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1. 发明申请

WO2009146003A1 PREDICTIVE DIAGNOSTICS SYSTEM, APPARATUS AND METHOD FOR IMPROVED RELIABILITY 审中-公开
标题翻译：预测诊断系统，改进的可靠性的装置和方法
公开(公告)号：WO2009146003A1
公开(公告)日：2009-12-03
申请号：PCT/US2009/038641
申请日：2009-03-27
申请人： ADVANCED ENERGY INDUSTRIES, INC , HECKMAN, Randy, L. , CARTER, Daniel, C. , BROUK, Victor, L.
发明人： HECKMAN, Randy, L. , CARTER, Daniel, C. , BROUK, Victor, L.
IPC分类号： H05H1/36 , H01L21/00
CPC分类号： G06F11/008 , G05B23/0283 , G05B2219/32234 , G05B2219/37252 , G05B2219/45031
摘要： A system for managing a processing system and/or a processing system component is described. The system may include a wear-out module configured to provide a wear-out signal, the wear-out signal indicating a remaining amount of useful life of the component; a health module configured to provide a health signal, the health signal indicating an extent to which operational and environmental factors affect a failure rate of the component during a useful life of the component; and a mission module configured to provide a mission signal, the mission signal indicative of whether an operating condition is approaching a threshold that would adversely affect the system's ability to meet at least one performance objective.
摘要翻译：描述了一种用于管理处理系统和/或处理系统组件的系统。该系统可以包括被配置为提供磨损信号的磨损模块，所述磨损信号指示所述部件的剩余使用寿命量; 健康模块被配置为提供健康信号，健康信号指示在组件的使用寿命期间操作和环境因素影响组件的故障率的程度; 以及任务模块，被配置为提供任务信号，所述任务信号指示操作条件是否接近将对系统满足至少一个性能目标的能力产生不利影响的阈值。

2. 发明申请

WO2010126806A1 DETECTING AND PREVENTING INSTABILITIES IN PLASMA PROCESSES 审中-公开
标题翻译：检测和防止等离子体过程中的不稳定性
公开(公告)号：WO2010126806A1
公开(公告)日：2010-11-04
申请号：PCT/US2010/032332
申请日：2010-04-26
申请人： ADVANCED ENERGY INDUSTRIES, INC. , CARTER, Daniel , BROUK, Victor , ROBERG, Jeff
发明人： CARTER, Daniel , BROUK, Victor , ROBERG, Jeff
IPC分类号： H01J37/32 , H01J7/24 , H05H1/00
CPC分类号： H05H1/46 , H01J37/32935 , H01J37/3299
摘要： Systems, methods and apparatus for reducing instabilities in a plasma-based processing system are disclosed. An exemplary method includes applying power to a plasma with a power amplifier; determining whether low frequency instability oscillations are present or high frequency instability oscillations are present in the plasma; and altering, based upon whether high or low frequency instability oscillations are present, an impedance of a load that is experienced by the power amplifier, the load experienced by the power amplifier including at least an impedance of the plasma.
摘要翻译：公开了用于减少基于等离子体的处理系统中的不稳定性的系统，方法和装置。一种示例性方法包括用功率放大器对等离子体施加功率; 确定在等离子体中是否存在低频不稳定振荡或高频不稳定振荡; 以及基于是否存在高频或低频不稳定振荡来改变由功率放大器经历的负载的阻抗，所述功率放大器经历的负载至少包括等离子体的阻抗。

3. 发明申请

WO2013016619A1 ION ENERGY CONTROL SYSTEM FOR ADVANCED PLASMA ENERGY PROCESSING SYSTEMS 审中-公开
标题翻译：用于先进等离子体能量处理系统的离子能量控制系统
公开(公告)号：WO2013016619A1
公开(公告)日：2013-01-31
申请号：PCT/US2012/048504
申请日：2012-07-27
申请人： ADVANCED ENERGY INDUSTRIES, INC. , BROUK, Victor , HOFFMAN, Daniel, J.
发明人： BROUK, Victor , HOFFMAN, Daniel, J.
IPC分类号： H01J37/30 , H01J37/302 , H01J37/305 , H01L21/3065 , H01L21/02 , H05H1/24
CPC分类号： C23C16/50 , C23C14/345 , H01J37/32009 , H01J37/32082 , H01J37/32174 , H01J37/32935 , H01J37/3299
摘要： Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a desired distribution of energies of ions at the surface of the substrate so as to effectuate the desired distribution of ion energies on a time-averaged basis.
摘要翻译：公开了用于调节等离子体室中的离子能并将衬底夹持到衬底支撑件的系统，方法和装置。一种示例性方法包括将衬底放置在等离子体室中，在等离子体室中形成等离子体，可控制地将功率切换到衬底，以便向衬底施加周期性电压功能，并且在周期性电压函数的多个周期内进行调制，所述周期性电压功能响应于所述衬底表面处的离子能量的期望分布，以便以时间平均的方式实现所需的离子能量分布。

4. 发明申请

WO2010126893A2 METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION 审中-公开
标题翻译：用于控制离子能量分布的方法和装置
公开(公告)号：WO2010126893A2
公开(公告)日：2010-11-04
申请号：PCT/US2010/032582
申请日：2010-04-27
申请人： ADVANCED ENERGY INDUSTRIES, INC. , HECKMAN, Randy , BROUK, Victor
发明人： HECKMAN, Randy , BROUK, Victor
CPC分类号： H01J37/32045 , C23C14/54 , H01J37/32009 , H01J37/32082 , H01J37/32174 , H01J37/32935 , H01J37/3299
摘要： Systems, methods and apparatus for regulating ion energies in a plasma chamber are disclosed. An exemplary system includes an ion-energy control portion, and the ion- energy control portion provides at least one ion-energy control signal responsive to at least one ion-energy setting that is indicative of a desired distribution of energies of ions bombarding a surface of a substrate. A controller is coupled to the switch-mode power supply, and the controller provides at least two drive-control signals. In addition, a switch-mode power supply is coupled to the substrate support, the ion-energy control portion and the controller. The switch-mode power supply includes switching components configured to apply power to the substrate responsive to the drive signals and the ion-energy control signal so as to effectuate the desired distribution of the energies of ions bombarding the surface of the substrate.
摘要翻译：公开了用于调节等离子体室中的离子能量的系统，方法和装置。示例性系统包括离子能量控制部分，并且离子能量控制部分响应于至少一个离子能量设定提供至少一个离子能量控制信号，该至少一个离子能量设定指示轰击表面的离子的所需能量分布的基底。控制器耦合到开关模式电源，并且控制器提供至少两个驱动控制信号。此外，开关模式电源耦合到衬底支撑件，离子能量控制部分和控制器。开关电源包括响应于驱动信号和离子能量控制信号而被配置为向基板施加功率的开关部件，以实现轰击基板表面的离子的能量的期望分布。

5. 发明申请

WO2010088677A1 PASSIVE POWER DISTRIBUTION FOR MULTIPLE ELECTRODE INDUCTIVE PLASMA SOURCE 审中-公开
标题翻译：多电极电感等离子体源的被动功率分配
公开(公告)号：WO2010088677A1
公开(公告)日：2010-08-05
申请号：PCT/US2010/022906
申请日：2010-02-02
申请人： ADVANCED ENERGY INDUSTRIES, INC. , CARTER, Daniel, C. , BROUK, Victor, L.
发明人： CARTER, Daniel, C. , BROUK, Victor, L.
IPC分类号： H05H1/24
CPC分类号： H01J37/321 , H01J37/32174 , H01J37/32183 , H05H1/46
摘要： Systems, methods, and Apparatus for controlling the spatial distribution of a plasma in a processing chamber are disclosed. An exemplary system includes a primary inductor disposed to excite the plasma when power is actively applied to the primary inductor; at least one secondary inductor located in proximity to the primary inductor such that substantially all current that passes through the secondary inductor results from mutual inductance through the plasma with the primary inductor. In addition, at least one terminating element is coupled to the at least one secondary inductor, the at least one terminating element affecting the current through the at least one secondary inductor so as to affect the spatial distribution of the plasma.
摘要翻译：公开了用于控制处理室中的等离子体的空间分布的系统，方法和装置。示例性系统包括主电感器，其设置成当功率被主动施加到初级电感器时激发等离子体; 位于主电感器附近的至少一个次级电感器，使得通过次级电感器的基本上所有的电流都是由与主电感器的等离子体的互感产生的。另外，至少一个终端元件耦合到至少一个次级电感器，所述至少一个终端元件影响通过至少一个次级电感器的电流，以便影响等离子体的空间分布。

6. 发明申请

WO2012030500A1 SYSTEM, METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION 审中-公开
标题翻译：用于控制离子能量分布的系统，方法和装置
公开(公告)号：WO2012030500A1
公开(公告)日：2012-03-08
申请号：PCT/US2011/047467
申请日：2011-08-11
申请人： ADVANCED ENERGY INDUSTRIES, INC. , BROUK, Victor , HECKMAN, Randy , HOFFMAN, Daniel, J.
发明人： BROUK, Victor , HECKMAN, Randy , HOFFMAN, Daniel, J.
IPC分类号： H05H1/36 , C23C16/52 , H01L21/3065 , C23C14/54 , C23F1/08
CPC分类号： H01J37/24 , C23C14/345 , C23C16/50 , H01J37/32009 , H01J37/32082 , H01J37/32174 , H01J37/32935 , H01J37/3299
摘要： Systems, methods and apparatus for regulating ion energies in a plasma chamber are disclosed. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a desired distribution of energies of ions at the surface of the substrate so as to effectuate the desired distribution of ion energies on a time-averaged basis.
摘要翻译：公开了用于调节等离子体室中的离子能量的系统，方法和装置。一种示例性方法包括将衬底放置在等离子体室中，在等离子体室中形成等离子体，可控制地将功率切换到衬底，以便向衬底施加周期性电压功能，并且在周期性电压函数的多个周期内进行调制，所述周期性电压功能响应于所述衬底表面处的离子能量的期望分布，以便以时间平均的方式实现所需的离子能量分布。

7. 发明申请

WO2010126893A3 METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION 审中-公开
标题翻译：用于控制离子能量分布的方法和装置
公开(公告)号：WO2010126893A3
公开(公告)日：2011-04-21
申请号：PCT/US2010032582
申请日：2010-04-27
申请人： ADVANCED ENERGY IND INC , HECKMAN RANDY , BROUK VICTOR
发明人： HECKMAN RANDY , BROUK VICTOR
IPC分类号： H01L21/3065 , C23C16/52 , H01L21/205 , H05H1/00
CPC分类号： H01J37/32045 , C23C14/54 , H01J37/32009 , H01J37/32082 , H01J37/32174 , H01J37/32935 , H01J37/3299
摘要： Systems, methods and apparatus for regulating ion energies in a plasma chamber are disclosed. An exemplary system includes an ion-energy control portion, and the ion- energy control portion provides at least one ion-energy control signal responsive to at least one ion-energy setting that is indicative of a desired distribution of energies of ions bombarding a surface of a substrate. A controller is coupled to the switch-mode power supply, and the controller provides at least two drive-control signals. In addition, a switch-mode power supply is coupled to the substrate support, the ion-energy control portion and the controller. The switch-mode power supply includes switching components configured to apply power to the substrate responsive to the drive signals and the ion-energy control signal so as to effectuate the desired distribution of the energies of ions bombarding the surface of the substrate.
摘要翻译：公开了用于调节等离子体室中的离子能量的系统，方法和装置。示例性系统包括离子能量控制部分，并且离子能量控制部分响应于至少一个离子能量设定提供至少一个离子能量控制信号，该至少一个离子能量设定指示轰击表面的离子的所需能量分布的基底。控制器耦合到开关模式电源，并且控制器提供至少两个驱动控制信号。此外，开关模式电源耦合到衬底支撑件，离子能量控制部分和控制器。开关电源包括响应于驱动信号和离子能量控制信号而被配置为向基板施加功率的开关部件，以实现轰击基板表面的离子的能量的期望分布。

8. 发明申请

WO2009088642A2 SYSTEM, METHOD AND APPARATUS FOR MONITORING CHARACTERISTICS OF RF POWER 审中-公开
标题翻译：用于监测射频功率特性的系统，方法和装置
公开(公告)号：WO2009088642A2
公开(公告)日：2009-07-16
申请号：PCT/US2008/086549
申请日：2008-12-12
申请人： ADVANCED ENERGY INDUSTRIES, INC. , BROUK, Victor, L. , ROBERG, Jeff
发明人： BROUK, Victor, L. , ROBERG, Jeff
IPC分类号： G01R21/10
CPC分类号： H05H1/46 , G01R21/01 , H01J37/32082 , H01J37/32174 , H01J37/32935 , H01J37/3299
摘要： A system and method for monitoring RF power is described. In one embodiment the system samples RP power that is generated by an RP generator to obtain RF signals that include information indicative of electrical characteristics at a plurality of particular frequencies that fall within a frequency range. The RF signals are digitized to obtain a stream of digital RF signals that include information indicative of electrical characteristics at the plurality of particular frequencies, and the information indicative of electrical characteristics is successively transformed, for each of the plurality of particular frequencies, from a time domain into a frequency domain.
摘要翻译：描述了用于监视RF功率的系统和方法。在一个实施例中，系统采样由RP发生器产生的RP功率，以获得RF信号，该信号包括表示在频率范围内的多个特定频率处的电特性的信息。 RF信号被数字化以获得数字RF信号流，其包括指示多个特定频率处的电特性的信息，并且针对多个特定频率中的每一个从一个时间顺序地变换表示电特性的信息域变成频域。

9. 发明申请

WO2012103101A1 ELECTROSTATIC REMOTE PLASMA SOURCE 审中-公开
标题翻译：静电等离子体源
公开(公告)号：WO2012103101A1
公开(公告)日：2012-08-02
申请号：PCT/US2012/022380
申请日：2012-01-24
申请人： ADVANCED ENERGY INDUSTRIES, INC. , HOFFMAN, Daniel, J. , CARTER, Daniel , BROUK, Victor , PETERSON, Karen , GRILLEY, Randy
发明人： HOFFMAN, Daniel, J. , CARTER, Daniel , BROUK, Victor , PETERSON, Karen , GRILLEY, Randy
IPC分类号： H05H1/00 , H05H1/03 , H05H1/24
CPC分类号： H01J37/32541 , H01J37/32091 , H01J37/32183 , H01J37/32357 , H01J37/3244 , H01J37/32568 , H01J2237/327 , H05H1/46 , H05H2001/4675
摘要： This disclosure describes systems, methods, and apparatus for capacitively coupling energy into a plasma to ignite and sustain the plasma within a remote plasma source. The power is provided by a first electrode that at least partially surrounds or is surrounded by a second electrode. The second electrode can be grounded or floating. First and second dielectric components can be arranged to separate one or both of the electrodes from the plasma and thereby DC isolate the plasma from one or both of the electrodes.
摘要翻译：本公开描述了用于将能量电容耦合到等离子体中以点燃和维持远程等离子体源内的等离子体的系统，方法和装置。功率由至少部分地围绕或被第二电极围绕的第一电极提供。第二个电极可以接地或浮动。可以布置第一和第二介电部件以将电极中的一个或两个与等离子体分开，从而将等离子体与一个或两个电极隔离。

10. 发明申请

WO2009088642A3 SYSTEM, METHOD AND APPARATUS FOR MONITORING CHARACTERISTICS OF RF POWER 审中-公开
标题翻译：监视RF功率特性的系统，方法和设备
公开(公告)号：WO2009088642A3
公开(公告)日：2009-09-03
申请号：PCT/US2008086549
申请日：2008-12-12
申请人： ADVANCED ENERGY IND INC , BROUK VICTOR L , ROBERG JEFF
发明人： BROUK VICTOR L , ROBERG JEFF
IPC分类号： G01R21/10
CPC分类号： H05H1/46 , G01R21/01 , H01J37/32082 , H01J37/32174 , H01J37/32935 , H01J37/3299
摘要： A system and method for monitoring RF power is described. In one embodiment the system samples RP power that is generated by an RP generator to obtain RF signals that include information indicative of electrical characteristics at a plurality of particular frequencies that fall within a frequency range. The RF signals are digitized to obtain a stream of digital RF signals that include information indicative of electrical characteristics at the plurality of particular frequencies, and the information indicative of electrical characteristics is successively transformed, for each of the plurality of particular frequencies, from a time domain into a frequency domain.
摘要翻译：描述了用于监视RF功率的系统和方法。在一个实施例中，系统对由RP发生器产生的RP功率进行采样，以获得包括指示落入频率范围内的多个特定频率的电特性的信息的RF信号。 RF信号被数字化以获得包括指示多个特定频率下的电特性的信息的数字RF信号流，并且对于多个特定频率中的每个特定频率，指示电特性的信息从时间域转换到频域。

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