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    • 2. 发明授权
    • Apparatus for automated loading of wafer cassette
    • 用于自动装载晶片盒的装置
    • US6135702A
    • 2000-10-24
    • US89498
    • 1998-06-03
    • Gwo-Jou HuangPing-Yu HuTon-Li LeeChen-Shin Lin
    • Gwo-Jou HuangPing-Yu HuTon-Li LeeChen-Shin Lin
    • B25J19/06B65G49/07H01L21/677
    • B25J19/06H01L21/67763Y10S414/14
    • An apparatus for preventing the over-tilt of a gripper assembly in a cassette loading device is described. The apparatus provides an additional sensor arm system rigidly mounted to the gripper assembly such that the additional sensor arm not only provides a method for it to reach an over-tilt position, but also provides a mechanical stop to manually stop the gripper assembly from making further motion beyond the maximum downward-tilt position of the arm. The apparatus may further be provided with a warning system and a manual override device such that a machine operator may be alerted of the over-tilt condition and further, may manually override the sensor system by temporarily restoring power to the gripper assembly and returning it to a safe position.
    • 描述了一种用于防止盒装载装置中的夹具组件过度倾斜的装置。 该装置提供了刚性地安装到夹持器组件的附加传感器臂系统,使得附加的传感器臂不仅提供了一种使其达到倾斜位置的方法,而且提供了一种机械停止来手动停止夹持器组件以进一步制造 超出臂的最大向下倾斜位置的运动。 该装置还可以设置有警告系统和手动超控装置,使得机器操作者可以被警告超倾斜状态,并且还可以通过暂时恢复到夹具组件的电力并将其返回到 一个安全的位置。