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    • 4. 发明授权
    • Ceramic probe card and method for reducing leakage current
    • 陶瓷探针卡和减少漏电流的方法
    • US5532608A
    • 1996-07-02
    • US417623
    • 1995-04-06
    • Abbas Behfar-RadCharles H. PerryKrishna G. Sachdev
    • Abbas Behfar-RadCharles H. PerryKrishna G. Sachdev
    • G01R31/26G01R1/073H05K3/28H05K9/00G01R15/12
    • G01R1/07307
    • An electrical probe card for parametric testing of microelectronics having reduced leakage current, includes a hydrophobic layer of a self curing silicone material coating the entire exposed surface of the ceramic card between exposed conductors. The hydrophobic layer has a thickness of less than 1 micrometer, preferably less than 0.1 micrometer and most preferably between 0.01 and 0.001 micrometers. The hydrophobic layer does not interfere with subsequent soldering to the contacts on the card, is inexpensive, solvent resistant and easily applied to new and pre-existing probe cards. The method of application involves applying an excess of the hydrophobic silicone material in its uncured state, followed by vigorously wiping excess material off to thin the layer, produce a good bond and clean the exposed conductors on the probe card.
    • 用于具有减小的漏电流的微电子学参数测试的电探针卡包括在裸露导体之间涂覆陶瓷卡的整个暴露表面的自固化硅氧烷材料的疏水层。 疏水层的厚度小于1微米,优选小于0.1微米,最优选为0.01至0.001微米。 疏水层不会干扰随后焊接到卡上的触点,价格低廉,耐溶剂性,并且易于应用于新的和预先存在的探针卡。 施用方法包括将过量的疏水性硅氧烷材料应用于其未固化状态,然后剧烈擦拭多余的材料以使层变薄,产生良好的粘结并清洁探针卡上的暴露的导体。
    • 6. 发明授权
    • Gas-loaded pressure diaphragm
    • 加气压力隔膜
    • US4684339A
    • 1987-08-04
    • US873906
    • 1986-06-13
    • Raschid J. BezamaCharles H. Perry
    • Raschid J. BezamaCharles H. Perry
    • B28B3/00B28B11/00B30B1/00B30B5/02C04B35/64
    • B30B1/003Y10S425/11
    • A gas-loaded diaphragm for exerting a predetermined pressure on a ceramic substrate during sintering to prevent x-y shrinkage. In the most preferred embodiment, the diaphragm comprises a gas-filled base composed of two opposing discs, and a substantially hollow gas-filled toroid container disposed around the perimeter of the opposing discs and communicating therewith to permit gas flow therebetween. This diaphragm is disposed in relation to a ceramic substrate-containing cell so that when it is heated to a desired temperature, the gas in the diaphragm expands and forces the two opposing discs apart to thereby exert a predetermined pressure on the ceramic substrate-containing cell.
    • 一种用于在烧结过程中在陶瓷衬底上施加预定压力以防止x-y收缩的气体隔膜。 在最优选的实施例中,隔膜包括由两个相对的盘组成的充气基座,以及设置在相对盘的周边周围并与其连通以允许气体在其间流动的基本上中空的气体填充的环形容器。 该隔膜相对于含陶瓷基板的电池设置,使得当其被加热到期望的温度时,隔膜中的气体膨胀并且迫使两个相对的盘分开,从而在含陶瓷衬底的电池上施加预定压力 。
    • 8. 发明授权
    • Metal buckling beam probe
    • 金属弯曲光束探头
    • US06404211B2
    • 2002-06-11
    • US09248733
    • 1999-02-11
    • Harvey C. HamelCharles H. PerryYuet-Ying Yu
    • Harvey C. HamelCharles H. PerryYuet-Ying Yu
    • G01R3102
    • G01R1/07357
    • A buckling beam probe assembly and a process to make the assembly using insulated metal to hold the vertical beam probe wires. The buckling beam probe assembly electrically connects a test apparatus with contact pads on the surface of a device to be tested. The assembly is formed with a plurality of buckling beam wires each having a head, a body, and a tail. Each of the beam wires is pressed vertically onto the contact pads and buckles laterally to adapt to height differences of the contact pads caused by irregularities on the surface of the device to be tested. A top plate has a first plurality of apertures receiving the heads of the plurality of buckling beam wires. A bottom plate has a second plurality of apertures receiving the tails of the plurality of buckling beams wires. A plurality of intermediate metal sections are positioned between the top plate and the bottom plate. Each of the intermediate metal sections is formed with a plurality of thin metal layers and has a plurality of openings coated with an insulation layer. The bodies of the plurality of buckling beam wires pass through the openings.
    • 屈曲梁探头组件和使用绝缘金属组装以保持垂直梁探针线的工艺。 屈曲梁探针组件将测试装置与待测试装置的表面上的接触垫电连接。 组件形成有多个屈曲束线,每个弯曲束线具有头部,主体和尾部。 每根光束线被垂直地按压到接触垫上并且侧向弯曲,以适应由待测试装置的表面上的不规则引起的接触垫的高度差。 顶板具有容纳多个屈曲束线的头部的第一多个孔。 底板具有接收多个弯曲梁线的尾部的第二多个孔。 多个中间金属部分位于顶板和底板之间。 每个中间金属部分形成有多个薄金属层,并且具有涂覆有绝缘层的多个开口。 多个屈曲束线的主体穿过开口。
    • 10. 发明授权
    • Semiconductor wafer test and burn-in
    • 半导体晶圆测试和老化
    • US5600257A
    • 1997-02-04
    • US513057
    • 1995-08-09
    • James M. LeasRobert W. KossGeorge F. WalkerCharles H. PerryJody J. Van Horn
    • James M. LeasRobert W. KossGeorge F. WalkerCharles H. PerryJody J. Van Horn
    • G01R1/06G01R1/073G01R31/28H01L21/66G01R1/02
    • G01R1/07385G01R1/07314G01R31/2889G01R31/2863G01R31/2879G01R31/2886
    • An apparatus and a method for simultaneously testing or burning in all the integrated circuit chips on a product wafer. The apparatus comprises a glass ceramic carrier having test chips and means for connection to pads of a large number of chips on a product wafer. Voltage regulators on the test chips provide an interface between a power supply and power pads on the product chips, at least one voltage regulator for each product chip. The voltage regulators provide a specified Vdd voltage to the product chips, whereby the Vdd voltage is substantially independent of current drawn by the product chips. The voltage regulators or other electronic means limit current to any product chip if it has a short. The voltage regulator circuit may be gated and variable and it may have sensor lines extending to the product chip. The test chips can also provide test functions such as test patterns and registers for storing test results.
    • 用于在产品晶片上的所有集成电路芯片中同时测试或燃烧的装置和方法。 该装置包括具有测试芯片的玻璃陶瓷载体和用于连接到产品晶片上的大量芯片的焊盘的装置。 测试芯片上的电压调节器提供电源和产品芯片上的电源接口之间的接口,每个产品芯片至少有一个电压调节器。 电压调节器向产品芯片提供指定的Vdd电压,由此Vdd电压基本上与产品芯片所消耗的电流无关。 电压调节器或其他电子装置将电流限制在任何产品芯片上。 电压调节器电路可以是门控和可变的,并且其可以具有延伸到产品芯片的传感器线路。 测试芯片还可以提供测试功能,例如测试模式和用于存储测试结果的寄存器。