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    • 9. 发明申请
    • FRACTURE SHOT COUNT REDUCTION
    • 断裂拍摄减少
    • WO2009036133A1
    • 2009-03-19
    • PCT/US2008/075968
    • 2008-09-11
    • MENTOR GRAPHICS CORPORATIONSAHOURIA, EmileWANG, Jianlin
    • SAHOURIA, EmileWANG, Jianlin
    • G03F1/14G03F7/20
    • G03F7/70433G03F1/36G03F1/68
    • Techniques are described for reducing the number of shots in a fractured layout design. Each polygon in a layout design is examined for "jogs." For each identified jog, the surrounding region is examined to determine if there is an opposing jog or parallel edge that can be aligned with the identified jog. The surrounding region then is examined for any polygon features, such as edges or vertices, which might restrict or prevent the alignment of the identified jog with the opposing jog or edge. If the identified jog can be aligned with an opposing jog or edge without violating a specified alignment constraint, then those jogs are deemed an alignable jog pair. Next, one or more of the alignable jog pairs is selected for alignment. The alignable jog pairs may be selected for alignment based upon their impact on the size of the polygon when aligned. Once one or more of the alignable jog pairs have been selected, then the layout design data will be modified to align the selected jog pairs.
    • 描述了用于减少断裂布局设计中的拍摄张数的技术。 检查布局设计中的每个多边形的“慢跑”。 对于每个识别的点动,检查周围区域以确定是否存在可以与所识别的点动对准的相对的点动或平行边缘。 然后检查周围区域的任何多边形特征,例如边缘或顶点,其可以限制或阻止所识别的慢跑与相对的点动或边缘的对准。 如果识别的点动可以与相对的点动或边缘对齐,而不违反指定的对准约束,则这些点动被认为是可对准的点对。 接下来,选择一个或多个可对准的点对对进行对准。 可以选择可对准的点对对,以便在对齐时基于它们对多边形的尺寸的影响进行对准。 一旦选择了一个或多个可对准的点对对,则将修改布局设计数据以对齐所选择的点对。