专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20170232438A1 MICROFLUIDIC STRUCTURES FABRICATING METHOD 审中-公开
公开(公告)号：US20170232438A1
公开(公告)日：2017-08-17
申请号：US15582750
申请日：2017-04-30
申请人： NATIONAL TSING HUA UNIVERSITY
发明人： Chien-Chong HONG , Shih-Hong YOU , Wen CHUNG
IPC分类号： B01L3/00 , B32B38/10 , B32B38/00 , B32B37/12 , B32B37/18
CPC分类号： B01L3/502707 , B01L2200/12 , B01L2300/0816 , B01L2300/0887 , B01L2300/123 , B32B37/12 , B32B37/18 , B32B38/0004 , B32B38/10 , B81B2201/058 , B81C99/0095 , Y10T29/49895 , Y10T156/1051 , Y10T156/1064
摘要： A method for fabricating microfluidic structures is provided. The method includes: a belt is provided and an adhesion layer is formed on at least one surface of the belt; the belt is cut for forming a first microfluidic channel thereon wherein the first microfluidic channel has an accommodating space; a second microfluidic channel is provided, wherein a line-width of the second microfluidic channel is smaller than a line-width of the first microfluidic channel; the second microfluidic channel is disposed in the accommodating space of the first microfluidic channel; and a substrate is adhered to the belt via the adhesion layer.

2. 发明授权

US09630836B2 Simplified MEMS device fabrication process 有权
公开(公告)号：US09630836B2
公开(公告)日：2017-04-25
申请号：US14872094
申请日：2015-09-30
申请人： MEMS DRIVE, INC.
发明人： Roman Gutierrez , Tony Tang , Xiaolei Liu , Matthew Ng , Guiqin Wang
IPC分类号： H01L21/00 , B81C1/00
CPC分类号： B81C1/00476 , B81B2201/033 , B81C1/00619 , B81C99/0095 , B81C2201/0132 , B81C2201/056
摘要： A simplified MEMS fabrication process and MEMS device is provided that allows for cheaper and lighter-weight MEMS devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a MEMS device, and then etching away the underlying wafer such that, after the etching process, the MEMS device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. By etching trenches into the substrate wafer and filling them with a MEMS base material, sophisticated taller MEMS devices with larger force may be made.

3. 发明申请

US20170088418A1 SIMPLIFIED MEMS DEVICE FABRICATION PROCESS 有权
公开(公告)号：US20170088418A1
公开(公告)日：2017-03-30
申请号：US14872094
申请日：2015-09-30
申请人： MEMS DRIVE, INC.
发明人： ROMAN GUTIERREZ , TONY TANG , XIAOLEI LIU , MATTHEW NG , GUIQIN WANG
IPC分类号： B81C1/00
CPC分类号： B81C1/00476 , B81B2201/033 , B81C1/00619 , B81C99/0095 , B81C2201/0132 , B81C2201/056
摘要： A simplified MEMS fabrication process and MEMS device is provided that allows for cheaper and lighter-weight MEMS devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a MEMS device, and then etching away the underlying wafer such that, after the etching process, the MEMS device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. By etching trenches into the substrate wafer and filling them with a MEMS base material, sophisticated taller MEMS devices with larger force may be made.

4. 发明申请

US20130279307A1 SILICON-METAL COMPOSITE MICROMECHANICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：硅金属复合微生物组分及其制造方法
公开(公告)号：US20130279307A1
公开(公告)日：2013-10-24
申请号：US13917975
申请日：2013-06-14
申请人： Nivarox-FAR S.A.
发明人： Jean-Charles Fiaccabrino , Marco Verardo , Thierry Conus , Jean-Philippe Thiebaud , Jean-Bernard Peters
IPC分类号： F16H55/06 , G04B13/02
CPC分类号： F16H55/06 , B81B2201/035 , B81C99/0095 , B81C2201/0197 , C25D1/08 , C25D5/02 , C25D5/10 , G04B13/02 , G04B13/022 , G04B19/042 , Y10T74/1987
摘要： The invention relates to a method (1) of manufacturing a silicon-metal composite micromechanical component (51) combining DRIE and LIGA processes. The invention also relates to a micromechanical component (51) including a layer wherein one part (53) is made of silicon and another part (41) of metal so as to form a composite micromechanical component (51). The invention concerns the field of timepiece movements.
摘要翻译：本发明涉及一种制造组合DRIE和LIGA工艺的硅 - 金属复合微机械部件（51）的方法（1）。本发明还涉及一种包括其中一部分（53）由硅制成的层和金属的另一部分（41）的层的微机械部件（51），以便形成复合微机械部件（51）。本发明涉及钟表运动领域。

5. 发明授权

US08501584B2 Method of manufacturing multi-level, silicon, micromechanical parts and parts thereby obtained 有权
标题翻译：由此得到多级，硅，微机械部件和部件的制造方法
公开(公告)号：US08501584B2
公开(公告)日：2013-08-06
申请号：US12514352
申请日：2007-11-01
申请人： Philippe Marmy , Jean-Luc Helfer , Thierry Conus
发明人： Philippe Marmy , Jean-Luc Helfer , Thierry Conus
IPC分类号： H01L21/30 , H01L21/46 , C23F1/00 , G04B15/00 , G04B1/00
CPC分类号： B81C99/0095 , B81B2201/035 , B81C2201/019 , B81C2201/056 , B81C2203/038 , B81C2203/051 , G04B31/004 , G04D3/0069 , Y10T29/49579
摘要： The process comprises the following steps: a) a first element (3) or a plurality of said first elements (3) is/are machined in a first silicon wafer (1) keeping said elements (3) joined together via material bridges (5); b) step a) is repeated with a second silicon wafer (2) in order to machine a second element (4), differing in shape from that of the first element (3), or a plurality of said second elements (4); c) the first and second elements (3, 4) or the first and second wafers (1, 2) are applied, face to face, with the aid of positioning means (6, 7); d) the assembly formed in step c) undergoes oxidation; and e) the parts (10) are separated form the wafers (1, 2). Micromechanical timepiece parts obtained according to the process.
摘要翻译：该方法包括以下步骤：a）在第一硅晶片（1）中加工第一元件（3）或多个所述第一元件（3），以使所述元件（3）通过材料桥（5）连接在一起）; b）用第二硅晶片（2）重复步骤a），以便加工与第一元件（3）的形状不同的第二元件（4）或多个所述第二元件（4）; c）第一和第二元件（3,4）或第一和第二晶片（1,2）通过定位装置（6,7）面对面地施加; d）步骤c）中形成的组件经历氧化; 和e）部件（10）从晶片（1,2）分离。根据工艺获得的微型钟表件。

6. 发明申请

US20120145572A1 CONTAINERS ASSEMBLED IN FLUID AND CORRESPONDING PRODUCTION 审中-公开
标题翻译：流体中组装的容器和相应的生产
公开(公告)号：US20120145572A1
公开(公告)日：2012-06-14
申请号：US13265044
申请日：2010-04-20
申请人： Juergen Brugger , Cristina Martin-Olmos , Alcherio Martinoli , Gregory Mermoud
发明人： Juergen Brugger , Cristina Martin-Olmos , Alcherio Martinoli , Gregory Mermoud
IPC分类号： B65D25/08 , B32B1/06 , B32B5/16
CPC分类号： B81C1/00007 , A61J3/07 , A61K9/0097 , A61K9/5089 , B81B2201/06 , B81C99/0095 , B81C2201/038 , B81C2203/051 , C09B67/0097 , Y10T428/2984
摘要： A method for fabricating a fluid container, wherein at least two half containers are mated in said fluid to be contained in said container. This method allows the incorporation of prefabricated devices into each half containers as well as the functional coupling of these devices after mating of the half containers, thus resulting in a functional hybrid MEMS fluid container.
摘要翻译：一种用于制造流体容器的方法，其中至少两个半容器在所述待容纳在所述容器中的流体中配合。这种方法允许将预制装置并入每个半容器以及这些装置在半容器配合之后的功能耦合，从而导致功能性混合MEMS流体容器。

7. 发明授权

US08021593B2 Method of producing a three-dimensional structure and fine three-dimensional structure 有权
标题翻译：制造三维结构和精细三维结构的方法
公开(公告)号：US08021593B2
公开(公告)日：2011-09-20
申请号：US10566476
申请日：2004-07-29
申请人： Kazuhiro Murata , Hiroshi Yokoyama
发明人： Kazuhiro Murata , Hiroshi Yokoyama
IPC分类号： B05D3/00 , B29C35/00 , B05D5/00
CPC分类号： B81C1/00111 , B81C99/0095 , B81C2201/0184
摘要： A method of producing a three-dimensional structure contains the steps of: arranging a substrate close to a tip of a needle-shaped fluid-ejection body having a fine diameter supplied with a solution, ejecting a fluid droplet having an ultra-fine diameter toward a surface of the substrate by applying a voltage having a prescribed waveform to the needle-shaped fluid-ejection body, making the droplet fly and land on the substrate, and solidifying the droplet after the fluid droplet is landed on the substrate; further a three-dimensional structure has a fine diameter comprises droplets having an ultra-fine particle diameter, wherein the structure is grown by solidifying the droplets and stacking the solidified droplets.
摘要翻译：一种制造三维结构的方法包括以下步骤：将具有细小直径的针状流体喷射体的尖端附近的基板配置在与溶液一体的状态下，将具有超细直径的液滴喷射向通过向针状流体喷射体施加具有规定波形的电压的基板的表面，使得液滴飞溅并落在基板上，并且在液滴落在基板上之后使液滴固化; 此外，具有细小直径的三维结构包括具有超细粒径的液滴，其中通过使液滴凝固并堆积固化的液滴来生长该结构。

8. 发明申请

US20100243603A1 SILICON-METAL COMPOSITE MICROMECHANICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：硅金属复合微生物组分及其制造方法
公开(公告)号：US20100243603A1
公开(公告)日：2010-09-30
申请号：US12743210
申请日：2008-11-12
申请人： Jean-Charles Fiaccabrino , Marco Verardo , Thierry Conus , Jean-Philippe Thiebaud , Jean-Bernard Peters
发明人： Jean-Charles Fiaccabrino , Marco Verardo , Thierry Conus , Jean-Philippe Thiebaud , Jean-Bernard Peters
IPC分类号： B44C1/22 , G03F7/20 , F16H55/17
CPC分类号： F16H55/06 , B81B2201/035 , B81C99/0095 , B81C2201/0197 , C25D1/08 , C25D5/02 , C25D5/10 , G04B13/02 , G04B13/022 , G04B19/042 , Y10T74/1987
摘要： The invention relates to a method (1) of manufacturing a silicon-metal composite micromechanical component (51) combining DRIE and LIGA processes.The invention also relates to a micromechanical component (51) including a layer wherein one part (53) is made of silicon and another part (41) of metal so as to form a composite micromechanical component (51).The invention concerns the field of timepiece movements.
摘要翻译：本发明涉及一种制造组合DRIE和LIGA工艺的硅 - 金属复合微机械部件（51）的方法（1）。本发明还涉及一种包括其中一部分（53）由硅制成的层和金属的另一部分（41）的层的微机械部件（51），以便形成复合微机械部件（51）。本发明涉及钟表运动领域。

9. 发明申请

US20100055352A1 METHOD OF FABRICATION OF FIBERS, TEXTILES AND COMPOSITE MATERIALS 有权
标题翻译：纤维，纺织品和复合材料的制造方法
公开(公告)号：US20100055352A1
公开(公告)日：2010-03-04
申请号：US12099556
申请日：2008-04-08
申请人： James L. MAXWELL
发明人： James L. MAXWELL
IPC分类号： C23C16/48
CPC分类号： C23C16/4418 , B81C99/0095 , B81C2201/0188 , C23C16/4415 , C23C16/455 , C23C16/4551 , C23C16/483
摘要： A method of growing a plurality of free-standing structures comprises providing a plurality of free-standing structures, each free-standing structure having a first end coupled to a substrate, and a terminal end; providing at least one laser beam, the laser beam having a beam waste at a point proximate to the terminal end of the free-standing structure; and moving one of the plurality of freestanding structures or the beam waste to provide a growth zone proximate to the terminal end of each of the free-standing structures such that the free-standing structures grow into the growth zones by addition of decomposing precursor components. The growth rates of each of the free-standing structures are substantially the same.
摘要翻译：生长多个独立结构的方法包括提供多个独立结构，每个独立结构具有耦合到衬底的第一端和终端; 提供至少一个激光束，所述激光束在靠近所述独立结构的终端的点处具有光束废料; 并且移动所述多个独立结构或束废料中的一个以提供靠近每个独立结构的末端的生长区，使得通过添加分解的前体组分而使自立结构生长到生长区中。每个独立结构的增长率基本相同。

10. 发明授权

US07615206B2 Methods of fabricating nanoscale-to-microscale structures 失效
标题翻译：制造纳米级至微结构的方法
公开(公告)号：US07615206B2
公开(公告)日：2009-11-10
申请号：US11838211
申请日：2007-08-13
申请人： Kenneth Henry Sandhage , Zhihao Bao
发明人： Kenneth Henry Sandhage , Zhihao Bao
IPC分类号： C01B13/14
CPC分类号： B81C99/0095 , B33Y80/00 , Y10T428/24479 , Y10T428/256 , Y10T428/2998 , Y10T428/31551 , Y10T428/31663
摘要： Methods for the production of shaped nanoscale-to-microscale structures, wherein a nanoscale-to-microscale template is provided having an original chemical composition and an original shape, and the nanoscale-to-microscale template subjected to a chemical reaction, so as to partially or completely convert the nanoscale-to-microscale template into the shaped nanoscale-to-microscale structure having a chemical composition different than the original chemical composition and having substantially the same shape as the original shape, being a scaled version of the original shape. The shaped nanoscale-to-microscale structure formed comprises an element (such as silicon), a metallic alloy (such as a silicon alloy), or a non-oxide compound (such as silicon carbide or silicon nitride).
摘要翻译：制备成形纳米级至微尺度结构的方法，其中提供具有原始化学组成和原始形状的纳米级至微量级模板，以及经受化学反应的纳米级至微量级模板，以便部分或完全地将纳米级至微米级模板转化成具有不同于原始化学成分的化学组成并具有与原始形状基本相同的形状的成形纳米级至微尺度结构，其为原始形状的缩放版本。形成的成形的纳米级至微细结构包括元素（例如硅），金属合金（例如硅合金）或非氧化物（例如碳化硅或氮化硅）。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式