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    • 83. 发明申请
    • TANTALUM FILMS AND METHODS FOR THEIR DEPOSITION
    • TANTALUM薄膜及其沉积方法
    • WO00017414A1
    • 2000-03-30
    • PCT/US1999/021739
    • 1999-09-21
    • C01B21/06C23C14/06C23C14/16C23C14/34C23C14/54C23C14/58H01C17/06H01C17/12H01L21/28H01L21/285H01L21/318H01L21/3205H01L21/768H01L23/52
    • H01L21/76843C23C14/0641C23C14/165C23C14/541C23C14/5806H01L21/28556H01L21/318H01L21/76864Y10T428/31678
    • We have discovered that, by depositing a tantalum layer upon a substrate at a temperature of at least 325 DEG C, it is possible to obtain an ultra low resistivity. In addition, it is possible to deposit a TaxNy film having an ultra low resistivity by depositing the TaxNy film upon a substrate at a temperature of at least 275 DEG C, wherein x is 1 and y ranges from about 0.05 to about 0.18. A combination of elevated substrate temperature and ion bombardment of the film surface during deposition enables the use of lower substrate temperatures while maintaining film properties. In another development, we have discovered that the ultra low resistivity tantalum and TaxNy films produced by the method of the present invention also exhibit particularly low residual stress. Further, these films can be chemical mechanical polished at significantly higher rates (at least 40 % higher rates) than higher resistivity tantalum and TaxNy. This is particularly useful in damascene processes when copper is used as the interconnect metal, since it reduces the possibility of copper dishing during a polishing step.
    • 我们已经发现,通过在至少325℃的温度下在基底上沉积钽层,可以获得超低电阻率。 此外,通过在至少275℃的温度下将TaxNy膜沉积在基底上,可以沉积具有超低电阻率的TaxNy膜,其中x为1,y为约0.05至约0.18。 在沉积期间提高的衬底温度和膜表面的离子轰击的组合使得能够使用较低的衬底温度同时保持膜的性质。 在另一个发展中,我们发现通过本发明的方法生产的超低电阻率的钽和TaxNy膜也表现出特别低的残余应力。 此外,这些膜可以以比较高电阻率钽和TaxNy更高的速率(至少高出40%的速率)进行化学机械抛光。 当使用铜作为互连金属时,这对于镶嵌工艺特别有用,因为它减少了在抛光步骤期间铜凹陷的可能性。
    • 84. 发明申请
    • HEATING ELEMENT AND METHOD FOR PRODUCING THE SAME
    • 加热元件与方法研究
    • WO99018586A1
    • 1999-04-15
    • PCT/AT1998/000233
    • 1998-10-02
    • F42B3/12F42B3/198H01C1/142H01C17/06H01C17/065
    • H01C17/065F42B3/124F42B3/198H01C1/142Y10T29/49099
    • The invention relates to a heating element which has a high heating-up rate and which has a predetermined resistance value, for triggering airbag systems. According to the inventive method for producing said heating element, a base consisting of an aluminium oxide ceramic is provided with a glass or glass ceramic coating. The surface of said coating can be lapped and polished if necessary. An extensive layer of AuPd-resinate is applied to the surface of the coating using the silk screen process and then structured into a resistance strip using etching technology. Said resistance strip is constricted in some areas and the ends of the resistance strip are brought into contact with an AgPd-thick-film conductor paste during the silk screen process, the Pd content of said paste being definitive for the desired resistance value. After the thick-film conductor paste has been dried and baked, the coated base is heated at temperatures of between 850 DEG C and 950 DEG C until the palladium in the resistance layer is evenly distributed and a stable resistance value has been established. Solder stop dams in the form of glass stops are arranged on the edges of the AgPd contacts facing the resistance strip in order to reduce the risk of unwanted alloys being formed on the resistance strip during a subsequent soldering process.
    • 对于具有与气囊系统的点火预定的电阻值高的加热速率加热元件的制造中,基体由具有一个玻璃或玻璃 - 陶瓷涂层的氧化铝陶瓷的设置,AUD如果需要被研磨和抛光的大面积沉积的金钯层的树酯酸screenprinted表面 并且然后在具有区域,收缩,通过蚀刻,其中,所述电阻通路的端部在丝网印刷方法用的AgPd厚膜导体糊料,Pd含量为预期的电阻值显著随后联系构图的电阻片。 干燥和烧制在850-950℃的范围内的热处理的如此涂覆的基体的厚膜导体浆料是后只要进行钯均匀地分布在所述电阻层和稳定的电阻值被调整。 此后,银钯触点的相面对的边缘的电阻路径Lötstopdämme在玻璃纤维条带的形式,以减少在随后的焊接工艺Ablegierens电阻轨迹的风险应用。
    • 85. 发明申请
    • RESISTANCE WIRING BOARD AND METHOD FOR MANUFACTURING THE SAME
    • 电阻布线及其制造方法
    • WO98058390A1
    • 1998-12-23
    • PCT/JP1998/002602
    • 1998-06-12
    • H01C1/012H01C7/00H01C17/06H01C17/065H01C17/28H05K1/16H05K3/10
    • H01C17/06533H01C17/281H05K1/167H05K3/107
    • A resistance wiring board which can be reduced in height and has a high accuracy of resistance value and excellent overload characteristics. The wiring board is obtained by forming a stepped pattern between electrode patterns formed on a green sheet and baking the green sheet after filling up the recessed section formed of the stepped pattern with a resistance paste. In addition, the height of the wiring board can be reduced by making the levels of the surfaces of electrodes (1) and a resistor (3) equal to or lower than that of the surface of an insulating substrate (2) by polishing the surface of the wiring board for improving the accuracy of thickness of the resistor (3). In addition, since the green sheet containing 1.5-2.5 wt.% TiO2, 1.5-2.5 wt.% MnO, and 1.5-4.5 wt.% SiO2 is used as a board material and a Pd-Ag electrode paste containing 60 wt.% Pd is used as an electrode material, the board material and electrode paste can be baked collectively at the same time without sacrificing the balance of the coefficients of thermal conductivity of the material and the paste.
    • 电阻布线板,其高度可降低,电阻值精度高,过载特性优异。 通过在形成在生片上的电极图案之间形成阶梯图案并在用电阻膏填充由阶梯图案形成的凹部之后烘烤生片来获得布线板。 此外,通过将表面(1)和电阻(3)的表面的等级等于或低于绝缘基板(2)的表面的电平,可以减少布线板的高度, 以提高电阻(3)的厚度精度。 此外,由于使用含有1.5-2.5重量%TiO 2,1.5-2.5重量%MnO和1.5-4.5重量%SiO 2的生片作为板材料和含有60重量%的Pd-Ag电极浆料, Pd用作电极材料,可以同时烘焙板材和电极糊料,而不牺牲材料和糊料的导热系数的平衡。
    • 87. 发明申请
    • RESISTOR AND METHOD FOR MANUFACTURING THE SAME
    • 电阻及其制造方法
    • WO98047157A1
    • 1998-10-22
    • PCT/JP1998/001700
    • 1998-04-14
    • H01C1/142H01C7/00H01C17/00H01C17/06H01C17/22H01C17/242
    • H01C17/22H01C17/006H01C17/242
    • A resistor for high-density wiring circuit the resistance value of which precisely falls within a prescribed range regardless of the variation in the position of contact of a probe with a pair of upper-surface electrode layers in a low-resistance area and a method for manufacturing the resistor. The resistor is provided with a substrate (31), a pair of upper-surface electrode layers (32) provided on both sides of the upper surface of the substrate (31), a resistance layer (33) provided so that the layer (33) can be connected electrically to the layers (32), a protective layer (36) formed to cover at least the resistance layer (33), and side-face electrode layers (37) which are provided on the side faces of the substrate (31) so that the layers (37) can be electrically connected to the electrode layers (32) in a state where the layers (37) overlap parts of the upper-surface of the layers (32), the upper-surface electrode layers (32) being provided with notched sections (34) so as to reduce the dispersion of the measured resistance value of the resistor caused by the positional variation of the probe during trimming.
    • 无论在低电阻区域中探针与一对上表面电极层的接触位置的变化如何,高电阻布线电路的电阻值精确地落在规定范围内, 制造电阻器。 电阻器设置有基板(31),设置在基板(31)的上表面的两侧的一对上表面电极层(32),电阻层(33),设置成使得层(33) )可以与层(32)电连接,形成为覆盖至少电阻层(33)的保护层(36)和设置在基板的侧面上的侧面电极层(37) 31),使得层(37)可以在层(37)与层(32)的上表面的重叠部分,上表面电极层(...)的部分重叠的状态下电连接到电极层(32) 32)设置有切口部(34),以减少由于在修整期间探针的位置变化引起的电阻测得的电阻值的偏差。