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1. 发明申请

WO2015138619A1 BLEND MODES FOR MINERALOGY IMAGES 审中-公开
标题翻译：矿物图像的混合模式
公开(公告)号：WO2015138619A1
公开(公告)日：2015-09-17
申请号：PCT/US2015/019989
申请日：2015-03-11
申请人： FEI COMPANY
发明人： HOWELL, Garth , OWEN, Michael James , SALAZAR, Leonardo , HABERLAH, David , GOERGEN, Eric
IPC分类号： G06T15/50 , G06T11/00 , G01N23/00 , G01N23/225
CPC分类号： G06T11/00 , G01N23/2252 , G01N2223/401 , G01N2223/405 , G01N2223/418 , G01N2223/606 , G01N2223/616 , G06T15/503
摘要： Optimized blending mode for mineralogy images. A luminosity value is determined for a pixel in a base layer or top layer mineralogy image. An image weighting value is determined from the luminosity value and an optional mixing parameter. A multiply value is determined by multiplying the base and top layer pixel values. An overlay value is determined from twice the multiply value if the value of one of the base layer or top layer pixel values is over a threshold, otherwise it is determined by inverting twice the product of the inverted top layer pixel value with the inverted base layer pixel value. A blended image pixel value is determined by adding the multiply value weighted with the image weighting value and the overlay value weighted with the inverted image weighting value.
摘要翻译：矿物图像优化混合模式。确定基层或顶层矿物学图像中的像素的亮度值。根据亮度值和可选的混合参数确定图像加权值。通过乘以基层和顶层像素值来确定乘法值。如果基层或顶层像素值之一的值超过阈值，则由乘法值的两倍确定覆盖值，否则通过将反向顶层像素值与反向基底层的乘积反相两倍来确定像素值。通过将用图像加权值加权的乘积值和用反转图像加权值加权的覆盖值相加来确定混合图像像素值。

2. 发明申请

WO2015069879A1 SUB-PIXEL ANALYSIS AND DISPLAY OF FINE GRAINED MINERAL SAMPLES 审中-公开
标题翻译：子像素分析和细粒度矿物样品的显示
公开(公告)号：WO2015069879A1
公开(公告)日：2015-05-14
申请号：PCT/US2014/064326
申请日：2014-11-06
申请人： FEI COMPANY
发明人： OWEN, Michael , HOWELL, Garth , DONALDSON, Ashley
IPC分类号： G01N23/00 , G01N23/225 , H01J37/28
CPC分类号： G01N23/225 , G01N2223/402 , G01N2223/616 , H01J2237/225 , H01J2237/2442
摘要： Method and apparatus for analysis and display of fine grained mineral samples. A portion of the sample is illuminated with a charged particle beam. Emitted radiation is detected, and a sample emission spectrum is generated and fit with a plurality of standard emission spectra of minerals in a candidate mineral composition. A mineral composition whose emission spectrum best fits the sample emission spectrum is selected from a plurality of candidate mineral compositions. An assigned color is received for each mineral in the selected mineral composition, and the assigned colors are blended according to the proportion of each mineral in the selected mineral composition. An image pixel corresponding to the portion of the sample is rendered for display.
摘要翻译：分析和显示细粒矿物样品的方法和装置。用带电粒子束照射样品的一部分。检测到发射的辐射，并且生成样品发射光谱并与候选矿物组合物中的矿物质的多个标准发射光谱拟合。从多种候选矿物组合物中选择最适合样品发射光谱的发射光谱的矿物组合物。对所选择的矿物组合物中的每种矿物接收分配的颜色，并且根据所选择的矿物组合物中的每种矿物的比例来调配所分配的颜色。渲染与样本部分对应的图像像素进行显示。

3. 发明申请

WO2014125098A1 HIGH - RESOLUTION AMPLITUDE CONTRAST IMAGING 审中-公开
标题翻译：高分辨率放大对比成像
公开(公告)号：WO2014125098A1
公开(公告)日：2014-08-21
申请号：PCT/EP2014/052973
申请日：2014-02-14
申请人： UNIVERSITEIT ANTWERPEN , FEI COMPANY
发明人： VAN DYCK, Dirk , LUCKEN, Uwe , STARK, Holger
IPC分类号： G01N23/04 , H01J37/26
CPC分类号： H01J37/265 , G01N23/04 , G01N2223/0565 , G01N2223/612 , H01J37/06 , H01J37/244 , H01J37/26 , H01J2237/063 , H01J2237/1534 , H01J2237/2602 , H01J2237/2614
摘要： A method for performing high resolution electron microscopy of a soft matter object (17) is described. The method comprises irradiating a soft matter object using an electron microscope (1) having a spherical aberration correction (10) with a substantially constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the soft matter object. The method comprises detecting the thermal diffuse scattered (TDS) electrons scattered at the soft matter, and using the detected thermal diffuse scattered electrons for deriving therefrom an image of the soft matter object.
摘要翻译：描述了用于执行软物体（17）的高分辨率电子显微镜的方法。该方法包括使用具有球面像差校正（10）的电子显微镜（1）照射软物体，该电子显微镜（1）在软物体散射的热散射电子的频带中具有基本恒定的传递函数。该方法包括检测在软物质处散射的热散射散射（TDS）电子，并使用检测到的热散射电子从其中导出软物体的图像。

4. 发明申请

WO2014106200A2 METHOD FOR PREPARING SAMPLES FOR IMAGING 审中-公开
标题翻译：制备图像样本的方法
公开(公告)号：WO2014106200A2
公开(公告)日：2014-07-03
申请号：PCT/US2013/078345
申请日：2013-12-30
申请人： FEI COMPANY
发明人： SCHMIDT, Michael , BLACKWOOD, Jeffrey , STONE, Stacey , LEE, Sang, Hoon , KELLEY, Ronald , LANDIN, Trevan
CPC分类号： G01N1/32 , G01N1/28 , H01L21/30655
摘要： A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. An ion beam mills exposes a cross section of the work piece using a bulk mill process. A deposition precursor gas is directed to the sample surface while a small amount of material is removed from the exposed cross section face, the deposition precursor producing a more uniform cross section. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.
摘要翻译：提供了一种方法和装置，用于以减少或防止伪影的方式制备用于在带电粒子束系统中观察的样品。离子束研磨机使用大量研磨工艺暴露工件的横截面。沉积前体气体被引导到样品表面，同时少量的材料从暴露的横截面去除，沉积前体产生更均匀的横截面。实施例对于制备具有不同硬度的材料层的样品的SEM观察的截面是有用的。实施例可用于制备薄TEM样品。

5. 发明申请

WO2014055982A1 BULK DEPOSITION FOR TILTED MILL PROTECTION 审中-公开
标题翻译：用于倾斜式铣刀保护的大块沉积
公开(公告)号：WO2014055982A1
公开(公告)日：2014-04-10
申请号：PCT/US2013/063704
申请日：2013-10-07
申请人： FEI COMPANY
发明人： STONE, Stacey , LEE, Sang Hoon , BLACKWOOD, Jeffrey , SCHMIDT, Michael
IPC分类号： B23K15/08 , B23K15/00 , C23F4/04
CPC分类号： H01J37/3005 , G01N1/32 , G01N23/2255 , G01N2223/104 , G01N2223/611 , H01J37/3007 , H01J37/3053 , H01J37/3056 , H01J37/31 , H01J2237/063 , H01J2237/08 , H01J2237/2813 , H01J2237/31732 , H01J2237/31745 , H01J2237/31749
摘要： To reduce artifacts in a surface exposed by a focused ion beam for viewing, a trench is milled next to the region of interest, and the trench is filled to create a bulkhead. The ion beam is directed through the bulkhead to expose a portion of the region of interest for viewing. The trench is filled, for example, by charged particle beam-induced deposition. The trench is typically milled and filled from the top down, and then the ion beam is angled with respect to the sample surface to expose the region of interest.
摘要翻译：为了减少由聚焦离子束暴露的表面中的人造物进行观察，在感兴趣区域旁边研磨沟槽，并且填充沟槽以形成隔板。离子束被引导通过隔板以暴露感兴趣区域的一部分以供观察。例如，通过带电粒子束诱导沉积来填充沟槽。沟槽通常从顶部向下铣削和填充，然后离子束相对于样品表面成角度以暴露感兴趣的区域。

6. 发明申请

WO2014055935A1 MULTIDIMENSIONAL STRUCTURAL ACCESS 审中-公开
标题翻译：多维结构访问
公开(公告)号：WO2014055935A1
公开(公告)日：2014-04-10
申请号：PCT/US2013/063556
申请日：2013-10-04
申请人： FEI COMPANY
发明人： BLACKWOOD, Jeffrey , LEE, Sang Hoon , SCHMIDT, Michael , STONE, Stacey , HOLLAND, Karey
IPC分类号： H01L21/66
CPC分类号： G01R31/2653 , G01N1/286 , G01N1/32 , G01R31/2808 , G01R31/2898 , G01R31/307 , G01R31/312 , H01J37/153 , H01J37/3005 , H01J2237/208 , H01J2237/24564 , H01J2237/2817 , H01J2237/31749 , H01L22/14 , H01L2924/0002 , H01L2924/00
摘要： Multiple planes within the sample are exposed from a single perspective for contact by an electrical probe. The sample can be milled at a non-orthogonal angle to expose different layers as sloped surfaces. The sloped edges of multiple, parallel conductor planes provide access to the multiple levels from above. The planes can be accessed, for example, for contacting with an electrical probe for applying or sensing a voltage. The level of an exposed layer to be contacted can be identified, for example, by counting down the exposed layers from the sample surface, since the non-orthogonal mill makes all layers visible from above. Alternatively, the sample can be milled orthogonally to the surface, and then tilted and/or rotated to provide access to multiple levels of the device. The milling is preferably performed away from the region of interest, to provide electrical access to the region while minimizing damage to the region.
摘要翻译：样品中的多个平面从单个视角暴露，用于通过电探针进行接触。可以以非正交角度研磨样品以将不同层暴露为倾斜表面。多个平行导体平面的倾斜边缘可以从上方访问多个层面。例如，可以接触平面用于与用于施加或感测电压的电探针接触。例如，通过从样品表面中倒下暴露的层，可以识别要接触的暴露层的水平，因为非正交研磨机使得所有层从上方可见。或者，样品可以与表面正交碾磨，然后倾斜和/或旋转以提供对多层装置的访问。研磨优选远离感兴趣区域进行，以提供对该区域的电接入，同时使对该区域的损害最小化。

7. 发明申请

WO2014022429A1 ENVIRONMENTAL SEM GAS INJECTION SYSTEM 审中-公开
标题翻译：环境SEM气体注入系统
公开(公告)号：WO2014022429A1
公开(公告)日：2014-02-06
申请号：PCT/US2013/052777
申请日：2013-07-30
申请人： FEI COMPANY
发明人： CASTAGNA, Marc , CHANDLER, Clive D , KUROWSKI, Wayne , PHIFER, Daniel Woodrow Jr.
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J37/18 , H01J37/28 , H01J2237/0044 , H01J2237/006 , H01J2237/24445
摘要： A gas injection system provides a local region at the sample surface that has sufficient gas concentration to be ionized by secondary electrons to neutralize charged on the sample surface. In some embodiments, a gas concentration structure concentrates the gas near the surface. An optional hole in the gas concentration structure allows the charged particle beam to impact the interior of a shrouded region. In some embodiments, an anode near the surface increases the number of ions that return to the work piece surface for charge neutralization, the anode in some embodiments being a part of the gas injection system and in some embodiments being a separate structure.
摘要翻译：气体注入系统在样品表面处提供具有足够气体浓度的局部区域，以通过二次电子电离以中和样品表面上的带电。在一些实施例中，气体浓度结构将气体靠近表面集中。气体浓度结构中的可选孔允许带电粒子束冲击被覆盖区域的内部。在一些实施例中，表面附近的阳极增加返回到工件表面以进行电荷中和的离子的数量，在一些实施例中，阳极是气体注入系统的一部分，并且在一些实施例中为独立的结构。

8. 发明申请

WO2012145751A2 AUTOMATED SAMPLE PREPARATION 审中-公开
标题翻译：自动样品制备
公开(公告)号：WO2012145751A2
公开(公告)日：2012-10-26
申请号：PCT/US2012/034682
申请日：2012-04-23
申请人： FEI COMPANY , GOTTLIEB, Paul
发明人： GOTTLIEB, Paul
IPC分类号： G01N1/28 , H01J37/20
CPC分类号： G01N1/28 , G01N1/06 , G01N1/286 , G01N1/36 , H01J2237/2007 , H01J2237/201
摘要： Mineral samples for use in analytical instruments are created by a system that greatly reduces the sample preparation time and facilitates automation. For example, in some implementations, rather than grinding to expose the interior of mineral particles in sample plug containing mineral particles in an epoxy compound, the sample plug is sliced with a saw, which more rapidly provides in many applications a sufficiently smooth surface on the exposed particle surfaces for observation. Rather than slowly mixing a slow curing epoxy to avoid introducing bubbles into the sample plug, some implementations use a fast settle fixative and a mechanical mixture that avoid bubbles.
摘要翻译：用于分析仪器的矿物样品由大大降低样品准备时间并便于自动化的系统创建。例如，在一些实施方案中，不是研磨以暴露含有环氧化合物中的矿物颗粒的样品塞中的矿物颗粒的内部，用锯切片样品塞，其在许多应用中更快地提供足够光滑的表面暴露的颗粒表面进行观察。不是缓慢地混合缓慢固化的环氧树脂，以避免将气泡引入到样品塞中，一些实施方案使用快速沉降固定剂和避免气泡的机械混合物。

9. 发明申请

WO2012031049A4 NAVIGATION AND SAMPLE PROCESSING USING AN ION SOURCE CONTAINING BOTH LOW-MASS AND HIGH-MASS SPECIES 审中-公开
公开(公告)号：WO2012031049A4
公开(公告)日：2012-03-08
申请号：PCT/US2011/050103
申请日：2011-08-31
申请人： FEI COMPANY , RUE, Chad
发明人： RUE, Chad
IPC分类号： H01J37/20 , H01J37/08
摘要： An improved method and apparatus for imaging and milling a substrate using a FIB system. Preferred embodiments of the present invention use a mixture of light and heavy ions, focused to the same focal point by the same beam optics, to simultaneously mill the sample surface (primarily with the heavy ions) while the light ions penetrate deeper into the sample to allow the generation of images of subsurface features. Among other uses, preferred embodiments of the present invention provide improved methods of navigation and sample processing that can be used for various circuit edit applications, such as backside circuit edit.

10. 发明申请

WO2009100404A3 A METHOD AND SYSTEM FOR SPECTRUM DATA ANALYSIS 审中-公开
公开(公告)号：WO2009100404A3
公开(公告)日：2009-08-13
申请号：PCT/US2009/033493
申请日：2009-02-06
申请人： FEI COMPANY , MENZIES, Andrew Harley , CORBETT, Daniel Roy , GOTTLIEB, Paul , OWEN, Michael James
发明人： MENZIES, Andrew Harley , CORBETT, Daniel Roy , GOTTLIEB, Paul , OWEN, Michael James
IPC分类号： G01J3/28 , G01J3/30 , G01J3/46
摘要： A method and system for spectrum data analysis. The method comprises the steps of collecting a spectrum of an unknown material; providing a set of element data templates; calculate optical least squares weights for the element data templates in approximating the spectrum; removing one or more of the templates having negative weights in approximating the spectrum; and re-calculating an approximation of the spectrum with said one or more templates removed.

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