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1. 发明申请

US20180208456A1 PROGRAMMABLE, SELF ASSEMBLING PATCHED NANOPARTICLES, AND ASSOCIATED DEVICES, SYSTEMS AND METHODS 审中-公开
公开(公告)号：US20180208456A1
公开(公告)日：2018-07-26
申请号：US15745897
申请日：2016-07-21
申请人： DNP123 Company
发明人： Aaron T. Santos , Derek M. Lyons
IPC分类号： B81B7/00 , C07H21/04 , A61K9/14 , B81C1/00 , B22F9/24 , B22F1/00
CPC分类号： B81B7/0003 , A61K9/14 , B22F1/0044 , B22F1/0062 , B22F9/24 , B22F2301/255 , B81C1/00007 , B81C2201/0149 , B82B3/0047 , B82Y5/00 , B82Y40/00 , C07H21/04 , C25B9/16 , H01L27/11807 , H01L2027/11853
摘要： The present invention generally relates to nanofabrication and, in some embodiments, to methods of synthesizing selectively binding patched nanoparticles and the devices that can be made from them. In some embodiments, the invention relates to methods of assembling arbitrarily shaped structures from patched nanocubes and the devices and uses that follow. For example, nanocube building blocks may be patched by stamping their faces with a selectively binding chemical species (e.g. DNA, antibody-antigen pairs, etc.), or by using self-assembly to attach to the nanocubes multiple selectively binding patch species whose immiscibility can be preprogrammed. Arbitrarily shaped structures can then be designed and assembled by deciding which faces will be bonded to each other in some target structure and combining nanocubes that have selectively binding patches on those faces. Other aspects of the invention are also directed to methods of making such nanocubes or other nanoparticles, methods of forming such nanocubes.

2. 发明申请

US20170250071A1 PATTERN FORMATION METHOD 有权
公开(公告)号：US20170250071A1
公开(公告)日：2017-08-31
申请号：US15263734
申请日：2016-09-13
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Yuriko SEINO
IPC分类号： H01L21/027
CPC分类号： H01L21/3086 , B81C1/00007 , B81C1/00031 , B81C2201/0149 , G03F7/0002 , H01L21/0273 , H01L21/0337 , H01L21/0338 , H01L21/3088 , H01L21/31144
摘要： According to one embodiment, a pattern formation method includes forming a base structure including first and second guide portions each including a pinning portion, and a neutral portion, forming a block copolymer film containing first and second polymers on the bass structure, performing a predetermined treatment for the block copolymer film, thereby forming first and second pattern portions formed of the first polymer, forming third and fourth pattern portions formed of the second polymer, and forming a fifth pattern portion formed of the first and second polymers. The fifth pattern portion includes a plurality of first portions formed of the second polymer, and a second portion formed of the first polymer and provided on the neutral portion and the first portions.

3. 发明申请

US20170090184A1 ASYMMETRIC MEMS MIRROR ASSEMBLY 有权
公开(公告)号：US20170090184A1
公开(公告)日：2017-03-30
申请号：US14975871
申请日：2015-12-21
申请人： APPLE INC.
发明人： Alexander Shpunt , Yuval Gerson
IPC分类号： G02B26/10 , B81B3/00 , B81C1/00 , G02B26/08
CPC分类号： G02B26/101 , B81B3/0051 , B81B2201/042 , B81B2203/0136 , B81C1/00007 , G02B26/0841
摘要： A mirror assembly includes a frame having a central opening and a mirror plate, which is contained within the central opening of the frame and is shaped to define separate first and second mirrors connected by a bridge extending between the first and second mirrors. A pair of hinges are connected between the frame and the mirror plate at locations on the central axis on opposing sides of the frame so as to enable rotation of the mirror plate about the central axis relative to the frame.

4. 发明申请

US20160332869A1 BLOCK COPOLYMER NANOSTRUCTURES FORMED BY DISTURBED SELF-ASSEMBLY AND USES THEREOF 审中-公开
标题翻译：通过干扰自组装形成的嵌段共聚物纳米结构及其用途
公开(公告)号：US20160332869A1
公开(公告)日：2016-11-17
申请号：US15107647
申请日：2014-12-18
申请人： WASHINGTON STATE UNIVERSITY
发明人： Yu WANG , Wei-hong ZHONG
IPC分类号： B81C1/00 , C08F299/04 , C08G81/00
CPC分类号： B81C1/00007 , B81C1/00031 , B81C2201/0149 , B82Y40/00 , C08F299/0492 , C08G81/00
摘要： Block copolymer nanostructures such as nanosheets, nanoribbons, and nanotubes, are provided. The nanotructures are formed by the self-assembly of block copolymers during evaporation of solvent from a sol that has been “disturbed”, either i) by the introduction of relief (e.g. curvature) and/or the inclusion of nanoparticles in the sol; or ii) externally, e.g. by physical deformation of a semi-solid form of the sol, or a combination of internal and external disturbance. The nanostructures have uses in, for example, energy devices, electronics, sensors and drug delivery applications.
摘要翻译：提供了嵌段共聚物纳米结构如纳米片，纳米带和纳米管。纳米结构通过嵌段共聚物的自组装形成，其中溶剂从已被“扰动”的溶胶中蒸发，或者i）通过引入浮雕（例如曲率）和/或将纳米颗粒纳入溶胶中; 或ii）外部，例如。通过半固体形式的溶胶的物理变形，或内部和外部干扰的组合。纳米结构在例如能量器件，电子学，传感器和药物递送应用中具有应用。

5. 发明申请

US20160298241A1 METHOD AND APPARATUS FOR PRODUCING MICRO-ARRAY SUBSTRATE 有权
标题翻译：用于生产微阵列基板的方法和装置
公开(公告)号：US20160298241A1
公开(公告)日：2016-10-13
申请号：US14902541
申请日：2015-07-08
申请人： GACHON UNIVERSITY OF INDUSTRY-ACADEMIC COOPERATION FOUNDATION , GIL MEDICAL CENTER
发明人： Young Soo YOON , Seung Hyun JEE , Seon Tae KIM
IPC分类号： C23C26/00 , B05D5/00 , C12N15/10 , B81C1/00 , B81C99/00 , C03C17/28 , B05B7/26
CPC分类号： C23C26/00 , B01J19/00 , B01J2219/00443 , B01J2219/00637 , B01L3/502707 , B05B7/26 , B05D5/00 , B81C1/00007 , B81C99/0025 , B82Y40/00 , C03C17/28 , C03C17/30 , C03C2217/20 , C03C2218/15 , C03C2218/31 , C12N15/1093 , C23C14/12 , G01N33/53
摘要： The present invention relates to a method of manufacturing a microarray substrate having improved reliability and mass-production properties using a vapor of a surface-reforming material, and the method of manufacturing the microarray substrate according to the present invention includes washing a base substrate, supplying the vapor of the surface-reforming material into a container to which the base substrate is provided, and coupling the vapor of the surface-reforming material to a surface of the base substrate to form a self-assembed monolayer.
摘要翻译：本发明涉及使用表面改性材料的蒸气提高了可靠性和批量生产性能的微阵列基板的制造方法以及本发明的微阵列基板的制造方法，其特征在于，将表面改性材料的蒸汽转变成设置有基础基材的容器，并将表面改性材料的蒸气与基底基材的表面结合，形成自组装的单层。

6. 发明申请

US20130205895A1 METHOD AND APPARATUS FOR BUILDING THREE-DIMENSIONAL MEMS ELEMENTS 有权
公开(公告)号：US20130205895A1
公开(公告)日：2013-08-15
申请号：US13397318
申请日：2012-02-15
申请人： Brian Lee Wardle , Fabio Ferrucci Fachin , Stefan Nikles , Matthew Varghese
发明人： Brian Lee Wardle , Fabio Ferrucci Fachin , Stefan Nikles , Matthew Varghese
IPC分类号： G01P15/00 , H05K13/04
CPC分类号： B81C1/00007 , B81B2201/0207 , B81B2201/0235 , B81C1/00142 , B81C1/00158 , B81C1/0019 , G01P15/00 , G01P15/008 , G01P15/0802 , Y10T29/49117 , Y10T29/49155
摘要： The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.

7. 发明申请

US20090303569A1 SELF-TILTED MICROMIRROR DEVICE 审中-公开
标题翻译：自抛式微型电子装置
公开(公告)号：US20090303569A1
公开(公告)日：2009-12-10
申请号：US12124110
申请日：2008-05-20
申请人： Gyoung Il Cho , Jin Young Sohn , Hye Young Kim , Cheong Soo Seo
发明人： Gyoung Il Cho , Jin Young Sohn , Hye Young Kim , Cheong Soo Seo
IPC分类号： G02B26/00
CPC分类号： B81C1/00007 , B81B2201/042 , G02B26/0833
摘要： A self-tilted micromirror device of the present invention comprises a plurality of micro-structures including a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate. The motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.
摘要翻译：本发明的自倾斜微反射镜装置包括多个微结构，包括基底，至少一个固定板，其被配置为通过粘附力被吸引到基底;弹性地连接到该静摩擦板的顶板，当所述固定板被吸引到所述基板时的至少一个运动，以及设置在所述基板和所述顶板之间的至少一个枢轴结构，并且构造成为所述顶板的运动提供倾斜点或区域。顶板的运动由自倾斜微镜装置的微结构的几何形状决定。

8. 发明申请

US20070039919A1 Polymide thin film self-assembly process 失效
标题翻译：聚酰亚胺薄膜自组装工艺
公开(公告)号：US20070039919A1
公开(公告)日：2007-02-22
申请号：US11248340
申请日：2005-10-13
申请人： Alex Hong , I-Yu Huang , Chih-Hung Wang
发明人： Alex Hong , I-Yu Huang , Chih-Hung Wang
IPC分类号： B44C1/22 , C23F1/00 , C03C15/00
CPC分类号： B81C1/00007 , G03F7/0035 , G03F7/40
摘要： The invention presents a novel polyimide-based thin film self-assembly technology, including five process steps described as follows: (1) deposits a sacrificial layer and a low-stress microstructure layer on a silicon substrate; (2) patterns and etches the low-stress microstructure layer to provide a stationary part and a movable part of the microstructure; (3) coats a photosensitive polyimide thin film as elastic joint of the microstructure layer and defines the shape by using photolithography technique; (4) releases the sacrificial layer beneath the movable part of microstructure layer by wet etching; (5) lastly proceeds the reflow process of polyimide to result in the contraction of the elastic joint further to rotate and lift the movable part in completion of the self-assembly of the microstructure. As the invention can be extensively applied to a myriad of miniaturizing industries, it can solve all the drawbacks of the prior art manufacturing process and miniaturization.
摘要翻译：本发明提出了一种新型的基于聚酰亚胺的薄膜自组装技术，包括以下五个工艺步骤：（1）在硅衬底上沉积牺牲层和低应力微结构层; （2）模拟和蚀刻低应力微结构层，以提供微观结构的固定部分和可移动部分; （3）涂覆感光性聚酰亚胺薄膜作为微结构层的弹性接头，并使用光刻技术限定形状; （4）通过湿法蚀刻在微结构层的可移动部分下方释放牺牲层; （5）最后进行聚酰亚胺的回流处理，导致弹性接头的收缩进一步旋转并提升可移动部件，完成微结构的自组装。由于本发明可广泛应用于各种小型化行业，因此可以解决现有技术制造工艺和小型化的所有缺陷。

9. 发明授权

US07085122B2 MEMS tunable capacitor based on angular vertical comb drives 失效
标题翻译：基于角度垂直梳齿驱动的MEMS可调电容器
公开(公告)号：US07085122B2
公开(公告)日：2006-08-01
申请号：US10850958
申请日：2004-05-21
申请人： Ming C. Wu , Hung D. Nguyen , Doo-Young Hah , Pamela R. Patterson
发明人： Ming C. Wu , Hung D. Nguyen , Doo-Young Hah , Pamela R. Patterson
IPC分类号： H01G7/00
CPC分类号： H01G5/06 , B81B2201/0221 , B81B2203/0136 , B81C1/00007
摘要： A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.
摘要翻译：描述了具有角度垂直梳驱动（AVC）致动器的MEMS可调谐电容器，其中在紧凑的空间中实现高电容和宽的连续调谐范围。梳指旋转一个较小的垂直角度，这允许比常规侧梳驱动装置更宽的调谐范围。该装置的制造是直接的，并涉及单个深反应离子蚀刻步骤，随后释放和平面外组装角梳。

10. 发明申请

US20130207511A1 METHOD AND APPARATUS FOR BUILDING THREE-DIMENSIONAL MEMS ELEMENTS 有权
标题翻译：用于建立三维MEMS元件的方法和装置
公开(公告)号：US20130207511A1
公开(公告)日：2013-08-15
申请号：US13397174
申请日：2012-02-15
申请人： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
发明人： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
IPC分类号： H02N11/00 , H05K13/00
CPC分类号： B81C1/00007 , B81B2203/0109 , B81C1/0019 , Y10T29/49002
摘要： The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.
摘要翻译：本发明一般涉及用于形成三维MEMS的方法和装置。更具体地说，本公开涉及一种控制微结构装置中的平面外屈曲的方法，以便产生具有1×，5×，10×，100×或500× 膜的厚度或晶片表面之上。根据所公开的原理形成的示例性装置包括具有在晶片表面上方和下方延伸的微桥的三维加速度计。

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