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    • 4. 发明申请
    • METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION
    • 用于控制离子能量分布的方法和装置
    • WO2010126893A2
    • 2010-11-04
    • PCT/US2010/032582
    • 2010-04-27
    • ADVANCED ENERGY INDUSTRIES, INC.HECKMAN, RandyBROUK, Victor
    • HECKMAN, RandyBROUK, Victor
    • H01J37/32045C23C14/54H01J37/32009H01J37/32082H01J37/32174H01J37/32935H01J37/3299
    • Systems, methods and apparatus for regulating ion energies in a plasma chamber are disclosed. An exemplary system includes an ion-energy control portion, and the ion- energy control portion provides at least one ion-energy control signal responsive to at least one ion-energy setting that is indicative of a desired distribution of energies of ions bombarding a surface of a substrate. A controller is coupled to the switch-mode power supply, and the controller provides at least two drive-control signals. In addition, a switch-mode power supply is coupled to the substrate support, the ion-energy control portion and the controller. The switch-mode power supply includes switching components configured to apply power to the substrate responsive to the drive signals and the ion-energy control signal so as to effectuate the desired distribution of the energies of ions bombarding the surface of the substrate.
    • 公开了用于调节等离子体室中的离子能量的系统,方法和装置。 示例性系统包括离子能量控制部分,并且离子能量控制部分响应于至少一个离子能量设定提供至少一个离子能量控制信号,该至少一个离子能量设定指示轰击表面的离子的所需能量分布 的基底。 控制器耦合到开关模式电源,并且控制器提供至少两个驱动控制信号。 此外,开关模式电源耦合到衬底支撑件,离子能量控制部分和控制器。 开关电源包括响应于驱动信号和离子能量控制信号而被配置为向基板施加功率的开关部件,以实现轰击基板表面的离子的能量的期望分布。
    • 7. 发明申请
    • METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION
    • 用于控制离子能量分布的方法和装置
    • WO2010126893A3
    • 2011-04-21
    • PCT/US2010032582
    • 2010-04-27
    • ADVANCED ENERGY IND INCHECKMAN RANDYBROUK VICTOR
    • HECKMAN RANDYBROUK VICTOR
    • H01L21/3065C23C16/52H01L21/205H05H1/00
    • H01J37/32045C23C14/54H01J37/32009H01J37/32082H01J37/32174H01J37/32935H01J37/3299
    • Systems, methods and apparatus for regulating ion energies in a plasma chamber are disclosed. An exemplary system includes an ion-energy control portion, and the ion- energy control portion provides at least one ion-energy control signal responsive to at least one ion-energy setting that is indicative of a desired distribution of energies of ions bombarding a surface of a substrate. A controller is coupled to the switch-mode power supply, and the controller provides at least two drive-control signals. In addition, a switch-mode power supply is coupled to the substrate support, the ion-energy control portion and the controller. The switch-mode power supply includes switching components configured to apply power to the substrate responsive to the drive signals and the ion-energy control signal so as to effectuate the desired distribution of the energies of ions bombarding the surface of the substrate.
    • 公开了用于调节等离子体室中的离子能量的系统,方法和装置。 示例性系统包括离子能量控制部分,并且离子能量控制部分响应于至少一个离子能量设定提供至少一个离子能量控制信号,该至少一个离子能量设定指示轰击表面的离子的所需能量分布 的基底。 控制器耦合到开关模式电源,并且控制器提供至少两个驱动控制信号。 此外,开关模式电源耦合到衬底支撑件,离子能量控制部分和控制器。 开关电源包括响应于驱动信号和离子能量控制信号而被配置为向基板施加功率的开关部件,以实现轰击基板表面的离子的能量的期望分布。