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    • 5. 发明申请
    • CONVEYANCE SYSTEM
    • 输送系统
    • US20140291122A1
    • 2014-10-02
    • US14348693
    • 2012-09-06
    • Kenji Bando
    • Kenji Bando
    • B65G47/06
    • B65G47/06B65G47/52B65G49/06B65G49/064B65G49/068H01L21/67706H01L21/67736H01L21/67778
    • A conveyance system includes a storage case, a lifting/lowering apparatus, a handover apparatus, and a conveying apparatus. The lifting/lowering apparatus lifts and lowers the storage case to position each substrate stored in the storage case to a receiving position sequentially. The handover apparatus receives the substrate at the receiving position, and hand over the substrate to the conveying apparatus at a handover position. The conveying apparatus includes a pair of belts. The pair of belts is provided such that the belts are spaced apart from each other in a left-right direction. A plurality of profiles associated with each other are provided on the pair of belts, respectively. The profiles associated with each other are configured to move together in a conveying direction, support outer edges of the substrate handed over at the handover position, and position the substrate to a prescribed position.
    • 输送系统包括存放箱,升降装置,切换装置和输送装置。 提升/降低装置提升并降低存储箱,以将存储在存储箱中的每个基板顺序地定位到接收位置。 切换装置在接收位置处接收基板,并且在切换位置将基板移交到输送装置。 输送装置包括一对带。 一对皮带设置成使得皮带在左右方向上彼此间隔开。 在一对皮带上分别设置有彼此相关联的多个轮廓。 相互关联的轮廓被配置成沿输送方向一起移动,支撑在切换位置切换的基板的外边缘,并将基板定位到规定位置。
    • 9. 发明授权
    • Electrostatic charge removal for solar cell grippers
    • 太阳能电池夹具的静电除电
    • US09202734B2
    • 2015-12-01
    • US14714645
    • 2015-05-18
    • Varian Semiconductor Equipment Associates, Inc.
    • Jason SchallerRobert Brent Vopat
    • H05F3/02B65G49/06H01L21/677B25J15/06B25J11/00
    • H01L21/67706B25J11/0095B25J15/0616B65G49/06B65G2207/10B65G2812/16H01L21/67742H01L21/67766H01L21/67781H05F3/02
    • A manufacturing system includes a gantry module, having an end effector, for moving workpieces from a conveyor system to a working area, such as a swap module. The swap module removes a matrix of processed workpieces from a load lock and place a matrix of unprocessed workpieces in its place. The processed workpieces are then moved by the gantry module back to the conveyor. Due to the speed of operation, the end effector may build up excessive electrostatic charge. To remove this built up charge, grounded electrically-conductive brushes are strategically positioned so that, as the end effector moves during normal operation, it comes in contact with these brushes. This removes this built up charge on the end effector, without affecting throughput. In another embodiment, the end effector moves over the brushes while the swap module is moving matrix to and from the load lock.
    • 制造系统包括具有末端执行器的台架模块,用于将工件从输送机系统移动到诸如交换模块的工作区域。 交换模块从加载锁中移除经处理的工件的矩阵,并将未加工的工件的矩阵放置在其位置。 然后将经处理的工件通过台架模块移回到输送机。 由于操作速度,末端执行器可能会积聚过多的静电电荷。 为了消除这个建立的电荷,接地的导电刷被策略地定位,使得当正常操作中末端执行器移动时,它与这些刷子接触。 这可以消除末端执行器上的这种建立的电荷,而不会影响吞吐量。 在另一个实施例中,端部执行器在电刷上移动,而交换模块正在移动矩阵到和从加载锁定。