件（822,824）。支撑件（822,824）的高度（826）大于图案化压电层和图案化导电层的组合高度（828）。可以连接许多换能器以形成阵列，其中可以提供用于控制阵列的控制器，例如控制阵列的波束，以及处理由阵列接收的信号，用于存在或运动检测和/或成像，例如。

9. 发明申请

WO2009016606A3 CMUTS WITH A HIGH-K DIELECTRIC 审中-公开
标题翻译：具有高K电介质的CMU
公开(公告)号：WO2009016606A3
公开(公告)日：2009-08-06
申请号：PCT/IB2008053082
申请日：2008-07-31
申请人： KONINKL PHILIPS ELECTRONICS NV , ROEST AARNOUD LAURENS , REIMANN KLAUS , KLEE MARIEKE , VAN BEEK JOZEF THOMAS MARTINUS , FRASER JOHN DOUGLAS
发明人： ROEST AARNOUD LAURENS , REIMANN KLAUS , KLEE MARIEKE , VAN BEEK JOZEF THOMAS MARTINUS , FRASER JOHN DOUGLAS
IPC分类号： B06B1/02
CPC分类号： B06B1/0292
摘要： A capacitive ultrasound transducer includes a first electrode, a second electrode, and a third electrode, the third electrode including a central region disposed in collapsibly spaced relation with the first electrode, and a peripheral region disposed outward of the central region and disposed in collapsibly spaced relation with the second electrode. The transducer further includes a layer of a high dielectric constant material disposed between the third electrode and the first electrode, and between the third electrode and the second electrode. The transducer may be operable in a collapsed mode wherein the peripheral region of the third electrode oscillates relative to the second electrode, and the central region of the third electrode is fully collapsed with respect to the first electrode such that the dielectric layer is sandwiched therebetween. Piezoelectric actuation, such as d31 and d33 mode piezoelectric actuation, may further be included. A medical imaging system includes an array of such capacitive ultrasound transducers disposed on a common substrate.
摘要翻译：电容式超声换能器包括第一电极，第二电极和第三电极，第三电极包括设置成与第一电极可收缩地间隔开的中央区域以及设置在中央区域外侧并以可收缩间隔布置的外围区域与第二电极的关系。换能器还包括设置在第三电极和第一电极之间以及第三电极和第二电极之间的高介电常数材料层。换能器可以以塌陷模式操作，其中第三电极的外围区域相对于第二电极振荡，并且第三电极的中心区域相对于第一电极完全塌陷，使得介电层夹在它们之间。还可以包括压电致动，例如d31和d33模式压电致动。医学成像系统包括设置在公共衬底上的这种电容式超声换能器阵列。

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