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    • 1. 发明授权
    • Segmented architecture for wafer test and burn-in
    • 用于晶圆测试和老化的分段架构
    • US06275051B1
    • 2001-08-14
    • US09240121
    • 1999-01-29
    • Thomas W. BachelderDennis R. BarringerDennis R. ContiJames M. CraftsDavid L. GardellPaul M. GaschkeMark R. LaforceCharles H. PerryRoger R. SchmidtJoseph J. Van HornWade H. White
    • Thomas W. BachelderDennis R. BarringerDennis R. ContiJames M. CraftsDavid L. GardellPaul M. GaschkeMark R. LaforceCharles H. PerryRoger R. SchmidtJoseph J. Van HornWade H. White
    • G01R1073
    • G01R31/2863
    • An apparatus for simultaneously testing or burning in a large number of the integrated circuit chips on a product wafer includes probes mounted on a first board and tester chips mounted on a second board, there being electrical connectors connecting the two boards. The tester chips are for distributing power to the product chips or for testing the product chips. The probes and thin film wiring to which they are attached are personalized for the pad footprint of the particular wafer being probed. The base of the first board and the second board both remain the same for all wafers in a product family. The use of two boards provides that the tester chip is kept at a substantially lower temperature than the product chips during burning to extend the lifetime of tester chips. A gap can be used as thermal insulation between the boards, and the gap sealed and evacuated for further thermal insulation. Evacuation also provides atmospheric pressure augmentation of contact for connection between boards and contact to wafer. Probes for parallel testing of chips are arranged in crescent shaped stripes to significantly increase tester throughput as compared with probes arranged in an area array.
    • 用于在产品晶片上同时测试或燃烧大量集成电路芯片的装置包括安装在第一板上的探针和安装在第二板上的测试器芯片,连接两个板的电连接器。 测试器芯片用于向产品芯片分配电力或用于测试产品芯片。 其所附接的探针和薄膜布线被个性化以用于被探测的特定晶片的焊盘覆盖区。 第一板和第二板的基座对于产品系列中的所有晶片都保持不变。 使用两个电路板提供了测试器芯片在燃烧期间保持在比产品芯片基本上更低的温度,以延长测试器芯片的寿命。 间隙可以用作板之间的绝热,并将间隙密封并抽真空以进行进一步的隔热。 疏散还提供大气压力增加的接触,用于连接板和与晶片的接触。 用于平行测试芯片的探针被布置成月牙形条纹,以便与布置在区域阵列中的探针相比显着增加测试仪的吞吐量。